Michelle M. Iacoletti

Array ( [id] => 14217727 [patent_doc_number] => 20190121248 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-04-25 [patent_title] => PATTERNING DEVICE COOLING APPARATUS [patent_app_type] => utility [patent_app_number] => 16/090713 [patent_app_country] => US [patent_app_date] => 2017-03-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12119 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16090713 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11708375 [patent_doc_number] => 20170176875 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-06-22 [patent_title] => 'FLUID HANDLING STRUCTURE, A LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD' [patent_app_type] => utility [patent_app_number] => 15/451007 [patent_app_country] => US [patent_app_date] => 2017-03-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 17267 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15451007 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11950953 [patent_doc_number] => 20170255104 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-09-07 [patent_title] => 'Metrology Apparatus, Method of Measuring a Structure and Lithographic Apparatus' [patent_app_type] => utility [patent_app_number] => 15/444765 [patent_app_country] => US [patent_app_date] => 2017-02-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 8014 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15444765 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 12412923 [patent_doc_number] => 09971248 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2018-05-15 [patent_title] => Shutter unit, lithography apparatus, and method of manufacturing article [patent_app_type] => utility [patent_app_number] => 15/444418 [patent_app_country] => US [patent_app_date] => 2017-02-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 6 [patent_no_of_words] => 3019 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 97 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15444418 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 12412926 [patent_doc_number] => 09971249 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2018-05-15 [patent_title] => Method and system for controlled ultraviolet light exposure [patent_app_type] => utility [patent_app_number] => 15/443196 [patent_app_country] => US [patent_app_date] => 2017-02-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 4966 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 123 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15443196 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11896623 [patent_doc_number] => 09766557 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2017-09-19 [patent_title] => 'Patterning device support, lithographic apparatus, and method of controlling patterning device temperature' [patent_app_type] => utility [patent_app_number] => 15/438376 [patent_app_country] => US [patent_app_date] => 2017-02-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 25 [patent_figures_cnt] => 26 [patent_no_of_words] => 14866 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 183 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15438376 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 12107796 [patent_doc_number] => 09864278 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2018-01-09 [patent_title] => 'Reflective mirror, projection optical system, exposure apparatus, and device manufacturing method' [patent_app_type] => utility [patent_app_number] => 15/437338 [patent_app_country] => US [patent_app_date] => 2017-02-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 9205 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 121 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15437338 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 14134895 [patent_doc_number] => 20190101837 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-04-04 [patent_title] => PATTERNING DEVICE COOLING SYSTEM AND METHOD OF THERMALLY CONDITIONING A PATTERNING DEVICE [patent_app_type] => utility [patent_app_number] => 16/086343 [patent_app_country] => US [patent_app_date] => 2017-02-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8338 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 58 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16086343 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 12512739 [patent_doc_number] => 10001709 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2018-06-19 [patent_title] => Lithographic apparatus, spectral purity filter and device manufacturing method [patent_app_type] => utility [patent_app_number] => 15/432698 [patent_app_country] => US [patent_app_date] => 2017-02-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 20 [patent_no_of_words] => 11453 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 179 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15432698 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 12931801 [patent_doc_number] => 09829799 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2017-11-28 [patent_title] => Lithographic apparatus and device manufacturing method [patent_app_type] => utility [patent_app_number] => 15/431440 [patent_app_country] => US [patent_app_date] => 2017-02-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 8 [patent_no_of_words] => 6483 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 177 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15431440 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11651011 [patent_doc_number] => 20170146912 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-05-25 [patent_title] => 'IMAGING OPTICAL SYSTEM' [patent_app_type] => utility [patent_app_number] => 15/426408 [patent_app_country] => US [patent_app_date] => 2017-02-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 8373 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15426408 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 14522457 [patent_doc_number] => 10338483 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-07-02 [patent_title] => Actuator system and lithographic apparatus [patent_app_type] => utility [patent_app_number] => 16/070848 [patent_app_country] => US [patent_app_date] => 2017-01-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 9 [patent_no_of_words] => 6512 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 57 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16070848 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 13095463 [patent_doc_number] => 10067068 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2018-09-04 [patent_title] => Lithographic apparatus and method for performing a measurement [patent_app_type] => utility [patent_app_number] => 15/388463 [patent_app_country] => US [patent_app_date] => 2016-12-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 13 [patent_no_of_words] => 10954 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 79 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15388463 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11716482 [patent_doc_number] => 20170184981 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-06-29 [patent_title] => 'Metrology Methods, Metrology Apparatus and Device Manufacturing Method' [patent_app_type] => utility [patent_app_number] => 15/388601 [patent_app_country] => US [patent_app_date] => 2016-12-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 16147 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15388601 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16477586 [patent_doc_number] => 10852528 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-12-01 [patent_title] => Method and device for exposure of photosensitive layer [patent_app_type] => utility [patent_app_number] => 16/464838 [patent_app_country] => US [patent_app_date] => 2016-12-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 8 [patent_no_of_words] => 4579 [patent_no_of_claims] => 5 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 158 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16464838 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 13028695 [patent_doc_number] => 10036966 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2018-07-31 [patent_title] => Environmental control of systems for photolithography process [patent_app_type] => utility [patent_app_number] => 15/364748 [patent_app_country] => US [patent_app_date] => 2016-11-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 10 [patent_no_of_words] => 6056 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 73 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15364748 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 13555519 [patent_doc_number] => 20180329307 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-11-15 [patent_title] => POSITION MEASURING METHOD OF AN ALIGNMENT TARGET [patent_app_type] => utility [patent_app_number] => 15/777162 [patent_app_country] => US [patent_app_date] => 2016-11-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 16741 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 138 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15777162 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11664831 [patent_doc_number] => 20170153550 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-06-01 [patent_title] => 'APPARATUS AND METHOD FOR TREATING A SUBSTRATE' [patent_app_type] => utility [patent_app_number] => 15/363062 [patent_app_country] => US [patent_app_date] => 2016-11-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 13 [patent_no_of_words] => 6240 [patent_no_of_claims] => 22 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15363062 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 12432495 [patent_doc_number] => 09977344 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2018-05-22 [patent_title] => Metrology target, method and apparatus, computer program and lithographic system [patent_app_type] => utility [patent_app_number] => 15/358321 [patent_app_country] => US [patent_app_date] => 2016-11-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 19 [patent_no_of_words] => 12368 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 43 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15358321 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16844314 [patent_doc_number] => 11016397 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-05-25 [patent_title] => Source separation from metrology data [patent_app_type] => utility [patent_app_number] => 15/777601 [patent_app_country] => US [patent_app_date] => 2016-11-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 18 [patent_figures_cnt] => 24 [patent_no_of_words] => 12544 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 45 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15777601 [rel_patent_id] =>[rel_patent_doc_number] =>)