Search

Margaret D. Klunk

Examiner (ID: 2861, Phone: (571)270-5513 , Office: P/1716 )

Most Active Art Unit
1716
Art Unit(s)
1716
Total Applications
484
Issued Applications
186
Pending Applications
68
Abandoned Applications
249

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 16300994 [patent_doc_number] => 20200286717 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-09-10 [patent_title] => ELECTROSTATIC CHUCK FOR HIGH BIAS RADIO FREQUENCY (RF) POWER APPLICATION IN A PLASMA PROCESSING CHAMBER [patent_app_type] => utility [patent_app_number] => 16/406921 [patent_app_country] => US [patent_app_date] => 2019-05-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3959 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 113 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16406921 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/406921
Electrostatic chuck for high bias radio frequency (RF) power application in a plasma processing chamber May 7, 2019 Issued
Array ( [id] => 15351395 [patent_doc_number] => 20200013589 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-01-09 [patent_title] => PROTECTION OF ALUMINUM PROCESS CHAMBER COMPONENTS [patent_app_type] => utility [patent_app_number] => 16/401871 [patent_app_country] => US [patent_app_date] => 2019-05-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5097 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 33 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16401871 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/401871
Protection of aluminum process chamber components May 1, 2019 Issued
Array ( [id] => 15092937 [patent_doc_number] => 20190341280 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-11-07 [patent_title] => WAFFER PEDESTAL WITH HEATING MECHANISM AND REACTION CHAMBER INCLUDING THE SAME [patent_app_type] => utility [patent_app_number] => 16/400323 [patent_app_country] => US [patent_app_date] => 2019-05-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3375 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -8 [patent_words_short_claim] => 71 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16400323 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/400323
WAFFER PEDESTAL WITH HEATING MECHANISM AND REACTION CHAMBER INCLUDING THE SAME Apr 30, 2019 Abandoned
Array ( [id] => 15180083 [patent_doc_number] => 20190360633 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-11-28 [patent_title] => PRECISION DYNAMIC LEVELING MECHANISM WITH LONG MOTION CAPABILITY [patent_app_type] => utility [patent_app_number] => 16/400090 [patent_app_country] => US [patent_app_date] => 2019-05-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3248 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 126 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16400090 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/400090
Precision dynamic leveling mechanism with long motion capability Apr 30, 2019 Issued
Array ( [id] => 14722347 [patent_doc_number] => 20190252237 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-08-15 [patent_title] => System and Method for Performing Spin Dry Etching [patent_app_type] => utility [patent_app_number] => 16/396438 [patent_app_country] => US [patent_app_date] => 2019-04-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6277 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 47 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16396438 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/396438
System and method for performing spin dry etching Apr 25, 2019 Issued
Array ( [id] => 15045465 [patent_doc_number] => 20190333737 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-10-31 [patent_title] => SUBSTRATE PROCESSING APPARATUS AND PROGRAM FOR SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 16/394655 [patent_app_country] => US [patent_app_date] => 2019-04-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7206 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -5 [patent_words_short_claim] => 137 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16394655 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/394655
SUBSTRATE PROCESSING APPARATUS AND PROGRAM FOR SUBSTRATE PROCESSING APPARATUS Apr 24, 2019 Abandoned
Array ( [id] => 17424230 [patent_doc_number] => 11257691 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-02-22 [patent_title] => Substrate processing apparatus [patent_app_type] => utility [patent_app_number] => 16/394320 [patent_app_country] => US [patent_app_date] => 2019-04-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 16 [patent_no_of_words] => 8788 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 160 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16394320 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/394320
Substrate processing apparatus Apr 24, 2019 Issued
Array ( [id] => 16394427 [patent_doc_number] => 20200335368 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-10-22 [patent_title] => SENSORS AND SYSTEM FOR IN-SITU EDGE RING EROSION MONITOR [patent_app_type] => utility [patent_app_number] => 16/391262 [patent_app_country] => US [patent_app_date] => 2019-04-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7951 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 98 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16391262 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/391262
Sensors and system for in-situ edge ring erosion monitor Apr 21, 2019 Issued
Array ( [id] => 15969453 [patent_doc_number] => 20200168478 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-05-28 [patent_title] => CHEMICAL LIQUID SUPPLY APPARATUS AND SEMICONDUCTOR PROCESSING APPARATUS HAVING THE SAME [patent_app_type] => utility [patent_app_number] => 16/387779 [patent_app_country] => US [patent_app_date] => 2019-04-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7723 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 80 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16387779 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/387779
CHEMICAL LIQUID SUPPLY APPARATUS AND SEMICONDUCTOR PROCESSING APPARATUS HAVING THE SAME Apr 17, 2019 Abandoned
Array ( [id] => 14994601 [patent_doc_number] => 20190316258 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-10-17 [patent_title] => CHEMICAL VAPOR DEPOSITION APPARATUS WITH MULTI-ZONE INJECTION BLOCK [patent_app_type] => utility [patent_app_number] => 16/383321 [patent_app_country] => US [patent_app_date] => 2019-04-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7000 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -33 [patent_words_short_claim] => 85 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16383321 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/383321
CHEMICAL VAPOR DEPOSITION APPARATUS WITH MULTI-ZONE INJECTION BLOCK Apr 11, 2019 Pending
Array ( [id] => 14676449 [patent_doc_number] => 20190237339 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-08-01 [patent_title] => PROCESS AND APPARATUS FOR PROCESSING A NITRIDE STRUCTURE WITHOUT SILICA DEPOSITION [patent_app_type] => utility [patent_app_number] => 16/377338 [patent_app_country] => US [patent_app_date] => 2019-04-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4932 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -14 [patent_words_short_claim] => 333 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16377338 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/377338
Process and apparatus for processing a nitride structure without silica deposition Apr 7, 2019 Issued
Array ( [id] => 14904197 [patent_doc_number] => 20190295864 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-09-26 [patent_title] => SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 16/360357 [patent_app_country] => US [patent_app_date] => 2019-03-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10373 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 105 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16360357 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/360357
SUBSTRATE PROCESSING APPARATUS Mar 20, 2019 Abandoned
Array ( [id] => 15030193 [patent_doc_number] => 20190326101 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-10-24 [patent_title] => PLASMA PROCESSING APPARATUS AND MEMBER OF PLASMA PROCESSING CHAMBER [patent_app_type] => utility [patent_app_number] => 16/357971 [patent_app_country] => US [patent_app_date] => 2019-03-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7389 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -4 [patent_words_short_claim] => 95 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16357971 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/357971
PLASMA PROCESSING APPARATUS AND MEMBER OF PLASMA PROCESSING CHAMBER Mar 18, 2019 Abandoned
Array ( [id] => 16013823 [patent_doc_number] => 20200181754 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-06-11 [patent_title] => A MASK AND A MASK DEVICE USING THE SAME [patent_app_type] => utility [patent_app_number] => 16/341909 [patent_app_country] => US [patent_app_date] => 2019-03-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4695 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -11 [patent_words_short_claim] => 105 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16341909 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/341909
A MASK AND A MASK DEVICE USING THE SAME Mar 18, 2019 Abandoned
Array ( [id] => 17787737 [patent_doc_number] => 11410871 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-08-09 [patent_title] => Workpiece placement apparatus and processing apparatus [patent_app_type] => utility [patent_app_number] => 16/293788 [patent_app_country] => US [patent_app_date] => 2019-03-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 11 [patent_no_of_words] => 7005 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 256 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16293788 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/293788
Workpiece placement apparatus and processing apparatus Mar 5, 2019 Issued
Array ( [id] => 16823313 [patent_doc_number] => 20210138606 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-05-13 [patent_title] => SUBSTRATE HOLDING APPARATUS AND METHOD OF MANUFACTURING A DRIVE RING [patent_app_type] => utility [patent_app_number] => 16/980995 [patent_app_country] => US [patent_app_date] => 2019-02-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8450 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -7 [patent_words_short_claim] => 83 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16980995 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/980995
SUBSTRATE HOLDING APPARATUS AND METHOD OF MANUFACTURING A DRIVE RING Feb 19, 2019 Abandoned
Array ( [id] => 17092813 [patent_doc_number] => 11121010 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-09-14 [patent_title] => Plasma processing apparatus [patent_app_type] => utility [patent_app_number] => 16/273765 [patent_app_country] => US [patent_app_date] => 2019-02-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 7085 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 171 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16273765 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/273765
Plasma processing apparatus Feb 11, 2019 Issued
Array ( [id] => 16238707 [patent_doc_number] => 20200255941 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-08-13 [patent_title] => SUPPORTS FOR CHEMICAL VAPOR DEPOSITION COATING APPLICATIONS [patent_app_type] => utility [patent_app_number] => 16/271940 [patent_app_country] => US [patent_app_date] => 2019-02-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 2447 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -26 [patent_words_short_claim] => 27 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16271940 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/271940
SUPPORTS FOR CHEMICAL VAPOR DEPOSITION COATING APPLICATIONS Feb 10, 2019 Abandoned
Array ( [id] => 15274265 [patent_doc_number] => 20190385867 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-12-19 [patent_title] => SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE [patent_app_type] => utility [patent_app_number] => 16/268538 [patent_app_country] => US [patent_app_date] => 2019-02-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4964 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 68 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16268538 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/268538
SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE Feb 5, 2019 Abandoned
Array ( [id] => 14405023 [patent_doc_number] => 20190168355 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-06-06 [patent_title] => POLISHING APPARATUS AND POLISHING METHOD [patent_app_type] => utility [patent_app_number] => 16/207958 [patent_app_country] => US [patent_app_date] => 2018-12-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 30001 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -7 [patent_words_short_claim] => 186 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16207958 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/207958
POLISHING APPARATUS AND POLISHING METHOD Dec 2, 2018 Pending
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