Melissa J. Koval

Array ( [id] => 12395958 [patent_doc_number] => 09966240 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2018-05-08 [patent_title] => Systems and methods for internal surface conditioning assessment in plasma processing equipment [patent_app_type] => utility [patent_app_number] => 14/514222 [patent_app_country] => US [patent_app_date] => 2014-10-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 19 [patent_no_of_words] => 8851 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 238 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14514222 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10219894 [patent_doc_number] => 20150104888 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-04-16 [patent_title] => 'SYSTEM FOR DETERMINING PRESENCE OF ABNORMALITY OF HEATER FOR SEMICONDUCTOR THIN FILM DEPOSITION APPARATUS' [patent_app_type] => utility [patent_app_number] => 14/511492 [patent_app_country] => US [patent_app_date] => 2014-10-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 7890 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14511492 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 9809027 [patent_doc_number] => 20150020972 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-01-22 [patent_title] => 'PROCESS CONDITION SENSING DEVICE AND METHOD FOR PLASMA CHAMBER' [patent_app_type] => utility [patent_app_number] => 14/505289 [patent_app_country] => US [patent_app_date] => 2014-10-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 6296 [patent_no_of_claims] => 23 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14505289 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 14036121 [patent_doc_number] => 10229815 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-03-12 [patent_title] => Plasma etching apparatus and method [patent_app_type] => utility [patent_app_number] => 14/489125 [patent_app_country] => US [patent_app_date] => 2014-09-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 20 [patent_figures_cnt] => 23 [patent_no_of_words] => 15071 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 411 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14489125 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10970750 [patent_doc_number] => 20140373783 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2014-12-25 [patent_title] => 'FILM FORMING DEVICE' [patent_app_type] => utility [patent_app_number] => 14/484598 [patent_app_country] => US [patent_app_date] => 2014-09-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 24 [patent_figures_cnt] => 24 [patent_no_of_words] => 12469 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14484598 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 9788652 [patent_doc_number] => 20150000595 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-01-01 [patent_title] => 'CONDENSATION APPARATUS' [patent_app_type] => utility [patent_app_number] => 14/485221 [patent_app_country] => US [patent_app_date] => 2014-09-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 20 [patent_figures_cnt] => 20 [patent_no_of_words] => 14177 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14485221 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10299290 [patent_doc_number] => 20150184289 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-07-02 [patent_title] => 'DEPOSITION APPARATUS AND DEPOSITION METHOD' [patent_app_type] => utility [patent_app_number] => 14/468042 [patent_app_country] => US [patent_app_date] => 2014-08-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 6120 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14468042 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 9913479 [patent_doc_number] => 20150068682 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-03-12 [patent_title] => 'POWER DEPOSITION CONTROL IN INDUCTIVELY COUPLED PLASMA (ICP) REACTORS' [patent_app_type] => utility [patent_app_number] => 14/463205 [patent_app_country] => US [patent_app_date] => 2014-08-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 3412 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14463205 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10964011 [patent_doc_number] => 20140367042 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2014-12-18 [patent_title] => 'SYSTEMS FOR AUTOMATICALLY CHARACTERIZING A PLASMA' [patent_app_type] => utility [patent_app_number] => 14/462969 [patent_app_country] => US [patent_app_date] => 2014-08-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 4845 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14462969 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10229566 [patent_doc_number] => 20150114559 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-04-30 [patent_title] => 'PLASMA SHIELDING MEMBERS, PLASMA DETECTING STRUCTURES, AND PLASMA REACTION APPARATUSES' [patent_app_type] => utility [patent_app_number] => 14/461651 [patent_app_country] => US [patent_app_date] => 2014-08-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 17 [patent_figures_cnt] => 17 [patent_no_of_words] => 12282 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14461651 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10666884 [patent_doc_number] => 20160013029 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-01-14 [patent_title] => 'Apparatus For Generating Plasma Using Dual Plasma Source And Apparatus For Treating Substrate Including The Same' [patent_app_type] => utility [patent_app_number] => 14/459179 [patent_app_country] => US [patent_app_date] => 2014-08-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 16 [patent_no_of_words] => 9277 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14459179 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10433138 [patent_doc_number] => 20150318150 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-11-05 [patent_title] => 'REAL-TIME EDGE ENCROACHMENT CONTROL FOR WAFER BEVEL' [patent_app_type] => utility [patent_app_number] => 14/266575 [patent_app_country] => US [patent_app_date] => 2014-04-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 6597 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14266575 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10902577 [patent_doc_number] => 20140305589 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2014-10-16 [patent_title] => 'SOFT PULSING' [patent_app_type] => utility [patent_app_number] => 14/260051 [patent_app_country] => US [patent_app_date] => 2014-04-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 26 [patent_figures_cnt] => 26 [patent_no_of_words] => 23260 [patent_no_of_claims] => 23 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14260051 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11918285 [patent_doc_number] => 09786475 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2017-10-10 [patent_title] => 'Systems and methods for plasma processing of microfeature workpieces' [patent_app_type] => utility [patent_app_number] => 14/218428 [patent_app_country] => US [patent_app_date] => 2014-03-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 7 [patent_no_of_words] => 5034 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 181 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14218428 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 9715842 [patent_doc_number] => 20140251540 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2014-09-11 [patent_title] => 'SUBSTRATE SUPPORTER AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME' [patent_app_type] => utility [patent_app_number] => 14/204541 [patent_app_country] => US [patent_app_date] => 2014-03-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 10077 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14204541 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 12377628 [patent_doc_number] => 09960776 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2018-05-01 [patent_title] => Method and apparatus for generating a variable clock used to control a component of a substrate processing system [patent_app_type] => utility [patent_app_number] => 14/202472 [patent_app_country] => US [patent_app_date] => 2014-03-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 4362 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 152 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14202472 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 14246773 [patent_doc_number] => 10273579 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-04-30 [patent_title] => Apparatus for processing two or more substrates in a batch process [patent_app_type] => utility [patent_app_number] => 14/777613 [patent_app_country] => US [patent_app_date] => 2014-02-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 17 [patent_no_of_words] => 4926 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 340 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14777613 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 9642149 [patent_doc_number] => 20140220260 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2014-08-07 [patent_title] => 'SUBSTRATE PROCESSING APPARATUS AND METHOD OF DEPOSITING A FILM' [patent_app_type] => utility [patent_app_number] => 14/171928 [patent_app_country] => US [patent_app_date] => 2014-02-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 23 [patent_figures_cnt] => 23 [patent_no_of_words] => 13010 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14171928 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 9612530 [patent_doc_number] => 20140202386 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2014-07-24 [patent_title] => 'SUBSTRATE PROCESSING APPARATUS AND SUSCEPTOR' [patent_app_type] => utility [patent_app_number] => 14/163115 [patent_app_country] => US [patent_app_date] => 2014-01-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 16 [patent_no_of_words] => 9116 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14163115 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10305831 [patent_doc_number] => 20150190831 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-07-09 [patent_title] => 'DRY ETCHER AND ETCHING METHOD OF THE SAME' [patent_app_type] => utility [patent_app_number] => 14/238733 [patent_app_country] => US [patent_app_date] => 2014-01-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 3212 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14238733 [rel_patent_id] =>[rel_patent_doc_number] =>)