Search

Margaret D. Klunk

Examiner (ID: 2861, Phone: (571)270-5513 , Office: P/1716 )

Most Active Art Unit
1716
Art Unit(s)
1716
Total Applications
484
Issued Applications
186
Pending Applications
68
Abandoned Applications
249

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 17949216 [patent_doc_number] => 20220336235 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-10-20 [patent_title] => VALVE BOX MODULE, SEMICONDUCTOR DEVICE MANUFACTURING SYSTEM AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE [patent_app_type] => utility [patent_app_number] => 17/232563 [patent_app_country] => US [patent_app_date] => 2021-04-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6506 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 74 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17232563 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/232563
VALVE BOX MODULE, SEMICONDUCTOR DEVICE MANUFACTURING SYSTEM AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE Apr 15, 2021 Pending
Array ( [id] => 17949216 [patent_doc_number] => 20220336235 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-10-20 [patent_title] => VALVE BOX MODULE, SEMICONDUCTOR DEVICE MANUFACTURING SYSTEM AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE [patent_app_type] => utility [patent_app_number] => 17/232563 [patent_app_country] => US [patent_app_date] => 2021-04-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6506 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 74 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17232563 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/232563
VALVE BOX MODULE, SEMICONDUCTOR DEVICE MANUFACTURING SYSTEM AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE Apr 15, 2021 Pending
Array ( [id] => 18507519 [patent_doc_number] => 11705346 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-07-18 [patent_title] => Substrate processing apparatus [patent_app_type] => utility [patent_app_number] => 17/223141 [patent_app_country] => US [patent_app_date] => 2021-04-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 7210 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 323 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17223141 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/223141
Substrate processing apparatus Apr 5, 2021 Issued
Array ( [id] => 18562887 [patent_doc_number] => 11728139 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-08-15 [patent_title] => Process chamber for cyclic and selective material removal and etching [patent_app_type] => utility [patent_app_number] => 17/219360 [patent_app_country] => US [patent_app_date] => 2021-03-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 6876 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 176 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17219360 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/219360
Process chamber for cyclic and selective material removal and etching Mar 30, 2021 Issued
Array ( [id] => 18439934 [patent_doc_number] => 20230187229 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-06-15 [patent_title] => CERAMIC ADDITIVE MANUFACTURING TECHNIQUES FOR GAS INJECTORS [patent_app_type] => utility [patent_app_number] => 17/912358 [patent_app_country] => US [patent_app_date] => 2021-03-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12333 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 119 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17912358 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/912358
CERAMIC ADDITIVE MANUFACTURING TECHNIQUES FOR GAS INJECTORS Mar 28, 2021 Pending
Array ( [id] => 18439934 [patent_doc_number] => 20230187229 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-06-15 [patent_title] => CERAMIC ADDITIVE MANUFACTURING TECHNIQUES FOR GAS INJECTORS [patent_app_type] => utility [patent_app_number] => 17/912358 [patent_app_country] => US [patent_app_date] => 2021-03-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12333 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 119 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17912358 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/912358
CERAMIC ADDITIVE MANUFACTURING TECHNIQUES FOR GAS INJECTORS Mar 28, 2021 Pending
Array ( [id] => 17130246 [patent_doc_number] => 20210305015 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-09-30 [patent_title] => SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/213065 [patent_app_country] => US [patent_app_date] => 2021-03-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5619 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 137 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17213065 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/213065
SUBSTRATE PROCESSING APPARATUS Mar 24, 2021 Abandoned
Array ( [id] => 16951660 [patent_doc_number] => 20210210352 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-07-08 [patent_title] => CORRELATION BETWEEN CONDUCTIVITY AND PH MEASUREMENTS FOR KOH TEXTURING SOLUTIONS AND ADDITIVES [patent_app_type] => utility [patent_app_number] => 17/209299 [patent_app_country] => US [patent_app_date] => 2021-03-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5770 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 219 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17209299 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/209299
CORRELATION BETWEEN CONDUCTIVITY AND PH MEASUREMENTS FOR KOH TEXTURING SOLUTIONS AND ADDITIVES Mar 22, 2021 Pending
Array ( [id] => 17881781 [patent_doc_number] => 20220297258 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-09-22 [patent_title] => SUBSTRATE POLISHING SIMULTANEOUSLY OVER MULTIPLE MINI PLATENS [patent_app_type] => utility [patent_app_number] => 17/204832 [patent_app_country] => US [patent_app_date] => 2021-03-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8128 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 56 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17204832 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/204832
SUBSTRATE POLISHING SIMULTANEOUSLY OVER MULTIPLE MINI PLATENS Mar 16, 2021 Abandoned
Array ( [id] => 17100092 [patent_doc_number] => 20210287883 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-09-16 [patent_title] => HOLDING METHOD OF EDGE RING, PLASMA PROCESSING APPARATUS, AND SUBSTRATE PROCESSING SYSTEM [patent_app_type] => utility [patent_app_number] => 17/189858 [patent_app_country] => US [patent_app_date] => 2021-03-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10194 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 164 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17189858 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/189858
Holding method of edge ring, plasma processing apparatus, and substrate processing system Mar 1, 2021 Issued
Array ( [id] => 17055743 [patent_doc_number] => 20210265177 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-08-26 [patent_title] => SUBSTRATE TREATING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/182535 [patent_app_country] => US [patent_app_date] => 2021-02-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 32117 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 125 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17182535 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/182535
SUBSTRATE TREATING APPARATUS Feb 22, 2021 Issued
Array ( [id] => 19277278 [patent_doc_number] => 12027410 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-07-02 [patent_title] => Edge ring arrangement with moveable edge rings [patent_app_type] => utility [patent_app_number] => 17/181571 [patent_app_country] => US [patent_app_date] => 2021-02-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 18 [patent_figures_cnt] => 26 [patent_no_of_words] => 7869 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 183 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17181571 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/181571
Edge ring arrangement with moveable edge rings Feb 21, 2021 Issued
Array ( [id] => 17055742 [patent_doc_number] => 20210265176 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-08-26 [patent_title] => SUBSTRATE PROCESSING APPARATUS AND METHOD FOR FABRICATING CATALYST PROCESSING MEMBER [patent_app_type] => utility [patent_app_number] => 17/180394 [patent_app_country] => US [patent_app_date] => 2021-02-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9532 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -7 [patent_words_short_claim] => 136 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17180394 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/180394
SUBSTRATE PROCESSING APPARATUS AND METHOD FOR FABRICATING CATALYST PROCESSING MEMBER Feb 18, 2021 Abandoned
Array ( [id] => 18729301 [patent_doc_number] => 20230343597 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-10-26 [patent_title] => STRUCTURE MANUFACTURING METHOD AND STRUCTURE MANUFACTURING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/799406 [patent_app_country] => US [patent_app_date] => 2021-02-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 32840 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 71 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17799406 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/799406
STRUCTURE MANUFACTURING METHOD AND STRUCTURE MANUFACTURING APPARATUS Feb 11, 2021 Abandoned
Array ( [id] => 18213231 [patent_doc_number] => 20230059495 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-02-23 [patent_title] => Optimization of Radiofrequency Signal Ground Return in Plasma Processing System [patent_app_type] => utility [patent_app_number] => 17/793366 [patent_app_country] => US [patent_app_date] => 2021-01-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 16159 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -20 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17793366 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/793366
Optimization of Radiofrequency Signal Ground Return in Plasma Processing System Jan 29, 2021 Pending
Array ( [id] => 16850545 [patent_doc_number] => 20210151290 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-05-20 [patent_title] => Method and Apparatus for Anisotropic Pattern Etching and Treatment [patent_app_type] => utility [patent_app_number] => 17/163248 [patent_app_country] => US [patent_app_date] => 2021-01-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10738 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 167 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17163248 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/163248
Method and apparatus for anisotropic pattern etching and treatment Jan 28, 2021 Issued
Array ( [id] => 16951671 [patent_doc_number] => 20210210363 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-07-08 [patent_title] => SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/141670 [patent_app_country] => US [patent_app_date] => 2021-01-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11090 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 159 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17141670 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/141670
Substrate processing apparatus Jan 4, 2021 Issued
Array ( [id] => 16936407 [patent_doc_number] => 20210202296 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-07-01 [patent_title] => METHOD FOR LIFTING SUBSTRATE AND APPARATUS FOR TREATING SUBSTRATE [patent_app_type] => utility [patent_app_number] => 17/138427 [patent_app_country] => US [patent_app_date] => 2020-12-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6306 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 135 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17138427 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/138427
METHOD FOR LIFTING SUBSTRATE AND APPARATUS FOR TREATING SUBSTRATE Dec 29, 2020 Abandoned
Array ( [id] => 17262661 [patent_doc_number] => 20210375646 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-12-02 [patent_title] => GAS INJECTOR FOR SEMICONDUCTOR MANUFACTURING CHAMBER [patent_app_type] => utility [patent_app_number] => 17/110817 [patent_app_country] => US [patent_app_date] => 2020-12-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 2580 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -5 [patent_words_short_claim] => 82 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17110817 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/110817
GAS INJECTOR FOR SEMICONDUCTOR MANUFACTURING CHAMBER Dec 2, 2020 Abandoned
Array ( [id] => 16677328 [patent_doc_number] => 20210066094 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-03-04 [patent_title] => SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/095954 [patent_app_country] => US [patent_app_date] => 2020-11-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11636 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -6 [patent_words_short_claim] => 436 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17095954 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/095954
Substrate processing apparatus Nov 11, 2020 Issued
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