Search

Margaret D. Klunk

Examiner (ID: 2861, Phone: (571)270-5513 , Office: P/1716 )

Most Active Art Unit
1716
Art Unit(s)
1716
Total Applications
484
Issued Applications
186
Pending Applications
68
Abandoned Applications
249

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 14405023 [patent_doc_number] => 20190168355 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-06-06 [patent_title] => POLISHING APPARATUS AND POLISHING METHOD [patent_app_type] => utility [patent_app_number] => 16/207958 [patent_app_country] => US [patent_app_date] => 2018-12-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 30001 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -7 [patent_words_short_claim] => 186 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16207958 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/207958
POLISHING APPARATUS AND POLISHING METHOD Dec 2, 2018 Pending
Array ( [id] => 14405023 [patent_doc_number] => 20190168355 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-06-06 [patent_title] => POLISHING APPARATUS AND POLISHING METHOD [patent_app_type] => utility [patent_app_number] => 16/207958 [patent_app_country] => US [patent_app_date] => 2018-12-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 30001 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -7 [patent_words_short_claim] => 186 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16207958 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/207958
POLISHING APPARATUS AND POLISHING METHOD Dec 2, 2018 Pending
Array ( [id] => 14307547 [patent_doc_number] => 20190143477 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-05-16 [patent_title] => APPARATUS AND METHOD FOR PLANARIZING SUBSTRATE [patent_app_type] => utility [patent_app_number] => 16/185773 [patent_app_country] => US [patent_app_date] => 2018-11-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 14085 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -21 [patent_words_short_claim] => 43 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16185773 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/185773
APPARATUS AND METHOD FOR PLANARIZING SUBSTRATE Nov 8, 2018 Abandoned
Array ( [id] => 14237955 [patent_doc_number] => 20190131150 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-05-02 [patent_title] => POLISHING APPARATUS AND POLISHING METHOD [patent_app_type] => utility [patent_app_number] => 16/175445 [patent_app_country] => US [patent_app_date] => 2018-10-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 31638 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 155 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16175445 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/175445
Polishing apparatus and polishing method Oct 29, 2018 Issued
Array ( [id] => 14316945 [patent_doc_number] => 20190148176 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-05-16 [patent_title] => SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 16/167863 [patent_app_country] => US [patent_app_date] => 2018-10-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8575 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 122 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16167863 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/167863
SUBSTRATE PROCESSING APPARATUS Oct 22, 2018 Abandoned
Array ( [id] => 14211901 [patent_doc_number] => 20190118335 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-04-25 [patent_title] => POLISHING APPARATUS [patent_app_type] => utility [patent_app_number] => 16/163070 [patent_app_country] => US [patent_app_date] => 2018-10-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 15911 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -22 [patent_words_short_claim] => 108 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16163070 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/163070
Polishing apparatus Oct 16, 2018 Issued
Array ( [id] => 20216082 [patent_doc_number] => 12412736 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-09-09 [patent_title] => Methods and systems for managing byproduct material accumulation during plasma-based semiconductor wafer fabrication process [patent_app_type] => utility [patent_app_number] => 16/147231 [patent_app_country] => US [patent_app_date] => 2018-09-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 11 [patent_no_of_words] => 7795 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 311 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16147231 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/147231
Methods and systems for managing byproduct material accumulation during plasma-based semiconductor wafer fabrication process Sep 27, 2018 Issued
Array ( [id] => 18574721 [patent_doc_number] => 11731229 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-08-22 [patent_title] => Substrate processing apparatus, substrate processing method, and storage medium [patent_app_type] => utility [patent_app_number] => 16/136476 [patent_app_country] => US [patent_app_date] => 2018-09-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 13 [patent_no_of_words] => 8583 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 217 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16136476 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/136476
Substrate processing apparatus, substrate processing method, and storage medium Sep 19, 2018 Issued
Array ( [id] => 14446303 [patent_doc_number] => 20190181025 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-06-13 [patent_title] => MONITORING SYSTEM, LEARNING APPARATUS, LEARNING METHOD, MONITORING APPARATUS, AND MONITORING METHOD [patent_app_type] => utility [patent_app_number] => 16/133140 [patent_app_country] => US [patent_app_date] => 2018-09-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10694 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -11 [patent_words_short_claim] => 177 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16133140 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/133140
MONITORING SYSTEM, LEARNING APPARATUS, LEARNING METHOD, MONITORING APPARATUS, AND MONITORING METHOD Sep 16, 2018 Abandoned
Array ( [id] => 13799387 [patent_doc_number] => 20190013232 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-01-10 [patent_title] => MOVEABLE EDGE RING DESIGN [patent_app_type] => utility [patent_app_number] => 16/131822 [patent_app_country] => US [patent_app_date] => 2018-09-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7853 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 75 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16131822 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/131822
MOVEABLE EDGE RING DESIGN Sep 13, 2018 Abandoned
Array ( [id] => 16098415 [patent_doc_number] => 20200203194 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-06-25 [patent_title] => Inner Wall and substrate Processing Apparatus [patent_app_type] => utility [patent_app_number] => 16/641456 [patent_app_country] => US [patent_app_date] => 2018-08-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7027 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -6 [patent_words_short_claim] => 83 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16641456 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/641456
Inner wall and substrate processing apparatus Aug 12, 2018 Issued
Array ( [id] => 16920342 [patent_doc_number] => 20210193434 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-06-24 [patent_title] => LINER, REACTION CHAMBER AND SEMICONDUCTOR PROCESSING EQUIPMENT [patent_app_type] => utility [patent_app_number] => 16/638688 [patent_app_country] => US [patent_app_date] => 2018-07-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3482 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 102 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16638688 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/638688
Liner, reaction chamber and semiconductor processing equipment Jul 11, 2018 Issued
Array ( [id] => 13832451 [patent_doc_number] => 20190019710 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-01-17 [patent_title] => SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 16/019620 [patent_app_country] => US [patent_app_date] => 2018-06-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 18174 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -21 [patent_words_short_claim] => 147 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16019620 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/019620
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD Jun 26, 2018 Abandoned
Array ( [id] => 18804283 [patent_doc_number] => 11837446 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-12-05 [patent_title] => High power cable for heated components in RF environment [patent_app_type] => utility [patent_app_number] => 16/017357 [patent_app_country] => US [patent_app_date] => 2018-06-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 5 [patent_no_of_words] => 5021 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 225 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16017357 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/017357
High power cable for heated components in RF environment Jun 24, 2018 Issued
Array ( [id] => 17364633 [patent_doc_number] => 11231652 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-01-25 [patent_title] => Liquid chemical vapor recovery device, wet stripping device, photoresist stripping process, and method for manufacturing thin film transistor-liquid crystal display using the same [patent_app_type] => utility [patent_app_number] => 15/952574 [patent_app_country] => US [patent_app_date] => 2018-04-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 1 [patent_figures_cnt] => 1 [patent_no_of_words] => 4763 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 307 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15952574 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/952574
Liquid chemical vapor recovery device, wet stripping device, photoresist stripping process, and method for manufacturing thin film transistor-liquid crystal display using the same Apr 12, 2018 Issued
Array ( [id] => 13359659 [patent_doc_number] => 20180231369 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-08-16 [patent_title] => TEMPERATURE MEASURING METHOD, SUBSTRATE PROCESSING SYSTEM AND COMPONENT TO BE PROVIDED IN SUBSTRATE PROCESSING APPARATUS OF THE SUBSTRATE PROCESSING SYSTEM [patent_app_type] => utility [patent_app_number] => 15/952372 [patent_app_country] => US [patent_app_date] => 2018-04-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8156 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -11 [patent_words_short_claim] => 261 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15952372 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/952372
TEMPERATURE MEASURING METHOD, SUBSTRATE PROCESSING SYSTEM AND COMPONENT TO BE PROVIDED IN SUBSTRATE PROCESSING APPARATUS OF THE SUBSTRATE PROCESSING SYSTEM Apr 12, 2018 Abandoned
Array ( [id] => 13785327 [patent_doc_number] => 20190006202 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-01-03 [patent_title] => REPAIRING APPARATUS FOR REMOVAL OF METAL RESIDUALS ON DISPLAY SUBSTRATE [patent_app_type] => utility [patent_app_number] => 15/943407 [patent_app_country] => US [patent_app_date] => 2018-04-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5855 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 139 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15943407 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/943407
REPAIRING APPARATUS FOR REMOVAL OF METAL RESIDUALS ON DISPLAY SUBSTRATE Apr 1, 2018 Abandoned
Array ( [id] => 17166122 [patent_doc_number] => 11152234 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-10-19 [patent_title] => Weighing apparatus, substrate liquid processing apparatus, weighing method, substrate liquid processing method and recording medium [patent_app_type] => utility [patent_app_number] => 15/940036 [patent_app_country] => US [patent_app_date] => 2018-03-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 17 [patent_figures_cnt] => 26 [patent_no_of_words] => 15473 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 280 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15940036 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/940036
Weighing apparatus, substrate liquid processing apparatus, weighing method, substrate liquid processing method and recording medium Mar 28, 2018 Issued
Array ( [id] => 13470349 [patent_doc_number] => 20180286717 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-10-04 [patent_title] => SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING SYSTEM INCLUDING THE SAME [patent_app_type] => utility [patent_app_number] => 15/935922 [patent_app_country] => US [patent_app_date] => 2018-03-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9050 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -10 [patent_words_short_claim] => 123 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15935922 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/935922
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING SYSTEM INCLUDING THE SAME Mar 25, 2018 Abandoned
Array ( [id] => 18120506 [patent_doc_number] => 11551905 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-01-10 [patent_title] => Resonant process monitor [patent_app_type] => utility [patent_app_number] => 15/925739 [patent_app_country] => US [patent_app_date] => 2018-03-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 12 [patent_no_of_words] => 5695 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 149 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15925739 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/925739
Resonant process monitor Mar 18, 2018 Issued
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