Search

Matthew M. Nelson

Examiner (ID: 9518, Phone: (571)270-5898 , Office: P/3732 )

Most Active Art Unit
3772
Art Unit(s)
3776, 3732, 3772
Total Applications
1023
Issued Applications
580
Pending Applications
98
Abandoned Applications
382

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 18488352 [patent_doc_number] => 20230215700 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-07-06 [patent_title] => SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 18/121611 [patent_app_country] => US [patent_app_date] => 2023-03-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11452 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -24 [patent_words_short_claim] => 86 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18121611 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/121611
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS Mar 14, 2023 Pending
Array ( [id] => 18611337 [patent_doc_number] => 20230278068 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-09-07 [patent_title] => AUTOMOTIVE PART IDENTIFICATION MARKING SYSTEM [patent_app_type] => utility [patent_app_number] => 18/178924 [patent_app_country] => US [patent_app_date] => 2023-03-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6003 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 147 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18178924 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/178924
Automotive part identification marking system Mar 5, 2023 Issued
Array ( [id] => 18473084 [patent_doc_number] => 20230207372 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-06-29 [patent_title] => REAL TIME BIAS DETECTION AND CORRECTION FOR ELECTROSTATIC CHUCK [patent_app_type] => utility [patent_app_number] => 18/176187 [patent_app_country] => US [patent_app_date] => 2023-02-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9042 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 167 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18176187 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/176187
Real time bias detection and correction for electrostatic chuck Feb 27, 2023 Issued
Array ( [id] => 20266979 [patent_doc_number] => 12437977 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-10-07 [patent_title] => Method for etching lithium niobate and method for forming lithium niobate pattern using the same [patent_app_type] => utility [patent_app_number] => 18/114295 [patent_app_country] => US [patent_app_date] => 2023-02-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 16 [patent_no_of_words] => 3249 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 140 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18114295 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/114295
Method for etching lithium niobate and method for forming lithium niobate pattern using the same Feb 26, 2023 Issued
Array ( [id] => 18643534 [patent_doc_number] => 11767595 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-09-26 [patent_title] => Chemical liquid, chemical liquid container, and method for treating substrate [patent_app_type] => utility [patent_app_number] => 18/158061 [patent_app_country] => US [patent_app_date] => 2023-01-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 4 [patent_no_of_words] => 14695 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 82 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18158061 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/158061
Chemical liquid, chemical liquid container, and method for treating substrate Jan 22, 2023 Issued
Array ( [id] => 18628695 [patent_doc_number] => 20230287574 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-09-14 [patent_title] => ETCHANT COMPOSITION FOR TITANIUM-CONTAINING METAL LAYER AND ETCHING METHOD USING THE SAME [patent_app_type] => utility [patent_app_number] => 18/156969 [patent_app_country] => US [patent_app_date] => 2023-01-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5689 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 34 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18156969 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/156969
Etchant composition for titanium-containing metal layer and etching method using the same Jan 18, 2023 Issued
Array ( [id] => 18585923 [patent_doc_number] => 20230268187 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-08-24 [patent_title] => ATOMIC LAYER ETCHING [patent_app_type] => utility [patent_app_number] => 18/156085 [patent_app_country] => US [patent_app_date] => 2023-01-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11044 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18156085 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/156085
Atomic layer etching Jan 17, 2023 Issued
Array ( [id] => 19321423 [patent_doc_number] => 20240242970 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-07-18 [patent_title] => PHOTOLITHOGRAPHY ENHANCEMENT TECHNIQUES [patent_app_type] => utility [patent_app_number] => 18/096207 [patent_app_country] => US [patent_app_date] => 2023-01-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7721 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 111 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18096207 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/096207
PHOTOLITHOGRAPHY ENHANCEMENT TECHNIQUES Jan 11, 2023 Pending
Array ( [id] => 18485091 [patent_doc_number] => 20230212414 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-07-06 [patent_title] => RESIN COMPOSITION, ANTI-ETCHING LAYER AND ETCHING METHOD [patent_app_type] => utility [patent_app_number] => 18/090522 [patent_app_country] => US [patent_app_date] => 2022-12-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5376 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 154 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18090522 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/090522
RESIN COMPOSITION, ANTI-ETCHING LAYER AND ETCHING METHOD Dec 28, 2022 Pending
Array ( [id] => 19285641 [patent_doc_number] => 20240222118 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-07-04 [patent_title] => METHODS FOR FORMING SEMICONDUCTOR DEVICES USING MODIFIED PHOTOMASK LAYER [patent_app_type] => utility [patent_app_number] => 18/090436 [patent_app_country] => US [patent_app_date] => 2022-12-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4194 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 72 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18090436 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/090436
Methods for forming semiconductor devices using modified photomask layer Dec 27, 2022 Issued
Array ( [id] => 19285596 [patent_doc_number] => 20240222073 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-07-04 [patent_title] => ION BEAM LITHOGRAPHY AND NANOENGINEERING [patent_app_type] => utility [patent_app_number] => 18/147636 [patent_app_country] => US [patent_app_date] => 2022-12-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4284 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 106 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18147636 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/147636
ION BEAM LITHOGRAPHY AND NANOENGINEERING Dec 27, 2022 Pending
Array ( [id] => 18339123 [patent_doc_number] => 20230131072 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-04-27 [patent_title] => DRY ETCHING METHOD OR DRY CLEANING METHOD [patent_app_type] => utility [patent_app_number] => 18/145343 [patent_app_country] => US [patent_app_date] => 2022-12-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5977 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -10 [patent_words_short_claim] => 100 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18145343 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/145343
Dry etching method or dry cleaning method Dec 21, 2022 Issued
Array ( [id] => 19252697 [patent_doc_number] => 20240203694 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-06-20 [patent_title] => ETCHING METHOD AND ETCHING APPARATUS [patent_app_type] => utility [patent_app_number] => 18/067917 [patent_app_country] => US [patent_app_date] => 2022-12-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6941 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 128 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18067917 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/067917
Etching method and etching apparatus Dec 18, 2022 Issued
Array ( [id] => 18451889 [patent_doc_number] => 20230193168 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-06-22 [patent_title] => METHOD OF REDUCING DEFECTS ON POLISHED WAFERS [patent_app_type] => utility [patent_app_number] => 18/081738 [patent_app_country] => US [patent_app_date] => 2022-12-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3697 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 96 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18081738 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/081738
METHOD OF REDUCING DEFECTS ON POLISHED WAFERS Dec 14, 2022 Pending
Array ( [id] => 20433172 [patent_doc_number] => 12503363 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-12-23 [patent_title] => Cubic boron nitride particle population with highly-etched particle surface and high toughness index [patent_app_type] => utility [patent_app_number] => 18/065890 [patent_app_country] => US [patent_app_date] => 2022-12-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 14 [patent_no_of_words] => 0 [patent_no_of_claims] => 4 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 214 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18065890 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/065890
Cubic boron nitride particle population with highly-etched particle surface and high toughness index Dec 13, 2022 Issued
Array ( [id] => 20251059 [patent_doc_number] => 20250299928 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2025-09-25 [patent_title] => PLASMA PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 18/691760 [patent_app_country] => US [patent_app_date] => 2022-12-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5732 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -7 [patent_words_short_claim] => 66 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18691760 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/691760
PLASMA PROCESSING METHOD Dec 12, 2022 Pending
Array ( [id] => 18308590 [patent_doc_number] => 20230112490 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-04-13 [patent_title] => METHOD FOR DEPOSITING SILICON OXIDE FILM HAVING IMPROVED QUALITY BY PEALD USING BIS(DIETHYLAMINO)SILANE [patent_app_type] => utility [patent_app_number] => 18/077280 [patent_app_country] => US [patent_app_date] => 2022-12-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6109 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -14 [patent_words_short_claim] => 130 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18077280 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/077280
Method for depositing silicon oxide film having improved quality by PEALD using bis(diethylamino)silane Dec 7, 2022 Issued
Array ( [id] => 18376411 [patent_doc_number] => 20230151495 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-05-18 [patent_title] => ATOMIC LAYER ROUGHNESS REDUCING METHODS AND DEVICES [patent_app_type] => utility [patent_app_number] => 17/988734 [patent_app_country] => US [patent_app_date] => 2022-11-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11670 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17988734 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/988734
Atomic layer roughness reducing methods and devices Nov 15, 2022 Issued
Array ( [id] => 18323118 [patent_doc_number] => 20230121246 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-04-20 [patent_title] => METHODS FOR WET ETCHING OF NOBLE METALS [patent_app_type] => utility [patent_app_number] => 17/986160 [patent_app_country] => US [patent_app_date] => 2022-11-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 16062 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -21 [patent_words_short_claim] => 163 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17986160 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/986160
Methods for wet etching of noble metals Nov 13, 2022 Issued
Array ( [id] => 18212536 [patent_doc_number] => 20230058800 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-02-23 [patent_title] => Slurry Compositions For Chemical Mechanical Planarization [patent_app_type] => utility [patent_app_number] => 17/982028 [patent_app_country] => US [patent_app_date] => 2022-11-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10589 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 144 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17982028 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/982028
Slurry compositions for chemical mechanical planarization Nov 6, 2022 Issued
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