
Meera Natarajan
Examiner (ID: 11893, Phone: (571)270-3058 , Office: P/1643 )
| Most Active Art Unit | 1643 |
| Art Unit(s) | 1643 |
| Total Applications | 1081 |
| Issued Applications | 634 |
| Pending Applications | 80 |
| Abandoned Applications | 380 |
Applications
| Application number | Title of the application | Filing Date | Status |
|---|---|---|---|
Array
(
[id] => 18408868
[patent_doc_number] => 20230170221
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2023-06-01
[patent_title] => ETCH PROCESS AND A PROCESSING ASSEMBLY
[patent_app_type] => utility
[patent_app_number] => 18/056169
[patent_app_country] => US
[patent_app_date] => 2022-11-16
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 12319
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -18
[patent_words_short_claim] => 61
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18056169
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/056169 | Etch process and a processing assembly | Nov 15, 2022 | Issued |
Array
(
[id] => 18267612
[patent_doc_number] => 20230088854
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2023-03-23
[patent_title] => CLEANING LIQUID AND METHOD FOR CLEANING SEMICONDUCTOR SUBSTRATE
[patent_app_type] => utility
[patent_app_number] => 18/055145
[patent_app_country] => US
[patent_app_date] => 2022-11-14
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 21290
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -19
[patent_words_short_claim] => 29
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18055145
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/055145 | CLEANING LIQUID AND METHOD FOR CLEANING SEMICONDUCTOR SUBSTRATE | Nov 13, 2022 | Pending |
Array
(
[id] => 19100980
[patent_doc_number] => 20240120208
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2024-04-11
[patent_title] => METHOD FOR FABRICATING SPACER
[patent_app_type] => utility
[patent_app_number] => 17/983426
[patent_app_country] => US
[patent_app_date] => 2022-11-09
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 2613
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -9
[patent_words_short_claim] => 58
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17983426
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/983426 | METHOD FOR FABRICATING SPACER | Nov 8, 2022 | Pending |
Array
(
[id] => 18272422
[patent_doc_number] => 20230093664
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2023-03-23
[patent_title] => SILICON-CONTAINING COMPOSITION AND METHOD FOR MANUFACTURING SEMICONDUCTOR SUBSTRATE
[patent_app_type] => utility
[patent_app_number] => 17/974618
[patent_app_country] => US
[patent_app_date] => 2022-10-27
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 13155
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 63
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17974618
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/974618 | SILICON-CONTAINING COMPOSITION AND METHOD FOR MANUFACTURING SEMICONDUCTOR SUBSTRATE | Oct 26, 2022 | Pending |
Array
(
[id] => 19176068
[patent_doc_number] => 20240162042
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2024-05-16
[patent_title] => ETCHING METHODS WITH ALTERNATING NON-PLASMA AND PLASMA ETCHING PROCESSES
[patent_app_type] => utility
[patent_app_number] => 17/974246
[patent_app_country] => US
[patent_app_date] => 2022-10-26
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 10796
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 126
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17974246
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/974246 | Etching methods with alternating non-plasma and plasma etching processes | Oct 25, 2022 | Issued |
Array
(
[id] => 18338436
[patent_doc_number] => 20230130385
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2023-04-27
[patent_title] => METHOD FOR FORMING A PATTERN
[patent_app_type] => utility
[patent_app_number] => 18/048618
[patent_app_country] => US
[patent_app_date] => 2022-10-21
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 7826
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -20
[patent_words_short_claim] => 41
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18048618
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/048618 | METHOD FOR FORMING A PATTERN | Oct 20, 2022 | Pending |
Array
(
[id] => 18337342
[patent_doc_number] => 20230129291
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2023-04-27
[patent_title] => BEVEL ETCHER USING ATMOSPHERIC PLASMA
[patent_app_type] => utility
[patent_app_number] => 17/970987
[patent_app_country] => US
[patent_app_date] => 2022-10-21
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 5239
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -19
[patent_words_short_claim] => 59
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17970987
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/970987 | BEVEL ETCHER USING ATMOSPHERIC PLASMA | Oct 20, 2022 | Pending |
Array
(
[id] => 18323511
[patent_doc_number] => 20230121639
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2023-04-20
[patent_title] => SELECTIVE WET ETCH COMPOSITION AND METHOD
[patent_app_type] => utility
[patent_app_number] => 17/968286
[patent_app_country] => US
[patent_app_date] => 2022-10-18
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 5823
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -18
[patent_words_short_claim] => 76
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17968286
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/968286 | SELECTIVE WET ETCH COMPOSITION AND METHOD | Oct 17, 2022 | Pending |
Array
(
[id] => 18322086
[patent_doc_number] => 20230120214
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2023-04-20
[patent_title] => METHOD FOR CONTROLLING WET ETCH RATE (WER) SELECTIVITY
[patent_app_type] => utility
[patent_app_number] => 17/965559
[patent_app_country] => US
[patent_app_date] => 2022-10-13
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 6443
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 143
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17965559
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/965559 | METHOD FOR CONTROLLING WET ETCH RATE (WER) SELECTIVITY | Oct 12, 2022 | Pending |
Array
(
[id] => 20387659
[patent_doc_number] => 12487384
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2025-12-02
[patent_title] => Method forming grating device
[patent_app_type] => utility
[patent_app_number] => 17/955800
[patent_app_country] => US
[patent_app_date] => 2022-09-29
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 10
[patent_figures_cnt] => 20
[patent_no_of_words] => 3287
[patent_no_of_claims] => 19
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 145
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17955800
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/955800 | Method forming grating device | Sep 28, 2022 | Issued |
Array
(
[id] => 19054631
[patent_doc_number] => 20240096600
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2024-03-21
[patent_title] => Substrate Bombardment with Ions having Targeted Mass using Pulsed Bias Phase Control
[patent_app_type] => utility
[patent_app_number] => 17/945408
[patent_app_country] => US
[patent_app_date] => 2022-09-15
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 15977
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 143
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17945408
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/945408 | Substrate bombardment with ions having targeted mass using pulsed bias phase control | Sep 14, 2022 | Issued |
Array
(
[id] => 19007732
[patent_doc_number] => 20240071803
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2024-02-29
[patent_title] => METHODS AND SYSTEMS FOR DRY ETCHING
[patent_app_type] => utility
[patent_app_number] => 17/899821
[patent_app_country] => US
[patent_app_date] => 2022-08-31
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 5980
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 34
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17899821
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/899821 | METHODS AND SYSTEMS FOR DRY ETCHING | Aug 30, 2022 | Pending |
Array
(
[id] => 20598143
[patent_doc_number] => 12581882
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2026-03-17
[patent_title] => Substrate processing method, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
[patent_app_type] => utility
[patent_app_number] => 17/897275
[patent_app_country] => US
[patent_app_date] => 2022-08-29
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 10
[patent_figures_cnt] => 16
[patent_no_of_words] => 4386
[patent_no_of_claims] => 16
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 91
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17897275
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/897275 | Substrate processing method, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Aug 28, 2022 | Issued |
Array
(
[id] => 18394765
[patent_doc_number] => 20230162986
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2023-05-25
[patent_title] => Method for Improving Plasma Distribution in Etching
[patent_app_type] => utility
[patent_app_number] => 17/888615
[patent_app_country] => US
[patent_app_date] => 2022-08-16
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 1530
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -5
[patent_words_short_claim] => 157
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17888615
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/888615 | Method for improving plasma distribution in etching | Aug 15, 2022 | Issued |
Array
(
[id] => 19531745
[patent_doc_number] => 20240355647
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2024-10-24
[patent_title] => SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
[patent_app_type] => utility
[patent_app_number] => 18/686540
[patent_app_country] => US
[patent_app_date] => 2022-08-05
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 9990
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -12
[patent_words_short_claim] => 88
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18686540
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/686540 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM | Aug 4, 2022 | Pending |
Array
(
[id] => 18198699
[patent_doc_number] => 20230052218
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2023-02-16
[patent_title] => METHOD OF SiC WAFER PROCESSING
[patent_app_type] => utility
[patent_app_number] => 17/861254
[patent_app_country] => US
[patent_app_date] => 2022-07-11
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 2779
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -10
[patent_words_short_claim] => 93
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17861254
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/861254 | METHOD OF SiC WAFER PROCESSING | Jul 10, 2022 | Abandoned |
Array
(
[id] => 17933197
[patent_doc_number] => 20220328323
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2022-10-13
[patent_title] => ETCHING METHOD AND PLASMA PROCESSING APPARATUS
[patent_app_type] => utility
[patent_app_number] => 17/852395
[patent_app_country] => US
[patent_app_date] => 2022-06-29
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 14410
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => 0
[patent_words_short_claim] => 128
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17852395
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/852395 | Etching method and plasma processing apparatus | Jun 28, 2022 | Issued |
Array
(
[id] => 18631791
[patent_doc_number] => 20230290696
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2023-09-14
[patent_title] => SEMICONDUCTOR TEST STRUCTURE AND METHOD FOR MANUFACTURING SAME
[patent_app_type] => utility
[patent_app_number] => 17/849004
[patent_app_country] => US
[patent_app_date] => 2022-06-24
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 6131
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -13
[patent_words_short_claim] => 32
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17849004
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/849004 | Semiconductor test structure and method for manufacturing same | Jun 23, 2022 | Issued |
Array
(
[id] => 18585928
[patent_doc_number] => 20230268192
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2023-08-24
[patent_title] => IN-SITU HYDROCARBON-BASED LAYER FOR NON-CONFORMAL PASSIVATION OF PARTIALLY ETCHED STRUCTURES
[patent_app_type] => utility
[patent_app_number] => 18/012194
[patent_app_country] => US
[patent_app_date] => 2022-06-13
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 5728
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -21
[patent_words_short_claim] => 111
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18012194
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/012194 | IN-SITU HYDROCARBON-BASED LAYER FOR NON-CONFORMAL PASSIVATION OF PARTIALLY ETCHED STRUCTURES | Jun 12, 2022 | Pending |
Array
(
[id] => 18570461
[patent_doc_number] => 20230260798
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2023-08-17
[patent_title] => CHEMISTRY FOR HIGH ASPECT RATIO ETCH FOR 3D-NAND
[patent_app_type] => utility
[patent_app_number] => 18/003146
[patent_app_country] => US
[patent_app_date] => 2022-05-24
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 10431
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -19
[patent_words_short_claim] => 2
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18003146
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/003146 | CHEMISTRY FOR HIGH ASPECT RATIO ETCH FOR 3D-NAND | May 23, 2022 | Abandoned |