Search

Meera Natarajan

Examiner (ID: 11893, Phone: (571)270-3058 , Office: P/1643 )

Most Active Art Unit
1643
Art Unit(s)
1643
Total Applications
1081
Issued Applications
634
Pending Applications
80
Abandoned Applications
380

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 18408868 [patent_doc_number] => 20230170221 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-06-01 [patent_title] => ETCH PROCESS AND A PROCESSING ASSEMBLY [patent_app_type] => utility [patent_app_number] => 18/056169 [patent_app_country] => US [patent_app_date] => 2022-11-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12319 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 61 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18056169 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/056169
Etch process and a processing assembly Nov 15, 2022 Issued
Array ( [id] => 18267612 [patent_doc_number] => 20230088854 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-03-23 [patent_title] => CLEANING LIQUID AND METHOD FOR CLEANING SEMICONDUCTOR SUBSTRATE [patent_app_type] => utility [patent_app_number] => 18/055145 [patent_app_country] => US [patent_app_date] => 2022-11-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 21290 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 29 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18055145 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/055145
CLEANING LIQUID AND METHOD FOR CLEANING SEMICONDUCTOR SUBSTRATE Nov 13, 2022 Pending
Array ( [id] => 19100980 [patent_doc_number] => 20240120208 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-04-11 [patent_title] => METHOD FOR FABRICATING SPACER [patent_app_type] => utility [patent_app_number] => 17/983426 [patent_app_country] => US [patent_app_date] => 2022-11-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 2613 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 58 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17983426 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/983426
METHOD FOR FABRICATING SPACER Nov 8, 2022 Pending
Array ( [id] => 18272422 [patent_doc_number] => 20230093664 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-03-23 [patent_title] => SILICON-CONTAINING COMPOSITION AND METHOD FOR MANUFACTURING SEMICONDUCTOR SUBSTRATE [patent_app_type] => utility [patent_app_number] => 17/974618 [patent_app_country] => US [patent_app_date] => 2022-10-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 13155 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 63 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17974618 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/974618
SILICON-CONTAINING COMPOSITION AND METHOD FOR MANUFACTURING SEMICONDUCTOR SUBSTRATE Oct 26, 2022 Pending
Array ( [id] => 19176068 [patent_doc_number] => 20240162042 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-05-16 [patent_title] => ETCHING METHODS WITH ALTERNATING NON-PLASMA AND PLASMA ETCHING PROCESSES [patent_app_type] => utility [patent_app_number] => 17/974246 [patent_app_country] => US [patent_app_date] => 2022-10-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10796 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 126 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17974246 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/974246
Etching methods with alternating non-plasma and plasma etching processes Oct 25, 2022 Issued
Array ( [id] => 18338436 [patent_doc_number] => 20230130385 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-04-27 [patent_title] => METHOD FOR FORMING A PATTERN [patent_app_type] => utility [patent_app_number] => 18/048618 [patent_app_country] => US [patent_app_date] => 2022-10-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7826 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -20 [patent_words_short_claim] => 41 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18048618 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/048618
METHOD FOR FORMING A PATTERN Oct 20, 2022 Pending
Array ( [id] => 18337342 [patent_doc_number] => 20230129291 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-04-27 [patent_title] => BEVEL ETCHER USING ATMOSPHERIC PLASMA [patent_app_type] => utility [patent_app_number] => 17/970987 [patent_app_country] => US [patent_app_date] => 2022-10-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5239 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 59 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17970987 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/970987
BEVEL ETCHER USING ATMOSPHERIC PLASMA Oct 20, 2022 Pending
Array ( [id] => 18323511 [patent_doc_number] => 20230121639 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-04-20 [patent_title] => SELECTIVE WET ETCH COMPOSITION AND METHOD [patent_app_type] => utility [patent_app_number] => 17/968286 [patent_app_country] => US [patent_app_date] => 2022-10-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5823 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 76 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17968286 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/968286
SELECTIVE WET ETCH COMPOSITION AND METHOD Oct 17, 2022 Pending
Array ( [id] => 18322086 [patent_doc_number] => 20230120214 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-04-20 [patent_title] => METHOD FOR CONTROLLING WET ETCH RATE (WER) SELECTIVITY [patent_app_type] => utility [patent_app_number] => 17/965559 [patent_app_country] => US [patent_app_date] => 2022-10-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6443 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 143 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17965559 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/965559
METHOD FOR CONTROLLING WET ETCH RATE (WER) SELECTIVITY Oct 12, 2022 Pending
Array ( [id] => 20387659 [patent_doc_number] => 12487384 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-12-02 [patent_title] => Method forming grating device [patent_app_type] => utility [patent_app_number] => 17/955800 [patent_app_country] => US [patent_app_date] => 2022-09-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 20 [patent_no_of_words] => 3287 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 145 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17955800 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/955800
Method forming grating device Sep 28, 2022 Issued
Array ( [id] => 19054631 [patent_doc_number] => 20240096600 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-03-21 [patent_title] => Substrate Bombardment with Ions having Targeted Mass using Pulsed Bias Phase Control [patent_app_type] => utility [patent_app_number] => 17/945408 [patent_app_country] => US [patent_app_date] => 2022-09-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 15977 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 143 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17945408 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/945408
Substrate bombardment with ions having targeted mass using pulsed bias phase control Sep 14, 2022 Issued
Array ( [id] => 19007732 [patent_doc_number] => 20240071803 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-02-29 [patent_title] => METHODS AND SYSTEMS FOR DRY ETCHING [patent_app_type] => utility [patent_app_number] => 17/899821 [patent_app_country] => US [patent_app_date] => 2022-08-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5980 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 34 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17899821 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/899821
METHODS AND SYSTEMS FOR DRY ETCHING Aug 30, 2022 Pending
Array ( [id] => 20598143 [patent_doc_number] => 12581882 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2026-03-17 [patent_title] => Substrate processing method, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium [patent_app_type] => utility [patent_app_number] => 17/897275 [patent_app_country] => US [patent_app_date] => 2022-08-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 16 [patent_no_of_words] => 4386 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 91 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17897275 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/897275
Substrate processing method, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium Aug 28, 2022 Issued
Array ( [id] => 18394765 [patent_doc_number] => 20230162986 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-05-25 [patent_title] => Method for Improving Plasma Distribution in Etching [patent_app_type] => utility [patent_app_number] => 17/888615 [patent_app_country] => US [patent_app_date] => 2022-08-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 1530 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -5 [patent_words_short_claim] => 157 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17888615 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/888615
Method for improving plasma distribution in etching Aug 15, 2022 Issued
Array ( [id] => 19531745 [patent_doc_number] => 20240355647 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-10-24 [patent_title] => SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM [patent_app_type] => utility [patent_app_number] => 18/686540 [patent_app_country] => US [patent_app_date] => 2022-08-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9990 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 88 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18686540 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/686540
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM Aug 4, 2022 Pending
Array ( [id] => 18198699 [patent_doc_number] => 20230052218 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-02-16 [patent_title] => METHOD OF SiC WAFER PROCESSING [patent_app_type] => utility [patent_app_number] => 17/861254 [patent_app_country] => US [patent_app_date] => 2022-07-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 2779 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -10 [patent_words_short_claim] => 93 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17861254 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/861254
METHOD OF SiC WAFER PROCESSING Jul 10, 2022 Abandoned
Array ( [id] => 17933197 [patent_doc_number] => 20220328323 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-10-13 [patent_title] => ETCHING METHOD AND PLASMA PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/852395 [patent_app_country] => US [patent_app_date] => 2022-06-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 14410 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => 0 [patent_words_short_claim] => 128 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17852395 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/852395
Etching method and plasma processing apparatus Jun 28, 2022 Issued
Array ( [id] => 18631791 [patent_doc_number] => 20230290696 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-09-14 [patent_title] => SEMICONDUCTOR TEST STRUCTURE AND METHOD FOR MANUFACTURING SAME [patent_app_type] => utility [patent_app_number] => 17/849004 [patent_app_country] => US [patent_app_date] => 2022-06-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6131 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 32 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17849004 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/849004
Semiconductor test structure and method for manufacturing same Jun 23, 2022 Issued
Array ( [id] => 18585928 [patent_doc_number] => 20230268192 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-08-24 [patent_title] => IN-SITU HYDROCARBON-BASED LAYER FOR NON-CONFORMAL PASSIVATION OF PARTIALLY ETCHED STRUCTURES [patent_app_type] => utility [patent_app_number] => 18/012194 [patent_app_country] => US [patent_app_date] => 2022-06-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5728 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -21 [patent_words_short_claim] => 111 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18012194 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/012194
IN-SITU HYDROCARBON-BASED LAYER FOR NON-CONFORMAL PASSIVATION OF PARTIALLY ETCHED STRUCTURES Jun 12, 2022 Pending
Array ( [id] => 18570461 [patent_doc_number] => 20230260798 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-08-17 [patent_title] => CHEMISTRY FOR HIGH ASPECT RATIO ETCH FOR 3D-NAND [patent_app_type] => utility [patent_app_number] => 18/003146 [patent_app_country] => US [patent_app_date] => 2022-05-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10431 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18003146 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/003146
CHEMISTRY FOR HIGH ASPECT RATIO ETCH FOR 3D-NAND May 23, 2022 Abandoned
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