Search

Margaret D. Klunk

Examiner (ID: 2861, Phone: (571)270-5513 , Office: P/1716 )

Most Active Art Unit
1716
Art Unit(s)
1716
Total Applications
484
Issued Applications
186
Pending Applications
68
Abandoned Applications
249

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 19658906 [patent_doc_number] => 20240425971 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-12-26 [patent_title] => SYSTEM AND METHOD FOR CONTROLLING FILM THICKNESS, AND FILM DEPOSITION SYSTEM AND METHOD USING SAME [patent_app_type] => utility [patent_app_number] => 18/825717 [patent_app_country] => US [patent_app_date] => 2024-09-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 18065 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 135 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18825717 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/825717
SYSTEM AND METHOD FOR CONTROLLING FILM THICKNESS, AND FILM DEPOSITION SYSTEM AND METHOD USING SAME Sep 4, 2024 Pending
Array ( [id] => 19384570 [patent_doc_number] => 20240274440 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-08-15 [patent_title] => CMP System and Method of Use [patent_app_type] => utility [patent_app_number] => 18/631589 [patent_app_country] => US [patent_app_date] => 2024-04-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12462 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 82 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18631589 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/631589
CMP system and method of use Apr 9, 2024 Issued
Array ( [id] => 19741100 [patent_doc_number] => 12217944 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-02-04 [patent_title] => High power cable for heated components in RF environment [patent_app_type] => utility [patent_app_number] => 18/526215 [patent_app_country] => US [patent_app_date] => 2023-12-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 5 [patent_no_of_words] => 4982 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 177 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18526215 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/526215
High power cable for heated components in RF environment Nov 30, 2023 Issued
Array ( [id] => 19049930 [patent_doc_number] => 20240091899 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-03-21 [patent_title] => POLISHING APPARATUS [patent_app_type] => utility [patent_app_number] => 18/521813 [patent_app_country] => US [patent_app_date] => 2023-11-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 15933 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 108 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18521813 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/521813
POLISHING APPARATUS Nov 27, 2023 Pending
Array ( [id] => 19049930 [patent_doc_number] => 20240091899 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-03-21 [patent_title] => POLISHING APPARATUS [patent_app_type] => utility [patent_app_number] => 18/521813 [patent_app_country] => US [patent_app_date] => 2023-11-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 15933 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 108 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18521813 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/521813
POLISHING APPARATUS Nov 27, 2023 Pending
Array ( [id] => 19034638 [patent_doc_number] => 20240084453 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-03-14 [patent_title] => CARRIER DEVICE AND SEMICONDUCTOR PROCESSING EQUIPMENT [patent_app_type] => utility [patent_app_number] => 18/516653 [patent_app_country] => US [patent_app_date] => 2023-11-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6698 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 192 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18516653 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/516653
CARRIER DEVICE AND SEMICONDUCTOR PROCESSING EQUIPMENT Nov 20, 2023 Pending
Array ( [id] => 19034638 [patent_doc_number] => 20240084453 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-03-14 [patent_title] => CARRIER DEVICE AND SEMICONDUCTOR PROCESSING EQUIPMENT [patent_app_type] => utility [patent_app_number] => 18/516653 [patent_app_country] => US [patent_app_date] => 2023-11-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6698 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 192 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18516653 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/516653
CARRIER DEVICE AND SEMICONDUCTOR PROCESSING EQUIPMENT Nov 20, 2023 Pending
Array ( [id] => 19835680 [patent_doc_number] => 20250087466 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2025-03-13 [patent_title] => PROCESSING APPARATUS AND PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 18/381647 [patent_app_country] => US [patent_app_date] => 2023-10-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3707 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -14 [patent_words_short_claim] => 32 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18381647 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/381647
PROCESSING APPARATUS AND PROCESSING METHOD Oct 18, 2023 Pending
Array ( [id] => 19038104 [patent_doc_number] => 20240087919 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-03-14 [patent_title] => SUBSTRATE PROCESSING APPARATUS AND PROTECTIVE LAYER FORMING METHOD [patent_app_type] => utility [patent_app_number] => 18/458866 [patent_app_country] => US [patent_app_date] => 2023-08-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9826 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 49 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18458866 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/458866
SUBSTRATE PROCESSING APPARATUS AND PROTECTIVE LAYER FORMING METHOD Aug 29, 2023 Pending
Array ( [id] => 19007734 [patent_doc_number] => 20240071805 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-02-29 [patent_title] => METHOD, ASSEMBLY AND SYSTEM FOR GAS INJECTION [patent_app_type] => utility [patent_app_number] => 18/238577 [patent_app_country] => US [patent_app_date] => 2023-08-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7657 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 85 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18238577 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/238577
METHOD, ASSEMBLY AND SYSTEM FOR GAS INJECTION Aug 27, 2023 Pending
Array ( [id] => 19007734 [patent_doc_number] => 20240071805 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-02-29 [patent_title] => METHOD, ASSEMBLY AND SYSTEM FOR GAS INJECTION [patent_app_type] => utility [patent_app_number] => 18/238577 [patent_app_country] => US [patent_app_date] => 2023-08-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7657 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 85 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18238577 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/238577
METHOD, ASSEMBLY AND SYSTEM FOR GAS INJECTION Aug 27, 2023 Pending
Array ( [id] => 19452672 [patent_doc_number] => 20240312802 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-09-19 [patent_title] => SUBSTRATE PROCESSING APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE [patent_app_type] => utility [patent_app_number] => 18/447702 [patent_app_country] => US [patent_app_date] => 2023-08-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6899 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 78 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18447702 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/447702
SUBSTRATE PROCESSING APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE Aug 9, 2023 Pending
Array ( [id] => 19452672 [patent_doc_number] => 20240312802 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-09-19 [patent_title] => SUBSTRATE PROCESSING APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE [patent_app_type] => utility [patent_app_number] => 18/447702 [patent_app_country] => US [patent_app_date] => 2023-08-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6899 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 78 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18447702 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/447702
SUBSTRATE PROCESSING APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE Aug 9, 2023 Pending
Array ( [id] => 18743338 [patent_doc_number] => 20230352326 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-11-02 [patent_title] => SUBSTRATE PROCESSING APPARATUS AND PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 18/349666 [patent_app_country] => US [patent_app_date] => 2023-07-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 40320 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 89 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18349666 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/349666
SUBSTRATE PROCESSING APPARATUS AND PROCESSING METHOD Jul 9, 2023 Abandoned
Array ( [id] => 18615753 [patent_doc_number] => 20230282492 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-09-07 [patent_title] => SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE TRANSFER APPARATUS AND METHOD [patent_app_type] => utility [patent_app_number] => 18/197455 [patent_app_country] => US [patent_app_date] => 2023-05-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6544 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 86 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18197455 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/197455
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE TRANSFER APPARATUS AND METHOD May 14, 2023 Pending
Array ( [id] => 18600116 [patent_doc_number] => 20230274917 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-08-31 [patent_title] => CARRIER DEVICE AND SEMICONDUCTOR REACTION CHAMBER [patent_app_type] => utility [patent_app_number] => 18/313027 [patent_app_country] => US [patent_app_date] => 2023-05-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7318 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 261 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18313027 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/313027
CARRIER DEVICE AND SEMICONDUCTOR REACTION CHAMBER May 4, 2023 Pending
Array ( [id] => 19051399 [patent_doc_number] => 20240093368 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-03-21 [patent_title] => EDGE RING, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME [patent_app_type] => utility [patent_app_number] => 18/136070 [patent_app_country] => US [patent_app_date] => 2023-04-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4771 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 77 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18136070 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/136070
EDGE RING, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME Apr 17, 2023 Pending
Array ( [id] => 19615506 [patent_doc_number] => 20240401186 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-12-05 [patent_title] => SYSTEM AND METHOD FOR CONTROLLING FILM THICKNESS, AND FILM DEPOSITION SYSTEM AND METHOD USING SAME [patent_app_type] => utility [patent_app_number] => 18/193253 [patent_app_country] => US [patent_app_date] => 2023-03-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 17898 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -25 [patent_words_short_claim] => 68 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18193253 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/193253
SYSTEM AND METHOD FOR CONTROLLING FILM THICKNESS, AND FILM DEPOSITION SYSTEM AND METHOD USING SAME Mar 29, 2023 Abandoned
Array ( [id] => 19615506 [patent_doc_number] => 20240401186 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-12-05 [patent_title] => SYSTEM AND METHOD FOR CONTROLLING FILM THICKNESS, AND FILM DEPOSITION SYSTEM AND METHOD USING SAME [patent_app_type] => utility [patent_app_number] => 18/193253 [patent_app_country] => US [patent_app_date] => 2023-03-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 17898 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -25 [patent_words_short_claim] => 68 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18193253 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/193253
SYSTEM AND METHOD FOR CONTROLLING FILM THICKNESS, AND FILM DEPOSITION SYSTEM AND METHOD USING SAME Mar 29, 2023 Abandoned
Array ( [id] => 18661241 [patent_doc_number] => 20230307254 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-09-28 [patent_title] => SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 18/175995 [patent_app_country] => US [patent_app_date] => 2023-02-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12469 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -5 [patent_words_short_claim] => 165 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18175995 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/175995
SUBSTRATE PROCESSING APPARATUS Feb 27, 2023 Pending
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