Search

Michael Pham

Examiner (ID: 16492, Phone: (571)272-3924 , Office: P/2167 )

Most Active Art Unit
2167
Art Unit(s)
2153, 2167
Total Applications
671
Issued Applications
518
Pending Applications
33
Abandoned Applications
139

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 15503219 [patent_doc_number] => 20200051798 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-02-13 [patent_title] => COLLIMATOR FOR SELECTIVE PVD WITHOUT SCANNING [patent_app_type] => utility [patent_app_number] => 16/515785 [patent_app_country] => US [patent_app_date] => 2019-07-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3225 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 53 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16515785 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/515785
COLLIMATOR FOR SELECTIVE PVD WITHOUT SCANNING Jul 17, 2019 Abandoned
Array ( [id] => 16016421 [patent_doc_number] => 20200183054 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-06-11 [patent_title] => ANTI-REFLECTION COMPOSITE LAYER AND THE MANUFACTURING METHOD THEREOF [patent_app_type] => utility [patent_app_number] => 16/503457 [patent_app_country] => US [patent_app_date] => 2019-07-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 2516 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 84 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16503457 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/503457
ANTI-REFLECTION COMPOSITE LAYER AND THE MANUFACTURING METHOD THEREOF Jul 2, 2019 Abandoned
Array ( [id] => 17800460 [patent_doc_number] => 11414746 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-08-16 [patent_title] => Film forming apparatus and film forming method using the same [patent_app_type] => utility [patent_app_number] => 16/453730 [patent_app_country] => US [patent_app_date] => 2019-06-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 13 [patent_no_of_words] => 10939 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 286 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16453730 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/453730
Film forming apparatus and film forming method using the same Jun 25, 2019 Issued
Array ( [id] => 14927373 [patent_doc_number] => 20190299324 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-10-03 [patent_title] => PROCESS FOR PRODUCING SPUTTERING TARGET AND SPUTTERING TARGET [patent_app_type] => utility [patent_app_number] => 16/446179 [patent_app_country] => US [patent_app_date] => 2019-06-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9942 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => 0 [patent_words_short_claim] => 102 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16446179 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/446179
Process for producing sputtering target and sputtering target Jun 18, 2019 Issued
Array ( [id] => 16332202 [patent_doc_number] => 20200303168 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-09-24 [patent_title] => SINGLE BEAM PLASMA SOURCE [patent_app_type] => utility [patent_app_number] => 16/642133 [patent_app_country] => US [patent_app_date] => 2019-06-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4272 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -11 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16642133 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/642133
Single beam plasma source Jun 18, 2019 Issued
Array ( [id] => 16524219 [patent_doc_number] => 20200398299 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-12-24 [patent_title] => COATING APPARATUS [patent_app_type] => utility [patent_app_number] => 16/444382 [patent_app_country] => US [patent_app_date] => 2019-06-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5735 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 129 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16444382 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/444382
Coating apparatus Jun 17, 2019 Issued
Array ( [id] => 16515940 [patent_doc_number] => 20200395198 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-12-17 [patent_title] => PHYSICAL VAPOR DEPOSITION (PVD) CHAMBER WITH IN SITU CHAMBER CLEANING CAPABILITY [patent_app_type] => utility [patent_app_number] => 16/438560 [patent_app_country] => US [patent_app_date] => 2019-06-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6254 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 75 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16438560 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/438560
Physical vapor deposition (PVD) chamber with in situ chamber cleaning capability Jun 11, 2019 Issued
Array ( [id] => 18315329 [patent_doc_number] => 11629400 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-04-18 [patent_title] => Sputtering target and method of producing the same [patent_app_type] => utility [patent_app_number] => 16/966807 [patent_app_country] => US [patent_app_date] => 2019-05-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 8 [patent_no_of_words] => 5354 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 167 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16966807 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/966807
Sputtering target and method of producing the same May 15, 2019 Issued
Array ( [id] => 14784645 [patent_doc_number] => 20190267220 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-08-29 [patent_title] => SHIELD FOR A SUBSTRATE PROCESSING CHAMBER [patent_app_type] => utility [patent_app_number] => 16/409757 [patent_app_country] => US [patent_app_date] => 2019-05-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6498 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 72 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16409757 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/409757
Shield for a substrate processing chamber May 9, 2019 Issued
Array ( [id] => 14808921 [patent_doc_number] => 20190271070 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-09-05 [patent_title] => Electrically and Magnetically Enhanced Ionized Physical Vapor Deposition Unbalanced Sputtering Source [patent_app_type] => utility [patent_app_number] => 16/400539 [patent_app_country] => US [patent_app_date] => 2019-05-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7738 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -11 [patent_words_short_claim] => 139 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16400539 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/400539
Electrically and magnetically enhanced ionized physical vapor deposition unbalanced sputtering source Apr 30, 2019 Issued
Array ( [id] => 14752831 [patent_doc_number] => 20190259589 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-08-22 [patent_title] => Ruthenium Sputtering Target and Ruthenium Alloy Sputtering Target [patent_app_type] => utility [patent_app_number] => 16/399415 [patent_app_country] => US [patent_app_date] => 2019-04-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3530 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -4 [patent_words_short_claim] => 44 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16399415 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/399415
Ruthenium sputtering target and ruthenium alloy sputtering target Apr 29, 2019 Issued
Array ( [id] => 17181232 [patent_doc_number] => 11158481 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-10-26 [patent_title] => Ion milling device, ion source, and ion milling method [patent_app_type] => utility [patent_app_number] => 16/381938 [patent_app_country] => US [patent_app_date] => 2019-04-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 15 [patent_no_of_words] => 7461 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 56 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16381938 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/381938
Ion milling device, ion source, and ion milling method Apr 10, 2019 Issued
Array ( [id] => 14573253 [patent_doc_number] => 20190214234 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-07-11 [patent_title] => DEPOSITION SYSTEM WITH INTEGRATED COOLING ON A ROTATING DRUM [patent_app_type] => utility [patent_app_number] => 16/355405 [patent_app_country] => US [patent_app_date] => 2019-03-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8590 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => 0 [patent_words_short_claim] => 179 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16355405 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/355405
DEPOSITION SYSTEM WITH INTEGRATED COOLING ON A ROTATING DRUM Mar 14, 2019 Abandoned
Array ( [id] => 14994583 [patent_doc_number] => 20190316249 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-10-17 [patent_title] => ELECTRICALLY AND MAGNETICALLY ENHANCED IONIZED PHYSICAL VAPOR DEPOSITION UNBALANCED SPUTTERING SOURCE [patent_app_type] => utility [patent_app_number] => 16/284327 [patent_app_country] => US [patent_app_date] => 2019-02-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 22068 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 153 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16284327 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/284327
Electrically and magnetically enhanced ionized physical vapor deposition unbalanced sputtering source Feb 24, 2019 Issued
Array ( [id] => 14446217 [patent_doc_number] => 20190180982 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-06-13 [patent_title] => SYSTEM, METHOD, AND APPARATUS FOR CONTROLLING ION ENERGY DISTRIBUTION IN PLASMA PROCESSING SYSTEMS [patent_app_type] => utility [patent_app_number] => 16/278822 [patent_app_country] => US [patent_app_date] => 2019-02-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 27214 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -14 [patent_words_short_claim] => 72 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16278822 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/278822
System, method, and apparatus for controlling ion energy distribution in plasma processing systems Feb 18, 2019 Issued
Array ( [id] => 14752923 [patent_doc_number] => 20190259635 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-08-22 [patent_title] => PROCESS KIT FOR PROCESSING REDUCED SIZED SUBSTRATES [patent_app_type] => utility [patent_app_number] => 16/273390 [patent_app_country] => US [patent_app_date] => 2019-02-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4348 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 46 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16273390 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/273390
PROCESS KIT FOR PROCESSING REDUCED SIZED SUBSTRATES Feb 11, 2019 Abandoned
Array ( [id] => 17772303 [patent_doc_number] => 11404254 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-08-02 [patent_title] => Insertable target holder for solid dopant materials [patent_app_type] => utility [patent_app_number] => 16/269120 [patent_app_country] => US [patent_app_date] => 2019-02-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 15 [patent_no_of_words] => 6786 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 114 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16269120 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/269120
Insertable target holder for solid dopant materials Feb 5, 2019 Issued
Array ( [id] => 16720526 [patent_doc_number] => 20210087673 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-03-25 [patent_title] => SPUTTERING TARGET [patent_app_type] => utility [patent_app_number] => 17/041315 [patent_app_country] => US [patent_app_date] => 2019-01-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11806 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17041315 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/041315
SPUTTERING TARGET Jan 16, 2019 Abandoned
Array ( [id] => 14404811 [patent_doc_number] => 20190168249 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-06-06 [patent_title] => COATING APPARATUS [patent_app_type] => utility [patent_app_number] => 16/206307 [patent_app_country] => US [patent_app_date] => 2018-11-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4447 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 120 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16206307 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/206307
COATING APPARATUS Nov 29, 2018 Abandoned
Array ( [id] => 13935975 [patent_doc_number] => 20190051503 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-02-14 [patent_title] => PROCESSING APPARATUS AND COLLIMATOR [patent_app_type] => utility [patent_app_number] => 16/159812 [patent_app_country] => US [patent_app_date] => 2018-10-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10266 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -11 [patent_words_short_claim] => 59 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16159812 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/159812
Processing apparatus and collimator Oct 14, 2018 Issued
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