Kurt C Rowan

Array ( [id] => 996433 [patent_doc_number] => 06913872 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2005-07-05 [patent_title] => 'Dual-wavelength exposure for reduction of implant shadowing' [patent_app_type] => utility [patent_app_number] => 10/262301 [patent_app_country] => US [patent_app_date] => 2002-09-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 3740 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 122 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/913/06913872.pdf [firstpage_image] =>[orig_patent_app_number] => 10262301 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7397776 [patent_doc_number] => 20040023124 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-02-05 [patent_title] => 'Photolithography process with hybrid chromeless phase shift mask' [patent_app_type] => new [patent_app_number] => 10/065145 [patent_app_country] => US [patent_app_date] => 2002-09-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 2200 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 53 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0023/20040023124.pdf [firstpage_image] =>[orig_patent_app_number] => 10065145 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7351082 [patent_doc_number] => 20040048194 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-03-11 [patent_title] => 'Mehod for forming a tunable deep-ultraviolet dielectric antireflection layer for image transfer processing' [patent_app_type] => new [patent_app_number] => 10/241137 [patent_app_country] => US [patent_app_date] => 2002-09-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 5381 [patent_no_of_claims] => 33 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 55 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0048/20040048194.pdf [firstpage_image] =>[orig_patent_app_number] => 10241137 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6778489 [patent_doc_number] => 20030049570 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-03-13 [patent_title] => 'Pattern formation method' [patent_app_type] => new [patent_app_number] => 10/236921 [patent_app_country] => US [patent_app_date] => 2002-09-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 3943 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 73 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0049/20030049570.pdf [firstpage_image] =>[orig_patent_app_number] => 10236921 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6778491 [patent_doc_number] => 20030049572 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-03-13 [patent_title] => 'Method for forming patterned insulating elements and methods for making electron source and image display device' [patent_app_type] => new [patent_app_number] => 10/235757 [patent_app_country] => US [patent_app_date] => 2002-09-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 6212 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 64 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0049/20030049572.pdf [firstpage_image] =>[orig_patent_app_number] => 10235757 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1104360 [patent_doc_number] => 06811955 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2004-11-02 [patent_title] => 'Method for photoresist development with improved CD' [patent_app_type] => B2 [patent_app_number] => 10/235185 [patent_app_country] => US [patent_app_date] => 2002-09-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 1 [patent_figures_cnt] => 5 [patent_no_of_words] => 2792 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 134 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/811/06811955.pdf [firstpage_image] =>[orig_patent_app_number] => 10235185 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6778487 [patent_doc_number] => 20030049568 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-03-13 [patent_title] => 'Method for producing a structured layer on a semiconductor substrate' [patent_app_type] => new [patent_app_number] => 10/233692 [patent_app_country] => US [patent_app_date] => 2002-09-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 4368 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 88 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0049/20030049568.pdf [firstpage_image] =>[orig_patent_app_number] => 10233692 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 963518 [patent_doc_number] => 06949330 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2005-09-27 [patent_title] => 'Multiple level photolithography' [patent_app_type] => utility [patent_app_number] => 10/231918 [patent_app_country] => US [patent_app_date] => 2002-08-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 1 [patent_figures_cnt] => 1 [patent_no_of_words] => 1375 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 150 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/949/06949330.pdf [firstpage_image] =>[orig_patent_app_number] => 10231918 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6755965 [patent_doc_number] => 20030003742 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-01-02 [patent_title] => 'Gas assisted method for applying resist stripper and gas-resist stripper combinations' [patent_app_type] => new [patent_app_number] => 10/230472 [patent_app_country] => US [patent_app_date] => 2002-08-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 4054 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 28 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0003/20030003742.pdf [firstpage_image] =>[orig_patent_app_number] => 10230472 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7134265 [patent_doc_number] => 20040043333 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-03-04 [patent_title] => 'Method of etching materials patterned with a single layer 193nm resist' [patent_app_type] => new [patent_app_number] => 10/230570 [patent_app_country] => US [patent_app_date] => 2002-08-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 3915 [patent_no_of_claims] => 47 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 61 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0043/20040043333.pdf [firstpage_image] =>[orig_patent_app_number] => 10230570 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1317506 [patent_doc_number] => 06605413 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2003-08-12 [patent_title] => 'Chemical treatment to strengthen photoresists to prevent pattern collapse' [patent_app_type] => B1 [patent_app_number] => 10/230171 [patent_app_country] => US [patent_app_date] => 2002-08-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 20 [patent_no_of_words] => 5631 [patent_no_of_claims] => 43 [patent_no_of_ind_claims] => 8 [patent_words_short_claim] => 91 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/605/06605413.pdf [firstpage_image] =>[orig_patent_app_number] => 10230171 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 768549 [patent_doc_number] => 07005221 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2006-02-28 [patent_title] => 'Method and apparatus to easily measure reticle blind positioning with an exposure apparatus' [patent_app_type] => utility [patent_app_number] => 10/064920 [patent_app_country] => US [patent_app_date] => 2002-08-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 9 [patent_no_of_words] => 3545 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 176 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/005/07005221.pdf [firstpage_image] =>[orig_patent_app_number] => 10064920 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 913871 [patent_doc_number] => 07326509 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2008-02-05 [patent_title] => 'Composition for forming anti-reflective coating for use in lithography' [patent_app_type] => utility [patent_app_number] => 10/486891 [patent_app_country] => US [patent_app_date] => 2002-08-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 9623 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 59 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/326/07326509.pdf [firstpage_image] =>[orig_patent_app_number] => 10486891 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6791852 [patent_doc_number] => 20030087196 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-05-08 [patent_title] => 'Resist pattern hardening method' [patent_app_type] => new [patent_app_number] => 10/216816 [patent_app_country] => US [patent_app_date] => 2002-08-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 5444 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 45 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0087/20030087196.pdf [firstpage_image] =>[orig_patent_app_number] => 10216816 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6750202 [patent_doc_number] => 20030044722 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-03-06 [patent_title] => 'Process for improving critical dimension uniformity' [patent_app_type] => new [patent_app_number] => 10/215295 [patent_app_country] => US [patent_app_date] => 2002-08-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 1785 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 73 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0044/20030044722.pdf [firstpage_image] =>[orig_patent_app_number] => 10215295 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6715739 [patent_doc_number] => 20030027087 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-02-06 [patent_title] => 'Process for structuring a photoresist layer on a semiconductor substrate' [patent_app_type] => new [patent_app_number] => 10/213413 [patent_app_country] => US [patent_app_date] => 2002-08-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 3417 [patent_no_of_claims] => 24 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 113 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0027/20030027087.pdf [firstpage_image] =>[orig_patent_app_number] => 10213413 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1037361 [patent_doc_number] => 06872509 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2005-03-29 [patent_title] => 'Apparatus and methods for photolithographic processing' [patent_app_type] => utility [patent_app_number] => 10/213034 [patent_app_country] => US [patent_app_date] => 2002-08-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 11 [patent_no_of_words] => 4593 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 115 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/872/06872509.pdf [firstpage_image] =>[orig_patent_app_number] => 10213034 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7442886 [patent_doc_number] => 20040009434 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-01-15 [patent_title] => 'Sandwich photoresist structure in phtotlithographic process' [patent_app_type] => new [patent_app_number] => 10/064649 [patent_app_country] => US [patent_app_date] => 2002-08-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 2528 [patent_no_of_claims] => 23 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 100 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0009/20040009434.pdf [firstpage_image] =>[orig_patent_app_number] => 10064649 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6444568 [patent_doc_number] => 20020177076 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-11-28 [patent_title] => 'Exposure method' [patent_app_type] => new [patent_app_number] => 10/195394 [patent_app_country] => US [patent_app_date] => 2002-07-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 7084 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 79 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0177/20020177076.pdf [firstpage_image] =>[orig_patent_app_number] => 10195394 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 777108 [patent_doc_number] => 06998226 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2006-02-14 [patent_title] => 'Method of forming patterned photoresist layer' [patent_app_type] => utility [patent_app_number] => 10/193464 [patent_app_country] => US [patent_app_date] => 2002-07-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 8 [patent_no_of_words] => 1070 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 89 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/998/06998226.pdf [firstpage_image] =>[orig_patent_app_number] => 10193464 [rel_patent_id] =>[rel_patent_doc_number] =>)