Search

Kurt C Rowan

Examiner (ID: 13691)

Most Active Art Unit
3205
Art Unit(s)
3643, 3616, 2899, 3205, 2761
Total Applications
2630
Issued Applications
1958
Pending Applications
87
Abandoned Applications
584

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 14509341 [patent_doc_number] => 20190198325 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-06-27 [patent_title] => EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY PATTERNING METHODS UTILIZING EUV RESIST HARDENING [patent_app_type] => utility [patent_app_number] => 15/852377 [patent_app_country] => US [patent_app_date] => 2017-12-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4679 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 86 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15852377 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/852377
EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY PATTERNING METHODS UTILIZING EUV RESIST HARDENING Dec 21, 2017 Abandoned
Array ( [id] => 15918581 [patent_doc_number] => 10656527 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-05-19 [patent_title] => Patterning material film stack with hard mask layer configured to support selective deposition on patterned resist layer [patent_app_type] => utility [patent_app_number] => 15/850192 [patent_app_country] => US [patent_app_date] => 2017-12-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 8 [patent_no_of_words] => 5761 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 214 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15850192 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/850192
Patterning material film stack with hard mask layer configured to support selective deposition on patterned resist layer Dec 20, 2017 Issued
Array ( [id] => 12686620 [patent_doc_number] => 20180120706 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-05-03 [patent_title] => PATTERN FORMING METHOD, LAMINATE, AND RESIST COMPOSITION FOR ORGANIC SOLVENT DEVELOPMENT [patent_app_type] => utility [patent_app_number] => 15/851703 [patent_app_country] => US [patent_app_date] => 2017-12-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 44859 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 147 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15851703 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/851703
PATTERN FORMING METHOD, LAMINATE, AND RESIST COMPOSITION FOR ORGANIC SOLVENT DEVELOPMENT Dec 20, 2017 Abandoned
Array ( [id] => 14471843 [patent_doc_number] => 20190187565 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-06-20 [patent_title] => TUNABLE ADHESION OF EUV PHOTORESIST ON OXIDE SURFACE [patent_app_type] => utility [patent_app_number] => 15/848471 [patent_app_country] => US [patent_app_date] => 2017-12-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3452 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 27 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15848471 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/848471
Tunable adhesion of EUV photoresist on oxide surface Dec 19, 2017 Issued
Array ( [id] => 16031437 [patent_doc_number] => 10678135 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-06-09 [patent_title] => Surface treatment of titanium containing hardmasks [patent_app_type] => utility [patent_app_number] => 15/848495 [patent_app_country] => US [patent_app_date] => 2017-12-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 3 [patent_no_of_words] => 3826 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 83 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15848495 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/848495
Surface treatment of titanium containing hardmasks Dec 19, 2017 Issued
Array ( [id] => 12890437 [patent_doc_number] => 20180188654 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-07-05 [patent_title] => PATTERN-FORMATION METHODS [patent_app_type] => utility [patent_app_number] => 15/846658 [patent_app_country] => US [patent_app_date] => 2017-12-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7437 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -14 [patent_words_short_claim] => 88 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15846658 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/846658
Pattern-formation methods Dec 18, 2017 Issued
Array ( [id] => 14193941 [patent_doc_number] => 20190116676 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-04-18 [patent_title] => METHOD FOR MANUFACTURING CIRCUIT BOARD [patent_app_type] => utility [patent_app_number] => 15/817052 [patent_app_country] => US [patent_app_date] => 2017-11-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 2370 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 122 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15817052 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/817052
Method for manufacturing circuit board Nov 16, 2017 Issued
Array ( [id] => 17016585 [patent_doc_number] => 11086220 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-08-10 [patent_title] => Underlayer coating compositions for use with photoresists [patent_app_type] => utility [patent_app_number] => 15/800040 [patent_app_country] => US [patent_app_date] => 2017-10-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 2 [patent_no_of_words] => 7053 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 78 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15800040 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/800040
Underlayer coating compositions for use with photoresists Oct 30, 2017 Issued
Array ( [id] => 15424963 [patent_doc_number] => 10545408 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-01-28 [patent_title] => Performance improvement of EUV photoresist by ion implantation [patent_app_type] => utility [patent_app_number] => 15/786806 [patent_app_country] => US [patent_app_date] => 2017-10-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 8 [patent_no_of_words] => 3915 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 69 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15786806 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/786806
Performance improvement of EUV photoresist by ion implantation Oct 17, 2017 Issued
Array ( [id] => 14688271 [patent_doc_number] => 20190243251 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-08-08 [patent_title] => AQUEOUS SOLUTION FOR RESIST PATTERN COATING AND PATTERN FORMING METHOD USING THE SAME [patent_app_type] => utility [patent_app_number] => 16/343342 [patent_app_country] => US [patent_app_date] => 2017-10-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5500 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 68 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16343342 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/343342
AQUEOUS SOLUTION FOR RESIST PATTERN COATING AND PATTERN FORMING METHOD USING THE SAME Oct 12, 2017 Abandoned
Array ( [id] => 14046603 [patent_doc_number] => 20190079408 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-03-14 [patent_title] => DUAL DEVELOPING METHODS FOR LITHOGRAPHY PATTERNING [patent_app_type] => utility [patent_app_number] => 15/698775 [patent_app_country] => US [patent_app_date] => 2017-09-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5221 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 66 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15698775 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/698775
DUAL DEVELOPING METHODS FOR LITHOGRAPHY PATTERNING Sep 7, 2017 Abandoned
Array ( [id] => 15312239 [patent_doc_number] => 10520821 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-12-31 [patent_title] => Lithography process with enhanced etch selectivity [patent_app_type] => utility [patent_app_number] => 15/697226 [patent_app_country] => US [patent_app_date] => 2017-09-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 14 [patent_no_of_words] => 6854 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 78 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15697226 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/697226
Lithography process with enhanced etch selectivity Sep 5, 2017 Issued
Array ( [id] => 14933933 [patent_doc_number] => 20190302604 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-10-03 [patent_title] => MASK BLANK, PHASE SHIFT MASK, METHOD OF MANUFACTURING PHASE SHIFT MASK, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE [patent_app_type] => utility [patent_app_number] => 16/335539 [patent_app_country] => US [patent_app_date] => 2017-09-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 20358 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -21 [patent_words_short_claim] => 201 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16335539 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/335539
MASK BLANK, PHASE SHIFT MASK, METHOD OF MANUFACTURING PHASE SHIFT MASK, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE Sep 3, 2017 Abandoned
Array ( [id] => 13303647 [patent_doc_number] => 20180203360 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-07-19 [patent_title] => PHOTORESIST STRIPPING APPARATUS, AND METHODS OF STRIPPING PHOTORESIST AND FORMING THIN FILM PATTERN USING THE SAME [patent_app_type] => utility [patent_app_number] => 15/692437 [patent_app_country] => US [patent_app_date] => 2017-08-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9840 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 56 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15692437 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/692437
Photoresist stripping apparatus, and methods of stripping photoresist and forming thin film pattern using the same Aug 30, 2017 Issued
Array ( [id] => 12795985 [patent_doc_number] => 20180157164 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-06-07 [patent_title] => PHOTOLITHOGRAPHY MASK PLATE [patent_app_type] => utility [patent_app_number] => 15/684350 [patent_app_country] => US [patent_app_date] => 2017-08-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7828 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 54 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15684350 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/684350
Photolithography mask plate Aug 22, 2017 Issued
Array ( [id] => 12795982 [patent_doc_number] => 20180157163 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-06-07 [patent_title] => PHOTOLITHOGRAPHY MASK PLATE [patent_app_type] => utility [patent_app_number] => 15/684244 [patent_app_country] => US [patent_app_date] => 2017-08-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7829 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 57 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15684244 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/684244
Photolithography mask plate Aug 22, 2017 Issued
Array ( [id] => 12800563 [patent_doc_number] => 20180158690 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-06-07 [patent_title] => PHOTOLITHOGRAPHY MASK PLATE [patent_app_type] => utility [patent_app_number] => 15/684428 [patent_app_country] => US [patent_app_date] => 2017-08-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7828 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 47 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15684428 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/684428
Photolithography mask plate Aug 22, 2017 Issued
Array ( [id] => 12092594 [patent_doc_number] => 20170349686 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-12-07 [patent_title] => 'PATTERN FORMING METHOD, RESIST PATTERN, METHOD FOR MANUFACTURING ELECTRONIC DEVICE, AND ELECTRONIC DEVICE' [patent_app_type] => utility [patent_app_number] => 15/683884 [patent_app_country] => US [patent_app_date] => 2017-08-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 41622 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15683884 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/683884
PATTERN FORMING METHOD, RESIST PATTERN, METHOD FOR MANUFACTURING ELECTRONIC DEVICE, AND ELECTRONIC DEVICE Aug 22, 2017 Abandoned
Array ( [id] => 14668267 [patent_doc_number] => 10372031 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-08-06 [patent_title] => Method for making microstructures [patent_app_type] => utility [patent_app_number] => 15/680334 [patent_app_country] => US [patent_app_date] => 2017-08-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 20 [patent_figures_cnt] => 20 [patent_no_of_words] => 7830 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 208 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15680334 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/680334
Method for making microstructures Aug 17, 2017 Issued
Array ( [id] => 12207169 [patent_doc_number] => 20180052395 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-02-22 [patent_title] => 'EXPOSURE METHOD, SUBSTRATE AND EXPOSURE APPARATUS' [patent_app_type] => utility [patent_app_number] => 15/658372 [patent_app_country] => US [patent_app_date] => 2017-07-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 4720 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15658372 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/658372
EXPOSURE METHOD, SUBSTRATE AND EXPOSURE APPARATUS Jul 23, 2017 Abandoned
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