Search

Lan Vinh

Examiner (ID: 7200)

Most Active Art Unit
1713
Art Unit(s)
1765, 1713, 1792
Total Applications
1662
Issued Applications
1401
Pending Applications
46
Abandoned Applications
218

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 16586050 [patent_doc_number] => 20210020452 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-01-21 [patent_title] => LIMITED DOSE AND ANGLE DIRECTED BEAM ASSISTED ALE AND ALD PROCESSES FOR LOCALIZED COATINGS ON NON-PLANAR SURFACES [patent_app_type] => utility [patent_app_number] => 16/947034 [patent_app_country] => US [patent_app_date] => 2020-07-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7610 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 159 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16947034 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/947034
Limited dose and angle directed beam assisted ALE and ALD processes for localized coatings on non-planar surfaces Jul 14, 2020 Issued
Array ( [id] => 16586011 [patent_doc_number] => 20210020413 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-01-21 [patent_title] => PROCESSING OF WORKPIECES USING HYDROGEN RADICALS AND OZONE GAS [patent_app_type] => utility [patent_app_number] => 16/928220 [patent_app_country] => US [patent_app_date] => 2020-07-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8595 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 60 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16928220 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/928220
Processing of workpieces using hydrogen radicals and ozone gas Jul 13, 2020 Issued
Array ( [id] => 17347006 [patent_doc_number] => 20220013337 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-01-13 [patent_title] => PLASMA ETCHER EDGE RING WITH A CHAMFER GEOMETRY AND IMPEDANCE DESIGN [patent_app_type] => utility [patent_app_number] => 16/946825 [patent_app_country] => US [patent_app_date] => 2020-07-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6855 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 95 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16946825 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/946825
Plasma etcher edge ring with a chamfer geometry and impedance design Jul 7, 2020 Issued
Array ( [id] => 17603906 [patent_doc_number] => 11332376 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-05-17 [patent_title] => Diamond-like carbon film [patent_app_type] => utility [patent_app_number] => 16/922083 [patent_app_country] => US [patent_app_date] => 2020-07-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 13 [patent_no_of_words] => 5726 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 58 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16922083 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/922083
Diamond-like carbon film Jul 6, 2020 Issued
Array ( [id] => 17700162 [patent_doc_number] => 11373895 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-06-28 [patent_title] => Etching method and plasma processing apparatus [patent_app_type] => utility [patent_app_number] => 16/916917 [patent_app_country] => US [patent_app_date] => 2020-06-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 22 [patent_no_of_words] => 8943 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 113 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16916917 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/916917
Etching method and plasma processing apparatus Jun 29, 2020 Issued
Array ( [id] => 16765474 [patent_doc_number] => 20210111056 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-04-15 [patent_title] => ETCHING APPARATUS [patent_app_type] => utility [patent_app_number] => 16/901228 [patent_app_country] => US [patent_app_date] => 2020-06-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5889 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 124 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16901228 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/901228
Etching apparatus Jun 14, 2020 Issued
Array ( [id] => 17292661 [patent_doc_number] => 20210388500 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-12-16 [patent_title] => METHOD AND APPARATUS FOR DEPOSITING A MULTI-SECTOR FILM ON BACKSIDE OF A SEMICONDUCTOR WAFER [patent_app_type] => utility [patent_app_number] => 16/897679 [patent_app_country] => US [patent_app_date] => 2020-06-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10891 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -8 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16897679 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/897679
Method and apparatus for depositing a multi-sector film on backside of a semiconductor wafer Jun 9, 2020 Issued
Array ( [id] => 17410151 [patent_doc_number] => 11251048 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-02-15 [patent_title] => Plasma processing method and plasma processing apparatus [patent_app_type] => utility [patent_app_number] => 16/896304 [patent_app_country] => US [patent_app_date] => 2020-06-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 7102 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 222 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16896304 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/896304
Plasma processing method and plasma processing apparatus Jun 8, 2020 Issued
Array ( [id] => 17743973 [patent_doc_number] => 11392036 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-07-19 [patent_title] => Photoresist and method [patent_app_type] => utility [patent_app_number] => 16/896674 [patent_app_country] => US [patent_app_date] => 2020-06-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 4766 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 129 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16896674 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/896674
Photoresist and method Jun 8, 2020 Issued
Array ( [id] => 18088584 [patent_doc_number] => 11538723 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-12-27 [patent_title] => Optical diagnostics of semiconductor process using hyperspectral imaging [patent_app_type] => utility [patent_app_number] => 16/880042 [patent_app_country] => US [patent_app_date] => 2020-05-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 13 [patent_no_of_words] => 12861 [patent_no_of_claims] => 25 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 106 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16880042 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/880042
Optical diagnostics of semiconductor process using hyperspectral imaging May 20, 2020 Issued
Array ( [id] => 16286156 [patent_doc_number] => 20200279758 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-09-03 [patent_title] => CHEMICAL DISPENSING APPARATUS AND METHODS FOR DISPENSING A CHEMICAL TO A REACTION CHAMBER [patent_app_type] => utility [patent_app_number] => 16/875814 [patent_app_country] => US [patent_app_date] => 2020-05-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6133 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -21 [patent_words_short_claim] => 85 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16875814 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/875814
Chemical dispensing apparatus and methods for dispensing a chemical to a reaction chamber May 14, 2020 Issued
Array ( [id] => 16752397 [patent_doc_number] => 20210104409 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-04-08 [patent_title] => METHOD OF FORMING PATTERNS [patent_app_type] => utility [patent_app_number] => 16/875515 [patent_app_country] => US [patent_app_date] => 2020-05-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10844 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 94 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16875515 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/875515
Method of forming patterns May 14, 2020 Issued
Array ( [id] => 16660576 [patent_doc_number] => 20210057213 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-02-25 [patent_title] => NON-PLASMA ETCH OF TITANIUM-CONTAINING MATERIAL LAYERS WITH TUNABLE SELECTIVITY TO ALTERNATE METALS AND DIELECTRICS [patent_app_type] => utility [patent_app_number] => 16/868277 [patent_app_country] => US [patent_app_date] => 2020-05-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8762 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -20 [patent_words_short_claim] => 54 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16868277 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/868277
Non-plasma etch of titanium-containing material layers with tunable selectivity to alternate metals and dielectrics May 5, 2020 Issued
Array ( [id] => 16677320 [patent_doc_number] => 20210066086 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-03-04 [patent_title] => CHEMICAL MECHANICAL POLISHING METHOD AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND POLISHING PAD AND CHEMICAL MECHANICAL POLISHING DEVICE [patent_app_type] => utility [patent_app_number] => 16/867715 [patent_app_country] => US [patent_app_date] => 2020-05-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8188 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 26 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16867715 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/867715
CHEMICAL MECHANICAL POLISHING METHOD AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND POLISHING PAD AND CHEMICAL MECHANICAL POLISHING DEVICE May 5, 2020 Abandoned
Array ( [id] => 17152420 [patent_doc_number] => 11145509 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-10-12 [patent_title] => Method for forming and patterning a layer and/or substrate [patent_app_type] => utility [patent_app_number] => 16/853500 [patent_app_country] => US [patent_app_date] => 2020-04-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 63 [patent_no_of_words] => 6924 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 285 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16853500 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/853500
Method for forming and patterning a layer and/or substrate Apr 19, 2020 Issued
Array ( [id] => 17818501 [patent_doc_number] => 11424123 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-08-23 [patent_title] => Forming a semiconductor feature using atomic layer etch [patent_app_type] => utility [patent_app_number] => 16/851414 [patent_app_country] => US [patent_app_date] => 2020-04-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 13744 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 132 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16851414 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/851414
Forming a semiconductor feature using atomic layer etch Apr 16, 2020 Issued
Array ( [id] => 17158961 [patent_doc_number] => 20210320012 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-10-14 [patent_title] => METHODS AND APPARATUS FOR IN-SITU PROTECTION LINERS FOR HIGH ASPECT RATIO REACTIVE ION ETCHING [patent_app_type] => utility [patent_app_number] => 16/846869 [patent_app_country] => US [patent_app_date] => 2020-04-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9417 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 140 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16846869 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/846869
Methods and apparatus for in-situ protection liners for high aspect ratio reactive ion etching Apr 12, 2020 Issued
Array ( [id] => 16379247 [patent_doc_number] => 20200328090 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-10-15 [patent_title] => METHOD OF ADDRESSING DISSIMILAR ETCH RATES [patent_app_type] => utility [patent_app_number] => 16/843214 [patent_app_country] => US [patent_app_date] => 2020-04-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6711 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 148 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16843214 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/843214
Method of addressing dissimilar etch rates Apr 7, 2020 Issued
Array ( [id] => 17145199 [patent_doc_number] => 20210313212 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-10-07 [patent_title] => ETCHING APPARATUS AND METHODS OF CLEANING THEREOF [patent_app_type] => utility [patent_app_number] => 16/837938 [patent_app_country] => US [patent_app_date] => 2020-04-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7069 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 77 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16837938 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/837938
Etching apparatus and methods of cleaning thereof Mar 31, 2020 Issued
Array ( [id] => 17730674 [patent_doc_number] => 11387075 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-07-12 [patent_title] => Surface processing apparatus [patent_app_type] => utility [patent_app_number] => 16/837262 [patent_app_country] => US [patent_app_date] => 2020-04-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 4 [patent_no_of_words] => 4078 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 149 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16837262 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/837262
Surface processing apparatus Mar 31, 2020 Issued
Menu