Search

Lan Vinh

Examiner (ID: 7200)

Most Active Art Unit
1713
Art Unit(s)
1765, 1713, 1792
Total Applications
1662
Issued Applications
1401
Pending Applications
46
Abandoned Applications
218

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 18131270 [patent_doc_number] => 11557486 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-01-17 [patent_title] => Etching method, damage layer removal method, and storage medium [patent_app_type] => utility [patent_app_number] => 17/027327 [patent_app_country] => US [patent_app_date] => 2020-09-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 25 [patent_no_of_words] => 11180 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 109 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17027327 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/027327
Etching method, damage layer removal method, and storage medium Sep 20, 2020 Issued
Array ( [id] => 18088565 [patent_doc_number] => 11538704 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-12-27 [patent_title] => Processing method of workpiece [patent_app_type] => utility [patent_app_number] => 17/024153 [patent_app_country] => US [patent_app_date] => 2020-09-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 14 [patent_no_of_words] => 11699 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 379 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17024153 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/024153
Processing method of workpiece Sep 16, 2020 Issued
Array ( [id] => 17683358 [patent_doc_number] => 11367622 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-06-21 [patent_title] => Manufacturing method of semiconductor device and etching gas [patent_app_type] => utility [patent_app_number] => 17/022640 [patent_app_country] => US [patent_app_date] => 2020-09-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 13 [patent_no_of_words] => 3646 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 48 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17022640 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/022640
Manufacturing method of semiconductor device and etching gas Sep 15, 2020 Issued
Array ( [id] => 17477339 [patent_doc_number] => 20220084843 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-03-17 [patent_title] => METHODS AND APPARATUS FOR CLEANING A SUBSTRATE AFTER PROCESSING [patent_app_type] => utility [patent_app_number] => 17/022072 [patent_app_country] => US [patent_app_date] => 2020-09-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4921 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 80 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17022072 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/022072
Methods and apparatus for cleaning a substrate after processing Sep 14, 2020 Issued
Array ( [id] => 17463654 [patent_doc_number] => 20220076960 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-03-10 [patent_title] => METHODS FOR SELECTIVE DRY ETCHING GALLIUM OXIDE [patent_app_type] => utility [patent_app_number] => 17/014251 [patent_app_country] => US [patent_app_date] => 2020-09-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8543 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -14 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17014251 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/014251
Methods for selective dry etching gallium oxide Sep 7, 2020 Issued
Array ( [id] => 17445809 [patent_doc_number] => 20220066314 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-03-03 [patent_title] => MASS FABRICATION-COMPATIBLE PROCESSING OF SEMICONDUCTOR METASURFACES [patent_app_type] => utility [patent_app_number] => 17/011235 [patent_app_country] => US [patent_app_date] => 2020-09-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5985 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 250 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17011235 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/011235
Mass fabrication-compatible processing of semiconductor metasurfaces Sep 2, 2020 Issued
Array ( [id] => 17448103 [patent_doc_number] => 20220068608 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-03-03 [patent_title] => Pedestal Support Design for Precise Chamber Matching and Process Control [patent_app_type] => utility [patent_app_number] => 17/011977 [patent_app_country] => US [patent_app_date] => 2020-09-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5597 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 92 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17011977 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/011977
Pedestal support design for precise chamber matching and process control Sep 2, 2020 Issued
Array ( [id] => 17998003 [patent_doc_number] => 11499099 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-11-15 [patent_title] => Etching composition [patent_app_type] => utility [patent_app_number] => 17/009857 [patent_app_country] => US [patent_app_date] => 2020-09-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6110 [patent_no_of_claims] => 27 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 155 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17009857 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/009857
Etching composition Sep 1, 2020 Issued
Array ( [id] => 17978596 [patent_doc_number] => 11495468 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-11-08 [patent_title] => Etching method and etching apparatus [patent_app_type] => utility [patent_app_number] => 17/006500 [patent_app_country] => US [patent_app_date] => 2020-08-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 12 [patent_no_of_words] => 7815 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 108 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17006500 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/006500
Etching method and etching apparatus Aug 27, 2020 Issued
Array ( [id] => 17448140 [patent_doc_number] => 20220068645 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-03-03 [patent_title] => METHOD AND DEVICE FOR CONTROLLING A THICKNESS OF A PROTECTIVE FILM ON A SUBSTRATE [patent_app_type] => utility [patent_app_number] => 17/005401 [patent_app_country] => US [patent_app_date] => 2020-08-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9053 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 98 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17005401 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/005401
Method and device for controlling a thickness of a protective film on a substrate Aug 27, 2020 Issued
Array ( [id] => 17448139 [patent_doc_number] => 20220068644 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-03-03 [patent_title] => Atomic Layer Deposition Using A Substrate Scanning System [patent_app_type] => utility [patent_app_number] => 17/003155 [patent_app_country] => US [patent_app_date] => 2020-08-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8022 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -14 [patent_words_short_claim] => 102 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17003155 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/003155
Atomic layer deposition using a substrate scanning system Aug 25, 2020 Issued
Array ( [id] => 17470077 [patent_doc_number] => 11276560 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-03-15 [patent_title] => Spacer etching process [patent_app_type] => utility [patent_app_number] => 17/001751 [patent_app_country] => US [patent_app_date] => 2020-08-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 9 [patent_no_of_words] => 9201 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 320 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17001751 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/001751
Spacer etching process Aug 24, 2020 Issued
Array ( [id] => 18105467 [patent_doc_number] => 11545364 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-01-03 [patent_title] => Pulsed capacitively coupled plasma processes [patent_app_type] => utility [patent_app_number] => 17/001327 [patent_app_country] => US [patent_app_date] => 2020-08-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 16 [patent_no_of_words] => 11638 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 113 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17001327 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/001327
Pulsed capacitively coupled plasma processes Aug 23, 2020 Issued
Array ( [id] => 17971288 [patent_doc_number] => 11488836 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-11-01 [patent_title] => Apparatus for substrate processing [patent_app_type] => utility [patent_app_number] => 16/999145 [patent_app_country] => US [patent_app_date] => 2020-08-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 22 [patent_figures_cnt] => 54 [patent_no_of_words] => 18968 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 223 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16999145 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/999145
Apparatus for substrate processing Aug 20, 2020 Issued
Array ( [id] => 16692070 [patent_doc_number] => 20210074549 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-03-11 [patent_title] => METHOD FOR FORMING ETCHING MASK AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE [patent_app_type] => utility [patent_app_number] => 16/997729 [patent_app_country] => US [patent_app_date] => 2020-08-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5462 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 77 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16997729 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/997729
Method for forming etching mask and method for manufacturing semiconductor device Aug 18, 2020 Issued
Array ( [id] => 17772328 [patent_doc_number] => 11404279 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-08-02 [patent_title] => Etching method and substrate processing apparatus [patent_app_type] => utility [patent_app_number] => 16/997199 [patent_app_country] => US [patent_app_date] => 2020-08-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 9 [patent_no_of_words] => 5683 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 57 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16997199 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/997199
Etching method and substrate processing apparatus Aug 18, 2020 Issued
Array ( [id] => 16827723 [patent_doc_number] => 20210143016 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-05-13 [patent_title] => ETCHING METHOD [patent_app_type] => utility [patent_app_number] => 16/930483 [patent_app_country] => US [patent_app_date] => 2020-07-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12947 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -26 [patent_words_short_claim] => 84 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16930483 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/930483
Etching method Jul 15, 2020 Issued
Array ( [id] => 16827723 [patent_doc_number] => 20210143016 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-05-13 [patent_title] => ETCHING METHOD [patent_app_type] => utility [patent_app_number] => 16/930483 [patent_app_country] => US [patent_app_date] => 2020-07-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12947 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -26 [patent_words_short_claim] => 84 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16930483 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/930483
Etching method Jul 15, 2020 Issued
Array ( [id] => 16827723 [patent_doc_number] => 20210143016 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-05-13 [patent_title] => ETCHING METHOD [patent_app_type] => utility [patent_app_number] => 16/930483 [patent_app_country] => US [patent_app_date] => 2020-07-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12947 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -26 [patent_words_short_claim] => 84 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16930483 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/930483
Etching method Jul 15, 2020 Issued
Array ( [id] => 16827723 [patent_doc_number] => 20210143016 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-05-13 [patent_title] => ETCHING METHOD [patent_app_type] => utility [patent_app_number] => 16/930483 [patent_app_country] => US [patent_app_date] => 2020-07-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12947 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -26 [patent_words_short_claim] => 84 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16930483 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/930483
Etching method Jul 15, 2020 Issued
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