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Kevin D Ahlstrom

Examiner (ID: 1368)

Most Active Art Unit
2835
Art Unit(s)
2835
Total Applications
2
Issued Applications
2
Pending Applications
0
Abandoned Applications
0

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 17482448 [patent_doc_number] => 20220089952 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-03-24 [patent_title] => SILICON NITRIDE FILM ETCHING COMPOSITION AND ETCHING METHOD USING THE SAME [patent_app_type] => utility [patent_app_number] => 17/446414 [patent_app_country] => US [patent_app_date] => 2021-08-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7444 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 15 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17446414 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/446414
Silicon nitride film etching composition and etching method using the same Aug 29, 2021 Issued
Array ( [id] => 17482447 [patent_doc_number] => 20220089951 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-03-24 [patent_title] => SILICON NITRIDE FILM ETCHING COMPOSITION AND ETCHING METHOD USING THE SAME [patent_app_type] => utility [patent_app_number] => 17/446408 [patent_app_country] => US [patent_app_date] => 2021-08-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7835 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 18 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17446408 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/446408
Silicon nitride film etching composition and etching method using the same Aug 29, 2021 Issued
Array ( [id] => 17414256 [patent_doc_number] => 20220049160 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-02-17 [patent_title] => NITRIDE ETCHANT COMPOSITION AND METHOD [patent_app_type] => utility [patent_app_number] => 17/402126 [patent_app_country] => US [patent_app_date] => 2021-08-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6275 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 40 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17402126 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/402126
NITRIDE ETCHANT COMPOSITION AND METHOD Aug 12, 2021 Pending
Array ( [id] => 18996090 [patent_doc_number] => 11912921 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-02-27 [patent_title] => Etching compositions [patent_app_type] => utility [patent_app_number] => 17/398181 [patent_app_country] => US [patent_app_date] => 2021-08-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7960 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 33 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17398181 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/398181
Etching compositions Aug 9, 2021 Issued
Array ( [id] => 17704840 [patent_doc_number] => 20220204846 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-06-30 [patent_title] => ETCHING COMPOSITION FOR THIN FILM CONTAINING SILVER, METHOD FOR FORMING PATTERN AND METHOD FOR MANUFACTURING A DISPLAY DEVICE USING THE SAME [patent_app_type] => utility [patent_app_number] => 17/388712 [patent_app_country] => US [patent_app_date] => 2021-07-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6882 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 37 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17388712 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/388712
Etching composition for thin film containing silver, method for forming pattern and method for manufacturing a display device using the same Jul 28, 2021 Issued
Array ( [id] => 17385830 [patent_doc_number] => 20220033682 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-02-03 [patent_title] => CMP COMPOSITION INCLUDING ANIONIC AND CATIONIC INHIBITORS [patent_app_type] => utility [patent_app_number] => 17/384940 [patent_app_country] => US [patent_app_date] => 2021-07-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10704 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 43 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17384940 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/384940
CMP COMPOSITION INCLUDING ANIONIC AND CATIONIC INHIBITORS Jul 25, 2021 Pending
Array ( [id] => 17200350 [patent_doc_number] => 20210340445 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-11-04 [patent_title] => Tungsten Chemical Mechanical Planarization (CMP) With Low Dishing And Low Erosion Topography [patent_app_type] => utility [patent_app_number] => 17/377981 [patent_app_country] => US [patent_app_date] => 2021-07-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11148 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 35 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17377981 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/377981
Tungsten chemical mechanical planarization (CMP) with low dishing and low erosion topography Jul 15, 2021 Issued
Array ( [id] => 18387242 [patent_doc_number] => 11658035 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-05-23 [patent_title] => Substrate processing method [patent_app_type] => utility [patent_app_number] => 17/358860 [patent_app_country] => US [patent_app_date] => 2021-06-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 13 [patent_no_of_words] => 8390 [patent_no_of_claims] => 22 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 95 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17358860 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/358860
Substrate processing method Jun 24, 2021 Issued
Array ( [id] => 18371789 [patent_doc_number] => 11651971 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-05-16 [patent_title] => Etching method, substrate processing apparatus, and substrate processing system [patent_app_type] => utility [patent_app_number] => 17/351549 [patent_app_country] => US [patent_app_date] => 2021-06-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 21 [patent_no_of_words] => 13657 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 78 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17351549 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/351549
Etching method, substrate processing apparatus, and substrate processing system Jun 17, 2021 Issued
Array ( [id] => 18608052 [patent_doc_number] => 11749530 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-09-05 [patent_title] => Method of removing phosphorus-doped silicon film and system therefor [patent_app_type] => utility [patent_app_number] => 17/304116 [patent_app_country] => US [patent_app_date] => 2021-06-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 8 [patent_no_of_words] => 4319 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 118 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17304116 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/304116
Method of removing phosphorus-doped silicon film and system therefor Jun 14, 2021 Issued
Array ( [id] => 17477331 [patent_doc_number] => 20220084835 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-03-17 [patent_title] => PLASMA ETCHING METHOD AND PLASMA ETCHING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/346810 [patent_app_country] => US [patent_app_date] => 2021-06-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4575 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 52 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17346810 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/346810
PLASMA ETCHING METHOD AND PLASMA ETCHING APPARATUS Jun 13, 2021 Abandoned
Array ( [id] => 18608083 [patent_doc_number] => 11749561 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-09-05 [patent_title] => Self-alignment etching of interconnect layers [patent_app_type] => utility [patent_app_number] => 17/344528 [patent_app_country] => US [patent_app_date] => 2021-06-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 21 [patent_figures_cnt] => 32 [patent_no_of_words] => 11370 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 126 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17344528 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/344528
Self-alignment etching of interconnect layers Jun 9, 2021 Issued
Array ( [id] => 18263072 [patent_doc_number] => 11610780 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-03-21 [patent_title] => Alternating hardmasks for tight-pitch line formation [patent_app_type] => utility [patent_app_number] => 17/340915 [patent_app_country] => US [patent_app_date] => 2021-06-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 18 [patent_no_of_words] => 5503 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 162 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17340915 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/340915
Alternating hardmasks for tight-pitch line formation Jun 6, 2021 Issued
Array ( [id] => 17657316 [patent_doc_number] => 20220177781 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-06-09 [patent_title] => WET ANISOTROPIC ETCHING OF SILICON [patent_app_type] => utility [patent_app_number] => 17/339474 [patent_app_country] => US [patent_app_date] => 2021-06-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9424 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 20 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17339474 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/339474
Wet anisotropic etching of silicon Jun 3, 2021 Issued
Array ( [id] => 18051712 [patent_doc_number] => 11525085 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-12-13 [patent_title] => Process to manufacture novel inhibited hydrofluoric acid composition [patent_app_type] => utility [patent_app_number] => 17/338865 [patent_app_country] => US [patent_app_date] => 2021-06-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3859 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 105 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17338865 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/338865
Process to manufacture novel inhibited hydrofluoric acid composition Jun 3, 2021 Issued
Array ( [id] => 17277840 [patent_doc_number] => 20210384038 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-12-09 [patent_title] => SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/303558 [patent_app_country] => US [patent_app_date] => 2021-06-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8954 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 90 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17303558 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/303558
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS Jun 1, 2021 Abandoned
Array ( [id] => 17993177 [patent_doc_number] => 20220359214 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-11-10 [patent_title] => METAL ETCH IN HIGH ASPECT-RATIO FEATURES [patent_app_type] => utility [patent_app_number] => 17/307636 [patent_app_country] => US [patent_app_date] => 2021-05-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7421 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17307636 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/307636
Metal etch in high aspect-ratio features May 3, 2021 Issued
Array ( [id] => 17978598 [patent_doc_number] => 11495470 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2022-11-08 [patent_title] => Method of enhancing etching selectivity using a pulsed plasma [patent_app_type] => utility [patent_app_number] => 17/244873 [patent_app_country] => US [patent_app_date] => 2021-04-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 15 [patent_no_of_words] => 14182 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 273 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17244873 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/244873
Method of enhancing etching selectivity using a pulsed plasma Apr 28, 2021 Issued
Array ( [id] => 18854034 [patent_doc_number] => 11851597 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-12-26 [patent_title] => Etchant composition, tackifier, alkaline solution, method of removing polyimide and etching process [patent_app_type] => utility [patent_app_number] => 17/241086 [patent_app_country] => US [patent_app_date] => 2021-04-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 1 [patent_figures_cnt] => 1 [patent_no_of_words] => 7899 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 143 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17241086 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/241086
Etchant composition, tackifier, alkaline solution, method of removing polyimide and etching process Apr 26, 2021 Issued
Array ( [id] => 17170855 [patent_doc_number] => 20210324525 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-10-21 [patent_title] => METHOD AND COMPOSITION FOR ETCHING MOLYBDENUM [patent_app_type] => utility [patent_app_number] => 17/230633 [patent_app_country] => US [patent_app_date] => 2021-04-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4333 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 52 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17230633 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/230633
Method and composition for etching molybdenum Apr 13, 2021 Issued
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