| Application number | Title of the application | Filing Date | Status |
|---|
Array
(
[id] => 5337157
[patent_doc_number] => 20090053621
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2009-02-26
[patent_title] => 'Source and Mask Optimization by Changing Intensity and Shape of the Illumination Source'
[patent_app_type] => utility
[patent_app_number] => 12/186410
[patent_app_country] => US
[patent_app_date] => 2008-08-05
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 32
[patent_figures_cnt] => 32
[patent_no_of_words] => 10756
[patent_no_of_claims] => 5
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0053/20090053621.pdf
[firstpage_image] =>[orig_patent_app_number] => 12186410
[rel_patent_id] =>[rel_patent_doc_number] =>) 12/186410 | Source and mask optimization by changing intensity and shape of the illumination source | Aug 4, 2008 | Issued |
Array
(
[id] => 5359107
[patent_doc_number] => 20090033901
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2009-02-05
[patent_title] => 'DRIVING APPARATUS AND EXPOSURE APPARATUS USING THE SAME AND DEVICE MANUFACTURING METHOD'
[patent_app_type] => utility
[patent_app_number] => 12/181215
[patent_app_country] => US
[patent_app_date] => 2008-07-28
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 5
[patent_figures_cnt] => 5
[patent_no_of_words] => 4739
[patent_no_of_claims] => 17
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0033/20090033901.pdf
[firstpage_image] =>[orig_patent_app_number] => 12181215
[rel_patent_id] =>[rel_patent_doc_number] =>) 12/181215 | DRIVING APPARATUS AND EXPOSURE APPARATUS USING THE SAME AND DEVICE MANUFACTURING METHOD | Jul 27, 2008 | Abandoned |
Array
(
[id] => 8387267
[patent_doc_number] => 08264669
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2012-09-11
[patent_title] => 'Movable body drive method, pattern formation method, exposure method, and device manufacturing method for maintaining position coordinate before and after switching encoder head'
[patent_app_type] => utility
[patent_app_number] => 12/179144
[patent_app_country] => US
[patent_app_date] => 2008-07-24
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 19
[patent_figures_cnt] => 34
[patent_no_of_words] => 33703
[patent_no_of_claims] => 14
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 155
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 12179144
[rel_patent_id] =>[rel_patent_doc_number] =>) 12/179144 | Movable body drive method, pattern formation method, exposure method, and device manufacturing method for maintaining position coordinate before and after switching encoder head | Jul 23, 2008 | Issued |
Array
(
[id] => 7969599
[patent_doc_number] => 07940374
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2011-05-10
[patent_title] => 'Parallel process focus compensation'
[patent_app_type] => utility
[patent_app_number] => 12/164931
[patent_app_country] => US
[patent_app_date] => 2008-06-30
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 22
[patent_figures_cnt] => 23
[patent_no_of_words] => 8377
[patent_no_of_claims] => 26
[patent_no_of_ind_claims] => 6
[patent_words_short_claim] => 151
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/07/940/07940374.pdf
[firstpage_image] =>[orig_patent_app_number] => 12164931
[rel_patent_id] =>[rel_patent_doc_number] =>) 12/164931 | Parallel process focus compensation | Jun 29, 2008 | Issued |
Array
(
[id] => 9832984
[patent_doc_number] => 08941808
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2015-01-27
[patent_title] => 'Immersion lithographic apparatus rinsing outer contour of substrate with immersion space'
[patent_app_type] => utility
[patent_app_number] => 12/155714
[patent_app_country] => US
[patent_app_date] => 2008-06-09
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 12
[patent_figures_cnt] => 19
[patent_no_of_words] => 21706
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 199
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 12155714
[rel_patent_id] =>[rel_patent_doc_number] =>) 12/155714 | Immersion lithographic apparatus rinsing outer contour of substrate with immersion space | Jun 8, 2008 | Issued |
Array
(
[id] => 4661958
[patent_doc_number] => 20080252865
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2008-10-16
[patent_title] => 'Exposure apparatus, method for cleaning member thereof, maintenance method for exposure apparatus, maintenance device, and method for producing device'
[patent_app_type] => utility
[patent_app_number] => 12/155742
[patent_app_country] => US
[patent_app_date] => 2008-06-09
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 17
[patent_figures_cnt] => 17
[patent_no_of_words] => 31918
[patent_no_of_claims] => 49
[patent_no_of_ind_claims] => 9
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0252/20080252865.pdf
[firstpage_image] =>[orig_patent_app_number] => 12155742
[rel_patent_id] =>[rel_patent_doc_number] =>) 12/155742 | Exposure apparatus, method for cleaning member thereof, maintenance method for exposure apparatus, maintenance device, and method for producing device | Jun 8, 2008 | Abandoned |
Array
(
[id] => 9428915
[patent_doc_number] => 08704997
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2014-04-22
[patent_title] => 'Immersion lithographic apparatus and method for rinsing immersion space before exposure'
[patent_app_type] => utility
[patent_app_number] => 12/134950
[patent_app_country] => US
[patent_app_date] => 2008-06-06
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 9
[patent_figures_cnt] => 10
[patent_no_of_words] => 28668
[patent_no_of_claims] => 21
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 250
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 12134950
[rel_patent_id] =>[rel_patent_doc_number] =>) 12/134950 | Immersion lithographic apparatus and method for rinsing immersion space before exposure | Jun 5, 2008 | Issued |
Array
(
[id] => 8341324
[patent_doc_number] => 08243253
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2012-08-14
[patent_title] => 'Lyophobic run-off path to collect liquid for an immersion lithography apparatus'
[patent_app_type] => utility
[patent_app_number] => 12/155377
[patent_app_country] => US
[patent_app_date] => 2008-06-03
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 9
[patent_figures_cnt] => 12
[patent_no_of_words] => 7775
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 201
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 12155377
[rel_patent_id] =>[rel_patent_doc_number] =>) 12/155377 | Lyophobic run-off path to collect liquid for an immersion lithography apparatus | Jun 2, 2008 | Issued |
Array
(
[id] => 4716752
[patent_doc_number] => 20080239274
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2008-10-02
[patent_title] => 'Illumination optical system, exposure apparatus, and exposure method'
[patent_app_type] => utility
[patent_app_number] => 12/155301
[patent_app_country] => US
[patent_app_date] => 2008-06-02
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 31
[patent_figures_cnt] => 31
[patent_no_of_words] => 27694
[patent_no_of_claims] => 7
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0239/20080239274.pdf
[firstpage_image] =>[orig_patent_app_number] => 12155301
[rel_patent_id] =>[rel_patent_doc_number] =>) 12/155301 | Illumination optical system, exposure apparatus, and exposure method | Jun 1, 2008 | Abandoned |
Array
(
[id] => 5269629
[patent_doc_number] => 20090073404
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2009-03-19
[patent_title] => 'Variable slit device, illumination device, exposure apparatus, exposure method, and device manufacturing method'
[patent_app_type] => utility
[patent_app_number] => 12/155266
[patent_app_country] => US
[patent_app_date] => 2008-05-30
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 24
[patent_figures_cnt] => 24
[patent_no_of_words] => 17850
[patent_no_of_claims] => 55
[patent_no_of_ind_claims] => 8
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0073/20090073404.pdf
[firstpage_image] =>[orig_patent_app_number] => 12155266
[rel_patent_id] =>[rel_patent_doc_number] =>) 12/155266 | Variable slit device, illumination device, exposure apparatus, exposure method, and device manufacturing method | May 29, 2008 | Abandoned |
Array
(
[id] => 4710974
[patent_doc_number] => 20080299500
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2008-12-04
[patent_title] => 'EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD'
[patent_app_type] => utility
[patent_app_number] => 12/126713
[patent_app_country] => US
[patent_app_date] => 2008-05-23
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 3
[patent_figures_cnt] => 3
[patent_no_of_words] => 5196
[patent_no_of_claims] => 9
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0299/20080299500.pdf
[firstpage_image] =>[orig_patent_app_number] => 12126713
[rel_patent_id] =>[rel_patent_doc_number] =>) 12/126713 | EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD | May 22, 2008 | Abandoned |
Array
(
[id] => 4598104
[patent_doc_number] => 07982850
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2011-07-19
[patent_title] => 'Immersion lithographic apparatus and device manufacturing method with gas supply'
[patent_app_type] => utility
[patent_app_number] => 12/153276
[patent_app_country] => US
[patent_app_date] => 2008-05-15
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 7
[patent_figures_cnt] => 17
[patent_no_of_words] => 10417
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 186
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/07/982/07982850.pdf
[firstpage_image] =>[orig_patent_app_number] => 12153276
[rel_patent_id] =>[rel_patent_doc_number] =>) 12/153276 | Immersion lithographic apparatus and device manufacturing method with gas supply | May 14, 2008 | Issued |
Array
(
[id] => 4738171
[patent_doc_number] => 20080231823
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2008-09-25
[patent_title] => 'Apparatus and methods for reducing the escape of immersion liquid from immersion lithography apparatus'
[patent_app_type] => utility
[patent_app_number] => 12/076501
[patent_app_country] => US
[patent_app_date] => 2008-03-19
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 5
[patent_figures_cnt] => 5
[patent_no_of_words] => 5913
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0231/20080231823.pdf
[firstpage_image] =>[orig_patent_app_number] => 12076501
[rel_patent_id] =>[rel_patent_doc_number] =>) 12/076501 | Apparatus and methods for reducing the escape of immersion liquid from immersion lithography apparatus | Mar 18, 2008 | Abandoned |
Array
(
[id] => 8179437
[patent_doc_number] => 08179518
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2012-05-15
[patent_title] => 'Exposure apparatus to correct position between reticle and substrate according to propagation time and shifting rate'
[patent_app_type] => utility
[patent_app_number] => 12/046709
[patent_app_country] => US
[patent_app_date] => 2008-03-12
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 4
[patent_figures_cnt] => 6
[patent_no_of_words] => 5643
[patent_no_of_claims] => 10
[patent_no_of_ind_claims] => 6
[patent_words_short_claim] => 187
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/08/179/08179518.pdf
[firstpage_image] =>[orig_patent_app_number] => 12046709
[rel_patent_id] =>[rel_patent_doc_number] =>) 12/046709 | Exposure apparatus to correct position between reticle and substrate according to propagation time and shifting rate | Mar 11, 2008 | Issued |
Array
(
[id] => 8179451
[patent_doc_number] => 08179519
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2012-05-15
[patent_title] => 'Adjusting device with a laser light source and a reflector for aligning a microlithography projection exposure installation'
[patent_app_type] => utility
[patent_app_number] => 12/046836
[patent_app_country] => US
[patent_app_date] => 2008-03-12
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 5
[patent_figures_cnt] => 6
[patent_no_of_words] => 5173
[patent_no_of_claims] => 21
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 117
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/08/179/08179519.pdf
[firstpage_image] =>[orig_patent_app_number] => 12046836
[rel_patent_id] =>[rel_patent_doc_number] =>) 12/046836 | Adjusting device with a laser light source and a reflector for aligning a microlithography projection exposure installation | Mar 11, 2008 | Issued |
Array
(
[id] => 4817988
[patent_doc_number] => 20080225247
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2008-09-18
[patent_title] => 'OPTICAL ELEMENT UNIT FOR EXPOSURE PROCESSES'
[patent_app_type] => utility
[patent_app_number] => 12/046186
[patent_app_country] => US
[patent_app_date] => 2008-03-11
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 9
[patent_figures_cnt] => 9
[patent_no_of_words] => 12939
[patent_no_of_claims] => 52
[patent_no_of_ind_claims] => 5
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0225/20080225247.pdf
[firstpage_image] =>[orig_patent_app_number] => 12046186
[rel_patent_id] =>[rel_patent_doc_number] =>) 12/046186 | Optical element unit for exposure processes having sealing element | Mar 10, 2008 | Issued |
Array
(
[id] => 4817989
[patent_doc_number] => 20080225248
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2008-09-18
[patent_title] => 'Apparatus, systems and methods for removing liquid from workpiece during workpiece processing'
[patent_app_type] => utility
[patent_app_number] => 12/073865
[patent_app_country] => US
[patent_app_date] => 2008-03-11
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 12
[patent_figures_cnt] => 12
[patent_no_of_words] => 6834
[patent_no_of_claims] => 26
[patent_no_of_ind_claims] => 5
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0225/20080225248.pdf
[firstpage_image] =>[orig_patent_app_number] => 12073865
[rel_patent_id] =>[rel_patent_doc_number] =>) 12/073865 | Apparatus, systems and methods for removing liquid from workpiece during workpiece processing | Mar 10, 2008 | Abandoned |
Array
(
[id] => 4845802
[patent_doc_number] => 20080182210
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2008-07-31
[patent_title] => 'Image-projecting system, such as a projection objective of a microlithographic projection exposure apparatus'
[patent_app_type] => utility
[patent_app_number] => 12/027731
[patent_app_country] => US
[patent_app_date] => 2008-02-07
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 3
[patent_figures_cnt] => 3
[patent_no_of_words] => 2967
[patent_no_of_claims] => 39
[patent_no_of_ind_claims] => 5
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0182/20080182210.pdf
[firstpage_image] =>[orig_patent_app_number] => 12027731
[rel_patent_id] =>[rel_patent_doc_number] =>) 12/027731 | Image-projecting system, such as a projection objective of a microlithographic projection exposure apparatus | Feb 6, 2008 | Abandoned |
Array
(
[id] => 4850704
[patent_doc_number] => 20080316446
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2008-12-25
[patent_title] => 'Stage apparatus and exposure apparatus'
[patent_app_type] => utility
[patent_app_number] => 12/068199
[patent_app_country] => US
[patent_app_date] => 2008-02-04
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 12
[patent_figures_cnt] => 12
[patent_no_of_words] => 16037
[patent_no_of_claims] => 27
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0316/20080316446.pdf
[firstpage_image] =>[orig_patent_app_number] => 12068199
[rel_patent_id] =>[rel_patent_doc_number] =>) 12/068199 | Stage apparatus and exposure apparatus | Feb 3, 2008 | Abandoned |
Array
(
[id] => 5378269
[patent_doc_number] => 20090190108
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2009-07-30
[patent_title] => 'METHOD AND SYSTEM FOR LEVELING TOPOGRAPHY OF SEMICONDUCTOR CHIP SURFACE'
[patent_app_type] => utility
[patent_app_number] => 12/022560
[patent_app_country] => US
[patent_app_date] => 2008-01-30
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 7
[patent_figures_cnt] => 7
[patent_no_of_words] => 3226
[patent_no_of_claims] => 9
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0190/20090190108.pdf
[firstpage_image] =>[orig_patent_app_number] => 12022560
[rel_patent_id] =>[rel_patent_doc_number] =>) 12/022560 | METHOD AND SYSTEM FOR LEVELING TOPOGRAPHY OF SEMICONDUCTOR CHIP SURFACE | Jan 29, 2008 | Abandoned |