Search

Margaret D. Klunk

Examiner (ID: 377, Phone: (571)270-5513 , Office: P/1716 )

Most Active Art Unit
1716
Art Unit(s)
1716
Total Applications
497
Issued Applications
196
Pending Applications
64
Abandoned Applications
249

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 20649735 [patent_doc_number] => 12604698 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2026-04-14 [patent_title] => Substrate processing system and state monitoring method [patent_app_type] => utility [patent_app_number] => 17/446477 [patent_app_country] => US [patent_app_date] => 2021-08-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 7 [patent_no_of_words] => 5770 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 459 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17446477 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/446477
Substrate processing system and state monitoring method Aug 30, 2021 Issued
Array ( [id] => 17247001 [patent_doc_number] => 20210366746 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-11-25 [patent_title] => ACTIVE WORKPIECE HEATING OR COOLING FOR AN ION IMPLANTATION SYSTEM [patent_app_type] => utility [patent_app_number] => 17/393737 [patent_app_country] => US [patent_app_date] => 2021-08-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7334 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 164 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17393737 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/393737
ACTIVE WORKPIECE HEATING OR COOLING FOR AN ION IMPLANTATION SYSTEM Aug 3, 2021 Abandoned
Array ( [id] => 17232222 [patent_doc_number] => 20210358779 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-11-18 [patent_title] => PLASMA PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/386645 [patent_app_country] => US [patent_app_date] => 2021-07-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7098 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -14 [patent_words_short_claim] => 152 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17386645 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/386645
Plasma processing apparatus Jul 27, 2021 Issued
Array ( [id] => 19093900 [patent_doc_number] => 11955365 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-04-09 [patent_title] => Substrate processing method and substrate processing apparatus [patent_app_type] => utility [patent_app_number] => 17/443286 [patent_app_country] => US [patent_app_date] => 2021-07-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 15 [patent_no_of_words] => 9199 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 390 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17443286 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/443286
Substrate processing method and substrate processing apparatus Jul 22, 2021 Issued
Array ( [id] => 18150152 [patent_doc_number] => 20230024009 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-01-26 [patent_title] => FACE-UP WAFER EDGE POLISHING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/380788 [patent_app_country] => US [patent_app_date] => 2021-07-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7690 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 63 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17380788 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/380788
FACE-UP WAFER EDGE POLISHING APPARATUS Jul 19, 2021 Pending
Array ( [id] => 17708553 [patent_doc_number] => 20220208561 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-06-30 [patent_title] => SUPPORTING DEVICE AND APPARATUS FOR PROCESSING A SUBSTRATE INCLUDING A SUPPORTING DEVICE [patent_app_type] => utility [patent_app_number] => 17/377666 [patent_app_country] => US [patent_app_date] => 2021-07-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6446 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 40 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17377666 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/377666
Supporting device and apparatus for processing a substrate including a supporting device Jul 15, 2021 Issued
Array ( [id] => 19858215 [patent_doc_number] => 12261066 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-03-25 [patent_title] => Substrate processing apparatus and furnace opening closer [patent_app_type] => utility [patent_app_number] => 17/376446 [patent_app_country] => US [patent_app_date] => 2021-07-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 9 [patent_no_of_words] => 7072 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 154 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17376446 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/376446
Substrate processing apparatus and furnace opening closer Jul 14, 2021 Issued
Array ( [id] => 20583087 [patent_doc_number] => 12575350 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2026-03-10 [patent_title] => Substrate processing method and substrate processing apparatus [patent_app_type] => utility [patent_app_number] => 17/367975 [patent_app_country] => US [patent_app_date] => 2021-07-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 19 [patent_figures_cnt] => 39 [patent_no_of_words] => 8054 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 333 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17367975 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/367975
Substrate processing method and substrate processing apparatus Jul 5, 2021 Issued
Array ( [id] => 20583097 [patent_doc_number] => 12575360 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2026-03-10 [patent_title] => Semiconductor processing chamber adapter [patent_app_type] => utility [patent_app_number] => 17/366761 [patent_app_country] => US [patent_app_date] => 2021-07-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 2616 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 203 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17366761 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/366761
Semiconductor processing chamber adapter Jul 1, 2021 Issued
Array ( [id] => 19972367 [patent_doc_number] => 12340986 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-06-24 [patent_title] => Plasma processing apparatus and plasma processing method [patent_app_type] => utility [patent_app_number] => 17/361572 [patent_app_country] => US [patent_app_date] => 2021-06-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 8 [patent_no_of_words] => 1236 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 261 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17361572 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/361572
Plasma processing apparatus and plasma processing method Jun 28, 2021 Issued
Array ( [id] => 18207933 [patent_doc_number] => 20230054190 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-02-23 [patent_title] => SEMICONDUCTOR DEPOSITION METHOD AND SEMICONDUCTOR DEPOSITION SYSTEM [patent_app_type] => utility [patent_app_number] => 17/441850 [patent_app_country] => US [patent_app_date] => 2021-06-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7797 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -11 [patent_words_short_claim] => 94 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17441850 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/441850
SEMICONDUCTOR DEPOSITION METHOD AND SEMICONDUCTOR DEPOSITION SYSTEM Jun 20, 2021 Abandoned
Array ( [id] => 17477343 [patent_doc_number] => 20220084847 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-03-17 [patent_title] => SUBSTRATE TREATING EQUIPMENT [patent_app_type] => utility [patent_app_number] => 17/346410 [patent_app_country] => US [patent_app_date] => 2021-06-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10745 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 132 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17346410 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/346410
SUBSTRATE TREATING EQUIPMENT Jun 13, 2021 Abandoned
Array ( [id] => 17295313 [patent_doc_number] => 20210391152 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-12-16 [patent_title] => STAGE, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 17/342809 [patent_app_country] => US [patent_app_date] => 2021-06-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5726 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 112 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17342809 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/342809
STAGE, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING METHOD Jun 8, 2021 Pending
Array ( [id] => 17246995 [patent_doc_number] => 20210366740 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-11-25 [patent_title] => SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 17/326821 [patent_app_country] => US [patent_app_date] => 2021-05-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 18754 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 83 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17326821 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/326821
Substrate processing apparatus and substrate processing method May 20, 2021 Issued
Array ( [id] => 17232216 [patent_doc_number] => 20210358773 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-11-18 [patent_title] => SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 17/318019 [patent_app_country] => US [patent_app_date] => 2021-05-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8580 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 104 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17318019 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/318019
Substrate processing apparatus and substrate processing method May 11, 2021 Issued
Array ( [id] => 17055745 [patent_doc_number] => 20210265179 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-08-26 [patent_title] => HYDROGEN FLUORIDE VAPOR PHASE CORROSION APPARATUS AND METHOD [patent_app_type] => utility [patent_app_number] => 17/315478 [patent_app_country] => US [patent_app_date] => 2021-05-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3582 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -3 [patent_words_short_claim] => 172 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17315478 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/315478
HYDROGEN FLUORIDE VAPOR PHASE CORROSION APPARATUS AND METHOD May 9, 2021 Abandoned
Array ( [id] => 17203408 [patent_doc_number] => 20210343503 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-11-04 [patent_title] => ETCHING APPARATUS AND ETCHING METHOD [patent_app_type] => utility [patent_app_number] => 17/243596 [patent_app_country] => US [patent_app_date] => 2021-04-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 15246 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 89 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17243596 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/243596
ETCHING APPARATUS AND ETCHING METHOD Apr 28, 2021 Pending
Array ( [id] => 17203481 [patent_doc_number] => 20210343576 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-11-04 [patent_title] => SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/241504 [patent_app_country] => US [patent_app_date] => 2021-04-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9301 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 65 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17241504 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/241504
Substrate processing apparatus Apr 26, 2021 Issued
Array ( [id] => 17949216 [patent_doc_number] => 20220336235 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-10-20 [patent_title] => VALVE BOX MODULE, SEMICONDUCTOR DEVICE MANUFACTURING SYSTEM AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE [patent_app_type] => utility [patent_app_number] => 17/232563 [patent_app_country] => US [patent_app_date] => 2021-04-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6506 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 74 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17232563 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/232563
VALVE BOX MODULE, SEMICONDUCTOR DEVICE MANUFACTURING SYSTEM AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE Apr 15, 2021 Pending
Array ( [id] => 18507519 [patent_doc_number] => 11705346 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-07-18 [patent_title] => Substrate processing apparatus [patent_app_type] => utility [patent_app_number] => 17/223141 [patent_app_country] => US [patent_app_date] => 2021-04-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 7210 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 323 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17223141 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/223141
Substrate processing apparatus Apr 5, 2021 Issued
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