| Application number | Title of the application | Filing Date | Status |
|---|
Array
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[patent_doc_number] => 05928817
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[patent_issue_date] => 1999-07-27
[patent_title] => 'Method of protecting an EUV mask from damage and contamination'
[patent_app_type] => 1
[patent_app_number] => 8/995867
[patent_app_country] => US
[patent_app_date] => 1997-12-22
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[rel_patent_id] =>[rel_patent_doc_number] =>) 08/995867 | Method of protecting an EUV mask from damage and contamination | Dec 21, 1997 | Issued |
| 08/995018 | METHOD FOR THE MEASUREMENT OF ABERRATION OF OPTICAL PROJECTION SYSTEM | Dec 18, 1997 | Abandoned |
| 08/945304 | DEEP PATTERN MICRO-LITHOGRAPHY | Dec 17, 1997 | Abandoned |
Array
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[patent_issue_date] => 1999-08-03
[patent_title] => 'Phase-shifting mask structure'
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Array
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[patent_issue_date] => 2000-12-19
[patent_title] => 'Mask blank and method of producing mask'
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Array
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[patent_kind] => NA
[patent_issue_date] => 1999-03-02
[patent_title] => 'Process for producing a structured mask'
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Array
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Array
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Array
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[rel_patent_id] =>[rel_patent_doc_number] =>) 08/975253 | X-ray absorber in X-ray mask and method for manufacturing the same | Nov 20, 1997 | Issued |
Array
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[patent_issue_date] => 1999-07-13
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[rel_patent_id] =>[rel_patent_doc_number] =>) 08/972183 | Selective deposition mask and method for making the same | Nov 17, 1997 | Issued |
Array
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[id] => 3930244
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[patent_issue_date] => 1999-07-27
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[rel_patent_id] =>[rel_patent_doc_number] =>) 08/971054 | Proximity masking device for near-field optical lithography | Nov 13, 1997 | Issued |
Array
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[id] => 3931615
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[patent_issue_date] => 1999-10-26
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[rel_patent_id] =>[rel_patent_doc_number] =>) 08/966701 | Phase-shifting mask and a manufacturing method thereof | Nov 9, 1997 | Issued |
| 08/966353 | METHOD OF DRIVING MASK STAGE AND METHOD OF MASK ALIGNMENT | Nov 6, 1997 | Abandoned |
Array
(
[id] => 1541870
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Array
(
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[rel_patent_id] =>[rel_patent_doc_number] =>) 08/964010 | Phase shifting mask and a manufacturing method therefor | Nov 3, 1997 | Issued |
| 08/960211 | PHOTOMASK AND PROJECTION EXPOSURE APPARATUS | Oct 28, 1997 | Abandoned |
Array
(
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Array
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Array
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Array
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