Margaret D. Klunk

Array ( [id] => 16809944 [patent_doc_number] => 20210132499 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-05-06 [patent_title] => APPARATUS AND METHOD FOR TREATING SUBSTRATE [patent_app_type] => utility [patent_app_number] => 17/084903 [patent_app_country] => US [patent_app_date] => 2020-10-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8928 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -6 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17084903 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16812062 [patent_doc_number] => 20210134617 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-05-06 [patent_title] => SUBSTRATE TREATMENT APPARATUS [patent_app_type] => utility [patent_app_number] => 17/079439 [patent_app_country] => US [patent_app_date] => 2020-10-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5321 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 76 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17079439 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 20189769 [patent_doc_number] => 12400892 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-08-26 [patent_title] => High throughput polishing modules and modular polishing systems [patent_app_type] => utility [patent_app_number] => 17/076315 [patent_app_country] => US [patent_app_date] => 2020-10-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 19 [patent_no_of_words] => 11107 [patent_no_of_claims] => 24 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 392 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17076315 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17485924 [patent_doc_number] => 20220093428 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-03-24 [patent_title] => ATOMIC OXYGEN DETECTION IN SEMICONDUCTOR PROCESSING CHAMBERS [patent_app_type] => utility [patent_app_number] => 17/026905 [patent_app_country] => US [patent_app_date] => 2020-09-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8685 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 39 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17026905 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16936328 [patent_doc_number] => 20210202217 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-07-01 [patent_title] => EDGE RING, SUBSTRATE PROCESSING APPARATUS HAVING THE SAME AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE APPARATUS [patent_app_type] => utility [patent_app_number] => 17/027460 [patent_app_country] => US [patent_app_date] => 2020-09-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6127 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 230 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17027460 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17485924 [patent_doc_number] => 20220093428 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-03-24 [patent_title] => ATOMIC OXYGEN DETECTION IN SEMICONDUCTOR PROCESSING CHAMBERS [patent_app_type] => utility [patent_app_number] => 17/026905 [patent_app_country] => US [patent_app_date] => 2020-09-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8685 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 39 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17026905 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17477338 [patent_doc_number] => 20220084842 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-03-17 [patent_title] => ANTIFRAGILE SYSTEMS FOR SEMICONDUCTOR PROCESSING EQUIPMENT USING MULTIPLE SPECIAL SENSORS AND ALGORITHMS [patent_app_type] => utility [patent_app_number] => 17/019061 [patent_app_country] => US [patent_app_date] => 2020-09-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6521 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 52 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17019061 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16692079 [patent_doc_number] => 20210074558 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-03-11 [patent_title] => SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/016881 [patent_app_country] => US [patent_app_date] => 2020-09-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4644 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 106 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17016881 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18991082 [patent_doc_number] => 20240063051 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-02-22 [patent_title] => SUBSTRATE SUPPORT UNIT, AND APPARATUS AND METHOD FOR DEPOSITING A LAYER USING THE SAME [patent_app_type] => utility [patent_app_number] => 17/754560 [patent_app_country] => US [patent_app_date] => 2020-09-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4101 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 82 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17754560 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16528741 [patent_doc_number] => 20200402822 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-12-24 [patent_title] => PLASMA PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/013325 [patent_app_country] => US [patent_app_date] => 2020-09-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5779 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -10 [patent_words_short_claim] => 132 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17013325 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18669914 [patent_doc_number] => 11776826 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-10-03 [patent_title] => Apparatus and method for treating substrate [patent_app_type] => utility [patent_app_number] => 16/999836 [patent_app_country] => US [patent_app_date] => 2020-08-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 12 [patent_no_of_words] => 9547 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 225 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16999836 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17417008 [patent_doc_number] => 20220051912 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-02-17 [patent_title] => GAS FLOW CONTROL DURING SEMICONDUCTOR FABRICATION [patent_app_type] => utility [patent_app_number] => 16/991168 [patent_app_country] => US [patent_app_date] => 2020-08-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7439 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16991168 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16586067 [patent_doc_number] => 20210020469 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-01-21 [patent_title] => SEMICONDUCTOR VAPOR ETCHING DEVICE WITH INTERMEDIATE CHAMBER [patent_app_type] => utility [patent_app_number] => 16/930867 [patent_app_country] => US [patent_app_date] => 2020-07-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4316 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -21 [patent_words_short_claim] => 43 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16930867 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16617129 [patent_doc_number] => 20210035782 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-02-04 [patent_title] => SUBSTRATE SUPPORTING DEVICE AND SUBSTRATE TREATING APPARATUS INCLUDING THE SAME [patent_app_type] => utility [patent_app_number] => 16/924513 [patent_app_country] => US [patent_app_date] => 2020-07-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5948 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 111 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16924513 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16560353 [patent_doc_number] => 20210005502 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-01-07 [patent_title] => STAGE, SUBSTRATE PROCESSING APPARATUS AND STAGE ASSEMBLING METHOD [patent_app_type] => utility [patent_app_number] => 16/909228 [patent_app_country] => US [patent_app_date] => 2020-06-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9139 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 149 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16909228 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 20175896 [patent_doc_number] => 12394651 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-08-19 [patent_title] => High throughput polishing modules and modular polishing systems [patent_app_type] => utility [patent_app_number] => 16/871588 [patent_app_country] => US [patent_app_date] => 2020-05-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 19 [patent_no_of_words] => 12574 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 562 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16871588 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 20175896 [patent_doc_number] => 12394651 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-08-19 [patent_title] => High throughput polishing modules and modular polishing systems [patent_app_type] => utility [patent_app_number] => 16/871588 [patent_app_country] => US [patent_app_date] => 2020-05-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 19 [patent_no_of_words] => 12574 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 562 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16871588 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 20175896 [patent_doc_number] => 12394651 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-08-19 [patent_title] => High throughput polishing modules and modular polishing systems [patent_app_type] => utility [patent_app_number] => 16/871588 [patent_app_country] => US [patent_app_date] => 2020-05-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 19 [patent_no_of_words] => 12574 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 562 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16871588 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 20175896 [patent_doc_number] => 12394651 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-08-19 [patent_title] => High throughput polishing modules and modular polishing systems [patent_app_type] => utility [patent_app_number] => 16/871588 [patent_app_country] => US [patent_app_date] => 2020-05-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 19 [patent_no_of_words] => 12574 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 562 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16871588 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17169447 [patent_doc_number] => 20210323117 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-10-21 [patent_title] => HIGH THROUGHPUT POLISHING MODULES AND MODULAR POLISHING SYSTEMS [patent_app_type] => utility [patent_app_number] => 16/851012 [patent_app_country] => US [patent_app_date] => 2020-04-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12737 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 57 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16851012 [rel_patent_id] =>[rel_patent_doc_number] =>)