Search

Kevin D Ahlstrom

Examiner (ID: 1368)

Most Active Art Unit
2835
Art Unit(s)
2835
Total Applications
2
Issued Applications
2
Pending Applications
0
Abandoned Applications
0

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 18533175 [patent_doc_number] => 20230238251 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-07-27 [patent_title] => ETCHING LIQUID FOR TITANIUM AND/OR TITANIUM ALLOY, METHOD FOR ETCHING TITANIUM AND/OR TITANIUM ALLOY WITH USE OF SAID ETCHING LIQUID, AND METHOD FOR PRODUCING SUBSTRATE WITH USE OF SAID ETCHING LIQUID [patent_app_type] => utility [patent_app_number] => 17/996170 [patent_app_country] => US [patent_app_date] => 2021-04-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8020 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -11 [patent_words_short_claim] => 98 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17996170 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/996170
ETCHING LIQUID FOR TITANIUM AND/OR TITANIUM ALLOY, METHOD FOR ETCHING TITANIUM AND/OR TITANIUM ALLOY WITH USE OF SAID ETCHING LIQUID, AND METHOD FOR PRODUCING SUBSTRATE WITH USE OF SAID ETCHING LIQUID Apr 6, 2021 Pending
Array ( [id] => 17847857 [patent_doc_number] => 11437241 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-09-06 [patent_title] => Apparatus and methods for selectively etching silicon oxide films [patent_app_type] => utility [patent_app_number] => 17/221944 [patent_app_country] => US [patent_app_date] => 2021-04-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 7 [patent_no_of_words] => 3921 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 158 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17221944 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/221944
Apparatus and methods for selectively etching silicon oxide films Apr 4, 2021 Issued
Array ( [id] => 17188735 [patent_doc_number] => 20210335620 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-10-28 [patent_title] => WET ETCHING METHOD AND WET ETCHING SYSTEM [patent_app_type] => utility [patent_app_number] => 17/220990 [patent_app_country] => US [patent_app_date] => 2021-04-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5416 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -2 [patent_words_short_claim] => 91 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17220990 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/220990
WET ETCHING METHOD AND WET ETCHING SYSTEM Apr 1, 2021 Pending
Array ( [id] => 18975140 [patent_doc_number] => 20240055232 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-02-15 [patent_title] => PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 17/763320 [patent_app_country] => US [patent_app_date] => 2021-03-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11050 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -6 [patent_words_short_claim] => 218 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17763320 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/763320
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD Mar 24, 2021 Pending
Array ( [id] => 17665433 [patent_doc_number] => 11359114 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-06-14 [patent_title] => Polishing method using CMP polishing liquid [patent_app_type] => utility [patent_app_number] => 17/197991 [patent_app_country] => US [patent_app_date] => 2021-03-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 2 [patent_no_of_words] => 6751 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 128 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17197991 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/197991
Polishing method using CMP polishing liquid Mar 9, 2021 Issued
Array ( [id] => 16936360 [patent_doc_number] => 20210202249 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-07-01 [patent_title] => GRADED HARDMASK INTERLAYER FOR ENHANCED EXTREME ULTRAVIOLET PERFORMANCE [patent_app_type] => utility [patent_app_number] => 17/197406 [patent_app_country] => US [patent_app_date] => 2021-03-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6180 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 74 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17197406 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/197406
Graded hardmask interlayer for enhanced extreme ultraviolet performance Mar 9, 2021 Issued
Array ( [id] => 17474111 [patent_doc_number] => 20220081615 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-03-17 [patent_title] => ETCHING COMPOSITION FOR SILICON NITRIDE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE [patent_app_type] => utility [patent_app_number] => 17/194929 [patent_app_country] => US [patent_app_date] => 2021-03-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5649 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -21 [patent_words_short_claim] => 69 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17194929 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/194929
ETCHING COMPOSITION FOR SILICON NITRIDE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE Mar 7, 2021 Abandoned
Array ( [id] => 17730708 [patent_doc_number] => 11387109 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2022-07-12 [patent_title] => CMP process and methods thereof [patent_app_type] => utility [patent_app_number] => 17/193693 [patent_app_country] => US [patent_app_date] => 2021-03-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 42 [patent_figures_cnt] => 62 [patent_no_of_words] => 10783 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 104 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17193693 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/193693
CMP process and methods thereof Mar 4, 2021 Issued
Array ( [id] => 18013460 [patent_doc_number] => 11505743 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-11-22 [patent_title] => Chemical solution and method for treating substrate [patent_app_type] => utility [patent_app_number] => 17/192391 [patent_app_country] => US [patent_app_date] => 2021-03-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 4 [patent_no_of_words] => 15155 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 230 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17192391 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/192391
Chemical solution and method for treating substrate Mar 3, 2021 Issued
Array ( [id] => 18013460 [patent_doc_number] => 11505743 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-11-22 [patent_title] => Chemical solution and method for treating substrate [patent_app_type] => utility [patent_app_number] => 17/192391 [patent_app_country] => US [patent_app_date] => 2021-03-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 4 [patent_no_of_words] => 15155 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 230 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17192391 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/192391
Chemical solution and method for treating substrate Mar 3, 2021 Issued
Array ( [id] => 18013460 [patent_doc_number] => 11505743 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-11-22 [patent_title] => Chemical solution and method for treating substrate [patent_app_type] => utility [patent_app_number] => 17/192391 [patent_app_country] => US [patent_app_date] => 2021-03-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 4 [patent_no_of_words] => 15155 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 230 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17192391 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/192391
Chemical solution and method for treating substrate Mar 3, 2021 Issued
Array ( [id] => 18013460 [patent_doc_number] => 11505743 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-11-22 [patent_title] => Chemical solution and method for treating substrate [patent_app_type] => utility [patent_app_number] => 17/192391 [patent_app_country] => US [patent_app_date] => 2021-03-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 4 [patent_no_of_words] => 15155 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 230 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17192391 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/192391
Chemical solution and method for treating substrate Mar 3, 2021 Issued
Array ( [id] => 17067501 [patent_doc_number] => 20210269716 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-09-02 [patent_title] => Silicon Etching Solution, Method for Manufacturing Silicon Device Using Same, and Substrate Treatment Method [patent_app_type] => utility [patent_app_number] => 17/186057 [patent_app_country] => US [patent_app_date] => 2021-02-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 14215 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -5 [patent_words_short_claim] => 211 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17186057 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/186057
Silicon Etching Solution, Method for Manufacturing Silicon Device Using Same, and Substrate Treatment Method Feb 25, 2021 Abandoned
Array ( [id] => 17953768 [patent_doc_number] => 11479863 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-10-25 [patent_title] => Chemical solution and method for treating substrate [patent_app_type] => utility [patent_app_number] => 17/183449 [patent_app_country] => US [patent_app_date] => 2021-02-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 4 [patent_no_of_words] => 16182 [patent_no_of_claims] => 27 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 80 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17183449 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/183449
Chemical solution and method for treating substrate Feb 23, 2021 Issued
Array ( [id] => 17978564 [patent_doc_number] => 11495436 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-11-08 [patent_title] => Systems and methods to control critical dimension (CD) shrink ratio through radio frequency (RF) pulsing [patent_app_type] => utility [patent_app_number] => 17/176342 [patent_app_country] => US [patent_app_date] => 2021-02-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 13 [patent_no_of_words] => 7787 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 122 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17176342 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/176342
Systems and methods to control critical dimension (CD) shrink ratio through radio frequency (RF) pulsing Feb 15, 2021 Issued
Array ( [id] => 17590654 [patent_doc_number] => 11328931 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2022-05-10 [patent_title] => Method of manufacturing a semiconductor device [patent_app_type] => utility [patent_app_number] => 17/175396 [patent_app_country] => US [patent_app_date] => 2021-02-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 32 [patent_no_of_words] => 8700 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 73 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17175396 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/175396
Method of manufacturing a semiconductor device Feb 11, 2021 Issued
Array ( [id] => 17036946 [patent_doc_number] => 20210253904 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-08-19 [patent_title] => POLISHING COMPOSITIONS AND METHODS OF USE THEREOF [patent_app_type] => utility [patent_app_number] => 17/169685 [patent_app_country] => US [patent_app_date] => 2021-02-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5816 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 31 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17169685 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/169685
POLISHING COMPOSITIONS AND METHODS OF USE THEREOF Feb 7, 2021 Pending
Array ( [id] => 17010870 [patent_doc_number] => 20210242031 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-08-05 [patent_title] => METHOD FOR USING ULTRA-THIN ETCH STOP LAYERS IN SELECTIVE ATOMIC LAYER ETCHING [patent_app_type] => utility [patent_app_number] => 17/164649 [patent_app_country] => US [patent_app_date] => 2021-02-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 2936 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 54 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17164649 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/164649
METHOD FOR USING ULTRA-THIN ETCH STOP LAYERS IN SELECTIVE ATOMIC LAYER ETCHING Jan 31, 2021 Abandoned
Array ( [id] => 16995358 [patent_doc_number] => 20210233778 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-07-29 [patent_title] => ETCHING METHOD, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING SYSTEM [patent_app_type] => utility [patent_app_number] => 17/160780 [patent_app_country] => US [patent_app_date] => 2021-01-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10422 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 57 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17160780 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/160780
ETCHING METHOD, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING SYSTEM Jan 27, 2021 Pending
Array ( [id] => 17104505 [patent_doc_number] => 11124704 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-09-21 [patent_title] => Etching compositions [patent_app_type] => utility [patent_app_number] => 17/159551 [patent_app_country] => US [patent_app_date] => 2021-01-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7943 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 193 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17159551 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/159551
Etching compositions Jan 26, 2021 Issued
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