Search

Li Liu

Examiner (ID: 19142, Phone: (571)270-5363 , Office: P/2666 )

Most Active Art Unit
2666
Art Unit(s)
2636, 2624, 2634, 2613, 2665, 2666
Total Applications
2203
Issued Applications
1778
Pending Applications
82
Abandoned Applications
390

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 14459657 [patent_doc_number] => 10325800 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-06-18 [patent_title] => High temperature electrostatic chucking with dielectric constant engineered in-situ charge trap materials [patent_app_type] => utility [patent_app_number] => 14/469573 [patent_app_country] => US [patent_app_date] => 2014-08-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 5358 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 118 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14469573 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/469573
High temperature electrostatic chucking with dielectric constant engineered in-situ charge trap materials Aug 25, 2014 Issued
Array ( [id] => 10370261 [patent_doc_number] => 20150255266 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-09-10 [patent_title] => 'ETCHING DEVICE, ETCHING METHOD AND PATTERNING APPARATUS' [patent_app_type] => utility [patent_app_number] => 14/446619 [patent_app_country] => US [patent_app_date] => 2014-07-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 3659 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14446619 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/446619
ETCHING DEVICE, ETCHING METHOD AND PATTERNING APPARATUS Jul 29, 2014 Abandoned
Array ( [id] => 10681523 [patent_doc_number] => 20160027668 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-01-28 [patent_title] => 'CHEMICAL MECHANICAL POLISHING APPARATUS AND METHODS' [patent_app_type] => utility [patent_app_number] => 14/341762 [patent_app_country] => US [patent_app_date] => 2014-07-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 13 [patent_no_of_words] => 10597 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14341762 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/341762
CHEMICAL MECHANICAL POLISHING APPARATUS AND METHODS Jul 24, 2014 Abandoned
Array ( [id] => 10123847 [patent_doc_number] => 09158203 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2015-10-13 [patent_title] => 'Compositions and methods for the selective removal of silicon nitride' [patent_app_type] => utility [patent_app_number] => 14/331958 [patent_app_country] => US [patent_app_date] => 2014-07-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 10473 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 44 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14331958 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/331958
Compositions and methods for the selective removal of silicon nitride Jul 14, 2014 Issued
Array ( [id] => 9801960 [patent_doc_number] => 20150013905 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-01-15 [patent_title] => 'WET PROCESSING APPARATUS AND PLATING APPARATUS' [patent_app_type] => utility [patent_app_number] => 14/326439 [patent_app_country] => US [patent_app_date] => 2014-07-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 15 [patent_no_of_words] => 11795 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14326439 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/326439
WET PROCESSING APPARATUS AND PLATING APPARATUS Jul 7, 2014 Abandoned
Array ( [id] => 16738895 [patent_doc_number] => 10964559 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-03-30 [patent_title] => Wafer etching apparatus and method for controlling etch bath of wafer [patent_app_type] => utility [patent_app_number] => 14/320181 [patent_app_country] => US [patent_app_date] => 2014-06-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 4033 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 143 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14320181 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/320181
Wafer etching apparatus and method for controlling etch bath of wafer Jun 29, 2014 Issued
Array ( [id] => 10486891 [patent_doc_number] => 20150371912 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-12-24 [patent_title] => 'METHODS AND SYSTEMS FOR CHEMICAL MECHANICAL PLANARIZATION ENDPOINT DETECTION USING AN ALTERNATING CURRENT REFERENCE SIGNAL' [patent_app_type] => utility [patent_app_number] => 14/311761 [patent_app_country] => US [patent_app_date] => 2014-06-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 3489 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14311761 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/311761
Methods and systems for chemical mechanical planarization endpoint detection using an alternating current reference signal Jun 22, 2014 Issued
Array ( [id] => 9682192 [patent_doc_number] => 20140238955 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2014-08-28 [patent_title] => 'PLASMA PROCESSING WITH PREIONIZED AND PREDISSOCIATED TUNING GASES AND ASSOCIATED SYSTEMS AND METHODS' [patent_app_type] => utility [patent_app_number] => 14/272928 [patent_app_country] => US [patent_app_date] => 2014-05-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 3684 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14272928 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/272928
Plasma processing with preionized and predissociated tuning gases and associated systems and methods May 7, 2014 Issued
Array ( [id] => 9638223 [patent_doc_number] => 20140216332 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2014-08-07 [patent_title] => 'VACUUM TREATMENT DEVICE' [patent_app_type] => utility [patent_app_number] => 14/252119 [patent_app_country] => US [patent_app_date] => 2014-04-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 6099 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14252119 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/252119
VACUUM TREATMENT DEVICE Apr 13, 2014 Abandoned
Array ( [id] => 9767197 [patent_doc_number] => 20140290859 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2014-10-02 [patent_title] => 'WET ETCHING APPARATUS' [patent_app_type] => utility [patent_app_number] => 14/228515 [patent_app_country] => US [patent_app_date] => 2014-03-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 6259 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14228515 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/228515
WET ETCHING APPARATUS Mar 27, 2014
Array ( [id] => 10390339 [patent_doc_number] => 20150275346 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-10-01 [patent_title] => 'HEAT TREATMENT APPARATUS' [patent_app_type] => utility [patent_app_number] => 14/229111 [patent_app_country] => US [patent_app_date] => 2014-03-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 5644 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14229111 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/229111
HEAT TREATMENT APPARATUS Mar 27, 2014
Array ( [id] => 9767626 [patent_doc_number] => 20140291289 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2014-10-02 [patent_title] => 'METHOD FOR ETCHING POROUS ORGANOSILICA LOW-K MATERIALS' [patent_app_type] => utility [patent_app_number] => 14/225107 [patent_app_country] => US [patent_app_date] => 2014-03-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 2270 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14225107 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/225107
METHOD FOR ETCHING POROUS ORGANOSILICA LOW-K MATERIALS Mar 24, 2014 Abandoned
Array ( [id] => 9753292 [patent_doc_number] => 20140283993 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2014-09-25 [patent_title] => 'ETCHING APPARATUS' [patent_app_type] => utility [patent_app_number] => 14/219640 [patent_app_country] => US [patent_app_date] => 2014-03-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 5405 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14219640 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/219640
ETCHING APPARATUS Mar 18, 2014 Abandoned
Array ( [id] => 10696834 [patent_doc_number] => 20160042980 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-02-11 [patent_title] => 'SUBSTRATE PROCESSING APPARATUS' [patent_app_type] => utility [patent_app_number] => 14/776963 [patent_app_country] => US [patent_app_date] => 2014-02-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 17 [patent_figures_cnt] => 17 [patent_no_of_words] => 12008 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14776963 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/776963
SUBSTRATE PROCESSING APPARATUS Feb 26, 2014 Abandoned
Array ( [id] => 13648549 [patent_doc_number] => 09850583 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2017-12-26 [patent_title] => Apparatus and method for forming lubricant recess having minute configuration in curved inner surface [patent_app_type] => utility [patent_app_number] => 14/185084 [patent_app_country] => US [patent_app_date] => 2014-02-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 19 [patent_figures_cnt] => 34 [patent_no_of_words] => 10561 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 312 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14185084 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/185084
Apparatus and method for forming lubricant recess having minute configuration in curved inner surface Feb 19, 2014 Issued
Array ( [id] => 13822343 [patent_doc_number] => 10187965 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-01-22 [patent_title] => Plasma confinement apparatus, and method for confining a plasma [patent_app_type] => utility [patent_app_number] => 14/108241 [patent_app_country] => US [patent_app_date] => 2013-12-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 7978 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 145 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14108241 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/108241
Plasma confinement apparatus, and method for confining a plasma Dec 15, 2013 Issued
Array ( [id] => 10273146 [patent_doc_number] => 20150158143 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-06-11 [patent_title] => 'APPARATUS AND METHOD FOR CHEMICALLY MECHANICALLY POLISHING' [patent_app_type] => utility [patent_app_number] => 14/101962 [patent_app_country] => US [patent_app_date] => 2013-12-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 5939 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14101962 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/101962
APPARATUS AND METHOD FOR CHEMICALLY MECHANICALLY POLISHING Dec 9, 2013 Abandoned
Array ( [id] => 16502438 [patent_doc_number] => 10867832 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-12-15 [patent_title] => Apparatus for holding semiconductor wafers [patent_app_type] => utility [patent_app_number] => 14/101052 [patent_app_country] => US [patent_app_date] => 2013-12-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 4039 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 194 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14101052 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/101052
Apparatus for holding semiconductor wafers Dec 8, 2013 Issued
Array ( [id] => 9380495 [patent_doc_number] => 20140083976 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2014-03-27 [patent_title] => 'CLUSTER BEAM GENERATING APPARATUS, SUBSTRATE PROCESSING APPARATUS, CLUSTER BEAM GENERATING METHOD, AND SUBSTRATE PROCESSING METHOD' [patent_app_type] => utility [patent_app_number] => 14/093058 [patent_app_country] => US [patent_app_date] => 2013-11-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 3519 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14093058 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/093058
CLUSTER BEAM GENERATING APPARATUS, SUBSTRATE PROCESSING APPARATUS, CLUSTER BEAM GENERATING METHOD, AND SUBSTRATE PROCESSING METHOD Nov 28, 2013 Abandoned
Array ( [id] => 9445376 [patent_doc_number] => 20140116544 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2014-05-01 [patent_title] => 'Device to Generate a Gas Mixture' [patent_app_type] => utility [patent_app_number] => 14/068545 [patent_app_country] => US [patent_app_date] => 2013-10-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 2469 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14068545 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/068545
Device to Generate a Gas Mixture Oct 30, 2013 Abandoned
Menu