Kevin D Ahlstrom

Array ( [id] => 17855087 [patent_doc_number] => 20220285130 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-09-08 [patent_title] => MULTI-STATE RF PULSING TO CONTROL MASK SHAPE AND BREAKING SELECTIVITY VERSUS PROCESS MARGIN TRADE-OFF [patent_app_type] => utility [patent_app_number] => 17/634547 [patent_app_country] => US [patent_app_date] => 2020-08-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5563 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -22 [patent_words_short_claim] => 169 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17634547 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17295344 [patent_doc_number] => 20210391183 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-12-16 [patent_title] => Method for Making Self-Aligned Double Pattern [patent_app_type] => utility [patent_app_number] => 16/997504 [patent_app_country] => US [patent_app_date] => 2020-08-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3347 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 415 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16997504 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17743899 [patent_doc_number] => 11391960 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-07-19 [patent_title] => Method and system for tunable gradient patterning using a shadow mask [patent_app_type] => utility [patent_app_number] => 16/922851 [patent_app_country] => US [patent_app_date] => 2020-07-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 27 [patent_no_of_words] => 10381 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 137 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16922851 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18838719 [patent_doc_number] => 11846786 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-12-19 [patent_title] => Diffractive optical element and method for manufacturing the same [patent_app_type] => utility [patent_app_number] => 16/918829 [patent_app_country] => US [patent_app_date] => 2020-07-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 9 [patent_no_of_words] => 4875 [patent_no_of_claims] => 27 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 118 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16918829 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18721457 [patent_doc_number] => 11798811 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-10-24 [patent_title] => Iodine-containing fluorocarbon and hydrofluorocarbon compounds for etching semiconductor structures [patent_app_type] => utility [patent_app_number] => 16/913696 [patent_app_country] => US [patent_app_date] => 2020-06-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 15 [patent_no_of_words] => 15426 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 231 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16913696 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16379254 [patent_doc_number] => 20200328097 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-10-15 [patent_title] => SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 16/913133 [patent_app_country] => US [patent_app_date] => 2020-06-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11477 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 228 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16913133 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17900744 [patent_doc_number] => 20220310406 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-09-29 [patent_title] => SEMICONDUCTOR DEVICE FORMING METHOD AND SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/638879 [patent_app_country] => US [patent_app_date] => 2020-06-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 17106 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -10 [patent_words_short_claim] => 76 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17638879 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17623106 [patent_doc_number] => 11342167 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-05-24 [patent_title] => Plasma processing method including cleaning of inside of chamber main body of plasma processing apparatus [patent_app_type] => utility [patent_app_number] => 16/910240 [patent_app_country] => US [patent_app_date] => 2020-06-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 14 [patent_no_of_words] => 15746 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 282 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16910240 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16342279 [patent_doc_number] => 20200306929 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-10-01 [patent_title] => APPARATUS AND METHOD FOR CHEMICALLY MECHANICALLY POLISHING [patent_app_type] => utility [patent_app_number] => 16/902053 [patent_app_country] => US [patent_app_date] => 2020-06-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5912 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 78 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16902053 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17960234 [patent_doc_number] => 20220340814 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-10-27 [patent_title] => Hydrogen Peroxide Decomposition Inhibitor [patent_app_type] => utility [patent_app_number] => 17/617207 [patent_app_country] => US [patent_app_date] => 2020-06-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4384 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 41 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17617207 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17326427 [patent_doc_number] => 11217452 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-01-04 [patent_title] => Substrate processing device and substrate processing method for carrying out chemical treatment for substrate [patent_app_type] => utility [patent_app_number] => 16/899472 [patent_app_country] => US [patent_app_date] => 2020-06-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 23 [patent_no_of_words] => 18872 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 223 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16899472 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16316520 [patent_doc_number] => 20200295258 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-09-17 [patent_title] => RUTHENIUM REMOVAL COMPOSITION AND METHOD OF PRODUCING MAGNETORESISTIVE RANDOM ACCESS MEMORY [patent_app_type] => utility [patent_app_number] => 16/890505 [patent_app_country] => US [patent_app_date] => 2020-06-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6277 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 406 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16890505 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17232207 [patent_doc_number] => 20210358764 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-11-18 [patent_title] => METHOD FOR FORMING SEMICONDUCTOR STRUCTURE [patent_app_type] => utility [patent_app_number] => 16/872760 [patent_app_country] => US [patent_app_date] => 2020-05-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3529 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -11 [patent_words_short_claim] => 228 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16872760 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16241524 [patent_doc_number] => 20200258758 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-08-13 [patent_title] => METHOD FOR FORMING SEMICONDUCTOR DEVICE STRUCTURE [patent_app_type] => utility [patent_app_number] => 16/858820 [patent_app_country] => US [patent_app_date] => 2020-04-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6438 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 78 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16858820 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17652611 [patent_doc_number] => 11355351 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-06-07 [patent_title] => Semiconductor device and fabrication method thereof [patent_app_type] => utility [patent_app_number] => 16/856177 [patent_app_country] => US [patent_app_date] => 2020-04-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 26 [patent_no_of_words] => 7487 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 236 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16856177 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16361258 [patent_doc_number] => 20200318009 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-10-08 [patent_title] => NOVEL INHIBITIED HYDROFLUORIC ACID COMPOSITION [patent_app_type] => utility [patent_app_number] => 16/839631 [patent_app_country] => US [patent_app_date] => 2020-04-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4124 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16839631 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16180291 [patent_doc_number] => 20200227260 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-07-16 [patent_title] => SELECTIVE GROWTH OF METAL-CONTAINING HARDMASK THIN FILMS [patent_app_type] => utility [patent_app_number] => 16/835112 [patent_app_country] => US [patent_app_date] => 2020-03-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11078 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 88 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16835112 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16343801 [patent_doc_number] => 20200308451 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-10-01 [patent_title] => ADDITIVES TO IMPROVE PARTICLE DISPERSION FOR CMP SLURRY [patent_app_type] => utility [patent_app_number] => 16/826409 [patent_app_country] => US [patent_app_date] => 2020-03-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7846 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -20 [patent_words_short_claim] => 49 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16826409 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18008432 [patent_doc_number] => 20220367199 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-11-17 [patent_title] => ETCHING SOLUTION AND METHOD FOR ALUMINUM NITRIDE [patent_app_type] => utility [patent_app_number] => 17/622670 [patent_app_country] => US [patent_app_date] => 2020-03-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7909 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -20 [patent_words_short_claim] => 104 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17622670 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16987906 [patent_doc_number] => 11075089 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-07-27 [patent_title] => Method of plasma etching and method of fabricating semiconductor device using the same [patent_app_type] => utility [patent_app_number] => 16/812953 [patent_app_country] => US [patent_app_date] => 2020-03-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 41 [patent_figures_cnt] => 46 [patent_no_of_words] => 13181 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 191 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16812953 [rel_patent_id] =>[rel_patent_doc_number] =>)