Search

Li Liu

Examiner (ID: 19142, Phone: (571)270-5363 , Office: P/2666 )

Most Active Art Unit
2666
Art Unit(s)
2636, 2624, 2634, 2613, 2665, 2666
Total Applications
2203
Issued Applications
1778
Pending Applications
82
Abandoned Applications
390

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 17645189 [patent_doc_number] => 20220172928 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-06-02 [patent_title] => PLASMA PROCESSING APPARATUS AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE USING THE SAME [patent_app_type] => utility [patent_app_number] => 17/533507 [patent_app_country] => US [patent_app_date] => 2021-11-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6405 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 127 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17533507 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/533507
PLASMA PROCESSING APPARATUS AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE USING THE SAME Nov 22, 2021 Pending
Array ( [id] => 17630573 [patent_doc_number] => 20220165588 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-05-26 [patent_title] => SYSTEM FOR PROCESSING SUBSTRATE [patent_app_type] => utility [patent_app_number] => 17/522897 [patent_app_country] => US [patent_app_date] => 2021-11-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7918 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 91 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17522897 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/522897
SYSTEM FOR PROCESSING SUBSTRATE Nov 8, 2021 Pending
Array ( [id] => 20469424 [patent_doc_number] => 12525466 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2026-01-13 [patent_title] => Processing apparatus and processing method [patent_app_type] => utility [patent_app_number] => 17/522660 [patent_app_country] => US [patent_app_date] => 2021-11-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 16 [patent_no_of_words] => 3566 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 241 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17522660 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/522660
Processing apparatus and processing method Nov 8, 2021 Issued
Array ( [id] => 17431648 [patent_doc_number] => 20220059357 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-02-24 [patent_title] => SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/519785 [patent_app_country] => US [patent_app_date] => 2021-11-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8206 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17519785 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/519785
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS Nov 4, 2021 Abandoned
Array ( [id] => 17582878 [patent_doc_number] => 20220139733 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-05-05 [patent_title] => SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 17/513991 [patent_app_country] => US [patent_app_date] => 2021-10-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 13845 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -14 [patent_words_short_claim] => 137 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17513991 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/513991
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD Oct 28, 2021 Abandoned
Array ( [id] => 17577520 [patent_doc_number] => 20220134375 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-05-05 [patent_title] => SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 17/513986 [patent_app_country] => US [patent_app_date] => 2021-10-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 14360 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 122 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17513986 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/513986
Substrate processing apparatus and substrate processing method Oct 28, 2021 Issued
Array ( [id] => 18848773 [patent_doc_number] => 20230411177 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-12-21 [patent_title] => APPARATUS FOR PROCESSING A WAFER-SHAPED ARTICLE [patent_app_type] => utility [patent_app_number] => 18/032397 [patent_app_country] => US [patent_app_date] => 2021-10-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5255 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 60 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18032397 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/032397
APPARATUS FOR PROCESSING A WAFER-SHAPED ARTICLE Oct 13, 2021 Pending
Array ( [id] => 18693609 [patent_doc_number] => 20230324008 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-10-12 [patent_title] => GAS SUPPLY SYSTEM AND GAS SUPPLY METHOD [patent_app_type] => utility [patent_app_number] => 18/044184 [patent_app_country] => US [patent_app_date] => 2021-10-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8026 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -7 [patent_words_short_claim] => 217 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18044184 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/044184
GAS SUPPLY SYSTEM AND GAS SUPPLY METHOD Oct 4, 2021 Pending
Array ( [id] => 17302980 [patent_doc_number] => 20210398819 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-12-23 [patent_title] => ETCHING METHOD [patent_app_type] => utility [patent_app_number] => 17/465440 [patent_app_country] => US [patent_app_date] => 2021-09-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4925 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 124 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17465440 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/465440
ETCHING METHOD Sep 1, 2021 Pending
Array ( [id] => 18612808 [patent_doc_number] => 20230279544 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-09-07 [patent_title] => ADDITIVE CHEMICAL VAPOR DEPOSITION METHODS AND SYSTEMS [patent_app_type] => utility [patent_app_number] => 18/023814 [patent_app_country] => US [patent_app_date] => 2021-09-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6449 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -30 [patent_words_short_claim] => 84 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18023814 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/023814
ADDITIVE CHEMICAL VAPOR DEPOSITION METHODS AND SYSTEMS Sep 1, 2021 Pending
Array ( [id] => 19277248 [patent_doc_number] => 12027380 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-07-02 [patent_title] => Semiconductor manufacturing apparatus and method of manufacturing semiconductor device [patent_app_type] => utility [patent_app_number] => 17/464007 [patent_app_country] => US [patent_app_date] => 2021-09-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 19 [patent_no_of_words] => 4982 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 192 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17464007 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/464007
Semiconductor manufacturing apparatus and method of manufacturing semiconductor device Aug 31, 2021 Issued
Array ( [id] => 20649735 [patent_doc_number] => 12604698 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2026-04-14 [patent_title] => Substrate processing system and state monitoring method [patent_app_type] => utility [patent_app_number] => 17/446477 [patent_app_country] => US [patent_app_date] => 2021-08-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 7 [patent_no_of_words] => 5770 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 459 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17446477 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/446477
Substrate processing system and state monitoring method Aug 30, 2021 Issued
Array ( [id] => 17247001 [patent_doc_number] => 20210366746 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-11-25 [patent_title] => ACTIVE WORKPIECE HEATING OR COOLING FOR AN ION IMPLANTATION SYSTEM [patent_app_type] => utility [patent_app_number] => 17/393737 [patent_app_country] => US [patent_app_date] => 2021-08-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7334 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 164 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17393737 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/393737
ACTIVE WORKPIECE HEATING OR COOLING FOR AN ION IMPLANTATION SYSTEM Aug 3, 2021 Abandoned
Array ( [id] => 17232222 [patent_doc_number] => 20210358779 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-11-18 [patent_title] => PLASMA PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/386645 [patent_app_country] => US [patent_app_date] => 2021-07-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7098 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -14 [patent_words_short_claim] => 152 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17386645 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/386645
Plasma processing apparatus Jul 27, 2021 Issued
Array ( [id] => 19093900 [patent_doc_number] => 11955365 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-04-09 [patent_title] => Substrate processing method and substrate processing apparatus [patent_app_type] => utility [patent_app_number] => 17/443286 [patent_app_country] => US [patent_app_date] => 2021-07-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 15 [patent_no_of_words] => 9199 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 390 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17443286 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/443286
Substrate processing method and substrate processing apparatus Jul 22, 2021 Issued
Array ( [id] => 18150152 [patent_doc_number] => 20230024009 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-01-26 [patent_title] => FACE-UP WAFER EDGE POLISHING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/380788 [patent_app_country] => US [patent_app_date] => 2021-07-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7690 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 63 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17380788 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/380788
FACE-UP WAFER EDGE POLISHING APPARATUS Jul 19, 2021 Pending
Array ( [id] => 17708553 [patent_doc_number] => 20220208561 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-06-30 [patent_title] => SUPPORTING DEVICE AND APPARATUS FOR PROCESSING A SUBSTRATE INCLUDING A SUPPORTING DEVICE [patent_app_type] => utility [patent_app_number] => 17/377666 [patent_app_country] => US [patent_app_date] => 2021-07-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6446 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 40 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17377666 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/377666
Supporting device and apparatus for processing a substrate including a supporting device Jul 15, 2021 Issued
Array ( [id] => 19858215 [patent_doc_number] => 12261066 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-03-25 [patent_title] => Substrate processing apparatus and furnace opening closer [patent_app_type] => utility [patent_app_number] => 17/376446 [patent_app_country] => US [patent_app_date] => 2021-07-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 9 [patent_no_of_words] => 7072 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 154 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17376446 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/376446
Substrate processing apparatus and furnace opening closer Jul 14, 2021 Issued
Array ( [id] => 20583087 [patent_doc_number] => 12575350 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2026-03-10 [patent_title] => Substrate processing method and substrate processing apparatus [patent_app_type] => utility [patent_app_number] => 17/367975 [patent_app_country] => US [patent_app_date] => 2021-07-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 19 [patent_figures_cnt] => 39 [patent_no_of_words] => 8054 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 333 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17367975 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/367975
Substrate processing method and substrate processing apparatus Jul 5, 2021 Issued
Array ( [id] => 20583097 [patent_doc_number] => 12575360 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2026-03-10 [patent_title] => Semiconductor processing chamber adapter [patent_app_type] => utility [patent_app_number] => 17/366761 [patent_app_country] => US [patent_app_date] => 2021-07-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 2616 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 203 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17366761 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/366761
Semiconductor processing chamber adapter Jul 1, 2021 Issued
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