
Li Liu
Examiner (ID: 19142, Phone: (571)270-5363 , Office: P/2666 )
| Most Active Art Unit | 2666 |
| Art Unit(s) | 2636, 2624, 2634, 2613, 2665, 2666 |
| Total Applications | 2203 |
| Issued Applications | 1778 |
| Pending Applications | 82 |
| Abandoned Applications | 390 |
Applications
| Application number | Title of the application | Filing Date | Status |
|---|---|---|---|
Array
(
[id] => 19972367
[patent_doc_number] => 12340986
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2025-06-24
[patent_title] => Plasma processing apparatus and plasma processing method
[patent_app_type] => utility
[patent_app_number] => 17/361572
[patent_app_country] => US
[patent_app_date] => 2021-06-29
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 6
[patent_figures_cnt] => 8
[patent_no_of_words] => 1236
[patent_no_of_claims] => 8
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 261
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17361572
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/361572 | Plasma processing apparatus and plasma processing method | Jun 28, 2021 | Issued |
Array
(
[id] => 18207933
[patent_doc_number] => 20230054190
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2023-02-23
[patent_title] => SEMICONDUCTOR DEPOSITION METHOD AND SEMICONDUCTOR DEPOSITION SYSTEM
[patent_app_type] => utility
[patent_app_number] => 17/441850
[patent_app_country] => US
[patent_app_date] => 2021-06-21
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 7797
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -11
[patent_words_short_claim] => 94
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17441850
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/441850 | SEMICONDUCTOR DEPOSITION METHOD AND SEMICONDUCTOR DEPOSITION SYSTEM | Jun 20, 2021 | Abandoned |
Array
(
[id] => 17477343
[patent_doc_number] => 20220084847
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2022-03-17
[patent_title] => SUBSTRATE TREATING EQUIPMENT
[patent_app_type] => utility
[patent_app_number] => 17/346410
[patent_app_country] => US
[patent_app_date] => 2021-06-14
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 10745
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -16
[patent_words_short_claim] => 132
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17346410
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/346410 | SUBSTRATE TREATING EQUIPMENT | Jun 13, 2021 | Abandoned |
Array
(
[id] => 17295313
[patent_doc_number] => 20210391152
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2021-12-16
[patent_title] => STAGE, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING METHOD
[patent_app_type] => utility
[patent_app_number] => 17/342809
[patent_app_country] => US
[patent_app_date] => 2021-06-09
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 5726
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -12
[patent_words_short_claim] => 112
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17342809
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/342809 | STAGE, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING METHOD | Jun 8, 2021 | Pending |
Array
(
[id] => 17246995
[patent_doc_number] => 20210366740
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2021-11-25
[patent_title] => SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
[patent_app_type] => utility
[patent_app_number] => 17/326821
[patent_app_country] => US
[patent_app_date] => 2021-05-21
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 18754
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -12
[patent_words_short_claim] => 83
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17326821
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/326821 | Substrate processing apparatus and substrate processing method | May 20, 2021 | Issued |
Array
(
[id] => 17232216
[patent_doc_number] => 20210358773
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2021-11-18
[patent_title] => SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
[patent_app_type] => utility
[patent_app_number] => 17/318019
[patent_app_country] => US
[patent_app_date] => 2021-05-12
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 8580
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -12
[patent_words_short_claim] => 104
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17318019
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/318019 | Substrate processing apparatus and substrate processing method | May 11, 2021 | Issued |
Array
(
[id] => 17055745
[patent_doc_number] => 20210265179
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2021-08-26
[patent_title] => HYDROGEN FLUORIDE VAPOR PHASE CORROSION APPARATUS AND METHOD
[patent_app_type] => utility
[patent_app_number] => 17/315478
[patent_app_country] => US
[patent_app_date] => 2021-05-10
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 3582
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -3
[patent_words_short_claim] => 172
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17315478
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/315478 | HYDROGEN FLUORIDE VAPOR PHASE CORROSION APPARATUS AND METHOD | May 9, 2021 | Abandoned |
Array
(
[id] => 17203408
[patent_doc_number] => 20210343503
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2021-11-04
[patent_title] => ETCHING APPARATUS AND ETCHING METHOD
[patent_app_type] => utility
[patent_app_number] => 17/243596
[patent_app_country] => US
[patent_app_date] => 2021-04-29
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 15246
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -15
[patent_words_short_claim] => 89
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17243596
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/243596 | ETCHING APPARATUS AND ETCHING METHOD | Apr 28, 2021 | Pending |
Array
(
[id] => 17203481
[patent_doc_number] => 20210343576
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2021-11-04
[patent_title] => SUBSTRATE PROCESSING APPARATUS
[patent_app_type] => utility
[patent_app_number] => 17/241504
[patent_app_country] => US
[patent_app_date] => 2021-04-27
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 9301
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -16
[patent_words_short_claim] => 65
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17241504
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/241504 | Substrate processing apparatus | Apr 26, 2021 | Issued |
Array
(
[id] => 17949216
[patent_doc_number] => 20220336235
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2022-10-20
[patent_title] => VALVE BOX MODULE, SEMICONDUCTOR DEVICE MANUFACTURING SYSTEM AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
[patent_app_type] => utility
[patent_app_number] => 17/232563
[patent_app_country] => US
[patent_app_date] => 2021-04-16
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 6506
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 74
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17232563
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/232563 | VALVE BOX MODULE, SEMICONDUCTOR DEVICE MANUFACTURING SYSTEM AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE | Apr 15, 2021 | Pending |
Array
(
[id] => 18507519
[patent_doc_number] => 11705346
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2023-07-18
[patent_title] => Substrate processing apparatus
[patent_app_type] => utility
[patent_app_number] => 17/223141
[patent_app_country] => US
[patent_app_date] => 2021-04-06
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 7
[patent_figures_cnt] => 7
[patent_no_of_words] => 7210
[patent_no_of_claims] => 12
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 323
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17223141
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/223141 | Substrate processing apparatus | Apr 5, 2021 | Issued |
Array
(
[id] => 18562887
[patent_doc_number] => 11728139
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2023-08-15
[patent_title] => Process chamber for cyclic and selective material removal and etching
[patent_app_type] => utility
[patent_app_number] => 17/219360
[patent_app_country] => US
[patent_app_date] => 2021-03-31
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 4
[patent_figures_cnt] => 4
[patent_no_of_words] => 6876
[patent_no_of_claims] => 18
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 176
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17219360
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/219360 | Process chamber for cyclic and selective material removal and etching | Mar 30, 2021 | Issued |
Array
(
[id] => 18439934
[patent_doc_number] => 20230187229
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2023-06-15
[patent_title] => CERAMIC ADDITIVE MANUFACTURING TECHNIQUES FOR GAS INJECTORS
[patent_app_type] => utility
[patent_app_number] => 17/912358
[patent_app_country] => US
[patent_app_date] => 2021-03-29
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 12333
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 119
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17912358
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/912358 | CERAMIC ADDITIVE MANUFACTURING TECHNIQUES FOR GAS INJECTORS | Mar 28, 2021 | Pending |
Array
(
[id] => 17130246
[patent_doc_number] => 20210305015
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2021-09-30
[patent_title] => SUBSTRATE PROCESSING APPARATUS
[patent_app_type] => utility
[patent_app_number] => 17/213065
[patent_app_country] => US
[patent_app_date] => 2021-03-25
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 5619
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -9
[patent_words_short_claim] => 137
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17213065
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/213065 | SUBSTRATE PROCESSING APPARATUS | Mar 24, 2021 | Abandoned |
Array
(
[id] => 16951660
[patent_doc_number] => 20210210352
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2021-07-08
[patent_title] => CORRELATION BETWEEN CONDUCTIVITY AND PH MEASUREMENTS FOR KOH TEXTURING SOLUTIONS AND ADDITIVES
[patent_app_type] => utility
[patent_app_number] => 17/209299
[patent_app_country] => US
[patent_app_date] => 2021-03-23
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 5770
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -19
[patent_words_short_claim] => 219
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17209299
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/209299 | CORRELATION BETWEEN CONDUCTIVITY AND PH MEASUREMENTS FOR KOH TEXTURING SOLUTIONS AND ADDITIVES | Mar 22, 2021 | Pending |
Array
(
[id] => 17881781
[patent_doc_number] => 20220297258
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2022-09-22
[patent_title] => SUBSTRATE POLISHING SIMULTANEOUSLY OVER MULTIPLE MINI PLATENS
[patent_app_type] => utility
[patent_app_number] => 17/204832
[patent_app_country] => US
[patent_app_date] => 2021-03-17
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 8128
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 56
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17204832
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/204832 | SUBSTRATE POLISHING SIMULTANEOUSLY OVER MULTIPLE MINI PLATENS | Mar 16, 2021 | Abandoned |
Array
(
[id] => 17100092
[patent_doc_number] => 20210287883
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2021-09-16
[patent_title] => HOLDING METHOD OF EDGE RING, PLASMA PROCESSING APPARATUS, AND SUBSTRATE PROCESSING SYSTEM
[patent_app_type] => utility
[patent_app_number] => 17/189858
[patent_app_country] => US
[patent_app_date] => 2021-03-02
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 10194
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -9
[patent_words_short_claim] => 164
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17189858
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/189858 | Holding method of edge ring, plasma processing apparatus, and substrate processing system | Mar 1, 2021 | Issued |
Array
(
[id] => 20441500
[patent_doc_number] => 12512342
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2025-12-30
[patent_title] => Substrate treating apparatus
[patent_app_type] => utility
[patent_app_number] => 17/182535
[patent_app_country] => US
[patent_app_date] => 2021-02-23
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 21
[patent_figures_cnt] => 24
[patent_no_of_words] => 26774
[patent_no_of_claims] => 19
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 468
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17182535
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/182535 | Substrate treating apparatus | Feb 22, 2021 | Issued |
Array
(
[id] => 19277278
[patent_doc_number] => 12027410
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2024-07-02
[patent_title] => Edge ring arrangement with moveable edge rings
[patent_app_type] => utility
[patent_app_number] => 17/181571
[patent_app_country] => US
[patent_app_date] => 2021-02-22
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 18
[patent_figures_cnt] => 26
[patent_no_of_words] => 7869
[patent_no_of_claims] => 18
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 183
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17181571
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/181571 | Edge ring arrangement with moveable edge rings | Feb 21, 2021 | Issued |
Array
(
[id] => 17055742
[patent_doc_number] => 20210265176
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2021-08-26
[patent_title] => SUBSTRATE PROCESSING APPARATUS AND METHOD FOR FABRICATING CATALYST PROCESSING MEMBER
[patent_app_type] => utility
[patent_app_number] => 17/180394
[patent_app_country] => US
[patent_app_date] => 2021-02-19
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 9532
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -7
[patent_words_short_claim] => 136
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17180394
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/180394 | SUBSTRATE PROCESSING APPARATUS AND METHOD FOR FABRICATING CATALYST PROCESSING MEMBER | Feb 18, 2021 | Abandoned |