Lan Vinh

Array ( [id] => 6861268 [patent_doc_number] => 20030092276 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-05-15 [patent_title] => 'Method for etching a silicided poly using fluorine-based reactive ion etching and sodium hydroxide based solution immersion' [patent_app_type] => new [patent_app_number] => 10/012297 [patent_app_country] => US [patent_app_date] => 2001-11-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 3852 [patent_no_of_claims] => 26 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 76 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0092/20030092276.pdf [firstpage_image] =>[orig_patent_app_number] => 10012297 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6861264 [patent_doc_number] => 20030092272 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-05-15 [patent_title] => 'Method of stabilizing oxide etch and chamber performance using seasoning' [patent_app_type] => new [patent_app_number] => 09/682978 [patent_app_country] => US [patent_app_date] => 2001-11-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 5994 [patent_no_of_claims] => 26 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 25 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0092/20030092272.pdf [firstpage_image] =>[orig_patent_app_number] => 09682978 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5787488 [patent_doc_number] => 20020160613 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-10-31 [patent_title] => 'Method of manufacturing semiconductor device' [patent_app_type] => new [patent_app_number] => 09/984144 [patent_app_country] => US [patent_app_date] => 2001-10-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 6923 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 104 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0160/20020160613.pdf [firstpage_image] =>[orig_patent_app_number] => 09984144 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6631336 [patent_doc_number] => 20020086544 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-07-04 [patent_title] => 'Laser machining of semiconductor materials' [patent_app_type] => new [patent_app_number] => 09/983991 [patent_app_country] => US [patent_app_date] => 2001-10-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 2910 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 35 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0086/20020086544.pdf [firstpage_image] =>[orig_patent_app_number] => 09983991 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7317979 [patent_doc_number] => 20040224523 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-11-11 [patent_title] => 'METHOD OF FABRICATING ANTI-STICTION MICROMACHINED STRUCTURES' [patent_app_type] => new [patent_app_number] => 09/976316 [patent_app_country] => US [patent_app_date] => 2001-10-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 1383 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 3 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0224/20040224523.pdf [firstpage_image] =>[orig_patent_app_number] => 09976316 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1261555 [patent_doc_number] => 06664195 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-12-16 [patent_title] => 'Method for forming damascene metal gate' [patent_app_type] => B2 [patent_app_number] => 09/974811 [patent_app_country] => US [patent_app_date] => 2001-10-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 15 [patent_no_of_words] => 2632 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 135 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/664/06664195.pdf [firstpage_image] =>[orig_patent_app_number] => 09974811 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6774370 [patent_doc_number] => 20030017708 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-01-23 [patent_title] => 'Plasma etching gas' [patent_app_type] => new [patent_app_number] => 09/974582 [patent_app_country] => US [patent_app_date] => 2001-10-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 2 [patent_no_of_words] => 1993 [patent_no_of_claims] => 22 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 30 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0017/20030017708.pdf [firstpage_image] =>[orig_patent_app_number] => 09974582 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6595502 [patent_doc_number] => 20020042202 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-04-11 [patent_title] => 'Semiconductor device and method for forming contact holes in a semiconductor device' [patent_app_type] => new [patent_app_number] => 09/969991 [patent_app_country] => US [patent_app_date] => 2001-10-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 15 [patent_no_of_words] => 10162 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 217 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0042/20020042202.pdf [firstpage_image] =>[orig_patent_app_number] => 09969991 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6306882 [patent_doc_number] => 20020094692 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-07-18 [patent_title] => 'Method for carrying out a plasma etching process' [patent_app_type] => new [patent_app_number] => 09/969178 [patent_app_country] => US [patent_app_date] => 2001-10-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 2 [patent_no_of_words] => 1541 [patent_no_of_claims] => 4 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 72 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0094/20020094692.pdf [firstpage_image] =>[orig_patent_app_number] => 09969178 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6552535 [patent_doc_number] => 20020083961 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-07-04 [patent_title] => 'Method and apparatus for cleaning semiconductor wafer' [patent_app_type] => new [patent_app_number] => 09/969467 [patent_app_country] => US [patent_app_date] => 2001-10-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 3483 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 52 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0083/20020083961.pdf [firstpage_image] =>[orig_patent_app_number] => 09969467 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6081268 [patent_doc_number] => 20020081855 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-06-27 [patent_title] => 'In-situ plasma ash/treatment after via etch of low-k films for poison-free dual damascene trench patterning' [patent_app_type] => new [patent_app_number] => 09/966605 [patent_app_country] => US [patent_app_date] => 2001-09-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 2 [patent_no_of_words] => 2313 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 65 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0081/20020081855.pdf [firstpage_image] =>[orig_patent_app_number] => 09966605 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6063560 [patent_doc_number] => 20020031878 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-03-14 [patent_title] => 'Plasma etching methods' [patent_app_type] => new [patent_app_number] => 09/963163 [patent_app_country] => US [patent_app_date] => 2001-09-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 3061 [patent_no_of_claims] => 27 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 61 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0031/20020031878.pdf [firstpage_image] =>[orig_patent_app_number] => 09963163 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7631353 [patent_doc_number] => 06635579 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-10-21 [patent_title] => 'Operating method of a semiconductor etcher' [patent_app_type] => B2 [patent_app_number] => 09/682556 [patent_app_country] => US [patent_app_date] => 2001-09-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 1429 [patent_no_of_claims] => 5 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 9 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/635/06635579.pdf [firstpage_image] =>[orig_patent_app_number] => 09682556 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 749778 [patent_doc_number] => 07022616 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2006-04-04 [patent_title] => 'High speed silicon etching method' [patent_app_type] => utility [patent_app_number] => 10/380428 [patent_app_country] => US [patent_app_date] => 2001-09-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 9 [patent_no_of_words] => 6237 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 154 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/022/07022616.pdf [firstpage_image] =>[orig_patent_app_number] => 10380428 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 946592 [patent_doc_number] => 06964924 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2005-11-15 [patent_title] => 'Integrated circuit process monitoring and metrology system' [patent_app_type] => utility [patent_app_number] => 09/952790 [patent_app_country] => US [patent_app_date] => 2001-09-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 9 [patent_no_of_words] => 4853 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 236 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/964/06964924.pdf [firstpage_image] =>[orig_patent_app_number] => 09952790 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1096161 [patent_doc_number] => 06821908 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2004-11-23 [patent_title] => 'In-situ method for producing a hydrogen terminated hydrophobic surface on a silicon wafer' [patent_app_type] => B1 [patent_app_number] => 09/952050 [patent_app_country] => US [patent_app_date] => 2001-09-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 5 [patent_no_of_words] => 1476 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 105 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/821/06821908.pdf [firstpage_image] =>[orig_patent_app_number] => 09952050 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6750599 [patent_doc_number] => 20030045119 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-03-06 [patent_title] => 'Method for forming a bottle-shaped trench' [patent_app_type] => new [patent_app_number] => 09/947856 [patent_app_country] => US [patent_app_date] => 2001-09-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 2487 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 137 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0045/20030045119.pdf [firstpage_image] =>[orig_patent_app_number] => 09947856 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1312439 [patent_doc_number] => 06610610 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-08-26 [patent_title] => 'Methods for selective removal of material from wafer alignment marks' [patent_app_type] => B2 [patent_app_number] => 09/944471 [patent_app_country] => US [patent_app_date] => 2001-08-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 9 [patent_no_of_words] => 4595 [patent_no_of_claims] => 64 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 95 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/610/06610610.pdf [firstpage_image] =>[orig_patent_app_number] => 09944471 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6122600 [patent_doc_number] => 20020074310 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-06-20 [patent_title] => 'Method of fabricating a cooperating array of rotatable microstructure devices' [patent_app_type] => new [patent_app_number] => 09/942014 [patent_app_country] => US [patent_app_date] => 2001-08-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 6999 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 104 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0074/20020074310.pdf [firstpage_image] =>[orig_patent_app_number] => 09942014 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7457118 [patent_doc_number] => 20040094509 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-05-20 [patent_title] => 'Magnetic field generator for magnetron plasma, and plasma etching apparatus and method comprising the magnetic field generator' [patent_app_type] => new [patent_app_number] => 10/362879 [patent_app_country] => US [patent_app_date] => 2003-06-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 34 [patent_figures_cnt] => 34 [patent_no_of_words] => 17609 [patent_no_of_claims] => 24 [patent_no_of_ind_claims] => 13 [patent_words_short_claim] => 36 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0094/20040094509.pdf [firstpage_image] =>[orig_patent_app_number] => 10362879 [rel_patent_id] =>[rel_patent_doc_number] =>)