Mesfin T. Asfaw

Array ( [id] => 6602347 [patent_doc_number] => 20100002219 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2010-01-07 [patent_title] => 'Illuminant distribution evaluation method, optical member manufacturing method, illumination optical device, exposure apparatus, and exposure method' [patent_app_type] => utility [patent_app_number] => 12/585211 [patent_app_country] => US [patent_app_date] => 2009-09-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 12367 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0002/20100002219.pdf [firstpage_image] =>[orig_patent_app_number] => 12585211 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10650727 [patent_doc_number] => 09366974 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2016-06-14 [patent_title] => 'Movable body apparatus, pattern forming apparatus and pattern forming method, device manufacturing method, manufacturing method of movable body apparatus, and movable body drive method' [patent_app_type] => utility [patent_app_number] => 12/553549 [patent_app_country] => US [patent_app_date] => 2009-09-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 18 [patent_no_of_words] => 11023 [patent_no_of_claims] => 80 [patent_no_of_ind_claims] => 7 [patent_words_short_claim] => 114 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 12553549 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6156692 [patent_doc_number] => 20110157573 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2011-06-30 [patent_title] => 'SPECTRAL PURITY FILTER, LITHOGRAPHIC APPARATUS INCLUDING SUCH A SPECTRAL PURITY FILTER AND DEVICE MANUFACTURING METHOD' [patent_app_type] => utility [patent_app_number] => 13/060901 [patent_app_country] => US [patent_app_date] => 2009-07-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 9278 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0157/20110157573.pdf [firstpage_image] =>[orig_patent_app_number] => 13060901 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6612046 [patent_doc_number] => 20100033694 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2010-02-11 [patent_title] => 'Exposure method, exposure apparatus and device manufacturing method' [patent_app_type] => utility [patent_app_number] => 12/458898 [patent_app_country] => US [patent_app_date] => 2009-07-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 16 [patent_no_of_words] => 18981 [patent_no_of_claims] => 46 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0033/20100033694.pdf [firstpage_image] =>[orig_patent_app_number] => 12458898 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6249129 [patent_doc_number] => 20100026976 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2010-02-04 [patent_title] => 'Actuator System Using Multiple Piezoelectric Actuators' [patent_app_type] => utility [patent_app_number] => 12/508899 [patent_app_country] => US [patent_app_date] => 2009-07-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 12029 [patent_no_of_claims] => 23 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0026/20100026976.pdf [firstpage_image] =>[orig_patent_app_number] => 12508899 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6612113 [patent_doc_number] => 20100033698 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2010-02-11 [patent_title] => 'Full Wafer Width Scanning Using Steps and Scan System' [patent_app_type] => utility [patent_app_number] => 12/509062 [patent_app_country] => US [patent_app_date] => 2009-07-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 6773 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0033/20100033698.pdf [firstpage_image] =>[orig_patent_app_number] => 12509062 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6341617 [patent_doc_number] => 20100020302 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2010-01-28 [patent_title] => 'PROJECTION EXPOSURE TOOL FOR MICROLITHOGRAPHY WITH A MEASURING APPARATUS AND METHOD FOR MEASURING AN IRRADIATION STRENGTH DISTRIBUTION' [patent_app_type] => utility [patent_app_number] => 12/507694 [patent_app_country] => US [patent_app_date] => 2009-07-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 10728 [patent_no_of_claims] => 24 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0020/20100020302.pdf [firstpage_image] =>[orig_patent_app_number] => 12507694 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6249130 [patent_doc_number] => 20100026977 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2010-02-04 [patent_title] => 'METHOD FOR MEASURING WAVEFRONT ABERRATION' [patent_app_type] => utility [patent_app_number] => 12/507159 [patent_app_country] => US [patent_app_date] => 2009-07-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 10336 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0026/20100026977.pdf [firstpage_image] =>[orig_patent_app_number] => 12507159 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6341608 [patent_doc_number] => 20100020300 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2010-01-28 [patent_title] => 'MEASUREMENT APPARATUS AND METHOD' [patent_app_type] => utility [patent_app_number] => 12/506481 [patent_app_country] => US [patent_app_date] => 2009-07-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 12654 [patent_no_of_claims] => 33 [patent_no_of_ind_claims] => 8 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0020/20100020300.pdf [firstpage_image] =>[orig_patent_app_number] => 12506481 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6346927 [patent_doc_number] => 20100085545 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2010-04-08 [patent_title] => 'FLUID HANDLING STRUCTURE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD' [patent_app_type] => utility [patent_app_number] => 12/506565 [patent_app_country] => US [patent_app_date] => 2009-07-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 14 [patent_no_of_words] => 16521 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0085/20100085545.pdf [firstpage_image] =>[orig_patent_app_number] => 12506565 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6249126 [patent_doc_number] => 20100026975 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2010-02-04 [patent_title] => 'EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD' [patent_app_type] => utility [patent_app_number] => 12/506030 [patent_app_country] => US [patent_app_date] => 2009-07-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 4921 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0026/20100026975.pdf [firstpage_image] =>[orig_patent_app_number] => 12506030 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6185845 [patent_doc_number] => 20110170078 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2011-07-14 [patent_title] => 'Projection System and Lithographic Apparatus' [patent_app_type] => utility [patent_app_number] => 13/061792 [patent_app_country] => US [patent_app_date] => 2009-07-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 11405 [patent_no_of_claims] => 26 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0170/20110170078.pdf [firstpage_image] =>[orig_patent_app_number] => 13061792 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10616201 [patent_doc_number] => 09335641 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2016-05-10 [patent_title] => 'Optical element mount for lithographic apparatus' [patent_app_type] => utility [patent_app_number] => 13/054869 [patent_app_country] => US [patent_app_date] => 2009-07-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 6 [patent_no_of_words] => 4518 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 97 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13054869 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10865342 [patent_doc_number] => 08891058 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2014-11-18 [patent_title] => 'Extreme UV radiation generating device comprising a contamination captor' [patent_app_type] => utility [patent_app_number] => 13/003950 [patent_app_country] => US [patent_app_date] => 2009-07-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 3 [patent_no_of_words] => 2957 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 139 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13003950 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 9627821 [patent_doc_number] => 08797509 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2014-08-05 [patent_title] => 'Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method' [patent_app_type] => utility [patent_app_number] => 12/993460 [patent_app_country] => US [patent_app_date] => 2009-05-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 7 [patent_no_of_words] => 9108 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 7 [patent_words_short_claim] => 60 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 12993460 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6180045 [patent_doc_number] => 20110122387 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2011-05-26 [patent_title] => 'SYSTEM AND METHOD FOR LIGHT SOURCE EMPLOYING LASER-PRODUCED PLASMA' [patent_app_type] => utility [patent_app_number] => 12/992889 [patent_app_country] => US [patent_app_date] => 2009-05-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 3996 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0122/20110122387.pdf [firstpage_image] =>[orig_patent_app_number] => 12992889 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6185850 [patent_doc_number] => 20110170079 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2011-07-14 [patent_title] => 'RADIATION SYSTEM AND LITHOGRAPHIC APPARATUS' [patent_app_type] => utility [patent_app_number] => 13/062872 [patent_app_country] => US [patent_app_date] => 2009-04-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 6814 [patent_no_of_claims] => 51 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0170/20110170079.pdf [firstpage_image] =>[orig_patent_app_number] => 13062872 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 9470447 [patent_doc_number] => 08724087 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2014-05-13 [patent_title] => 'Inspection apparatus for lithography' [patent_app_type] => utility [patent_app_number] => 12/933481 [patent_app_country] => US [patent_app_date] => 2009-04-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 14 [patent_no_of_words] => 6137 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 7 [patent_words_short_claim] => 64 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 12933481 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 9377045 [patent_doc_number] => 08681312 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2014-03-25 [patent_title] => 'Inspection apparatus for lithography' [patent_app_type] => utility [patent_app_number] => 12/920968 [patent_app_country] => US [patent_app_date] => 2009-03-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 11 [patent_no_of_words] => 9608 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 77 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 12920968 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5456882 [patent_doc_number] => 20090257034 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2009-10-15 [patent_title] => 'LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD' [patent_app_type] => utility [patent_app_number] => 12/407360 [patent_app_country] => US [patent_app_date] => 2009-03-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 4977 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0257/20090257034.pdf [firstpage_image] =>[orig_patent_app_number] => 12407360 [rel_patent_id] =>[rel_patent_doc_number] =>)