Maureen Gramaglia Passey

Array ( [id] => 5468962 [patent_doc_number] => 20090242128 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2009-10-01 [patent_title] => 'PLASMA PROCESSING APPARATUS AND METHOD' [patent_app_type] => utility [patent_app_number] => 12/411814 [patent_app_country] => US [patent_app_date] => 2009-03-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 5920 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0242/20090242128.pdf [firstpage_image] =>[orig_patent_app_number] => 12411814 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6345074 [patent_doc_number] => 20100248397 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2010-09-30 [patent_title] => 'High temperature susceptor having improved processing uniformity' [patent_app_type] => utility [patent_app_number] => 12/411603 [patent_app_country] => US [patent_app_date] => 2009-03-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 5320 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0248/20100248397.pdf [firstpage_image] =>[orig_patent_app_number] => 12411603 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6160412 [patent_doc_number] => 20110159214 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2011-06-30 [patent_title] => 'GOLD-COATED POLYSILICON REACTOR SYSTEM AND METHOD' [patent_app_type] => utility [patent_app_number] => 12/934160 [patent_app_country] => US [patent_app_date] => 2009-03-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 3942 [patent_no_of_claims] => 23 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0159/20110159214.pdf [firstpage_image] =>[orig_patent_app_number] => 12934160 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5468968 [patent_doc_number] => 20090242134 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2009-10-01 [patent_title] => 'PLASMA PROCESSING APPARATUS' [patent_app_type] => utility [patent_app_number] => 12/410809 [patent_app_country] => US [patent_app_date] => 2009-03-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 6704 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0242/20090242134.pdf [firstpage_image] =>[orig_patent_app_number] => 12410809 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 8457404 [patent_doc_number] => 08293068 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2012-10-23 [patent_title] => 'Plasma processing apparatus' [patent_app_type] => utility [patent_app_number] => 12/410943 [patent_app_country] => US [patent_app_date] => 2009-03-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 11 [patent_no_of_words] => 8917 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 241 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 12410943 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5468967 [patent_doc_number] => 20090242133 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2009-10-01 [patent_title] => 'ELECTRODE STRUCTURE AND SUBSTRATE PROCESSING APPARATUS' [patent_app_type] => utility [patent_app_number] => 12/407109 [patent_app_country] => US [patent_app_date] => 2009-03-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 4627 [patent_no_of_claims] => 4 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0242/20090242133.pdf [firstpage_image] =>[orig_patent_app_number] => 12407109 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5529969 [patent_doc_number] => 20090229757 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2009-09-17 [patent_title] => 'PLASMA PROCESSING APPARATUS' [patent_app_type] => utility [patent_app_number] => 12/401864 [patent_app_country] => US [patent_app_date] => 2009-03-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 3793 [patent_no_of_claims] => 5 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0229/20090229757.pdf [firstpage_image] =>[orig_patent_app_number] => 12401864 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5529971 [patent_doc_number] => 20090229759 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2009-09-17 [patent_title] => 'ANNULAR ASSEMBLY FOR PLASMA PROCESSING, PLASMA PROCESSING APPARATUS, AND OUTER ANNULAR MEMBER' [patent_app_type] => utility [patent_app_number] => 12/399375 [patent_app_country] => US [patent_app_date] => 2009-03-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 5896 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0229/20090229759.pdf [firstpage_image] =>[orig_patent_app_number] => 12399375 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5382688 [patent_doc_number] => 20090223932 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2009-09-10 [patent_title] => 'ELECTRODE UNIT, SUBSTRATE PROCESSING APPARATUS, AND TEMPERATURE CONTROL METHOD FOR ELECTRODE UNIT' [patent_app_type] => utility [patent_app_number] => 12/397708 [patent_app_country] => US [patent_app_date] => 2009-03-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 6609 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0223/20090223932.pdf [firstpage_image] =>[orig_patent_app_number] => 12397708 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5382686 [patent_doc_number] => 20090223930 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2009-09-10 [patent_title] => 'APPARATUS FOR ETCHING SUBSTRATE AND METHOD OF ETCHING SUBSTRATE USING THE SAME' [patent_app_type] => utility [patent_app_number] => 12/395702 [patent_app_country] => US [patent_app_date] => 2009-03-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 19 [patent_figures_cnt] => 19 [patent_no_of_words] => 5846 [patent_no_of_claims] => 22 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0223/20090223930.pdf [firstpage_image] =>[orig_patent_app_number] => 12395702 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5498752 [patent_doc_number] => 20090159440 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2009-06-25 [patent_title] => 'Batch-Type Remote Plasma Processing Apparatus' [patent_app_type] => utility [patent_app_number] => 12/390291 [patent_app_country] => US [patent_app_date] => 2009-02-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 16 [patent_no_of_words] => 6277 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0159/20090159440.pdf [firstpage_image] =>[orig_patent_app_number] => 12390291 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5529846 [patent_doc_number] => 20090229634 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2009-09-17 [patent_title] => 'SUBSTRATE PROCESSING APPARATUS' [patent_app_type] => utility [patent_app_number] => 12/389431 [patent_app_country] => US [patent_app_date] => 2009-02-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 15 [patent_no_of_words] => 11642 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0229/20090229634.pdf [firstpage_image] =>[orig_patent_app_number] => 12389431 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5388746 [patent_doc_number] => 20090206058 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2009-08-20 [patent_title] => 'PLASMA PROCESSING APPARATUS AND METHOD, AND STORAGE MEDIUM' [patent_app_type] => utility [patent_app_number] => 12/372156 [patent_app_country] => US [patent_app_date] => 2009-02-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 7510 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0206/20090206058.pdf [firstpage_image] =>[orig_patent_app_number] => 12372156 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5523952 [patent_doc_number] => 20090194028 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2009-08-06 [patent_title] => 'PLASMA PROCESSING DEVICE' [patent_app_type] => utility [patent_app_number] => 12/368487 [patent_app_country] => US [patent_app_date] => 2009-02-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 2065 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0194/20090194028.pdf [firstpage_image] =>[orig_patent_app_number] => 12368487 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5391800 [patent_doc_number] => 20090209113 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2009-08-20 [patent_title] => 'SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND CEILING INSULATING PART' [patent_app_type] => utility [patent_app_number] => 12/367751 [patent_app_country] => US [patent_app_date] => 2009-02-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 24 [patent_figures_cnt] => 24 [patent_no_of_words] => 9857 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0209/20090209113.pdf [firstpage_image] =>[orig_patent_app_number] => 12367751 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 9412826 [patent_doc_number] => 08696862 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2014-04-15 [patent_title] => 'Substrate mounting table, substrate processing apparatus and substrate temperature control method' [patent_app_type] => utility [patent_app_number] => 12/366177 [patent_app_country] => US [patent_app_date] => 2009-02-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 11 [patent_no_of_words] => 4591 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 171 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 12366177 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 9691094 [patent_doc_number] => 08821684 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2014-09-02 [patent_title] => 'Substrate plasma processing apparatus and plasma processing method' [patent_app_type] => utility [patent_app_number] => 12/363070 [patent_app_country] => US [patent_app_date] => 2009-01-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 17 [patent_no_of_words] => 5630 [patent_no_of_claims] => 5 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 191 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 12363070 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5523947 [patent_doc_number] => 20090194023 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2009-08-06 [patent_title] => 'Plasma processing apparatus' [patent_app_type] => utility [patent_app_number] => 12/320262 [patent_app_country] => US [patent_app_date] => 2009-01-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 3766 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0194/20090194023.pdf [firstpage_image] =>[orig_patent_app_number] => 12320262 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4642914 [patent_doc_number] => 08020514 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2011-09-20 [patent_title] => 'Batch-type remote plasma processing apparatus' [patent_app_type] => utility [patent_app_number] => 12/357213 [patent_app_country] => US [patent_app_date] => 2009-01-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 15 [patent_no_of_words] => 6387 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 190 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/08/020/08020514.pdf [firstpage_image] =>[orig_patent_app_number] => 12357213 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5406892 [patent_doc_number] => 20090120790 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2009-05-14 [patent_title] => 'LOW CONTAMINATION COMPONENTS FOR SEMICONDUCTOR PROCESSING APPARATUS AND METHODS FOR MAKING COMPONENTS' [patent_app_type] => utility [patent_app_number] => 12/349949 [patent_app_country] => US [patent_app_date] => 2009-01-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 7591 [patent_no_of_claims] => 40 [patent_no_of_ind_claims] => 18 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0120/20090120790.pdf [firstpage_image] =>[orig_patent_app_number] => 12349949 [rel_patent_id] =>[rel_patent_doc_number] =>)