Search

Li Liu

Examiner (ID: 19142, Phone: (571)270-5363 , Office: P/2666 )

Most Active Art Unit
2666
Art Unit(s)
2636, 2624, 2634, 2613, 2665, 2666
Total Applications
2203
Issued Applications
1778
Pending Applications
82
Abandoned Applications
390

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 18729301 [patent_doc_number] => 20230343597 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-10-26 [patent_title] => STRUCTURE MANUFACTURING METHOD AND STRUCTURE MANUFACTURING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/799406 [patent_app_country] => US [patent_app_date] => 2021-02-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 32840 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 71 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17799406 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/799406
STRUCTURE MANUFACTURING METHOD AND STRUCTURE MANUFACTURING APPARATUS Feb 11, 2021 Abandoned
Array ( [id] => 18213231 [patent_doc_number] => 20230059495 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-02-23 [patent_title] => Optimization of Radiofrequency Signal Ground Return in Plasma Processing System [patent_app_type] => utility [patent_app_number] => 17/793366 [patent_app_country] => US [patent_app_date] => 2021-01-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 16159 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -20 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17793366 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/793366
Optimization of Radiofrequency Signal Ground Return in Plasma Processing System Jan 29, 2021 Pending
Array ( [id] => 16850545 [patent_doc_number] => 20210151290 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-05-20 [patent_title] => Method and Apparatus for Anisotropic Pattern Etching and Treatment [patent_app_type] => utility [patent_app_number] => 17/163248 [patent_app_country] => US [patent_app_date] => 2021-01-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10738 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 167 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17163248 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/163248
Method and apparatus for anisotropic pattern etching and treatment Jan 28, 2021 Issued
Array ( [id] => 16951671 [patent_doc_number] => 20210210363 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-07-08 [patent_title] => SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/141670 [patent_app_country] => US [patent_app_date] => 2021-01-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11090 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 159 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17141670 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/141670
Substrate processing apparatus Jan 4, 2021 Issued
Array ( [id] => 16936407 [patent_doc_number] => 20210202296 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-07-01 [patent_title] => METHOD FOR LIFTING SUBSTRATE AND APPARATUS FOR TREATING SUBSTRATE [patent_app_type] => utility [patent_app_number] => 17/138427 [patent_app_country] => US [patent_app_date] => 2020-12-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6306 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 135 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17138427 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/138427
METHOD FOR LIFTING SUBSTRATE AND APPARATUS FOR TREATING SUBSTRATE Dec 29, 2020 Abandoned
Array ( [id] => 17262661 [patent_doc_number] => 20210375646 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-12-02 [patent_title] => GAS INJECTOR FOR SEMICONDUCTOR MANUFACTURING CHAMBER [patent_app_type] => utility [patent_app_number] => 17/110817 [patent_app_country] => US [patent_app_date] => 2020-12-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 2580 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -5 [patent_words_short_claim] => 82 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17110817 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/110817
GAS INJECTOR FOR SEMICONDUCTOR MANUFACTURING CHAMBER Dec 2, 2020 Abandoned
Array ( [id] => 16677328 [patent_doc_number] => 20210066094 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-03-04 [patent_title] => SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/095954 [patent_app_country] => US [patent_app_date] => 2020-11-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11636 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -6 [patent_words_short_claim] => 436 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17095954 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/095954
Substrate processing apparatus Nov 11, 2020 Issued
Array ( [id] => 16809944 [patent_doc_number] => 20210132499 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-05-06 [patent_title] => APPARATUS AND METHOD FOR TREATING SUBSTRATE [patent_app_type] => utility [patent_app_number] => 17/084903 [patent_app_country] => US [patent_app_date] => 2020-10-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8928 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -6 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17084903 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/084903
APPARATUS AND METHOD FOR TREATING SUBSTRATE Oct 29, 2020 Abandoned
Array ( [id] => 16812062 [patent_doc_number] => 20210134617 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-05-06 [patent_title] => SUBSTRATE TREATMENT APPARATUS [patent_app_type] => utility [patent_app_number] => 17/079439 [patent_app_country] => US [patent_app_date] => 2020-10-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5321 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 76 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17079439 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/079439
SUBSTRATE TREATMENT APPARATUS Oct 23, 2020 Abandoned
Array ( [id] => 20189769 [patent_doc_number] => 12400892 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-08-26 [patent_title] => High throughput polishing modules and modular polishing systems [patent_app_type] => utility [patent_app_number] => 17/076315 [patent_app_country] => US [patent_app_date] => 2020-10-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 19 [patent_no_of_words] => 11107 [patent_no_of_claims] => 24 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 392 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17076315 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/076315
High throughput polishing modules and modular polishing systems Oct 20, 2020 Issued
Array ( [id] => 16936328 [patent_doc_number] => 20210202217 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-07-01 [patent_title] => EDGE RING, SUBSTRATE PROCESSING APPARATUS HAVING THE SAME AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE APPARATUS [patent_app_type] => utility [patent_app_number] => 17/027460 [patent_app_country] => US [patent_app_date] => 2020-09-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6127 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 230 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17027460 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/027460
Edge ring, substrate processing apparatus having the same and method of manufacturing semiconductor device using the apparatus Sep 20, 2020 Issued
Array ( [id] => 17485924 [patent_doc_number] => 20220093428 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-03-24 [patent_title] => ATOMIC OXYGEN DETECTION IN SEMICONDUCTOR PROCESSING CHAMBERS [patent_app_type] => utility [patent_app_number] => 17/026905 [patent_app_country] => US [patent_app_date] => 2020-09-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8685 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 39 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17026905 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/026905
ATOMIC OXYGEN DETECTION IN SEMICONDUCTOR PROCESSING CHAMBERS Sep 20, 2020 Pending
Array ( [id] => 17477338 [patent_doc_number] => 20220084842 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-03-17 [patent_title] => ANTIFRAGILE SYSTEMS FOR SEMICONDUCTOR PROCESSING EQUIPMENT USING MULTIPLE SPECIAL SENSORS AND ALGORITHMS [patent_app_type] => utility [patent_app_number] => 17/019061 [patent_app_country] => US [patent_app_date] => 2020-09-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6521 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 52 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17019061 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/019061
ANTIFRAGILE SYSTEMS FOR SEMICONDUCTOR PROCESSING EQUIPMENT USING MULTIPLE SPECIAL SENSORS AND ALGORITHMS Sep 10, 2020 Pending
Array ( [id] => 16692079 [patent_doc_number] => 20210074558 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-03-11 [patent_title] => SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/016881 [patent_app_country] => US [patent_app_date] => 2020-09-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4644 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 106 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17016881 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/016881
Substrate processing apparatus Sep 9, 2020 Issued
Array ( [id] => 18991082 [patent_doc_number] => 20240063051 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-02-22 [patent_title] => SUBSTRATE SUPPORT UNIT, AND APPARATUS AND METHOD FOR DEPOSITING A LAYER USING THE SAME [patent_app_type] => utility [patent_app_number] => 17/754560 [patent_app_country] => US [patent_app_date] => 2020-09-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4101 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 82 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17754560 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/754560
SUBSTRATE SUPPORT UNIT, AND APPARATUS AND METHOD FOR DEPOSITING A LAYER USING THE SAME Sep 7, 2020 Pending
Array ( [id] => 16528741 [patent_doc_number] => 20200402822 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-12-24 [patent_title] => PLASMA PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/013325 [patent_app_country] => US [patent_app_date] => 2020-09-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5779 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -10 [patent_words_short_claim] => 132 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17013325 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/013325
Plasma processing apparatus Sep 3, 2020 Issued
Array ( [id] => 18669914 [patent_doc_number] => 11776826 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-10-03 [patent_title] => Apparatus and method for treating substrate [patent_app_type] => utility [patent_app_number] => 16/999836 [patent_app_country] => US [patent_app_date] => 2020-08-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 12 [patent_no_of_words] => 9547 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 225 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16999836 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/999836
Apparatus and method for treating substrate Aug 20, 2020 Issued
Array ( [id] => 17417008 [patent_doc_number] => 20220051912 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-02-17 [patent_title] => GAS FLOW CONTROL DURING SEMICONDUCTOR FABRICATION [patent_app_type] => utility [patent_app_number] => 16/991168 [patent_app_country] => US [patent_app_date] => 2020-08-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7439 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16991168 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/991168
GAS FLOW CONTROL DURING SEMICONDUCTOR FABRICATION Aug 11, 2020 Pending
Array ( [id] => 16586067 [patent_doc_number] => 20210020469 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-01-21 [patent_title] => SEMICONDUCTOR VAPOR ETCHING DEVICE WITH INTERMEDIATE CHAMBER [patent_app_type] => utility [patent_app_number] => 16/930867 [patent_app_country] => US [patent_app_date] => 2020-07-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4316 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -21 [patent_words_short_claim] => 43 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16930867 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/930867
SEMICONDUCTOR VAPOR ETCHING DEVICE WITH INTERMEDIATE CHAMBER Jul 15, 2020 Abandoned
Array ( [id] => 16617129 [patent_doc_number] => 20210035782 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-02-04 [patent_title] => SUBSTRATE SUPPORTING DEVICE AND SUBSTRATE TREATING APPARATUS INCLUDING THE SAME [patent_app_type] => utility [patent_app_number] => 16/924513 [patent_app_country] => US [patent_app_date] => 2020-07-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5948 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 111 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16924513 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/924513
SUBSTRATE SUPPORTING DEVICE AND SUBSTRATE TREATING APPARATUS INCLUDING THE SAME Jul 8, 2020 Abandoned
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