Search

Li Liu

Examiner (ID: 19142, Phone: (571)270-5363 , Office: P/2666 )

Most Active Art Unit
2666
Art Unit(s)
2636, 2624, 2634, 2613, 2665, 2666
Total Applications
2203
Issued Applications
1778
Pending Applications
82
Abandoned Applications
390

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 18222483 [patent_doc_number] => 20230061477 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-03-02 [patent_title] => SEALING SYSTEM FOR A REACTOR SYSTEM [patent_app_type] => utility [patent_app_number] => 17/895370 [patent_app_country] => US [patent_app_date] => 2022-08-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6440 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 112 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17895370 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/895370
SEALING SYSTEM FOR A REACTOR SYSTEM Aug 24, 2022 Pending
Array ( [id] => 18225643 [patent_doc_number] => 20230064637 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-03-02 [patent_title] => CLAMPED DUAL-CHANNEL SHOWERHEAD [patent_app_type] => utility [patent_app_number] => 17/893430 [patent_app_country] => US [patent_app_date] => 2022-08-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11710 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 104 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17893430 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/893430
CLAMPED DUAL-CHANNEL SHOWERHEAD Aug 22, 2022 Pending
Array ( [id] => 18211500 [patent_doc_number] => 20230057763 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-02-23 [patent_title] => OPTICAL SENSORS FOR MEASURING PROPERTIES OF CONSUMABLE PARTS IN A SEMICONDUCTOR PLASMA PROCESSING CHAMBER [patent_app_type] => utility [patent_app_number] => 17/889077 [patent_app_country] => US [patent_app_date] => 2022-08-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9012 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -22 [patent_words_short_claim] => 123 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17889077 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/889077
OPTICAL SENSORS FOR MEASURING PROPERTIES OF CONSUMABLE PARTS IN A SEMICONDUCTOR PLASMA PROCESSING CHAMBER Aug 15, 2022 Pending
Array ( [id] => 18040016 [patent_doc_number] => 20220384233 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-12-01 [patent_title] => SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 17/887101 [patent_app_country] => US [patent_app_date] => 2022-08-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 18186 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 372 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17887101 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/887101
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD Aug 11, 2022 Abandoned
Array ( [id] => 18040022 [patent_doc_number] => 20220384239 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-12-01 [patent_title] => METHOD FOR MANUFACTURING SEMICONDUCTOR WAFER WITH WAFER CHUCK HAVING FLUID GUIDING STRUCTURE [patent_app_type] => utility [patent_app_number] => 17/883128 [patent_app_country] => US [patent_app_date] => 2022-08-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11367 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 80 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17883128 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/883128
METHOD FOR MANUFACTURING SEMICONDUCTOR WAFER WITH WAFER CHUCK HAVING FLUID GUIDING STRUCTURE Aug 7, 2022 Pending
Array ( [id] => 18940021 [patent_doc_number] => 20240035160 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-02-01 [patent_title] => SUSCEPTOR SUPPORT ASSEMBLY FOR CHEMICAL VAPOR DEPOSITION CHAMBERS [patent_app_type] => utility [patent_app_number] => 17/874873 [patent_app_country] => US [patent_app_date] => 2022-07-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5296 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 52 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17874873 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/874873
SUSCEPTOR SUPPORT ASSEMBLY FOR CHEMICAL VAPOR DEPOSITION CHAMBERS Jul 26, 2022 Pending
Array ( [id] => 19063107 [patent_doc_number] => 11942357 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-03-26 [patent_title] => Workpiece placement apparatus and processing apparatus [patent_app_type] => utility [patent_app_number] => 17/811121 [patent_app_country] => US [patent_app_date] => 2022-07-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 11 [patent_no_of_words] => 7023 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 188 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17811121 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/811121
Workpiece placement apparatus and processing apparatus Jul 6, 2022 Issued
Array ( [id] => 18312253 [patent_doc_number] => 20230116153 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-04-13 [patent_title] => SYSTEM FOR UNIFORM TEMPERATURE CONTROL OF CLUSTER PLATFORMS [patent_app_type] => utility [patent_app_number] => 17/851638 [patent_app_country] => US [patent_app_date] => 2022-06-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10379 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 181 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17851638 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/851638
SYSTEM FOR UNIFORM TEMPERATURE CONTROL OF CLUSTER PLATFORMS Jun 27, 2022 Abandoned
Array ( [id] => 18077905 [patent_doc_number] => 20220403517 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-12-22 [patent_title] => APPARATUS FOR TREATING SUBSTRATE [patent_app_type] => utility [patent_app_number] => 17/837241 [patent_app_country] => US [patent_app_date] => 2022-06-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7872 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 76 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17837241 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/837241
Apparatus for treating substrate Jun 9, 2022 Issued
Array ( [id] => 18210883 [patent_doc_number] => 20230057145 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-02-23 [patent_title] => PLASMA CHAMBER WITH A MULTIPHASE ROTATING CROSS-FLOW WITH UNIFORMITY TUNING [patent_app_type] => utility [patent_app_number] => 17/831781 [patent_app_country] => US [patent_app_date] => 2022-06-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 16788 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -20 [patent_words_short_claim] => 141 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17831781 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/831781
PLASMA CHAMBER WITH A MULTIPHASE ROTATING CROSS-FLOW WITH UNIFORMITY TUNING Jun 2, 2022 Pending
Array ( [id] => 18712786 [patent_doc_number] => 20230335419 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-10-19 [patent_title] => ETCHING DEVICE AND ETCHING METHOD [patent_app_type] => utility [patent_app_number] => 17/741787 [patent_app_country] => US [patent_app_date] => 2022-05-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3726 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -20 [patent_words_short_claim] => 73 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17741787 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/741787
ETCHING DEVICE AND ETCHING METHOD May 10, 2022 Abandoned
Array ( [id] => 20760193 [patent_doc_number] => 12652988 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2026-06-09 [patent_title] => Thermally guided chemical etching of a substrate and real-time monitoring thereof [patent_app_type] => utility [patent_app_number] => 17/728467 [patent_app_country] => US [patent_app_date] => 2022-04-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 23 [patent_no_of_words] => 6682 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 210 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17728467 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/728467
Thermally guided chemical etching of a substrate and real-time monitoring thereof Apr 24, 2022 Issued
Array ( [id] => 17917464 [patent_doc_number] => 20220319860 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-10-06 [patent_title] => ETCHING METHOD AND ETCHING PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/707316 [patent_app_country] => US [patent_app_date] => 2022-03-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6696 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 104 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17707316 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/707316
ETCHING METHOD AND ETCHING PROCESSING APPARATUS Mar 28, 2022 Abandoned
Array ( [id] => 17917481 [patent_doc_number] => 20220319877 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-10-06 [patent_title] => SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 17/656315 [patent_app_country] => US [patent_app_date] => 2022-03-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5993 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 99 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17656315 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/656315
Substrate processing apparatus and substrate processing method Mar 23, 2022 Issued
Array ( [id] => 17720662 [patent_doc_number] => 20220213382 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-07-07 [patent_title] => SUBSTRATE PROCESSING DEVICE AND ETCHING LIQUID [patent_app_type] => utility [patent_app_number] => 17/654640 [patent_app_country] => US [patent_app_date] => 2022-03-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12178 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -3 [patent_words_short_claim] => 91 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17654640 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/654640
Substrate processing device and etching liquid Mar 13, 2022 Issued
Array ( [id] => 17870661 [patent_doc_number] => 20220293398 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-09-15 [patent_title] => SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/689392 [patent_app_country] => US [patent_app_date] => 2022-03-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10066 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 91 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17689392 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/689392
SUBSTRATE PROCESSING APPARATUS Mar 7, 2022 Pending
Array ( [id] => 17676597 [patent_doc_number] => 20220189764 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-06-16 [patent_title] => Radiation of Substrates During Processing and Systems Thereof [patent_app_type] => utility [patent_app_number] => 17/653252 [patent_app_country] => US [patent_app_date] => 2022-03-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 14230 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 62 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17653252 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/653252
Radiation of Substrates During Processing and Systems Thereof Mar 1, 2022 Pending
Array ( [id] => 17708554 [patent_doc_number] => 20220208562 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-06-30 [patent_title] => PRESSURE ADJUSTMENT APPARATUS FOR CONTROLLING PRESSURE IN CHAMBER AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME [patent_app_type] => utility [patent_app_number] => 17/562986 [patent_app_country] => US [patent_app_date] => 2021-12-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5428 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 153 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17562986 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/562986
Pressure adjustment apparatus for controlling pressure in chamber and substrate processing apparatus including the same Dec 26, 2021 Issued
Array ( [id] => 20267033 [patent_doc_number] => 12438032 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-10-07 [patent_title] => Chuck pin assembly, and substrate holding apparatus and liquid processing apparatus including same [patent_app_type] => utility [patent_app_number] => 17/554972 [patent_app_country] => US [patent_app_date] => 2021-12-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 1136 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 210 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17554972 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/554972
Chuck pin assembly, and substrate holding apparatus and liquid processing apparatus including same Dec 16, 2021 Issued
Array ( [id] => 17708546 [patent_doc_number] => 20220208554 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-06-30 [patent_title] => ETCHING APPARATUS AND ETCHING METHOD [patent_app_type] => utility [patent_app_number] => 17/456998 [patent_app_country] => US [patent_app_date] => 2021-11-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6309 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -6 [patent_words_short_claim] => 78 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17456998 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/456998
ETCHING APPARATUS AND ETCHING METHOD Nov 29, 2021 Abandoned
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