Michael T. Holtzclaw

Array ( [id] => 18608054 [patent_doc_number] => 11749532 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-09-05 [patent_title] => Methods and apparatus for processing a substrate [patent_app_type] => utility [patent_app_number] => 17/307383 [patent_app_country] => US [patent_app_date] => 2021-05-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 3 [patent_no_of_words] => 2860 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 175 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17307383 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17582814 [patent_doc_number] => 20220139669 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-05-05 [patent_title] => PLASMA PROCESSING APPARATUS AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING SAME [patent_app_type] => utility [patent_app_number] => 17/242019 [patent_app_country] => US [patent_app_date] => 2021-04-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6878 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 168 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17242019 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18764341 [patent_doc_number] => 11814728 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-11-14 [patent_title] => Method for filling a gap in a three-dimensional structure on a semiconductor substrate [patent_app_type] => utility [patent_app_number] => 17/236782 [patent_app_country] => US [patent_app_date] => 2021-04-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 17 [patent_figures_cnt] => 22 [patent_no_of_words] => 14181 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 132 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17236782 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17010868 [patent_doc_number] => 20210242029 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-08-05 [patent_title] => PATTERNING PLATINUM BY ALLOYING AND ETCHING PLATINUM ALLOY [patent_app_type] => utility [patent_app_number] => 17/234833 [patent_app_country] => US [patent_app_date] => 2021-04-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4460 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 29 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17234833 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19260869 [patent_doc_number] => 12020934 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-06-25 [patent_title] => Substrate processing method [patent_app_type] => utility [patent_app_number] => 17/233384 [patent_app_country] => US [patent_app_date] => 2021-04-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 15 [patent_no_of_words] => 7920 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 153 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17233384 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18642791 [patent_doc_number] => 11766847 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-09-26 [patent_title] => Multilayer plate with composite material and method for manufacturing the same [patent_app_type] => utility [patent_app_number] => 17/225122 [patent_app_country] => US [patent_app_date] => 2021-04-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 7 [patent_no_of_words] => 7278 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 202 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17225122 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17145172 [patent_doc_number] => 20210313185 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-10-07 [patent_title] => ATOMIC LAYER ETCHING FOR SMOOTHING OF ARBITRARY SURFACES [patent_app_type] => utility [patent_app_number] => 17/224037 [patent_app_country] => US [patent_app_date] => 2021-04-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6550 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -22 [patent_words_short_claim] => 74 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17224037 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16981420 [patent_doc_number] => 20210225657 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-07-22 [patent_title] => Hard Mask Removal Method [patent_app_type] => utility [patent_app_number] => 17/220595 [patent_app_country] => US [patent_app_date] => 2021-04-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5194 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 204 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17220595 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16966129 [patent_doc_number] => 20210217628 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-07-15 [patent_title] => GAS PHASE ETCH WITH CONTROLLABLE ETCH SELECTIVITY OF Si-CONTAINING ARC OR SILICON OXYNITRIDE TO DIFFERENT FILMS OR MASKS [patent_app_type] => utility [patent_app_number] => 17/219413 [patent_app_country] => US [patent_app_date] => 2021-03-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5458 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -14 [patent_words_short_claim] => 261 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17219413 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18853802 [patent_doc_number] => 11851363 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-12-26 [patent_title] => Method for manufacturing ultra-thin glass substrate and method for manufacturing display panel [patent_app_type] => utility [patent_app_number] => 17/218306 [patent_app_country] => US [patent_app_date] => 2021-03-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 35 [patent_figures_cnt] => 35 [patent_no_of_words] => 7715 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 168 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17218306 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18999055 [patent_doc_number] => 11915910 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-02-27 [patent_title] => Fast neutral generation for plasma processing [patent_app_type] => utility [patent_app_number] => 17/212038 [patent_app_country] => US [patent_app_date] => 2021-03-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 12 [patent_no_of_words] => 11085 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 138 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17212038 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17448223 [patent_doc_number] => 20220068728 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-03-03 [patent_title] => METHOD OF MONITORING A SEMICONDUCTOR DEVICE FABRICATION PROCESS AND METHOD OF FABRICATING A SEMICONDUCTOR DEVICE USING THE SAME [patent_app_type] => utility [patent_app_number] => 17/212914 [patent_app_country] => US [patent_app_date] => 2021-03-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7139 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 145 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17212914 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18047908 [patent_doc_number] => 11521866 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-12-06 [patent_title] => Plasma processing method, plasma processing apparatus and method of manufacturing semiconductor device using the apparatus [patent_app_type] => utility [patent_app_number] => 17/198938 [patent_app_country] => US [patent_app_date] => 2021-03-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 17 [patent_no_of_words] => 6816 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 167 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17198938 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17855120 [patent_doc_number] => 20220285163 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-09-08 [patent_title] => ATOMIC LAYER ETCHING OF METAL OXIDES [patent_app_type] => utility [patent_app_number] => 17/194421 [patent_app_country] => US [patent_app_date] => 2021-03-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7878 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17194421 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18948405 [patent_doc_number] => 11891689 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-02-06 [patent_title] => Low-capacitance nanopore sensors on insulating substrates [patent_app_type] => utility [patent_app_number] => 17/908795 [patent_app_country] => US [patent_app_date] => 2021-03-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 23 [patent_no_of_words] => 10104 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 215 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17908795 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18494174 [patent_doc_number] => 11699595 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-07-11 [patent_title] => Imaging for monitoring thickness in a substrate cleaning system [patent_app_type] => utility [patent_app_number] => 17/185876 [patent_app_country] => US [patent_app_date] => 2021-02-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 7401 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 116 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17185876 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18859220 [patent_doc_number] => 11856832 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-12-26 [patent_title] => Electronic panel and method for manufacturing the same [patent_app_type] => utility [patent_app_number] => 17/182042 [patent_app_country] => US [patent_app_date] => 2021-02-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 25 [patent_figures_cnt] => 33 [patent_no_of_words] => 11825 [patent_no_of_claims] => 3 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 119 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17182042 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16870320 [patent_doc_number] => 20210163787 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-06-03 [patent_title] => NEUTRAL TO ALKALINE CHEMICAL MECHANICAL POLISHING COMPOSITIONS AND METHODS FOR TUNGSTEN [patent_app_type] => utility [patent_app_number] => 17/170026 [patent_app_country] => US [patent_app_date] => 2021-02-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7482 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -5 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17170026 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18414018 [patent_doc_number] => 11668553 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-06-06 [patent_title] => Apparatus and method for controlling edge ring variation [patent_app_type] => utility [patent_app_number] => 17/161271 [patent_app_country] => US [patent_app_date] => 2021-01-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 7 [patent_no_of_words] => 6139 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 136 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17161271 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17295334 [patent_doc_number] => 20210391173 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-12-16 [patent_title] => SEMICONDUCTOR STRUCTURE AND FORMING METHOD THEREOF [patent_app_type] => utility [patent_app_number] => 17/155483 [patent_app_country] => US [patent_app_date] => 2021-01-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9656 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -20 [patent_words_short_claim] => 117 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17155483 [rel_patent_id] =>[rel_patent_doc_number] =>)