Search

Li Liu

Examiner (ID: 19142, Phone: (571)270-5363 , Office: P/2666 )

Most Active Art Unit
2666
Art Unit(s)
2636, 2624, 2634, 2613, 2665, 2666
Total Applications
2203
Issued Applications
1778
Pending Applications
82
Abandoned Applications
390

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 19972367 [patent_doc_number] => 12340986 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-06-24 [patent_title] => Plasma processing apparatus and plasma processing method [patent_app_type] => utility [patent_app_number] => 17/361572 [patent_app_country] => US [patent_app_date] => 2021-06-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 8 [patent_no_of_words] => 1236 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 261 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17361572 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/361572
Plasma processing apparatus and plasma processing method Jun 28, 2021 Issued
Array ( [id] => 18207933 [patent_doc_number] => 20230054190 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-02-23 [patent_title] => SEMICONDUCTOR DEPOSITION METHOD AND SEMICONDUCTOR DEPOSITION SYSTEM [patent_app_type] => utility [patent_app_number] => 17/441850 [patent_app_country] => US [patent_app_date] => 2021-06-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7797 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -11 [patent_words_short_claim] => 94 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17441850 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/441850
SEMICONDUCTOR DEPOSITION METHOD AND SEMICONDUCTOR DEPOSITION SYSTEM Jun 20, 2021 Abandoned
Array ( [id] => 17477343 [patent_doc_number] => 20220084847 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-03-17 [patent_title] => SUBSTRATE TREATING EQUIPMENT [patent_app_type] => utility [patent_app_number] => 17/346410 [patent_app_country] => US [patent_app_date] => 2021-06-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10745 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 132 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17346410 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/346410
SUBSTRATE TREATING EQUIPMENT Jun 13, 2021 Abandoned
Array ( [id] => 17295313 [patent_doc_number] => 20210391152 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-12-16 [patent_title] => STAGE, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 17/342809 [patent_app_country] => US [patent_app_date] => 2021-06-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5726 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 112 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17342809 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/342809
STAGE, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING METHOD Jun 8, 2021 Pending
Array ( [id] => 17246995 [patent_doc_number] => 20210366740 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-11-25 [patent_title] => SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 17/326821 [patent_app_country] => US [patent_app_date] => 2021-05-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 18754 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 83 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17326821 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/326821
Substrate processing apparatus and substrate processing method May 20, 2021 Issued
Array ( [id] => 17232216 [patent_doc_number] => 20210358773 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-11-18 [patent_title] => SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 17/318019 [patent_app_country] => US [patent_app_date] => 2021-05-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8580 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 104 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17318019 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/318019
Substrate processing apparatus and substrate processing method May 11, 2021 Issued
Array ( [id] => 17055745 [patent_doc_number] => 20210265179 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-08-26 [patent_title] => HYDROGEN FLUORIDE VAPOR PHASE CORROSION APPARATUS AND METHOD [patent_app_type] => utility [patent_app_number] => 17/315478 [patent_app_country] => US [patent_app_date] => 2021-05-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3582 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -3 [patent_words_short_claim] => 172 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17315478 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/315478
HYDROGEN FLUORIDE VAPOR PHASE CORROSION APPARATUS AND METHOD May 9, 2021 Abandoned
Array ( [id] => 17203408 [patent_doc_number] => 20210343503 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-11-04 [patent_title] => ETCHING APPARATUS AND ETCHING METHOD [patent_app_type] => utility [patent_app_number] => 17/243596 [patent_app_country] => US [patent_app_date] => 2021-04-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 15246 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 89 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17243596 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/243596
ETCHING APPARATUS AND ETCHING METHOD Apr 28, 2021 Pending
Array ( [id] => 17203481 [patent_doc_number] => 20210343576 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-11-04 [patent_title] => SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/241504 [patent_app_country] => US [patent_app_date] => 2021-04-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9301 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 65 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17241504 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/241504
Substrate processing apparatus Apr 26, 2021 Issued
Array ( [id] => 17949216 [patent_doc_number] => 20220336235 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-10-20 [patent_title] => VALVE BOX MODULE, SEMICONDUCTOR DEVICE MANUFACTURING SYSTEM AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE [patent_app_type] => utility [patent_app_number] => 17/232563 [patent_app_country] => US [patent_app_date] => 2021-04-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6506 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 74 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17232563 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/232563
VALVE BOX MODULE, SEMICONDUCTOR DEVICE MANUFACTURING SYSTEM AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE Apr 15, 2021 Pending
Array ( [id] => 18507519 [patent_doc_number] => 11705346 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-07-18 [patent_title] => Substrate processing apparatus [patent_app_type] => utility [patent_app_number] => 17/223141 [patent_app_country] => US [patent_app_date] => 2021-04-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 7210 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 323 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17223141 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/223141
Substrate processing apparatus Apr 5, 2021 Issued
Array ( [id] => 18562887 [patent_doc_number] => 11728139 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-08-15 [patent_title] => Process chamber for cyclic and selective material removal and etching [patent_app_type] => utility [patent_app_number] => 17/219360 [patent_app_country] => US [patent_app_date] => 2021-03-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 6876 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 176 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17219360 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/219360
Process chamber for cyclic and selective material removal and etching Mar 30, 2021 Issued
Array ( [id] => 18439934 [patent_doc_number] => 20230187229 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-06-15 [patent_title] => CERAMIC ADDITIVE MANUFACTURING TECHNIQUES FOR GAS INJECTORS [patent_app_type] => utility [patent_app_number] => 17/912358 [patent_app_country] => US [patent_app_date] => 2021-03-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12333 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 119 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17912358 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/912358
CERAMIC ADDITIVE MANUFACTURING TECHNIQUES FOR GAS INJECTORS Mar 28, 2021 Pending
Array ( [id] => 17130246 [patent_doc_number] => 20210305015 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-09-30 [patent_title] => SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/213065 [patent_app_country] => US [patent_app_date] => 2021-03-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5619 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 137 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17213065 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/213065
SUBSTRATE PROCESSING APPARATUS Mar 24, 2021 Abandoned
Array ( [id] => 16951660 [patent_doc_number] => 20210210352 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-07-08 [patent_title] => CORRELATION BETWEEN CONDUCTIVITY AND PH MEASUREMENTS FOR KOH TEXTURING SOLUTIONS AND ADDITIVES [patent_app_type] => utility [patent_app_number] => 17/209299 [patent_app_country] => US [patent_app_date] => 2021-03-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5770 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 219 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17209299 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/209299
CORRELATION BETWEEN CONDUCTIVITY AND PH MEASUREMENTS FOR KOH TEXTURING SOLUTIONS AND ADDITIVES Mar 22, 2021 Pending
Array ( [id] => 17881781 [patent_doc_number] => 20220297258 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-09-22 [patent_title] => SUBSTRATE POLISHING SIMULTANEOUSLY OVER MULTIPLE MINI PLATENS [patent_app_type] => utility [patent_app_number] => 17/204832 [patent_app_country] => US [patent_app_date] => 2021-03-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8128 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 56 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17204832 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/204832
SUBSTRATE POLISHING SIMULTANEOUSLY OVER MULTIPLE MINI PLATENS Mar 16, 2021 Abandoned
Array ( [id] => 17100092 [patent_doc_number] => 20210287883 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-09-16 [patent_title] => HOLDING METHOD OF EDGE RING, PLASMA PROCESSING APPARATUS, AND SUBSTRATE PROCESSING SYSTEM [patent_app_type] => utility [patent_app_number] => 17/189858 [patent_app_country] => US [patent_app_date] => 2021-03-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10194 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 164 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17189858 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/189858
Holding method of edge ring, plasma processing apparatus, and substrate processing system Mar 1, 2021 Issued
Array ( [id] => 20441500 [patent_doc_number] => 12512342 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-12-30 [patent_title] => Substrate treating apparatus [patent_app_type] => utility [patent_app_number] => 17/182535 [patent_app_country] => US [patent_app_date] => 2021-02-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 21 [patent_figures_cnt] => 24 [patent_no_of_words] => 26774 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 468 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17182535 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/182535
Substrate treating apparatus Feb 22, 2021 Issued
Array ( [id] => 19277278 [patent_doc_number] => 12027410 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-07-02 [patent_title] => Edge ring arrangement with moveable edge rings [patent_app_type] => utility [patent_app_number] => 17/181571 [patent_app_country] => US [patent_app_date] => 2021-02-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 18 [patent_figures_cnt] => 26 [patent_no_of_words] => 7869 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 183 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17181571 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/181571
Edge ring arrangement with moveable edge rings Feb 21, 2021 Issued
Array ( [id] => 17055742 [patent_doc_number] => 20210265176 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-08-26 [patent_title] => SUBSTRATE PROCESSING APPARATUS AND METHOD FOR FABRICATING CATALYST PROCESSING MEMBER [patent_app_type] => utility [patent_app_number] => 17/180394 [patent_app_country] => US [patent_app_date] => 2021-02-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9532 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -7 [patent_words_short_claim] => 136 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17180394 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/180394
SUBSTRATE PROCESSING APPARATUS AND METHOD FOR FABRICATING CATALYST PROCESSING MEMBER Feb 18, 2021 Abandoned
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