Search

Li Liu

Examiner (ID: 19142, Phone: (571)270-5363 , Office: P/2666 )

Most Active Art Unit
2666
Art Unit(s)
2636, 2624, 2634, 2613, 2665, 2666
Total Applications
2203
Issued Applications
1778
Pending Applications
82
Abandoned Applications
390

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 20615333 [patent_doc_number] => 20260085421 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2026-03-26 [patent_title] => LASER HEATING ARRANGEMENTS FOR INJECTION GAS ACTIVATION, AND RELATED PROCESSING CHAMBERS, APPARATUS, AND METHODS [patent_app_type] => utility [patent_app_number] => 18/893596 [patent_app_country] => US [patent_app_date] => 2024-09-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 1022 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 52 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18893596 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/893596
LASER HEATING ARRANGEMENTS FOR INJECTION GAS ACTIVATION, AND RELATED PROCESSING CHAMBERS, APPARATUS, AND METHODS Sep 22, 2024 Pending
Array ( [id] => 20634683 [patent_doc_number] => 12595553 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2026-04-07 [patent_title] => System and method for controlling film thickness, and film deposition system and method using same [patent_app_type] => utility [patent_app_number] => 18/825717 [patent_app_country] => US [patent_app_date] => 2024-09-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 22 [patent_figures_cnt] => 37 [patent_no_of_words] => 13095 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 222 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18825717 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/825717
System and method for controlling film thickness, and film deposition system and method using same Sep 4, 2024 Issued
Array ( [id] => 19531765 [patent_doc_number] => 20240355667 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-10-24 [patent_title] => EDGE RING ARRANGEMENT WITH MOVEABLE EDGE RINGS [patent_app_type] => utility [patent_app_number] => 18/758576 [patent_app_country] => US [patent_app_date] => 2024-06-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7881 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 188 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18758576 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/758576
EDGE RING ARRANGEMENT WITH MOVEABLE EDGE RINGS Jun 27, 2024 Pending
Array ( [id] => 19467932 [patent_doc_number] => 20240321602 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-09-26 [patent_title] => Inner Wall and substrate Processing Apparatus [patent_app_type] => utility [patent_app_number] => 18/733073 [patent_app_country] => US [patent_app_date] => 2024-06-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7027 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18733073 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/733073
Inner Wall and substrate Processing Apparatus Jun 3, 2024 Pending
Array ( [id] => 19531693 [patent_doc_number] => 20240355595 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-10-24 [patent_title] => LOW PARAMETER PLASMA ASHING TECHNIQUES [patent_app_type] => utility [patent_app_number] => 18/634430 [patent_app_country] => US [patent_app_date] => 2024-04-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 14209 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 67 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18634430 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/634430
LOW PARAMETER PLASMA ASHING TECHNIQUES Apr 11, 2024 Pending
Array ( [id] => 19384570 [patent_doc_number] => 20240274440 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-08-15 [patent_title] => CMP System and Method of Use [patent_app_type] => utility [patent_app_number] => 18/631589 [patent_app_country] => US [patent_app_date] => 2024-04-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12462 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 82 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18631589 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/631589
CMP system and method of use Apr 9, 2024 Issued
Array ( [id] => 20283639 [patent_doc_number] => 20250308881 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2025-10-02 [patent_title] => SILICON ETCH BYPRODUCT REMOVAL [patent_app_type] => utility [patent_app_number] => 18/619083 [patent_app_country] => US [patent_app_date] => 2024-03-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 1243 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 101 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18619083 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/619083
SILICON ETCH BYPRODUCT REMOVAL Mar 26, 2024 Pending
Array ( [id] => 19418901 [patent_doc_number] => 20240295024 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-09-05 [patent_title] => SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 18/588315 [patent_app_country] => US [patent_app_date] => 2024-02-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8430 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 56 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18588315 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/588315
SUBSTRATE PROCESSING APPARATUS Feb 26, 2024 Pending
Array ( [id] => 19418900 [patent_doc_number] => 20240295023 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-09-05 [patent_title] => SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 18/588371 [patent_app_country] => US [patent_app_date] => 2024-02-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8520 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -14 [patent_words_short_claim] => 56 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18588371 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/588371
SUBSTRATE PROCESSING APPARATUS Feb 26, 2024 Pending
Array ( [id] => 19237319 [patent_doc_number] => 20240194514 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-06-13 [patent_title] => SUBSTRATE SUPPORT AND SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 18/586860 [patent_app_country] => US [patent_app_date] => 2024-02-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9484 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 169 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18586860 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/586860
SUBSTRATE SUPPORT AND SUBSTRATE PROCESSING APPARATUS Feb 25, 2024 Pending
Array ( [id] => 20139403 [patent_doc_number] => 20250246447 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2025-07-31 [patent_title] => CHOKE PLATES FOR SEMICONDUCTOR MANUFACTURING PROCESSING CHAMBERS [patent_app_type] => utility [patent_app_number] => 18/422727 [patent_app_country] => US [patent_app_date] => 2024-01-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 1250 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 95 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18422727 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/422727
CHOKE PLATES FOR SEMICONDUCTOR MANUFACTURING PROCESSING CHAMBERS Jan 24, 2024 Pending
Array ( [id] => 19221413 [patent_doc_number] => 20240186117 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-06-06 [patent_title] => ATOMIC LAYER DEPOSITION APPARATUS [patent_app_type] => utility [patent_app_number] => 18/409805 [patent_app_country] => US [patent_app_date] => 2024-01-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5905 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -8 [patent_words_short_claim] => 188 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18409805 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/409805
ATOMIC LAYER DEPOSITION APPARATUS Jan 10, 2024 Pending
Array ( [id] => 19321391 [patent_doc_number] => 20240242938 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-07-18 [patent_title] => ETCHING DEVICE AND ETCHING METHOD [patent_app_type] => utility [patent_app_number] => 18/408369 [patent_app_country] => US [patent_app_date] => 2024-01-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3893 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -3 [patent_words_short_claim] => 76 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18408369 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/408369
ETCHING DEVICE AND ETCHING METHOD Jan 8, 2024 Pending
Array ( [id] => 19575043 [patent_doc_number] => 20240379335 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-11-14 [patent_title] => CALIBRATION APPARATUS FOR SENSOR DEVICE AND SYSTEM INCLUDING THE SAME [patent_app_type] => utility [patent_app_number] => 18/396254 [patent_app_country] => US [patent_app_date] => 2023-12-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 13127 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18396254 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/396254
CALIBRATION APPARATUS FOR SENSOR DEVICE AND SYSTEM INCLUDING THE SAME Dec 25, 2023 Pending
Array ( [id] => 19407076 [patent_doc_number] => 20240290587 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-08-29 [patent_title] => APPARATUS AND METHOD FOR TREATING SUBSTRATE [patent_app_type] => utility [patent_app_number] => 18/394198 [patent_app_country] => US [patent_app_date] => 2023-12-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5242 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 116 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18394198 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/394198
APPARATUS AND METHOD FOR TREATING SUBSTRATE Dec 21, 2023 Pending
Array ( [id] => 20053668 [patent_doc_number] => 20250191890 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2025-06-12 [patent_title] => SHIELDING PLASMA ETCHING DATA COLLECTION WINDOWS USING POSITIVELY CHARGED CONDUCTIVE FILMS [patent_app_type] => utility [patent_app_number] => 18/531857 [patent_app_country] => US [patent_app_date] => 2023-12-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 0 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 53 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18531857 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/531857
SHIELDING PLASMA ETCHING DATA COLLECTION WINDOWS USING POSITIVELY CHARGED CONDUCTIVE FILMS Dec 6, 2023 Pending
Array ( [id] => 19741100 [patent_doc_number] => 12217944 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-02-04 [patent_title] => High power cable for heated components in RF environment [patent_app_type] => utility [patent_app_number] => 18/526215 [patent_app_country] => US [patent_app_date] => 2023-12-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 5 [patent_no_of_words] => 4982 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 177 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18526215 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/526215
High power cable for heated components in RF environment Nov 30, 2023 Issued
Array ( [id] => 19049930 [patent_doc_number] => 20240091899 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-03-21 [patent_title] => POLISHING APPARATUS [patent_app_type] => utility [patent_app_number] => 18/521813 [patent_app_country] => US [patent_app_date] => 2023-11-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 15933 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 108 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18521813 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/521813
POLISHING APPARATUS Nov 27, 2023 Pending
Array ( [id] => 19034638 [patent_doc_number] => 20240084453 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-03-14 [patent_title] => CARRIER DEVICE AND SEMICONDUCTOR PROCESSING EQUIPMENT [patent_app_type] => utility [patent_app_number] => 18/516653 [patent_app_country] => US [patent_app_date] => 2023-11-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6698 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 192 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18516653 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/516653
CARRIER DEVICE AND SEMICONDUCTOR PROCESSING EQUIPMENT Nov 20, 2023 Pending
Array ( [id] => 19173616 [patent_doc_number] => 20240159590 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-05-16 [patent_title] => FOCUS RING INSPECTION DEVICE AND FOCUS RING INSPECTION METHOD [patent_app_type] => utility [patent_app_number] => 18/507065 [patent_app_country] => US [patent_app_date] => 2023-11-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8492 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 65 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18507065 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/507065
FOCUS RING INSPECTION DEVICE AND FOCUS RING INSPECTION METHOD Nov 11, 2023 Pending
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