
Michael Pham
Examiner (ID: 16492, Phone: (571)272-3924 , Office: P/2167 )
| Most Active Art Unit | 2167 |
| Art Unit(s) | 2153, 2167 |
| Total Applications | 671 |
| Issued Applications | 518 |
| Pending Applications | 33 |
| Abandoned Applications | 139 |
Applications
| Application number | Title of the application | Filing Date | Status |
|---|---|---|---|
Array
(
[id] => 15503219
[patent_doc_number] => 20200051798
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2020-02-13
[patent_title] => COLLIMATOR FOR SELECTIVE PVD WITHOUT SCANNING
[patent_app_type] => utility
[patent_app_number] => 16/515785
[patent_app_country] => US
[patent_app_date] => 2019-07-18
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 3225
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 53
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16515785
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/515785 | COLLIMATOR FOR SELECTIVE PVD WITHOUT SCANNING | Jul 17, 2019 | Abandoned |
Array
(
[id] => 16016421
[patent_doc_number] => 20200183054
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2020-06-11
[patent_title] => ANTI-REFLECTION COMPOSITE LAYER AND THE MANUFACTURING METHOD THEREOF
[patent_app_type] => utility
[patent_app_number] => 16/503457
[patent_app_country] => US
[patent_app_date] => 2019-07-03
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 2516
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -12
[patent_words_short_claim] => 84
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16503457
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/503457 | ANTI-REFLECTION COMPOSITE LAYER AND THE MANUFACTURING METHOD THEREOF | Jul 2, 2019 | Abandoned |
Array
(
[id] => 17800460
[patent_doc_number] => 11414746
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2022-08-16
[patent_title] => Film forming apparatus and film forming method using the same
[patent_app_type] => utility
[patent_app_number] => 16/453730
[patent_app_country] => US
[patent_app_date] => 2019-06-26
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 9
[patent_figures_cnt] => 13
[patent_no_of_words] => 10939
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 286
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16453730
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/453730 | Film forming apparatus and film forming method using the same | Jun 25, 2019 | Issued |
Array
(
[id] => 14927373
[patent_doc_number] => 20190299324
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2019-10-03
[patent_title] => PROCESS FOR PRODUCING SPUTTERING TARGET AND SPUTTERING TARGET
[patent_app_type] => utility
[patent_app_number] => 16/446179
[patent_app_country] => US
[patent_app_date] => 2019-06-19
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 9942
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => 0
[patent_words_short_claim] => 102
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16446179
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/446179 | Process for producing sputtering target and sputtering target | Jun 18, 2019 | Issued |
Array
(
[id] => 16332202
[patent_doc_number] => 20200303168
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2020-09-24
[patent_title] => SINGLE BEAM PLASMA SOURCE
[patent_app_type] => utility
[patent_app_number] => 16/642133
[patent_app_country] => US
[patent_app_date] => 2019-06-19
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 4272
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -11
[patent_words_short_claim] => 2
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16642133
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/642133 | Single beam plasma source | Jun 18, 2019 | Issued |
Array
(
[id] => 16524219
[patent_doc_number] => 20200398299
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2020-12-24
[patent_title] => COATING APPARATUS
[patent_app_type] => utility
[patent_app_number] => 16/444382
[patent_app_country] => US
[patent_app_date] => 2019-06-18
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 5735
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -19
[patent_words_short_claim] => 129
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16444382
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/444382 | Coating apparatus | Jun 17, 2019 | Issued |
Array
(
[id] => 16515940
[patent_doc_number] => 20200395198
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2020-12-17
[patent_title] => PHYSICAL VAPOR DEPOSITION (PVD) CHAMBER WITH IN SITU CHAMBER CLEANING CAPABILITY
[patent_app_type] => utility
[patent_app_number] => 16/438560
[patent_app_country] => US
[patent_app_date] => 2019-06-12
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 6254
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 75
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16438560
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/438560 | Physical vapor deposition (PVD) chamber with in situ chamber cleaning capability | Jun 11, 2019 | Issued |
Array
(
[id] => 18315329
[patent_doc_number] => 11629400
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2023-04-18
[patent_title] => Sputtering target and method of producing the same
[patent_app_type] => utility
[patent_app_number] => 16/966807
[patent_app_country] => US
[patent_app_date] => 2019-05-16
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 4
[patent_figures_cnt] => 8
[patent_no_of_words] => 5354
[patent_no_of_claims] => 6
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 167
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16966807
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/966807 | Sputtering target and method of producing the same | May 15, 2019 | Issued |
Array
(
[id] => 14784645
[patent_doc_number] => 20190267220
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2019-08-29
[patent_title] => SHIELD FOR A SUBSTRATE PROCESSING CHAMBER
[patent_app_type] => utility
[patent_app_number] => 16/409757
[patent_app_country] => US
[patent_app_date] => 2019-05-10
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 6498
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 72
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16409757
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/409757 | Shield for a substrate processing chamber | May 9, 2019 | Issued |
Array
(
[id] => 14808921
[patent_doc_number] => 20190271070
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2019-09-05
[patent_title] => Electrically and Magnetically Enhanced Ionized Physical Vapor Deposition Unbalanced Sputtering Source
[patent_app_type] => utility
[patent_app_number] => 16/400539
[patent_app_country] => US
[patent_app_date] => 2019-05-01
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 7738
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -11
[patent_words_short_claim] => 139
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16400539
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/400539 | Electrically and magnetically enhanced ionized physical vapor deposition unbalanced sputtering source | Apr 30, 2019 | Issued |
Array
(
[id] => 14752831
[patent_doc_number] => 20190259589
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2019-08-22
[patent_title] => Ruthenium Sputtering Target and Ruthenium Alloy Sputtering Target
[patent_app_type] => utility
[patent_app_number] => 16/399415
[patent_app_country] => US
[patent_app_date] => 2019-04-30
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 3530
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -4
[patent_words_short_claim] => 44
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16399415
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/399415 | Ruthenium sputtering target and ruthenium alloy sputtering target | Apr 29, 2019 | Issued |
Array
(
[id] => 17181232
[patent_doc_number] => 11158481
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2021-10-26
[patent_title] => Ion milling device, ion source, and ion milling method
[patent_app_type] => utility
[patent_app_number] => 16/381938
[patent_app_country] => US
[patent_app_date] => 2019-04-11
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 10
[patent_figures_cnt] => 15
[patent_no_of_words] => 7461
[patent_no_of_claims] => 17
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 56
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16381938
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/381938 | Ion milling device, ion source, and ion milling method | Apr 10, 2019 | Issued |
Array
(
[id] => 14573253
[patent_doc_number] => 20190214234
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2019-07-11
[patent_title] => DEPOSITION SYSTEM WITH INTEGRATED COOLING ON A ROTATING DRUM
[patent_app_type] => utility
[patent_app_number] => 16/355405
[patent_app_country] => US
[patent_app_date] => 2019-03-15
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 8590
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => 0
[patent_words_short_claim] => 179
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16355405
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/355405 | DEPOSITION SYSTEM WITH INTEGRATED COOLING ON A ROTATING DRUM | Mar 14, 2019 | Abandoned |
Array
(
[id] => 14994583
[patent_doc_number] => 20190316249
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2019-10-17
[patent_title] => ELECTRICALLY AND MAGNETICALLY ENHANCED IONIZED PHYSICAL VAPOR DEPOSITION UNBALANCED SPUTTERING SOURCE
[patent_app_type] => utility
[patent_app_number] => 16/284327
[patent_app_country] => US
[patent_app_date] => 2019-02-25
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 22068
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -12
[patent_words_short_claim] => 153
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16284327
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/284327 | Electrically and magnetically enhanced ionized physical vapor deposition unbalanced sputtering source | Feb 24, 2019 | Issued |
Array
(
[id] => 14446217
[patent_doc_number] => 20190180982
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2019-06-13
[patent_title] => SYSTEM, METHOD, AND APPARATUS FOR CONTROLLING ION ENERGY DISTRIBUTION IN PLASMA PROCESSING SYSTEMS
[patent_app_type] => utility
[patent_app_number] => 16/278822
[patent_app_country] => US
[patent_app_date] => 2019-02-19
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 27214
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -14
[patent_words_short_claim] => 72
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16278822
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/278822 | System, method, and apparatus for controlling ion energy distribution in plasma processing systems | Feb 18, 2019 | Issued |
Array
(
[id] => 14752923
[patent_doc_number] => 20190259635
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2019-08-22
[patent_title] => PROCESS KIT FOR PROCESSING REDUCED SIZED SUBSTRATES
[patent_app_type] => utility
[patent_app_number] => 16/273390
[patent_app_country] => US
[patent_app_date] => 2019-02-12
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 4348
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 46
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16273390
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/273390 | PROCESS KIT FOR PROCESSING REDUCED SIZED SUBSTRATES | Feb 11, 2019 | Abandoned |
Array
(
[id] => 17772303
[patent_doc_number] => 11404254
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2022-08-02
[patent_title] => Insertable target holder for solid dopant materials
[patent_app_type] => utility
[patent_app_number] => 16/269120
[patent_app_country] => US
[patent_app_date] => 2019-02-06
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 9
[patent_figures_cnt] => 15
[patent_no_of_words] => 6786
[patent_no_of_claims] => 12
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 114
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16269120
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/269120 | Insertable target holder for solid dopant materials | Feb 5, 2019 | Issued |
Array
(
[id] => 16720526
[patent_doc_number] => 20210087673
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2021-03-25
[patent_title] => SPUTTERING TARGET
[patent_app_type] => utility
[patent_app_number] => 17/041315
[patent_app_country] => US
[patent_app_date] => 2019-01-17
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 11806
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -15
[patent_words_short_claim] => 2
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17041315
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/041315 | SPUTTERING TARGET | Jan 16, 2019 | Abandoned |
Array
(
[id] => 14404811
[patent_doc_number] => 20190168249
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2019-06-06
[patent_title] => COATING APPARATUS
[patent_app_type] => utility
[patent_app_number] => 16/206307
[patent_app_country] => US
[patent_app_date] => 2018-11-30
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 4447
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 120
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16206307
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/206307 | COATING APPARATUS | Nov 29, 2018 | Abandoned |
Array
(
[id] => 13935975
[patent_doc_number] => 20190051503
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2019-02-14
[patent_title] => PROCESSING APPARATUS AND COLLIMATOR
[patent_app_type] => utility
[patent_app_number] => 16/159812
[patent_app_country] => US
[patent_app_date] => 2018-10-15
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 10266
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -11
[patent_words_short_claim] => 59
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16159812
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/159812 | Processing apparatus and collimator | Oct 14, 2018 | Issued |