Search

Michael T. Holtzclaw

Examiner (ID: 6379)

Most Active Art Unit
3792
Art Unit(s)
3792, 3796
Total Applications
187
Issued Applications
97
Pending Applications
57
Abandoned Applications
33

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 16000821 [patent_doc_number] => 20200176281 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-06-04 [patent_title] => METHOD OF CLEANING A SUBSTRATE [patent_app_type] => utility [patent_app_number] => 16/780049 [patent_app_country] => US [patent_app_date] => 2020-02-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3977 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -5 [patent_words_short_claim] => 106 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16780049 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/780049
Method of cleaning a substrate Feb 2, 2020 Issued
Array ( [id] => 17523026 [patent_doc_number] => 20220108875 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-04-07 [patent_title] => MULTI-LOCATION GAS INJECTION TO IMPROVE UNIFORMITY IN RAPID ALTERNATING PROCESSES [patent_app_type] => utility [patent_app_number] => 17/426148 [patent_app_country] => US [patent_app_date] => 2020-01-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6136 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 219 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17426148 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/426148
MULTI-LOCATION GAS INJECTION TO IMPROVE UNIFORMITY IN RAPID ALTERNATING PROCESSES Jan 22, 2020 Pending
Array ( [id] => 16175857 [patent_doc_number] => 20200222825 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-07-16 [patent_title] => HEXAVALENT CHROMIUM FREE ETCH MANGANESE RECOVERY SYSTEM [patent_app_type] => utility [patent_app_number] => 16/747105 [patent_app_country] => US [patent_app_date] => 2020-01-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4144 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16747105 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/747105
HEXAVALENT CHROMIUM FREE ETCH MANGANESE RECOVERY SYSTEM Jan 19, 2020 Abandoned
Array ( [id] => 16959003 [patent_doc_number] => 11062882 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-07-13 [patent_title] => Plasma processing apparatus and plasma processing method [patent_app_type] => utility [patent_app_number] => 16/743788 [patent_app_country] => US [patent_app_date] => 2020-01-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 8 [patent_no_of_words] => 5468 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 130 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16743788 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/743788
Plasma processing apparatus and plasma processing method Jan 14, 2020 Issued
Array ( [id] => 16226228 [patent_doc_number] => 20200251345 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-08-06 [patent_title] => PLASMA REACTOR FOR ULTRA-HIGH ASPECT RATIO ETCHING AND ETCHING METHOD THEREOF [patent_app_type] => utility [patent_app_number] => 16/743748 [patent_app_country] => US [patent_app_date] => 2020-01-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8247 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -29 [patent_words_short_claim] => 252 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16743748 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/743748
Plasma reactor for ultra-high aspect ratio etching and etching method thereof Jan 14, 2020 Issued
Array ( [id] => 17015354 [patent_doc_number] => 11084981 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-08-10 [patent_title] => Silicon etchant with high Si/SiO2 etching selectivity and application thereof [patent_app_type] => utility [patent_app_number] => 16/743291 [patent_app_country] => US [patent_app_date] => 2020-01-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 1463 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 74 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16743291 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/743291
Silicon etchant with high Si/SiO2 etching selectivity and application thereof Jan 14, 2020 Issued
Array ( [id] => 17064546 [patent_doc_number] => 11109171 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-08-31 [patent_title] => Semiconductor device and manufacture thereof [patent_app_type] => utility [patent_app_number] => 16/730569 [patent_app_country] => US [patent_app_date] => 2019-12-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 14 [patent_no_of_words] => 4387 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 99 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16730569 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/730569
Semiconductor device and manufacture thereof Dec 29, 2019 Issued
Array ( [id] => 16162947 [patent_doc_number] => 20200219706 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-07-09 [patent_title] => APPARATUS FOR PLASMA PROCESSING AND METHOD OF ETCHING [patent_app_type] => utility [patent_app_number] => 16/725915 [patent_app_country] => US [patent_app_date] => 2019-12-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9045 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 285 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16725915 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/725915
Apparatus for plasma processing and method of etching Dec 22, 2019 Issued
Array ( [id] => 18088554 [patent_doc_number] => 11538693 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-12-27 [patent_title] => Substrate processing method and substrate processing system [patent_app_type] => utility [patent_app_number] => 16/722147 [patent_app_country] => US [patent_app_date] => 2019-12-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 23 [patent_no_of_words] => 12623 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 77 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16722147 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/722147
Substrate processing method and substrate processing system Dec 19, 2019 Issued
Array ( [id] => 16746369 [patent_doc_number] => 10971370 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-04-06 [patent_title] => Hard mask removal method [patent_app_type] => utility [patent_app_number] => 16/715466 [patent_app_country] => US [patent_app_date] => 2019-12-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 8 [patent_no_of_words] => 5156 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 200 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16715466 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/715466
Hard mask removal method Dec 15, 2019 Issued
Array ( [id] => 17795639 [patent_doc_number] => 20220254731 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-08-11 [patent_title] => SHIELDING PROCESS FOR SIP PACKAGING [patent_app_type] => utility [patent_app_number] => 17/620288 [patent_app_country] => US [patent_app_date] => 2019-12-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3034 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 121 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17620288 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/620288
SHIELDING PROCESS FOR SIP PACKAGING Dec 5, 2019 Pending
Array ( [id] => 18837854 [patent_doc_number] => 11845917 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-12-19 [patent_title] => Compositions and methods for post-CMP cleaning of cobalt substrates [patent_app_type] => utility [patent_app_number] => 16/694426 [patent_app_country] => US [patent_app_date] => 2019-11-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8056 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 257 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16694426 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/694426
Compositions and methods for post-CMP cleaning of cobalt substrates Nov 24, 2019 Issued
Array ( [id] => 16296786 [patent_doc_number] => 20200282509 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-09-10 [patent_title] => CHEMICAL MECHANICAL POLISHING USING TIME SHARE CONTROL [patent_app_type] => utility [patent_app_number] => 16/688604 [patent_app_country] => US [patent_app_date] => 2019-11-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4692 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 48 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16688604 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/688604
Chemical mechanical polishing using time share control Nov 18, 2019 Issued
Array ( [id] => 17336550 [patent_doc_number] => 20220002881 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-01-06 [patent_title] => COMPOSITION FOR REMOVING RUTHENIUM [patent_app_type] => utility [patent_app_number] => 17/291256 [patent_app_country] => US [patent_app_date] => 2019-11-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3999 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -11 [patent_words_short_claim] => 33 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17291256 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/291256
Composition for removing ruthenium Nov 12, 2019 Issued
Array ( [id] => 16324142 [patent_doc_number] => 10784114 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-09-22 [patent_title] => Methods of enhancing surface topography on a substrate for inspection [patent_app_type] => utility [patent_app_number] => 16/670107 [patent_app_country] => US [patent_app_date] => 2019-10-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 10 [patent_no_of_words] => 5843 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 77 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16670107 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/670107
Methods of enhancing surface topography on a substrate for inspection Oct 30, 2019 Issued
Array ( [id] => 15565031 [patent_doc_number] => 20200066927 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-02-27 [patent_title] => CONTROL OF SURFACE PROPERTIES BY DEPOSITION OF PARTICLE MONOLAYERS [patent_app_type] => utility [patent_app_number] => 16/669322 [patent_app_country] => US [patent_app_date] => 2019-10-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 23576 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 173 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16669322 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/669322
Control of surface properties by deposition of particle monolayers Oct 29, 2019 Issued
Array ( [id] => 18593301 [patent_doc_number] => 11742212 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-08-29 [patent_title] => Directional deposition in etch chamber [patent_app_type] => utility [patent_app_number] => 17/309188 [patent_app_country] => US [patent_app_date] => 2019-10-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 14 [patent_no_of_words] => 11650 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 79 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17309188 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/309188
Directional deposition in etch chamber Oct 28, 2019 Issued
Array ( [id] => 15499829 [patent_doc_number] => 20200050103 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-02-13 [patent_title] => CRITICAL DIMENSION UNIFORMITY [patent_app_type] => utility [patent_app_number] => 16/657551 [patent_app_country] => US [patent_app_date] => 2019-10-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5257 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 120 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16657551 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/657551
Critical dimension uniformity Oct 17, 2019 Issued
Array ( [id] => 15442541 [patent_doc_number] => 20200035454 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-01-30 [patent_title] => ION-ION PLASMA ATOMIC LAYER ETCH PROCESS [patent_app_type] => utility [patent_app_number] => 16/595339 [patent_app_country] => US [patent_app_date] => 2019-10-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8856 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 161 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16595339 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/595339
Ion-ion plasma atomic layer etch process Oct 6, 2019 Issued
Array ( [id] => 15745537 [patent_doc_number] => 20200111658 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-04-09 [patent_title] => WAFER PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 16/582146 [patent_app_country] => US [patent_app_date] => 2019-09-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6903 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -2 [patent_words_short_claim] => 174 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16582146 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/582146
Wafer processing method Sep 24, 2019 Issued
Menu