Melissa J. Koval

Array ( [id] => 10363990 [patent_doc_number] => 20150248995 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-09-03 [patent_title] => 'RADIOFREQUENCY ADJUSTMENT FOR INSTABILITY MANAGEMENT IN SEMICONDUCTOR PROCESSING' [patent_app_type] => utility [patent_app_number] => 14/714576 [patent_app_country] => US [patent_app_date] => 2015-05-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 5643 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14714576 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16067483 [patent_doc_number] => 10692702 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-06-23 [patent_title] => Apparatus for treating substrate [patent_app_type] => utility [patent_app_number] => 14/663658 [patent_app_country] => US [patent_app_date] => 2015-03-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 12 [patent_no_of_words] => 5136 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 280 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14663658 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10367468 [patent_doc_number] => 20150252473 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-09-10 [patent_title] => 'PLASMA FORELINE THERMAL REACTOR SYSTEM' [patent_app_type] => utility [patent_app_number] => 14/630631 [patent_app_country] => US [patent_app_date] => 2015-02-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 5061 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14630631 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10385141 [patent_doc_number] => 20150270148 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-09-24 [patent_title] => 'ETCHING APPARATUS' [patent_app_type] => utility [patent_app_number] => 14/627002 [patent_app_country] => US [patent_app_date] => 2015-02-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 9142 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14627002 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15541487 [patent_doc_number] => 10570512 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-02-25 [patent_title] => Substrate processing apparatus [patent_app_type] => utility [patent_app_number] => 14/624799 [patent_app_country] => US [patent_app_date] => 2015-02-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 14 [patent_no_of_words] => 9293 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 313 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14624799 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 13283101 [patent_doc_number] => 10153141 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2018-12-11 [patent_title] => Apparatus for monitoring gas and plasma process equipment including the same [patent_app_type] => utility [patent_app_number] => 14/621739 [patent_app_country] => US [patent_app_date] => 2015-02-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 8 [patent_no_of_words] => 4095 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 275 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14621739 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 14367329 [patent_doc_number] => 10304979 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-05-28 [patent_title] => In situ nitrogen doping of co-evaporated copper-zinc-tin-sulfo-selenide by nitrogen plasma [patent_app_type] => utility [patent_app_number] => 14/609985 [patent_app_country] => US [patent_app_date] => 2015-01-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 5 [patent_no_of_words] => 3093 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 174 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14609985 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10336470 [patent_doc_number] => 20150221475 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-08-06 [patent_title] => 'PLASMA PROCESSING DEVICE AND PLASMA PROCESSING METHOD' [patent_app_type] => utility [patent_app_number] => 14/606925 [patent_app_country] => US [patent_app_date] => 2015-01-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 5396 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14606925 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10474062 [patent_doc_number] => 20150359079 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-12-10 [patent_title] => 'Etching Apparatus Using Inductively Coupled Plasma' [patent_app_type] => utility [patent_app_number] => 14/598313 [patent_app_country] => US [patent_app_date] => 2015-01-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 4790 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14598313 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10244134 [patent_doc_number] => 20150129130 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-05-14 [patent_title] => 'SYSTEMS TO IMPROVE FRONT-SIDE PROCESS UNIFORMITY BY BACK-SIDE METALLIZATION' [patent_app_type] => utility [patent_app_number] => 14/595024 [patent_app_country] => US [patent_app_date] => 2015-01-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 5883 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14595024 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10282173 [patent_doc_number] => 20150167171 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-06-18 [patent_title] => 'PROCESSING APPARATUS AND ACTIVE SPECIES GENERATING METHOD' [patent_app_type] => utility [patent_app_number] => 14/573765 [patent_app_country] => US [patent_app_date] => 2014-12-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 5291 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14573765 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 13816041 [patent_doc_number] => 10184786 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-01-22 [patent_title] => Wear amount measuring apparatus and method, temperature measuring apparatus and method and substrate processing system [patent_app_type] => utility [patent_app_number] => 14/569990 [patent_app_country] => US [patent_app_date] => 2014-12-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 7 [patent_no_of_words] => 7747 [patent_no_of_claims] => 5 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 392 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14569990 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10817351 [patent_doc_number] => 20160163513 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-06-09 [patent_title] => 'PLASMA PROCESSING SYSTEM WITH DIRECT OUTLET TOROIDAL PLASMA SOURCE' [patent_app_type] => utility [patent_app_number] => 14/565077 [patent_app_country] => US [patent_app_date] => 2014-12-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 14 [patent_no_of_words] => 7851 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14565077 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11911135 [patent_doc_number] => 09779954 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2017-10-03 [patent_title] => 'Method for etching silicon layer and plasma processing apparatus' [patent_app_type] => utility [patent_app_number] => 14/557659 [patent_app_country] => US [patent_app_date] => 2014-12-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 15 [patent_no_of_words] => 9070 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 324 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14557659 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10747320 [patent_doc_number] => 20160093471 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-03-31 [patent_title] => 'Rotating RF Electric Field Antenna For Uniform Plasma Generation' [patent_app_type] => utility [patent_app_number] => 14/553870 [patent_app_country] => US [patent_app_date] => 2014-11-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 5134 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14553870 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10244138 [patent_doc_number] => 20150129133 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-05-14 [patent_title] => 'PLASMA DEVICE' [patent_app_type] => utility [patent_app_number] => 14/539185 [patent_app_country] => US [patent_app_date] => 2014-11-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 4280 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14539185 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15249967 [patent_doc_number] => 10510511 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-12-17 [patent_title] => Apparatus for treating substrate [patent_app_type] => utility [patent_app_number] => 14/528120 [patent_app_country] => US [patent_app_date] => 2014-10-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 4514 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 271 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14528120 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 12935527 [patent_doc_number] => 09831064 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2017-11-28 [patent_title] => Plasma processing apparatus [patent_app_type] => utility [patent_app_number] => 14/526900 [patent_app_country] => US [patent_app_date] => 2014-10-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 18 [patent_figures_cnt] => 20 [patent_no_of_words] => 14369 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 378 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14526900 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10229301 [patent_doc_number] => 20150114295 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-04-30 [patent_title] => 'DEPOSITION APPARATUS' [patent_app_type] => utility [patent_app_number] => 14/521588 [patent_app_country] => US [patent_app_date] => 2014-10-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 2271 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14521588 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 14397539 [patent_doc_number] => 10312060 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-06-04 [patent_title] => Plasma generating apparatus using mutual inductive coupling and substrate treating apparatus comprising the same [patent_app_type] => utility [patent_app_number] => 14/516766 [patent_app_country] => US [patent_app_date] => 2014-10-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 5322 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 283 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14516766 [rel_patent_id] =>[rel_patent_doc_number] =>)