Lisa A. Kilday

Array ( [id] => 6209452 [patent_doc_number] => 20020072248 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-06-13 [patent_title] => 'Process of forming a low dielectric constant material' [patent_app_type] => new [patent_app_number] => 09/847985 [patent_app_country] => US [patent_app_date] => 2001-05-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 1553 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 87 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0072/20020072248.pdf [firstpage_image] =>[orig_patent_app_number] => 09847985 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1402612 [patent_doc_number] => 06534418 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2003-03-18 [patent_title] => 'Use of silicon containing imaging layer to define sub-resolution gate structures' [patent_app_type] => B1 [patent_app_number] => 09/845656 [patent_app_country] => US [patent_app_date] => 2001-04-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 4 [patent_no_of_words] => 2352 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 64 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/534/06534418.pdf [firstpage_image] =>[orig_patent_app_number] => 09845656 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7014631 [patent_doc_number] => 20010051445 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2001-12-13 [patent_title] => 'Semiconductor device and method of manufacturing the same' [patent_app_type] => new [patent_app_number] => 09/843725 [patent_app_country] => US [patent_app_date] => 2001-04-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 5980 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 118 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0051/20010051445.pdf [firstpage_image] =>[orig_patent_app_number] => 09843725 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7000673 [patent_doc_number] => 20010053614 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2001-12-20 [patent_title] => 'Semiconductor device and method of manufacturing the same' [patent_app_type] => new [patent_app_number] => 09/843726 [patent_app_country] => US [patent_app_date] => 2001-04-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 5604 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 78 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0053/20010053614.pdf [firstpage_image] =>[orig_patent_app_number] => 09843726 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1291236 [patent_doc_number] => 06630413 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-10-07 [patent_title] => 'CVD syntheses of silicon nitride materials' [patent_app_type] => B2 [patent_app_number] => 09/843456 [patent_app_country] => US [patent_app_date] => 2001-04-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7532 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 127 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/630/06630413.pdf [firstpage_image] =>[orig_patent_app_number] => 09843456 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6242532 [patent_doc_number] => 20020045359 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-04-18 [patent_title] => 'Fluorine-containing materials and processes' [patent_app_type] => new [patent_app_number] => 09/841525 [patent_app_country] => US [patent_app_date] => 2001-04-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9298 [patent_no_of_claims] => 47 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 73 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0045/20020045359.pdf [firstpage_image] =>[orig_patent_app_number] => 09841525 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6898622 [patent_doc_number] => 20010046787 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2001-11-29 [patent_title] => 'Method for forming a dielectric on a semiconductor substrate' [patent_app_type] => new [patent_app_number] => 09/836946 [patent_app_country] => US [patent_app_date] => 2001-04-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 2 [patent_no_of_words] => 1997 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 34 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0046/20010046787.pdf [firstpage_image] =>[orig_patent_app_number] => 09836946 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1418779 [patent_doc_number] => 06514880 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-02-04 [patent_title] => 'Siloxan polymer film on semiconductor substrate and method for forming same' [patent_app_type] => B2 [patent_app_number] => 09/827616 [patent_app_country] => US [patent_app_date] => 2001-04-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 2 [patent_no_of_words] => 6327 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 150 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/514/06514880.pdf [firstpage_image] =>[orig_patent_app_number] => 09827616 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6921622 [patent_doc_number] => 20010029107 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2001-10-11 [patent_title] => 'Resist pattern forming method and semiconductor device manufacturing method' [patent_app_type] => new [patent_app_number] => 09/826006 [patent_app_country] => US [patent_app_date] => 2001-04-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 5340 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 47 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0029/20010029107.pdf [firstpage_image] =>[orig_patent_app_number] => 09826006 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7645635 [patent_doc_number] => 06472334 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2002-10-29 [patent_title] => 'Film forming method, semiconductor device manufacturing method, and semiconductor device' [patent_app_type] => B2 [patent_app_number] => 09/824106 [patent_app_country] => US [patent_app_date] => 2001-04-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 9 [patent_no_of_words] => 5223 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 16 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/472/06472334.pdf [firstpage_image] =>[orig_patent_app_number] => 09824106 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1600356 [patent_doc_number] => 06475867 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2002-11-05 [patent_title] => 'Method of forming integrated circuit features by oxidation of titanium hard mask' [patent_app_type] => B1 [patent_app_number] => 09/824416 [patent_app_country] => US [patent_app_date] => 2001-04-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 3 [patent_no_of_words] => 2139 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 92 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/475/06475867.pdf [firstpage_image] =>[orig_patent_app_number] => 09824416 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5906841 [patent_doc_number] => 20020142570 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-10-03 [patent_title] => 'Method for fabrication of a high capacitance interpoly dielectric' [patent_app_type] => new [patent_app_number] => 09/821365 [patent_app_country] => US [patent_app_date] => 2001-03-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 2213 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 16 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0142/20020142570.pdf [firstpage_image] =>[orig_patent_app_number] => 09821365 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1450153 [patent_doc_number] => 06455445 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2002-09-24 [patent_title] => 'Silicone polymer insulation film on semiconductor substrate and method for forming the film' [patent_app_type] => B2 [patent_app_number] => 09/820075 [patent_app_country] => US [patent_app_date] => 2001-03-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 7684 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 206 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/455/06455445.pdf [firstpage_image] =>[orig_patent_app_number] => 09820075 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1523773 [patent_doc_number] => 06352930 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2002-03-05 [patent_title] => 'Bilayer anti-reflective coating and etch hard mask' [patent_app_type] => B1 [patent_app_number] => 09/814636 [patent_app_country] => US [patent_app_date] => 2001-03-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 6 [patent_no_of_words] => 3031 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 136 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/352/06352930.pdf [firstpage_image] =>[orig_patent_app_number] => 09814636 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6921624 [patent_doc_number] => 20010029109 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2001-10-11 [patent_title] => 'Film-forming surface reforming method and semiconductor device manufacturing method' [patent_app_type] => new [patent_app_number] => 09/808016 [patent_app_country] => US [patent_app_date] => 2001-03-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 17 [patent_figures_cnt] => 17 [patent_no_of_words] => 10138 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 47 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0029/20010029109.pdf [firstpage_image] =>[orig_patent_app_number] => 09808016 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5844650 [patent_doc_number] => 20020132494 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-09-19 [patent_title] => 'Method for forming low dielectric constant layer' [patent_app_type] => new [patent_app_number] => 09/803906 [patent_app_country] => US [patent_app_date] => 2001-03-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 1732 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 51 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0132/20020132494.pdf [firstpage_image] =>[orig_patent_app_number] => 09803906 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1297607 [patent_doc_number] => 06627549 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-09-30 [patent_title] => 'Methods for making nearly planar dielectric films in integrated circuits' [patent_app_type] => B2 [patent_app_number] => 09/801265 [patent_app_country] => US [patent_app_date] => 2001-03-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 18 [patent_no_of_words] => 5199 [patent_no_of_claims] => 28 [patent_no_of_ind_claims] => 15 [patent_words_short_claim] => 82 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/627/06627549.pdf [firstpage_image] =>[orig_patent_app_number] => 09801265 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7629875 [patent_doc_number] => 06818481 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2004-11-16 [patent_title] => 'Method to manufacture a buried electrode PCRAM cell' [patent_app_type] => B2 [patent_app_number] => 09/803176 [patent_app_country] => US [patent_app_date] => 2001-03-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 6 [patent_no_of_words] => 1814 [patent_no_of_claims] => 24 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 12 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/818/06818481.pdf [firstpage_image] =>[orig_patent_app_number] => 09803176 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6901552 [patent_doc_number] => 20010023135 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2001-09-20 [patent_title] => 'Rapid thermal etch and rapid thermal oxidation' [patent_app_type] => new [patent_app_number] => 09/793248 [patent_app_country] => US [patent_app_date] => 2001-02-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 1 [patent_figures_cnt] => 1 [patent_no_of_words] => 3277 [patent_no_of_claims] => 27 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 52 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0023/20010023135.pdf [firstpage_image] =>[orig_patent_app_number] => 09793248 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1418801 [patent_doc_number] => 06514882 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-02-04 [patent_title] => 'Aggregate dielectric layer to reduce nitride consumption' [patent_app_type] => B2 [patent_app_number] => 09/789455 [patent_app_country] => US [patent_app_date] => 2001-02-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 4 [patent_no_of_words] => 2769 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 41 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/514/06514882.pdf [firstpage_image] =>[orig_patent_app_number] => 09789455 [rel_patent_id] =>[rel_patent_doc_number] =>)