Search

Margaret D. Klunk

Examiner (ID: 2861, Phone: (571)270-5513 , Office: P/1716 )

Most Active Art Unit
1716
Art Unit(s)
1716
Total Applications
484
Issued Applications
186
Pending Applications
68
Abandoned Applications
249

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 16364476 [patent_doc_number] => 20200321227 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-10-08 [patent_title] => SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE TRANSFER APPARATUS AND METHOD [patent_app_type] => utility [patent_app_number] => 16/842087 [patent_app_country] => US [patent_app_date] => 2020-04-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6522 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -8 [patent_words_short_claim] => 66 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16842087 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/842087
Substrate processing system and substrate transfer apparatus and method Apr 6, 2020 Issued
Array ( [id] => 16347984 [patent_doc_number] => 20200312635 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-10-01 [patent_title] => PLASMA FOCUS RING OF SEMICONDUCTOR ETCHING APPARATUS AND MANUFACTURING METHOD THEREOF [patent_app_type] => utility [patent_app_number] => 16/835104 [patent_app_country] => US [patent_app_date] => 2020-03-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3877 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -4 [patent_words_short_claim] => 130 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16835104 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/835104
PLASMA FOCUS RING OF SEMICONDUCTOR ETCHING APPARATUS AND MANUFACTURING METHOD THEREOF Mar 29, 2020 Abandoned
Array ( [id] => 17795513 [patent_doc_number] => 20220254605 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-08-11 [patent_title] => CERAMIC AIR INLET RADIO FREQUENCY CONNECTION TYPE CLEANING DEVICE [patent_app_type] => utility [patent_app_number] => 17/629362 [patent_app_country] => US [patent_app_date] => 2020-02-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8200 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 234 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17629362 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/629362
Ceramic air inlet radio frequency connection type cleaning device Feb 28, 2020 Issued
Array ( [id] => 17582862 [patent_doc_number] => 20220139717 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-05-05 [patent_title] => LARGE AREA METROLOGY AND PROCESS CONTROL FOR ANISOTROPIC CHEMICAL ETCHING [patent_app_type] => utility [patent_app_number] => 17/433777 [patent_app_country] => US [patent_app_date] => 2020-02-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 14048 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -21 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17433777 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/433777
LARGE AREA METROLOGY AND PROCESS CONTROL FOR ANISOTROPIC CHEMICAL ETCHING Feb 23, 2020 Abandoned
Array ( [id] => 18166887 [patent_doc_number] => 20230033493 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-02-02 [patent_title] => LIQUID CHEMICAL PROCESSING DEVICE [patent_app_type] => utility [patent_app_number] => 17/758667 [patent_app_country] => US [patent_app_date] => 2020-01-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6525 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 112 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17758667 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/758667
LIQUID CHEMICAL PROCESSING DEVICE Jan 16, 2020 Pending
Array ( [id] => 18166887 [patent_doc_number] => 20230033493 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-02-02 [patent_title] => LIQUID CHEMICAL PROCESSING DEVICE [patent_app_type] => utility [patent_app_number] => 17/758667 [patent_app_country] => US [patent_app_date] => 2020-01-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6525 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 112 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17758667 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/758667
LIQUID CHEMICAL PROCESSING DEVICE Jan 16, 2020 Pending
Array ( [id] => 17579252 [patent_doc_number] => 20220136107 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-05-05 [patent_title] => SHOWERHEAD WITH CONFIGURABLE GAS OUTLETS [patent_app_type] => utility [patent_app_number] => 17/424449 [patent_app_country] => US [patent_app_date] => 2020-01-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3639 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -25 [patent_words_short_claim] => 81 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17424449 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/424449
SHOWERHEAD WITH CONFIGURABLE GAS OUTLETS Jan 14, 2020 Pending
Array ( [id] => 18751477 [patent_doc_number] => 11810797 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-11-07 [patent_title] => Wetting processing apparatus and operation method thereof [patent_app_type] => utility [patent_app_number] => 16/722438 [patent_app_country] => US [patent_app_date] => 2019-12-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 16 [patent_no_of_words] => 13035 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 331 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16722438 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/722438
Wetting processing apparatus and operation method thereof Dec 19, 2019 Issued
Array ( [id] => 17481236 [patent_doc_number] => 20220088740 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-03-24 [patent_title] => SEMICONDUCTOR WAFER PHOTOELECTROCHEMICAL MECHANICAL POLISHING PROCESSING DEVICE AND PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 17/413939 [patent_app_country] => US [patent_app_date] => 2019-12-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6779 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 76 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17413939 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/413939
SEMICONDUCTOR WAFER PHOTOELECTROCHEMICAL MECHANICAL POLISHING PROCESSING DEVICE AND PROCESSING METHOD Dec 12, 2019 Abandoned
Array ( [id] => 17481236 [patent_doc_number] => 20220088740 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-03-24 [patent_title] => SEMICONDUCTOR WAFER PHOTOELECTROCHEMICAL MECHANICAL POLISHING PROCESSING DEVICE AND PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 17/413939 [patent_app_country] => US [patent_app_date] => 2019-12-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6779 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 76 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17413939 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/413939
SEMICONDUCTOR WAFER PHOTOELECTROCHEMICAL MECHANICAL POLISHING PROCESSING DEVICE AND PROCESSING METHOD Dec 12, 2019 Abandoned
Array ( [id] => 15969381 [patent_doc_number] => 20200168442 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-05-28 [patent_title] => FOCUS RING HEIGHT ADJUSTING DEVICE AND WAFER ETCHING APPARATUS INCLUDING THE SAME [patent_app_type] => utility [patent_app_number] => 16/682338 [patent_app_country] => US [patent_app_date] => 2019-11-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4932 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -8 [patent_words_short_claim] => 105 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16682338 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/682338
FOCUS RING HEIGHT ADJUSTING DEVICE AND WAFER ETCHING APPARATUS INCLUDING THE SAME Nov 12, 2019 Abandoned
Array ( [id] => 15560659 [patent_doc_number] => 20200064741 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-02-27 [patent_title] => SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 16/666717 [patent_app_country] => US [patent_app_date] => 2019-10-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 13436 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -6 [patent_words_short_claim] => 176 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16666717 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/666717
Substrate processing apparatus Oct 28, 2019 Issued
Array ( [id] => 16777093 [patent_doc_number] => 20210114170 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-04-22 [patent_title] => CONTAINER FOR STORING SLURRY HAVING FUMED SILICA PARTICLES AND CMP APPARATUS HAVING THE SAME [patent_app_type] => utility [patent_app_number] => 16/660736 [patent_app_country] => US [patent_app_date] => 2019-10-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3866 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 74 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16660736 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/660736
CONTAINER FOR STORING SLURRY HAVING FUMED SILICA PARTICLES AND CMP APPARATUS HAVING THE SAME Oct 21, 2019 Abandoned
Array ( [id] => 18525729 [patent_doc_number] => 11712710 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-08-01 [patent_title] => Substrate processing apparatus and substrate processing method [patent_app_type] => utility [patent_app_number] => 16/528757 [patent_app_country] => US [patent_app_date] => 2019-08-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 14 [patent_no_of_words] => 12113 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 410 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16528757 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/528757
Substrate processing apparatus and substrate processing method Jul 31, 2019 Issued
Array ( [id] => 16973553 [patent_doc_number] => 11069533 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-07-20 [patent_title] => CMP system and method of use [patent_app_type] => utility [patent_app_number] => 16/515938 [patent_app_country] => US [patent_app_date] => 2019-07-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 31 [patent_figures_cnt] => 43 [patent_no_of_words] => 12409 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 65 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16515938 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/515938
CMP system and method of use Jul 17, 2019 Issued
Array ( [id] => 18073655 [patent_doc_number] => 11532493 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-12-20 [patent_title] => Wet bench and chemical treatment method using the same [patent_app_type] => utility [patent_app_number] => 16/457416 [patent_app_country] => US [patent_app_date] => 2019-06-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 6335 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 276 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16457416 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/457416
Wet bench and chemical treatment method using the same Jun 27, 2019 Issued
Array ( [id] => 14999971 [patent_doc_number] => 20190318943 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-10-17 [patent_title] => WAFER CUTTING DEVICE AND METHOD [patent_app_type] => utility [patent_app_number] => 16/454289 [patent_app_country] => US [patent_app_date] => 2019-06-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4458 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -8 [patent_words_short_claim] => 227 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16454289 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/454289
WAFER CUTTING DEVICE AND METHOD Jun 26, 2019 Abandoned
Array ( [id] => 14959787 [patent_doc_number] => 20190307371 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-10-10 [patent_title] => CONTINUOUS ANALYTE SENSORS AND METHODS OF MAKING SAME [patent_app_type] => utility [patent_app_number] => 16/452364 [patent_app_country] => US [patent_app_date] => 2019-06-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 28896 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -7 [patent_words_short_claim] => 120 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16452364 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/452364
CONTINUOUS ANALYTE SENSORS AND METHODS OF MAKING SAME Jun 24, 2019 Abandoned
Array ( [id] => 15259927 [patent_doc_number] => 20190378697 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-12-12 [patent_title] => APPARATUS AND METHOD FOR PROCESSING SUBSTRATE [patent_app_type] => utility [patent_app_number] => 16/423745 [patent_app_country] => US [patent_app_date] => 2019-05-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5302 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 75 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16423745 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/423745
APPARATUS AND METHOD FOR PROCESSING SUBSTRATE May 27, 2019 Abandoned
Array ( [id] => 15179005 [patent_doc_number] => 20190360094 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-11-28 [patent_title] => CHEMICAL VAPOR DEPOSITION APPARATUS AND METHOD OF FORMING FILM [patent_app_type] => utility [patent_app_number] => 16/418142 [patent_app_country] => US [patent_app_date] => 2019-05-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8037 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -7 [patent_words_short_claim] => 107 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16418142 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/418142
CHEMICAL VAPOR DEPOSITION APPARATUS AND METHOD OF FORMING FILM May 20, 2019 Abandoned
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