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|---|
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[pdf_file] => publications/A1/0154/20120154771.pdf
[firstpage_image] =>[orig_patent_app_number] => 13408066
[rel_patent_id] =>[rel_patent_doc_number] =>) 13/408066 | IMMERSION MULTIPLE-EXPOSURE METHOD AND IMMERSION EXPOSURE SYSTEM FOR SEPARATELY PERFORMING MULTIPLE EXPOSURE OF MICROPATTERNS AND NON-MICROPATTERNS | Feb 28, 2012 | Abandoned |