Search

Margaret D. Klunk

Examiner (ID: 377, Phone: (571)270-5513 , Office: P/1716 )

Most Active Art Unit
1716
Art Unit(s)
1716
Total Applications
497
Issued Applications
196
Pending Applications
64
Abandoned Applications
249

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 17793437 [patent_doc_number] => 20220252529 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-08-11 [patent_title] => THERMALLY GUIDED CHEMICAL ETCHING OF A SUBSTRATE AND REAL-TIME MONITORING THEREOF [patent_app_type] => utility [patent_app_number] => 17/728467 [patent_app_country] => US [patent_app_date] => 2022-04-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11867 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -5 [patent_words_short_claim] => 98 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17728467 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/728467
THERMALLY GUIDED CHEMICAL ETCHING OF A SUBSTRATE AND REAL-TIME MONITORING THEREOF Apr 24, 2022 Pending
Array ( [id] => 17917464 [patent_doc_number] => 20220319860 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-10-06 [patent_title] => ETCHING METHOD AND ETCHING PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/707316 [patent_app_country] => US [patent_app_date] => 2022-03-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6696 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 104 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17707316 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/707316
ETCHING METHOD AND ETCHING PROCESSING APPARATUS Mar 28, 2022 Abandoned
Array ( [id] => 17917481 [patent_doc_number] => 20220319877 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-10-06 [patent_title] => SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 17/656315 [patent_app_country] => US [patent_app_date] => 2022-03-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5993 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 99 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17656315 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/656315
Substrate processing apparatus and substrate processing method Mar 23, 2022 Issued
Array ( [id] => 17720662 [patent_doc_number] => 20220213382 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-07-07 [patent_title] => SUBSTRATE PROCESSING DEVICE AND ETCHING LIQUID [patent_app_type] => utility [patent_app_number] => 17/654640 [patent_app_country] => US [patent_app_date] => 2022-03-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12178 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -3 [patent_words_short_claim] => 91 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17654640 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/654640
Substrate processing device and etching liquid Mar 13, 2022 Issued
Array ( [id] => 17870661 [patent_doc_number] => 20220293398 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-09-15 [patent_title] => SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/689392 [patent_app_country] => US [patent_app_date] => 2022-03-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10066 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 91 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17689392 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/689392
SUBSTRATE PROCESSING APPARATUS Mar 7, 2022 Pending
Array ( [id] => 17676597 [patent_doc_number] => 20220189764 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-06-16 [patent_title] => Radiation of Substrates During Processing and Systems Thereof [patent_app_type] => utility [patent_app_number] => 17/653252 [patent_app_country] => US [patent_app_date] => 2022-03-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 14230 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 62 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17653252 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/653252
Radiation of Substrates During Processing and Systems Thereof Mar 1, 2022 Pending
Array ( [id] => 17708554 [patent_doc_number] => 20220208562 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-06-30 [patent_title] => PRESSURE ADJUSTMENT APPARATUS FOR CONTROLLING PRESSURE IN CHAMBER AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME [patent_app_type] => utility [patent_app_number] => 17/562986 [patent_app_country] => US [patent_app_date] => 2021-12-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5428 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 153 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17562986 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/562986
Pressure adjustment apparatus for controlling pressure in chamber and substrate processing apparatus including the same Dec 26, 2021 Issued
Array ( [id] => 20267033 [patent_doc_number] => 12438032 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-10-07 [patent_title] => Chuck pin assembly, and substrate holding apparatus and liquid processing apparatus including same [patent_app_type] => utility [patent_app_number] => 17/554972 [patent_app_country] => US [patent_app_date] => 2021-12-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 1136 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 210 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17554972 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/554972
Chuck pin assembly, and substrate holding apparatus and liquid processing apparatus including same Dec 16, 2021 Issued
Array ( [id] => 17708546 [patent_doc_number] => 20220208554 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-06-30 [patent_title] => ETCHING APPARATUS AND ETCHING METHOD [patent_app_type] => utility [patent_app_number] => 17/456998 [patent_app_country] => US [patent_app_date] => 2021-11-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6309 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -6 [patent_words_short_claim] => 78 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17456998 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/456998
ETCHING APPARATUS AND ETCHING METHOD Nov 29, 2021 Abandoned
Array ( [id] => 17645189 [patent_doc_number] => 20220172928 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-06-02 [patent_title] => PLASMA PROCESSING APPARATUS AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE USING THE SAME [patent_app_type] => utility [patent_app_number] => 17/533507 [patent_app_country] => US [patent_app_date] => 2021-11-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6405 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 127 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17533507 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/533507
PLASMA PROCESSING APPARATUS AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE USING THE SAME Nov 22, 2021 Pending
Array ( [id] => 17630573 [patent_doc_number] => 20220165588 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-05-26 [patent_title] => SYSTEM FOR PROCESSING SUBSTRATE [patent_app_type] => utility [patent_app_number] => 17/522897 [patent_app_country] => US [patent_app_date] => 2021-11-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7918 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 91 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17522897 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/522897
SYSTEM FOR PROCESSING SUBSTRATE Nov 8, 2021 Pending
Array ( [id] => 20469424 [patent_doc_number] => 12525466 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2026-01-13 [patent_title] => Processing apparatus and processing method [patent_app_type] => utility [patent_app_number] => 17/522660 [patent_app_country] => US [patent_app_date] => 2021-11-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 16 [patent_no_of_words] => 3566 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 241 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17522660 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/522660
Processing apparatus and processing method Nov 8, 2021 Issued
Array ( [id] => 17431648 [patent_doc_number] => 20220059357 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-02-24 [patent_title] => SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/519785 [patent_app_country] => US [patent_app_date] => 2021-11-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8206 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17519785 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/519785
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS Nov 4, 2021 Abandoned
Array ( [id] => 17582878 [patent_doc_number] => 20220139733 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-05-05 [patent_title] => SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 17/513991 [patent_app_country] => US [patent_app_date] => 2021-10-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 13845 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -14 [patent_words_short_claim] => 137 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17513991 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/513991
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD Oct 28, 2021 Abandoned
Array ( [id] => 17577520 [patent_doc_number] => 20220134375 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-05-05 [patent_title] => SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 17/513986 [patent_app_country] => US [patent_app_date] => 2021-10-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 14360 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 122 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17513986 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/513986
Substrate processing apparatus and substrate processing method Oct 28, 2021 Issued
Array ( [id] => 18848773 [patent_doc_number] => 20230411177 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-12-21 [patent_title] => APPARATUS FOR PROCESSING A WAFER-SHAPED ARTICLE [patent_app_type] => utility [patent_app_number] => 18/032397 [patent_app_country] => US [patent_app_date] => 2021-10-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5255 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 60 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18032397 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/032397
APPARATUS FOR PROCESSING A WAFER-SHAPED ARTICLE Oct 13, 2021 Pending
Array ( [id] => 18693609 [patent_doc_number] => 20230324008 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-10-12 [patent_title] => GAS SUPPLY SYSTEM AND GAS SUPPLY METHOD [patent_app_type] => utility [patent_app_number] => 18/044184 [patent_app_country] => US [patent_app_date] => 2021-10-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8026 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -7 [patent_words_short_claim] => 217 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18044184 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/044184
GAS SUPPLY SYSTEM AND GAS SUPPLY METHOD Oct 4, 2021 Pending
Array ( [id] => 18612808 [patent_doc_number] => 20230279544 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-09-07 [patent_title] => ADDITIVE CHEMICAL VAPOR DEPOSITION METHODS AND SYSTEMS [patent_app_type] => utility [patent_app_number] => 18/023814 [patent_app_country] => US [patent_app_date] => 2021-09-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6449 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -30 [patent_words_short_claim] => 84 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18023814 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/023814
ADDITIVE CHEMICAL VAPOR DEPOSITION METHODS AND SYSTEMS Sep 1, 2021 Pending
Array ( [id] => 17302980 [patent_doc_number] => 20210398819 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-12-23 [patent_title] => ETCHING METHOD [patent_app_type] => utility [patent_app_number] => 17/465440 [patent_app_country] => US [patent_app_date] => 2021-09-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4925 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 124 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17465440 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/465440
ETCHING METHOD Sep 1, 2021 Pending
Array ( [id] => 19277248 [patent_doc_number] => 12027380 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-07-02 [patent_title] => Semiconductor manufacturing apparatus and method of manufacturing semiconductor device [patent_app_type] => utility [patent_app_number] => 17/464007 [patent_app_country] => US [patent_app_date] => 2021-09-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 19 [patent_no_of_words] => 4982 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 192 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17464007 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/464007
Semiconductor manufacturing apparatus and method of manufacturing semiconductor device Aug 31, 2021 Issued
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