Search

Li Liu

Examiner (ID: 19142, Phone: (571)270-5363 , Office: P/2666 )

Most Active Art Unit
2666
Art Unit(s)
2636, 2624, 2634, 2613, 2665, 2666
Total Applications
2203
Issued Applications
1778
Pending Applications
82
Abandoned Applications
390

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 16560353 [patent_doc_number] => 20210005502 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-01-07 [patent_title] => STAGE, SUBSTRATE PROCESSING APPARATUS AND STAGE ASSEMBLING METHOD [patent_app_type] => utility [patent_app_number] => 16/909228 [patent_app_country] => US [patent_app_date] => 2020-06-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9139 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 149 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16909228 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/909228
STAGE, SUBSTRATE PROCESSING APPARATUS AND STAGE ASSEMBLING METHOD Jun 22, 2020 Abandoned
Array ( [id] => 20175896 [patent_doc_number] => 12394651 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-08-19 [patent_title] => High throughput polishing modules and modular polishing systems [patent_app_type] => utility [patent_app_number] => 16/871588 [patent_app_country] => US [patent_app_date] => 2020-05-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 19 [patent_no_of_words] => 12574 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 562 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16871588 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/871588
High throughput polishing modules and modular polishing systems May 10, 2020 Issued
Array ( [id] => 20175896 [patent_doc_number] => 12394651 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-08-19 [patent_title] => High throughput polishing modules and modular polishing systems [patent_app_type] => utility [patent_app_number] => 16/871588 [patent_app_country] => US [patent_app_date] => 2020-05-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 19 [patent_no_of_words] => 12574 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 562 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16871588 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/871588
High throughput polishing modules and modular polishing systems May 10, 2020 Issued
Array ( [id] => 20175896 [patent_doc_number] => 12394651 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-08-19 [patent_title] => High throughput polishing modules and modular polishing systems [patent_app_type] => utility [patent_app_number] => 16/871588 [patent_app_country] => US [patent_app_date] => 2020-05-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 19 [patent_no_of_words] => 12574 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 562 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16871588 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/871588
High throughput polishing modules and modular polishing systems May 10, 2020 Issued
Array ( [id] => 20175896 [patent_doc_number] => 12394651 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-08-19 [patent_title] => High throughput polishing modules and modular polishing systems [patent_app_type] => utility [patent_app_number] => 16/871588 [patent_app_country] => US [patent_app_date] => 2020-05-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 19 [patent_no_of_words] => 12574 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 562 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16871588 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/871588
High throughput polishing modules and modular polishing systems May 10, 2020 Issued
Array ( [id] => 20692042 [patent_doc_number] => 12622217 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2026-05-05 [patent_title] => High throughput polishing modules and modular polishing systems [patent_app_type] => utility [patent_app_number] => 16/851012 [patent_app_country] => US [patent_app_date] => 2020-04-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 19 [patent_no_of_words] => 7923 [patent_no_of_claims] => 24 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 371 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16851012 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/851012
High throughput polishing modules and modular polishing systems Apr 15, 2020 Issued
Array ( [id] => 16364476 [patent_doc_number] => 20200321227 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-10-08 [patent_title] => SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE TRANSFER APPARATUS AND METHOD [patent_app_type] => utility [patent_app_number] => 16/842087 [patent_app_country] => US [patent_app_date] => 2020-04-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6522 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -8 [patent_words_short_claim] => 66 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16842087 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/842087
Substrate processing system and substrate transfer apparatus and method Apr 6, 2020 Issued
Array ( [id] => 16347984 [patent_doc_number] => 20200312635 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-10-01 [patent_title] => PLASMA FOCUS RING OF SEMICONDUCTOR ETCHING APPARATUS AND MANUFACTURING METHOD THEREOF [patent_app_type] => utility [patent_app_number] => 16/835104 [patent_app_country] => US [patent_app_date] => 2020-03-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3877 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -4 [patent_words_short_claim] => 130 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16835104 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/835104
PLASMA FOCUS RING OF SEMICONDUCTOR ETCHING APPARATUS AND MANUFACTURING METHOD THEREOF Mar 29, 2020 Abandoned
Array ( [id] => 17795513 [patent_doc_number] => 20220254605 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-08-11 [patent_title] => CERAMIC AIR INLET RADIO FREQUENCY CONNECTION TYPE CLEANING DEVICE [patent_app_type] => utility [patent_app_number] => 17/629362 [patent_app_country] => US [patent_app_date] => 2020-02-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8200 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 234 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17629362 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/629362
Ceramic air inlet radio frequency connection type cleaning device Feb 28, 2020 Issued
Array ( [id] => 17582862 [patent_doc_number] => 20220139717 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-05-05 [patent_title] => LARGE AREA METROLOGY AND PROCESS CONTROL FOR ANISOTROPIC CHEMICAL ETCHING [patent_app_type] => utility [patent_app_number] => 17/433777 [patent_app_country] => US [patent_app_date] => 2020-02-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 14048 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -21 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17433777 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/433777
LARGE AREA METROLOGY AND PROCESS CONTROL FOR ANISOTROPIC CHEMICAL ETCHING Feb 23, 2020 Abandoned
Array ( [id] => 18166887 [patent_doc_number] => 20230033493 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-02-02 [patent_title] => LIQUID CHEMICAL PROCESSING DEVICE [patent_app_type] => utility [patent_app_number] => 17/758667 [patent_app_country] => US [patent_app_date] => 2020-01-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6525 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 112 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17758667 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/758667
LIQUID CHEMICAL PROCESSING DEVICE Jan 16, 2020 Pending
Array ( [id] => 17579252 [patent_doc_number] => 20220136107 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-05-05 [patent_title] => SHOWERHEAD WITH CONFIGURABLE GAS OUTLETS [patent_app_type] => utility [patent_app_number] => 17/424449 [patent_app_country] => US [patent_app_date] => 2020-01-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3639 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -25 [patent_words_short_claim] => 81 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17424449 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/424449
SHOWERHEAD WITH CONFIGURABLE GAS OUTLETS Jan 14, 2020 Pending
Array ( [id] => 18751477 [patent_doc_number] => 11810797 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-11-07 [patent_title] => Wetting processing apparatus and operation method thereof [patent_app_type] => utility [patent_app_number] => 16/722438 [patent_app_country] => US [patent_app_date] => 2019-12-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 16 [patent_no_of_words] => 13035 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 331 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16722438 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/722438
Wetting processing apparatus and operation method thereof Dec 19, 2019 Issued
Array ( [id] => 17481236 [patent_doc_number] => 20220088740 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-03-24 [patent_title] => SEMICONDUCTOR WAFER PHOTOELECTROCHEMICAL MECHANICAL POLISHING PROCESSING DEVICE AND PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 17/413939 [patent_app_country] => US [patent_app_date] => 2019-12-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6779 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 76 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17413939 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/413939
SEMICONDUCTOR WAFER PHOTOELECTROCHEMICAL MECHANICAL POLISHING PROCESSING DEVICE AND PROCESSING METHOD Dec 12, 2019 Abandoned
Array ( [id] => 15969381 [patent_doc_number] => 20200168442 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-05-28 [patent_title] => FOCUS RING HEIGHT ADJUSTING DEVICE AND WAFER ETCHING APPARATUS INCLUDING THE SAME [patent_app_type] => utility [patent_app_number] => 16/682338 [patent_app_country] => US [patent_app_date] => 2019-11-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4932 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -8 [patent_words_short_claim] => 105 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16682338 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/682338
FOCUS RING HEIGHT ADJUSTING DEVICE AND WAFER ETCHING APPARATUS INCLUDING THE SAME Nov 12, 2019 Abandoned
Array ( [id] => 15560659 [patent_doc_number] => 20200064741 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-02-27 [patent_title] => SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 16/666717 [patent_app_country] => US [patent_app_date] => 2019-10-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 13436 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -6 [patent_words_short_claim] => 176 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16666717 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/666717
Substrate processing apparatus Oct 28, 2019 Issued
Array ( [id] => 16777093 [patent_doc_number] => 20210114170 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-04-22 [patent_title] => CONTAINER FOR STORING SLURRY HAVING FUMED SILICA PARTICLES AND CMP APPARATUS HAVING THE SAME [patent_app_type] => utility [patent_app_number] => 16/660736 [patent_app_country] => US [patent_app_date] => 2019-10-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3866 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 74 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16660736 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/660736
CONTAINER FOR STORING SLURRY HAVING FUMED SILICA PARTICLES AND CMP APPARATUS HAVING THE SAME Oct 21, 2019 Abandoned
Array ( [id] => 18525729 [patent_doc_number] => 11712710 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-08-01 [patent_title] => Substrate processing apparatus and substrate processing method [patent_app_type] => utility [patent_app_number] => 16/528757 [patent_app_country] => US [patent_app_date] => 2019-08-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 14 [patent_no_of_words] => 12113 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 410 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16528757 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/528757
Substrate processing apparatus and substrate processing method Jul 31, 2019 Issued
Array ( [id] => 16973553 [patent_doc_number] => 11069533 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-07-20 [patent_title] => CMP system and method of use [patent_app_type] => utility [patent_app_number] => 16/515938 [patent_app_country] => US [patent_app_date] => 2019-07-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 31 [patent_figures_cnt] => 43 [patent_no_of_words] => 12409 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 65 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16515938 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/515938
CMP system and method of use Jul 17, 2019 Issued
Array ( [id] => 18073655 [patent_doc_number] => 11532493 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-12-20 [patent_title] => Wet bench and chemical treatment method using the same [patent_app_type] => utility [patent_app_number] => 16/457416 [patent_app_country] => US [patent_app_date] => 2019-06-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 6335 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 276 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16457416 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/457416
Wet bench and chemical treatment method using the same Jun 27, 2019 Issued
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