Michelle M. Iacoletti

Array ( [id] => 13511207 [patent_doc_number] => 20180307146 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-10-25 [patent_title] => A Radiation System and Optical Device [patent_app_type] => utility [patent_app_number] => 15/766225 [patent_app_country] => US [patent_app_date] => 2016-10-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6470 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15766225 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 13496495 [patent_doc_number] => 20180299790 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-10-18 [patent_title] => POLARIZATION INDEPENDENT METROLOGY SYSTEM [patent_app_type] => utility [patent_app_number] => 15/766427 [patent_app_country] => US [patent_app_date] => 2016-10-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10814 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 111 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15766427 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 13932681 [patent_doc_number] => 20190049856 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-02-14 [patent_title] => EXPOSURE APPARATUS, EXPOSURE METHOD, MANUFACTURING METHOD OF FLAT-PANEL DISPLAY, AND DEVICE MANUFACTURING METHOD [patent_app_type] => utility [patent_app_number] => 15/763475 [patent_app_country] => US [patent_app_date] => 2016-09-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 16260 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -42 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15763475 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11365620 [patent_doc_number] => 20170003600 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-01-05 [patent_title] => 'EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD' [patent_app_type] => utility [patent_app_number] => 15/268112 [patent_app_country] => US [patent_app_date] => 2016-09-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 26 [patent_figures_cnt] => 26 [patent_no_of_words] => 30288 [patent_no_of_claims] => 25 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15268112 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 14569335 [patent_doc_number] => 20190212274 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-07-11 [patent_title] => OPTICAL DEVICE FOR CHARACTERIZATION OF A SAMPLE [patent_app_type] => utility [patent_app_number] => 16/333346 [patent_app_country] => US [patent_app_date] => 2016-09-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6265 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16333346 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 13678493 [patent_doc_number] => 20160377983 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-12-29 [patent_title] => EXTREME ULTRAVIOLET LITHOGRAPHY PROCESS [patent_app_type] => utility [patent_app_number] => 15/260953 [patent_app_country] => US [patent_app_date] => 2016-09-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3203 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 97 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15260953 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 13678505 [patent_doc_number] => 20160377989 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-12-29 [patent_title] => FLUID HANDLING STRUCTURE, A LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD [patent_app_type] => utility [patent_app_number] => 15/261616 [patent_app_country] => US [patent_app_date] => 2016-09-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 17256 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 89 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15261616 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 13514395 [patent_doc_number] => 20180308740 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-10-25 [patent_title] => SUBSTRATE TABLE AND LITHOGRAPHIC APPARATUS [patent_app_type] => utility [patent_app_number] => 15/766740 [patent_app_country] => US [patent_app_date] => 2016-09-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8485 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 166 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15766740 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 13678513 [patent_doc_number] => 20160377993 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-12-29 [patent_title] => MULTI-STAGE SYSTEM, A CONTROL METHOD THEREFOR, AND A LITHOGRAPHIC APPARATUS [patent_app_type] => utility [patent_app_number] => 15/258758 [patent_app_country] => US [patent_app_date] => 2016-09-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6770 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15258758 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 13119845 [patent_doc_number] => 10078274 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2018-09-18 [patent_title] => Method and arrangement for handling and processing substrates [patent_app_type] => utility [patent_app_number] => 15/250977 [patent_app_country] => US [patent_app_date] => 2016-08-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 27 [patent_no_of_words] => 7831 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 147 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15250977 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 13389761 [patent_doc_number] => 20180246423 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-08-30 [patent_title] => Lithographic Apparatus Alignment Sensor and Method [patent_app_type] => utility [patent_app_number] => 15/754470 [patent_app_country] => US [patent_app_date] => 2016-08-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9705 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15754470 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15756865 [patent_doc_number] => 10620541 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-04-14 [patent_title] => Mask plate, exposure system and exposure method [patent_app_type] => utility [patent_app_number] => 15/503926 [patent_app_country] => US [patent_app_date] => 2016-08-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 8 [patent_no_of_words] => 3881 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 143 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15503926 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11430519 [patent_doc_number] => 09568832 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2017-02-14 [patent_title] => 'Anamorphically imaging projection lens system and related optical systems, projection exposure systems and methods' [patent_app_type] => utility [patent_app_number] => 15/155356 [patent_app_country] => US [patent_app_date] => 2016-05-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 8406 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 73 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15155356 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11989074 [patent_doc_number] => 20170293230 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-10-12 [patent_title] => 'Adjustment and Design Method of Illumination System Matched with Multiple Objective Lenses in Extreme Ultraviolet Lithography Machine' [patent_app_type] => utility [patent_app_number] => 15/093843 [patent_app_country] => US [patent_app_date] => 2016-04-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 3829 [patent_no_of_claims] => 2 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15093843 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11094511 [patent_doc_number] => 20160291479 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-10-06 [patent_title] => 'Inspection Apparatus for Measuring Properties of a Target Structure, Methods of Operating an Optical System, Method of Manufacturing Devices' [patent_app_type] => utility [patent_app_number] => 15/087299 [patent_app_country] => US [patent_app_date] => 2016-03-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 15 [patent_no_of_words] => 13944 [patent_no_of_claims] => 26 [patent_no_of_ind_claims] => 12 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15087299 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 12045980 [patent_doc_number] => 09823578 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2017-11-21 [patent_title] => 'Control device for controlling at least one manipulator of a projection lens' [patent_app_type] => utility [patent_app_number] => 15/081074 [patent_app_country] => US [patent_app_date] => 2016-03-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 10642 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 134 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15081074 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 12416709 [patent_doc_number] => 09972516 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2018-05-15 [patent_title] => Exposure device, substrate processing apparatus, exposure method for substrate and substrate processing method [patent_app_type] => utility [patent_app_number] => 15/079153 [patent_app_country] => US [patent_app_date] => 2016-03-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 24 [patent_figures_cnt] => 30 [patent_no_of_words] => 14889 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 192 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15079153 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11875010 [patent_doc_number] => 09746778 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2017-08-29 [patent_title] => 'EUV exposure apparatus with reflective elements having reduced influence of temperature variation' [patent_app_type] => utility [patent_app_number] => 15/070872 [patent_app_country] => US [patent_app_date] => 2016-03-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 18 [patent_figures_cnt] => 27 [patent_no_of_words] => 36925 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 203 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15070872 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11344873 [patent_doc_number] => 09529278 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2016-12-27 [patent_title] => 'Inspection apparatus to detect a target located within a pattern for lithography' [patent_app_type] => utility [patent_app_number] => 15/056410 [patent_app_country] => US [patent_app_date] => 2016-02-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 10 [patent_no_of_words] => 6288 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 93 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15056410 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 14202025 [patent_doc_number] => 10268125 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-04-23 [patent_title] => Device and method for detecting overlay error [patent_app_type] => utility [patent_app_number] => 15/541342 [patent_app_country] => US [patent_app_date] => 2016-02-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 16 [patent_no_of_words] => 3525 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 170 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15541342 [rel_patent_id] =>[rel_patent_doc_number] =>)