Mark S. Graham

Array ( [id] => 8277525 [patent_doc_number] => 20120171390 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2012-07-05 [patent_title] => 'METHODS AND APPARATUS FOR SPUTTERING USING DIRECT CURRENT' [patent_app_type] => utility [patent_app_number] => 13/417937 [patent_app_country] => US [patent_app_date] => 2012-03-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 10287 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13417937 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 8277912 [patent_doc_number] => 20120171784 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2012-07-05 [patent_title] => 'MAGNETRON-SPUTTERING FILM-FORMING APPARATUS AND MANUFACTURING METHOD FOR A SEMICONDUCTOR DEVICE' [patent_app_type] => utility [patent_app_number] => 13/417541 [patent_app_country] => US [patent_app_date] => 2012-03-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 29 [patent_figures_cnt] => 29 [patent_no_of_words] => 12297 [patent_no_of_claims] => 1 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13417541 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 8260981 [patent_doc_number] => 20120160415 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2012-06-28 [patent_title] => 'MULTI-STEP DEPOSITION CONTROL' [patent_app_type] => utility [patent_app_number] => 13/416025 [patent_app_country] => US [patent_app_date] => 2012-03-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 6873 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13416025 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 8825299 [patent_doc_number] => 20130126344 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2013-05-23 [patent_title] => 'IGZO NANOPARTICLE AND MANUFACTURING METHOD AND USE THEREOF' [patent_app_type] => utility [patent_app_number] => 13/411215 [patent_app_country] => US [patent_app_date] => 2012-03-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 3174 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13411215 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10531121 [patent_doc_number] => 09257261 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2016-02-09 [patent_title] => 'Method for rapid switching between a high current mode and a low current mode in a charged particle beam system' [patent_app_type] => utility [patent_app_number] => 13/406207 [patent_app_country] => US [patent_app_date] => 2012-02-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 22 [patent_figures_cnt] => 30 [patent_no_of_words] => 13232 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 190 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13406207 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10554980 [patent_doc_number] => 09279179 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2016-03-08 [patent_title] => 'Multi coil target design' [patent_app_type] => utility [patent_app_number] => 13/366805 [patent_app_country] => US [patent_app_date] => 2012-02-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 11 [patent_no_of_words] => 4153 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 153 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13366805 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 8356189 [patent_doc_number] => 20120211354 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2012-08-23 [patent_title] => 'UNIFORMITY TUNING CAPABLE ESC GROUNDING KIT FOR RF PVD CHAMBER' [patent_app_type] => utility [patent_app_number] => 13/365876 [patent_app_country] => US [patent_app_date] => 2012-02-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 4352 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13365876 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 8332759 [patent_doc_number] => 20120199471 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2012-08-09 [patent_title] => 'FILM-FORMING APPARATUS AND FILM-FORMING METHOD' [patent_app_type] => utility [patent_app_number] => 13/359802 [patent_app_country] => US [patent_app_date] => 2012-01-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 16 [patent_no_of_words] => 9354 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13359802 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 9468217 [patent_doc_number] => 08721847 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2014-05-13 [patent_title] => 'Homing of arbitrary scan path of a rotating magnetron' [patent_app_type] => utility [patent_app_number] => 13/347030 [patent_app_country] => US [patent_app_date] => 2012-01-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 9 [patent_no_of_words] => 6795 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 127 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13347030 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 8900728 [patent_doc_number] => 20130168231 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2013-07-04 [patent_title] => 'Method For Sputter Deposition And RF Plasma Sputter Etch Combinatorial Processing' [patent_app_type] => utility [patent_app_number] => 13/341993 [patent_app_country] => US [patent_app_date] => 2011-12-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 8031 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13341993 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 9013486 [patent_doc_number] => 20130228450 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2013-09-05 [patent_title] => 'ELECTRODE FOR ELECTROLYTIC CELL' [patent_app_type] => utility [patent_app_number] => 13/885118 [patent_app_country] => US [patent_app_date] => 2011-12-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 2176 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13885118 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 8973162 [patent_doc_number] => 20130206592 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2013-08-15 [patent_title] => 'Ferromagnetic Sputtering Target' [patent_app_type] => utility [patent_app_number] => 13/881117 [patent_app_country] => US [patent_app_date] => 2011-12-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6296 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13881117 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10590482 [patent_doc_number] => 09312102 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2016-04-12 [patent_title] => 'Apparatus and method for processing substrate using ion beam' [patent_app_type] => utility [patent_app_number] => 13/315567 [patent_app_country] => US [patent_app_date] => 2011-12-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 8159 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 196 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13315567 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10205598 [patent_doc_number] => 20150090587 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-04-02 [patent_title] => 'ROTATABLE SPUTTER TARGET' [patent_app_type] => utility [patent_app_number] => 14/359014 [patent_app_country] => US [patent_app_date] => 2011-12-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 2939 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14359014 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 9008756 [patent_doc_number] => 08524050 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2013-09-03 [patent_title] => 'Stainless steel separator for fuel cell having M/MNx and MOyNz layer and method for manufacturing the same' [patent_app_type] => utility [patent_app_number] => 13/314758 [patent_app_country] => US [patent_app_date] => 2011-12-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 14 [patent_no_of_words] => 4925 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 195 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13314758 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 8841223 [patent_doc_number] => 20130136851 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2013-05-30 [patent_title] => 'METHOD OF FORMING ATO WITH HIGH THROUGHPUT AND ELLIPSOMETRY DIAGNOSTIC METHOD FOR THE TCO PROCESS' [patent_app_type] => utility [patent_app_number] => 13/307341 [patent_app_country] => US [patent_app_date] => 2011-11-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 4942 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13307341 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 9037715 [patent_doc_number] => 20130240353 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2013-09-19 [patent_title] => 'ION MILLING DEVICE AND ION MILLING PROCESSING METHOD' [patent_app_type] => utility [patent_app_number] => 13/988506 [patent_app_country] => US [patent_app_date] => 2011-11-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 9620 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13988506 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 9013488 [patent_doc_number] => 20130228452 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2013-09-05 [patent_title] => 'SOFT SPUTTERING MAGNETRON SYSTEM' [patent_app_type] => utility [patent_app_number] => 13/885905 [patent_app_country] => US [patent_app_date] => 2011-11-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 5894 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13885905 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 8132871 [patent_doc_number] => 20120090986 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2012-04-19 [patent_title] => 'Method of fabricating composite field emission source' [patent_app_type] => utility [patent_app_number] => 13/317955 [patent_app_country] => US [patent_app_date] => 2011-10-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 2701 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0090/20120090986.pdf [firstpage_image] =>[orig_patent_app_number] => 13317955 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 8164972 [patent_doc_number] => 20120103794 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2012-05-03 [patent_title] => 'METHOD OF COATING AN RF DEVICE AND SPUTTERING APPARATUS USED IN THE SAME' [patent_app_type] => utility [patent_app_number] => 13/282113 [patent_app_country] => US [patent_app_date] => 2011-10-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 3224 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0103/20120103794.pdf [firstpage_image] =>[orig_patent_app_number] => 13282113 [rel_patent_id] =>[rel_patent_doc_number] =>)