
Lan Vinh
Examiner (ID: 7200)
| Most Active Art Unit | 1713 |
| Art Unit(s) | 1765, 1713, 1792 |
| Total Applications | 1662 |
| Issued Applications | 1401 |
| Pending Applications | 46 |
| Abandoned Applications | 218 |
Applications
| Application number | Title of the application | Filing Date | Status |
|---|---|---|---|
Array
(
[id] => 18131270
[patent_doc_number] => 11557486
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2023-01-17
[patent_title] => Etching method, damage layer removal method, and storage medium
[patent_app_type] => utility
[patent_app_number] => 17/027327
[patent_app_country] => US
[patent_app_date] => 2020-09-21
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 15
[patent_figures_cnt] => 25
[patent_no_of_words] => 11180
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 109
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17027327
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/027327 | Etching method, damage layer removal method, and storage medium | Sep 20, 2020 | Issued |
Array
(
[id] => 18088565
[patent_doc_number] => 11538704
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2022-12-27
[patent_title] => Processing method of workpiece
[patent_app_type] => utility
[patent_app_number] => 17/024153
[patent_app_country] => US
[patent_app_date] => 2020-09-17
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 11
[patent_figures_cnt] => 14
[patent_no_of_words] => 11699
[patent_no_of_claims] => 9
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 379
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17024153
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/024153 | Processing method of workpiece | Sep 16, 2020 | Issued |
Array
(
[id] => 17683358
[patent_doc_number] => 11367622
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2022-06-21
[patent_title] => Manufacturing method of semiconductor device and etching gas
[patent_app_type] => utility
[patent_app_number] => 17/022640
[patent_app_country] => US
[patent_app_date] => 2020-09-16
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 8
[patent_figures_cnt] => 13
[patent_no_of_words] => 3646
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 48
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17022640
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/022640 | Manufacturing method of semiconductor device and etching gas | Sep 15, 2020 | Issued |
Array
(
[id] => 17477339
[patent_doc_number] => 20220084843
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2022-03-17
[patent_title] => METHODS AND APPARATUS FOR CLEANING A SUBSTRATE AFTER PROCESSING
[patent_app_type] => utility
[patent_app_number] => 17/022072
[patent_app_country] => US
[patent_app_date] => 2020-09-15
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 4921
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -18
[patent_words_short_claim] => 80
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17022072
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/022072 | Methods and apparatus for cleaning a substrate after processing | Sep 14, 2020 | Issued |
Array
(
[id] => 17463654
[patent_doc_number] => 20220076960
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2022-03-10
[patent_title] => METHODS FOR SELECTIVE DRY ETCHING GALLIUM OXIDE
[patent_app_type] => utility
[patent_app_number] => 17/014251
[patent_app_country] => US
[patent_app_date] => 2020-09-08
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 8543
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -14
[patent_words_short_claim] => 2
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17014251
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/014251 | Methods for selective dry etching gallium oxide | Sep 7, 2020 | Issued |
Array
(
[id] => 17445809
[patent_doc_number] => 20220066314
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2022-03-03
[patent_title] => MASS FABRICATION-COMPATIBLE PROCESSING OF SEMICONDUCTOR METASURFACES
[patent_app_type] => utility
[patent_app_number] => 17/011235
[patent_app_country] => US
[patent_app_date] => 2020-09-03
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 5985
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -19
[patent_words_short_claim] => 250
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17011235
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/011235 | Mass fabrication-compatible processing of semiconductor metasurfaces | Sep 2, 2020 | Issued |
Array
(
[id] => 17448103
[patent_doc_number] => 20220068608
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2022-03-03
[patent_title] => Pedestal Support Design for Precise Chamber Matching and Process Control
[patent_app_type] => utility
[patent_app_number] => 17/011977
[patent_app_country] => US
[patent_app_date] => 2020-09-03
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 5597
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 92
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17011977
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/011977 | Pedestal support design for precise chamber matching and process control | Sep 2, 2020 | Issued |
Array
(
[id] => 17998003
[patent_doc_number] => 11499099
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2022-11-15
[patent_title] => Etching composition
[patent_app_type] => utility
[patent_app_number] => 17/009857
[patent_app_country] => US
[patent_app_date] => 2020-09-02
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 6110
[patent_no_of_claims] => 27
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 155
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17009857
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/009857 | Etching composition | Sep 1, 2020 | Issued |
Array
(
[id] => 17978596
[patent_doc_number] => 11495468
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2022-11-08
[patent_title] => Etching method and etching apparatus
[patent_app_type] => utility
[patent_app_number] => 17/006500
[patent_app_country] => US
[patent_app_date] => 2020-08-28
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 8
[patent_figures_cnt] => 12
[patent_no_of_words] => 7815
[patent_no_of_claims] => 16
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 108
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17006500
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/006500 | Etching method and etching apparatus | Aug 27, 2020 | Issued |
Array
(
[id] => 17448140
[patent_doc_number] => 20220068645
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2022-03-03
[patent_title] => METHOD AND DEVICE FOR CONTROLLING A THICKNESS OF A PROTECTIVE FILM ON A SUBSTRATE
[patent_app_type] => utility
[patent_app_number] => 17/005401
[patent_app_country] => US
[patent_app_date] => 2020-08-28
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 9053
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 98
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17005401
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/005401 | Method and device for controlling a thickness of a protective film on a substrate | Aug 27, 2020 | Issued |
Array
(
[id] => 17448139
[patent_doc_number] => 20220068644
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2022-03-03
[patent_title] => Atomic Layer Deposition Using A Substrate Scanning System
[patent_app_type] => utility
[patent_app_number] => 17/003155
[patent_app_country] => US
[patent_app_date] => 2020-08-26
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 8022
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -14
[patent_words_short_claim] => 102
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17003155
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/003155 | Atomic layer deposition using a substrate scanning system | Aug 25, 2020 | Issued |
Array
(
[id] => 17470077
[patent_doc_number] => 11276560
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2022-03-15
[patent_title] => Spacer etching process
[patent_app_type] => utility
[patent_app_number] => 17/001751
[patent_app_country] => US
[patent_app_date] => 2020-08-25
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 7
[patent_figures_cnt] => 9
[patent_no_of_words] => 9201
[patent_no_of_claims] => 17
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 320
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17001751
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/001751 | Spacer etching process | Aug 24, 2020 | Issued |
Array
(
[id] => 18105467
[patent_doc_number] => 11545364
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2023-01-03
[patent_title] => Pulsed capacitively coupled plasma processes
[patent_app_type] => utility
[patent_app_number] => 17/001327
[patent_app_country] => US
[patent_app_date] => 2020-08-24
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 9
[patent_figures_cnt] => 16
[patent_no_of_words] => 11638
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 113
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17001327
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/001327 | Pulsed capacitively coupled plasma processes | Aug 23, 2020 | Issued |
Array
(
[id] => 17971288
[patent_doc_number] => 11488836
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2022-11-01
[patent_title] => Apparatus for substrate processing
[patent_app_type] => utility
[patent_app_number] => 16/999145
[patent_app_country] => US
[patent_app_date] => 2020-08-21
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 22
[patent_figures_cnt] => 54
[patent_no_of_words] => 18968
[patent_no_of_claims] => 19
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 223
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16999145
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/999145 | Apparatus for substrate processing | Aug 20, 2020 | Issued |
Array
(
[id] => 16692070
[patent_doc_number] => 20210074549
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2021-03-11
[patent_title] => METHOD FOR FORMING ETCHING MASK AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
[patent_app_type] => utility
[patent_app_number] => 16/997729
[patent_app_country] => US
[patent_app_date] => 2020-08-19
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 5462
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 77
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16997729
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/997729 | Method for forming etching mask and method for manufacturing semiconductor device | Aug 18, 2020 | Issued |
Array
(
[id] => 17772328
[patent_doc_number] => 11404279
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2022-08-02
[patent_title] => Etching method and substrate processing apparatus
[patent_app_type] => utility
[patent_app_number] => 16/997199
[patent_app_country] => US
[patent_app_date] => 2020-08-19
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 5
[patent_figures_cnt] => 9
[patent_no_of_words] => 5683
[patent_no_of_claims] => 9
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 57
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16997199
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/997199 | Etching method and substrate processing apparatus | Aug 18, 2020 | Issued |
Array
(
[id] => 16827723
[patent_doc_number] => 20210143016
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2021-05-13
[patent_title] => ETCHING METHOD
[patent_app_type] => utility
[patent_app_number] => 16/930483
[patent_app_country] => US
[patent_app_date] => 2020-07-16
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 12947
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -26
[patent_words_short_claim] => 84
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16930483
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/930483 | Etching method | Jul 15, 2020 | Issued |
Array
(
[id] => 16827723
[patent_doc_number] => 20210143016
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2021-05-13
[patent_title] => ETCHING METHOD
[patent_app_type] => utility
[patent_app_number] => 16/930483
[patent_app_country] => US
[patent_app_date] => 2020-07-16
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 12947
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -26
[patent_words_short_claim] => 84
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16930483
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/930483 | Etching method | Jul 15, 2020 | Issued |
Array
(
[id] => 16827723
[patent_doc_number] => 20210143016
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2021-05-13
[patent_title] => ETCHING METHOD
[patent_app_type] => utility
[patent_app_number] => 16/930483
[patent_app_country] => US
[patent_app_date] => 2020-07-16
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 12947
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -26
[patent_words_short_claim] => 84
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16930483
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/930483 | Etching method | Jul 15, 2020 | Issued |
Array
(
[id] => 16827723
[patent_doc_number] => 20210143016
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2021-05-13
[patent_title] => ETCHING METHOD
[patent_app_type] => utility
[patent_app_number] => 16/930483
[patent_app_country] => US
[patent_app_date] => 2020-07-16
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 12947
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -26
[patent_words_short_claim] => 84
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16930483
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/930483 | Etching method | Jul 15, 2020 | Issued |