Kin Chan Chen

Array ( [id] => 6829915 [patent_doc_number] => 20030180973 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-09-25 [patent_title] => 'Methods and systems for monitoring a parameter of a measurement device during polishing, damage to a specimen during polishing, or a characteristic of a polishing pad or tool' [patent_app_type] => new [patent_app_number] => 10/358101 [patent_app_country] => US [patent_app_date] => 2003-02-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 15 [patent_no_of_words] => 32574 [patent_no_of_claims] => 52 [patent_no_of_ind_claims] => 10 [patent_words_short_claim] => 43 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0180/20030180973.pdf [firstpage_image] =>[orig_patent_app_number] => 10358101 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6825322 [patent_doc_number] => 20030235944 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-12-25 [patent_title] => 'Semiconductor device manufacturing method' [patent_app_type] => new [patent_app_number] => 10/353943 [patent_app_country] => US [patent_app_date] => 2003-01-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 13 [patent_no_of_words] => 7137 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 168 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0235/20030235944.pdf [firstpage_image] =>[orig_patent_app_number] => 10353943 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6848747 [patent_doc_number] => 20030140949 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-07-31 [patent_title] => 'Substrate treating method and substrate treating apparatus' [patent_app_type] => new [patent_app_number] => 10/355960 [patent_app_country] => US [patent_app_date] => 2003-01-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 7581 [patent_no_of_claims] => 25 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 58 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0140/20030140949.pdf [firstpage_image] =>[orig_patent_app_number] => 10355960 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 732775 [patent_doc_number] => 07037839 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2006-05-02 [patent_title] => 'Method for polishing organic film on semiconductor substrate by use of resin particles, and slurry' [patent_app_type] => utility [patent_app_number] => 10/353962 [patent_app_country] => US [patent_app_date] => 2003-01-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 28 [patent_no_of_words] => 5494 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 60 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/037/07037839.pdf [firstpage_image] =>[orig_patent_app_number] => 10353962 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1043707 [patent_doc_number] => 06867140 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2005-03-15 [patent_title] => 'Method of polishing a multi-layer substrate' [patent_app_type] => utility [patent_app_number] => 10/353512 [patent_app_country] => US [patent_app_date] => 2003-01-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8758 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 103 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/867/06867140.pdf [firstpage_image] =>[orig_patent_app_number] => 10353512 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 941295 [patent_doc_number] => 06969686 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2005-11-29 [patent_title] => 'Memory device having isolation trenches with different depths and the method for making the same' [patent_app_type] => utility [patent_app_number] => 10/353177 [patent_app_country] => US [patent_app_date] => 2003-01-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 16 [patent_no_of_words] => 2206 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 148 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/969/06969686.pdf [firstpage_image] =>[orig_patent_app_number] => 10353177 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6843277 [patent_doc_number] => 20030148624 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-08-07 [patent_title] => 'Method for removing resists' [patent_app_type] => new [patent_app_number] => 10/352224 [patent_app_country] => US [patent_app_date] => 2003-01-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 2 [patent_no_of_words] => 4432 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 61 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0148/20030148624.pdf [firstpage_image] =>[orig_patent_app_number] => 10352224 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7471749 [patent_doc_number] => 20040121606 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-06-24 [patent_title] => 'Flip-chip structure and method for high quality inductors and transformers' [patent_app_type] => new [patent_app_number] => 10/329081 [patent_app_country] => US [patent_app_date] => 2002-12-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 4666 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 65 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0121/20040121606.pdf [firstpage_image] =>[orig_patent_app_number] => 10329081 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6701732 [patent_doc_number] => 20030224612 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-12-04 [patent_title] => 'Graded junction termination extensions for electronic devices' [patent_app_type] => new [patent_app_number] => 10/324564 [patent_app_country] => US [patent_app_date] => 2002-12-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 4503 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 26 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0224/20030224612.pdf [firstpage_image] =>[orig_patent_app_number] => 10324564 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7471724 [patent_doc_number] => 20040121598 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-06-24 [patent_title] => 'Method and apparatus for planarization of a material by growing a sacrificial film with customized thickness profile' [patent_app_type] => new [patent_app_number] => 10/325673 [patent_app_country] => US [patent_app_date] => 2002-12-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 21 [patent_figures_cnt] => 21 [patent_no_of_words] => 13772 [patent_no_of_claims] => 59 [patent_no_of_ind_claims] => 7 [patent_words_short_claim] => 66 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0121/20040121598.pdf [firstpage_image] =>[orig_patent_app_number] => 10325673 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7471741 [patent_doc_number] => 20040121603 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-06-24 [patent_title] => 'Advanced control for plasma process' [patent_app_type] => new [patent_app_number] => 10/324465 [patent_app_country] => US [patent_app_date] => 2002-12-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 3572 [patent_no_of_claims] => 25 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 61 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0121/20040121603.pdf [firstpage_image] =>[orig_patent_app_number] => 10324465 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 982325 [patent_doc_number] => 06927169 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2005-08-09 [patent_title] => 'Method and apparatus to improve thickness uniformity of surfaces for integrated device manufacturing' [patent_app_type] => utility [patent_app_number] => 10/325353 [patent_app_country] => US [patent_app_date] => 2002-12-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 20 [patent_figures_cnt] => 21 [patent_no_of_words] => 13585 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 108 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/927/06927169.pdf [firstpage_image] =>[orig_patent_app_number] => 10325353 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6740435 [patent_doc_number] => 20030157804 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-08-21 [patent_title] => 'Composition for the chemical mechanical polishing of metal and metal/dielectric structures' [patent_app_type] => new [patent_app_number] => 10/322961 [patent_app_country] => US [patent_app_date] => 2002-12-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4219 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 57 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0157/20030157804.pdf [firstpage_image] =>[orig_patent_app_number] => 10322961 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6683463 [patent_doc_number] => 20030119327 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-06-26 [patent_title] => 'Vertical type transistor and method for fabricating the same' [patent_app_type] => new [patent_app_number] => 10/323427 [patent_app_country] => US [patent_app_date] => 2002-12-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 1997 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 173 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0119/20030119327.pdf [firstpage_image] =>[orig_patent_app_number] => 10323427 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7270031 [patent_doc_number] => 20040058549 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-03-25 [patent_title] => 'Method for forming shallow trench isolation' [patent_app_type] => new [patent_app_number] => 10/322224 [patent_app_country] => US [patent_app_date] => 2002-12-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 2048 [patent_no_of_claims] => 27 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 149 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0058/20040058549.pdf [firstpage_image] =>[orig_patent_app_number] => 10322224 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1037512 [patent_doc_number] => 06872661 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2005-03-29 [patent_title] => 'Leadless plastic chip carrier with etch back pad singulation and die attach pad array' [patent_app_type] => utility [patent_app_number] => 10/318262 [patent_app_country] => US [patent_app_date] => 2002-12-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 32 [patent_no_of_words] => 4010 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 33 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/872/06872661.pdf [firstpage_image] =>[orig_patent_app_number] => 10318262 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7457123 [patent_doc_number] => 20040094510 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-05-20 [patent_title] => 'Fluorinated surfactants for aqueous acid etch solutions' [patent_app_type] => new [patent_app_number] => 10/290763 [patent_app_country] => US [patent_app_date] => 2002-11-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8762 [patent_no_of_claims] => 42 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 93 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0094/20040094510.pdf [firstpage_image] =>[orig_patent_app_number] => 10290763 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7204276 [patent_doc_number] => 20040087166 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-05-06 [patent_title] => 'Method for making a dual damascene interconnect using a dual hard mask' [patent_app_type] => new [patent_app_number] => 10/289807 [patent_app_country] => US [patent_app_date] => 2002-11-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 4044 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 120 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0087/20040087166.pdf [firstpage_image] =>[orig_patent_app_number] => 10289807 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7204282 [patent_doc_number] => 20040087167 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-05-06 [patent_title] => 'Method for removing polymeric residue contamination on semiconductor feature sidewalls' [patent_app_type] => new [patent_app_number] => 10/289972 [patent_app_country] => US [patent_app_date] => 2002-11-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 3857 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 121 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0087/20040087167.pdf [firstpage_image] =>[orig_patent_app_number] => 10289972 [rel_patent_id] =>[rel_patent_doc_number] =>)