| Application number | Title of the application | Filing Date | Status |
|---|
Array
(
[id] => 10575466
[patent_doc_number] => 09298104
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2016-03-29
[patent_title] => 'Substrate holder, lithographic apparatus, and device manufacturing method'
[patent_app_type] => utility
[patent_app_number] => 14/563792
[patent_app_country] => US
[patent_app_date] => 2014-12-08
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 9
[patent_figures_cnt] => 18
[patent_no_of_words] => 17167
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 70
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14563792
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/563792 | Substrate holder, lithographic apparatus, and device manufacturing method | Dec 7, 2014 | Issued |
Array
(
[id] => 12167191
[patent_doc_number] => 09885958
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2018-02-06
[patent_title] => 'Projection exposure methods and systems'
[patent_app_type] => utility
[patent_app_number] => 14/556432
[patent_app_country] => US
[patent_app_date] => 2014-12-01
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 11
[patent_figures_cnt] => 21
[patent_no_of_words] => 8262
[patent_no_of_claims] => 19
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 146
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14556432
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/556432 | Projection exposure methods and systems | Nov 30, 2014 | Issued |
Array
(
[id] => 10091567
[patent_doc_number] => 09128390
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2015-09-08
[patent_title] => 'Multi-stage system, a control method therefor, and a lithographic apparatus'
[patent_app_type] => utility
[patent_app_number] => 14/542263
[patent_app_country] => US
[patent_app_date] => 2014-11-14
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 6
[patent_figures_cnt] => 10
[patent_no_of_words] => 6893
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 131
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14542263
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/542263 | Multi-stage system, a control method therefor, and a lithographic apparatus | Nov 13, 2014 | Issued |
Array
(
[id] => 10200285
[patent_doc_number] => 20150085272
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2015-03-26
[patent_title] => 'OPTICAL SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS'
[patent_app_type] => utility
[patent_app_number] => 14/513944
[patent_app_country] => US
[patent_app_date] => 2014-10-14
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 11
[patent_figures_cnt] => 11
[patent_no_of_words] => 5091
[patent_no_of_claims] => 22
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14513944
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/513944 | Optical system of a microlithographic projection exposure apparatus | Oct 13, 2014 | Issued |
Array
(
[id] => 12039090
[patent_doc_number] => 09817320
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2017-11-14
[patent_title] => 'Lithographic method and apparatus'
[patent_app_type] => utility
[patent_app_number] => 15/032245
[patent_app_country] => US
[patent_app_date] => 2014-10-02
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 5
[patent_figures_cnt] => 8
[patent_no_of_words] => 9974
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 124
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15032245
[rel_patent_id] =>[rel_patent_doc_number] =>) 15/032245 | Lithographic method and apparatus | Oct 1, 2014 | Issued |
Array
(
[id] => 11481891
[patent_doc_number] => 09588433
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2017-03-07
[patent_title] => 'Optical system, in particular of a microlithographic projection exposure apparatus'
[patent_app_type] => utility
[patent_app_number] => 14/501770
[patent_app_country] => US
[patent_app_date] => 2014-09-30
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 5
[patent_figures_cnt] => 5
[patent_no_of_words] => 5308
[patent_no_of_claims] => 21
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 153
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14501770
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/501770 | Optical system, in particular of a microlithographic projection exposure apparatus | Sep 29, 2014 | Issued |
Array
(
[id] => 11700300
[patent_doc_number] => 09690211
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2017-06-27
[patent_title] => 'Exposure system'
[patent_app_type] => utility
[patent_app_number] => 14/500260
[patent_app_country] => US
[patent_app_date] => 2014-09-29
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 3
[patent_figures_cnt] => 20
[patent_no_of_words] => 5507
[patent_no_of_claims] => 13
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 269
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14500260
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/500260 | Exposure system | Sep 28, 2014 | Issued |
Array
(
[id] => 10207187
[patent_doc_number] => 20150092175
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2015-04-02
[patent_title] => 'LITHOGRAPHY APPARATUS, METHOD OF MEASURING SURFACE POSITION, AND METHOD OF PRODUCING DEVICE'
[patent_app_type] => utility
[patent_app_number] => 14/493861
[patent_app_country] => US
[patent_app_date] => 2014-09-23
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 10
[patent_figures_cnt] => 10
[patent_no_of_words] => 7299
[patent_no_of_claims] => 14
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14493861
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/493861 | LITHOGRAPHY APPARATUS, METHOD OF MEASURING SURFACE POSITION, AND METHOD OF PRODUCING DEVICE | Sep 22, 2014 | Abandoned |
Array
(
[id] => 11430416
[patent_doc_number] => 09568729
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2017-02-14
[patent_title] => 'Optical apparatus, projection optical system, exposure apparatus, and method of manufacturing article'
[patent_app_type] => utility
[patent_app_number] => 14/492111
[patent_app_country] => US
[patent_app_date] => 2014-09-22
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 7
[patent_figures_cnt] => 15
[patent_no_of_words] => 6385
[patent_no_of_claims] => 13
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 178
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14492111
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/492111 | Optical apparatus, projection optical system, exposure apparatus, and method of manufacturing article | Sep 21, 2014 | Issued |
Array
(
[id] => 11049226
[patent_doc_number] => 20160246185
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2016-08-25
[patent_title] => 'METHODS AND APPARATUS FOR OBTAINING DIAGNOSTIC INFORMATION RELATING TO AN INDUSTRIAL PROCESS'
[patent_app_type] => utility
[patent_app_number] => 15/025856
[patent_app_country] => US
[patent_app_date] => 2014-09-05
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 21
[patent_figures_cnt] => 21
[patent_no_of_words] => 23833
[patent_no_of_claims] => 27
[patent_no_of_ind_claims] => 10
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15025856
[rel_patent_id] =>[rel_patent_doc_number] =>) 15/025856 | Methods and apparatus for obtaining diagnostic information relating to an industrial process | Sep 4, 2014 | Issued |
Array
(
[id] => 13171121
[patent_doc_number] => 10101673
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2018-10-16
[patent_title] => Movable body drive method and system, pattern formation method and apparatus, exposure method and apparatus for driving movable body based on measurement value of encoder and information on flatness of scale, and device manufacturing method
[patent_app_type] => utility
[patent_app_number] => 14/478801
[patent_app_country] => US
[patent_app_date] => 2014-09-05
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 33
[patent_figures_cnt] => 48
[patent_no_of_words] => 44267
[patent_no_of_claims] => 21
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 349
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14478801
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/478801 | Movable body drive method and system, pattern formation method and apparatus, exposure method and apparatus for driving movable body based on measurement value of encoder and information on flatness of scale, and device manufacturing method | Sep 4, 2014 | Issued |
Array
(
[id] => 12003826
[patent_doc_number] => 20170307981
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2017-10-26
[patent_title] => 'EXPOSURE METHOD AND EXPOSURE MACHINE'
[patent_app_type] => utility
[patent_app_number] => 14/416317
[patent_app_country] => US
[patent_app_date] => 2014-09-04
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 3
[patent_figures_cnt] => 3
[patent_no_of_words] => 2201
[patent_no_of_claims] => 8
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14416317
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/416317 | EXPOSURE METHOD AND EXPOSURE MACHINE | Sep 3, 2014 | Abandoned |
Array
(
[id] => 10716103
[patent_doc_number] => 20160062250
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2016-03-03
[patent_title] => 'Lithography Process and System with Enhanced Overlay Quality'
[patent_app_type] => utility
[patent_app_number] => 14/471653
[patent_app_country] => US
[patent_app_date] => 2014-08-28
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 10
[patent_figures_cnt] => 10
[patent_no_of_words] => 6881
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14471653
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/471653 | Lithography process and system with enhanced overlay quality | Aug 27, 2014 | Issued |
Array
(
[id] => 10932436
[patent_doc_number] => 20140335457
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2014-11-13
[patent_title] => 'LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD'
[patent_app_type] => utility
[patent_app_number] => 14/444833
[patent_app_country] => US
[patent_app_date] => 2014-07-28
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 5
[patent_figures_cnt] => 5
[patent_no_of_words] => 5768
[patent_no_of_claims] => 18
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14444833
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/444833 | Lithographic apparatus and device manufacturing method involving a liquid confinement structure | Jul 27, 2014 | Issued |
Array
(
[id] => 10924869
[patent_doc_number] => 20140327890
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2014-11-06
[patent_title] => 'COATING AND DEVELOPING APPARATUS AND METHOD, AND STORAGE MEDIUM'
[patent_app_type] => utility
[patent_app_number] => 14/332473
[patent_app_country] => US
[patent_app_date] => 2014-07-16
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 17
[patent_figures_cnt] => 17
[patent_no_of_words] => 13278
[patent_no_of_claims] => 14
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14332473
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/332473 | Coating and developing apparatus and method, and storage medium | Jul 15, 2014 | Issued |
Array
(
[id] => 10213081
[patent_doc_number] => 20150098072
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2015-04-09
[patent_title] => 'BEAM GUIDANCE SYSTEM FOR THE FOCUSING GUIDANCE OF RADIATION FROM A HIGH-POWER LASER LIGHT SOURCE TOWARD A TARGET AND LPP X-RAY SOURCE COMPRISING A LASER LIGHT SOURCE AND SUCH A BEAM GUIDANCE SYSTEM'
[patent_app_type] => utility
[patent_app_number] => 14/320045
[patent_app_country] => US
[patent_app_date] => 2014-06-30
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 4
[patent_figures_cnt] => 4
[patent_no_of_words] => 4525
[patent_no_of_claims] => 24
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14320045
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/320045 | Beam guidance system for the focusing guidance of radiation from a high-power laser light source toward a target and LPP X-ray source comprising a laser light source and such a beam guidance system | Jun 29, 2014 | Issued |
Array
(
[id] => 11332679
[patent_doc_number] => 09523922
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2016-12-20
[patent_title] => 'Illumination system of a microlithographic projection exposure apparatus having a temperature control device'
[patent_app_type] => utility
[patent_app_number] => 14/314725
[patent_app_country] => US
[patent_app_date] => 2014-06-25
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 9
[patent_figures_cnt] => 18
[patent_no_of_words] => 10131
[patent_no_of_claims] => 21
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 85
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14314725
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/314725 | Illumination system of a microlithographic projection exposure apparatus having a temperature control device | Jun 24, 2014 | Issued |
Array
(
[id] => 10801006
[patent_doc_number] => 20160147163
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2016-05-26
[patent_title] => 'Reticle Shape Regulation Device and Method, and Exposure Apparatus Using Same'
[patent_app_type] => utility
[patent_app_number] => 14/900073
[patent_app_country] => US
[patent_app_date] => 2014-06-10
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 5
[patent_figures_cnt] => 5
[patent_no_of_words] => 4415
[patent_no_of_claims] => 14
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14900073
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/900073 | Reticle shape regulation device and method, and exposure apparatus using same | Jun 9, 2014 | Issued |
Array
(
[id] => 9755087
[patent_doc_number] => 20140285788
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2014-09-25
[patent_title] => 'OPTICAL SYSTEM FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS AND MICROLITHOGRAPHIC EXPOSURE METHOD'
[patent_app_type] => utility
[patent_app_number] => 14/297375
[patent_app_country] => US
[patent_app_date] => 2014-06-05
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 9
[patent_figures_cnt] => 9
[patent_no_of_words] => 4436
[patent_no_of_claims] => 21
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14297375
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/297375 | Optical system for a microlithographic projection exposure apparatus and microlithographic exposure method | Jun 4, 2014 | Issued |
Array
(
[id] => 10770693
[patent_doc_number] => 20160116849
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2016-04-28
[patent_title] => 'METHOD OF DETERMINING CRITICAL-DIMENSION-RELATED PROPERTIES, INSPECTION APPARATUS AND DEVICE MANUFACTURING METHOD'
[patent_app_type] => utility
[patent_app_number] => 14/892176
[patent_app_country] => US
[patent_app_date] => 2014-05-23
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 13
[patent_figures_cnt] => 13
[patent_no_of_words] => 12062
[patent_no_of_claims] => 13
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14892176
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/892176 | Method of determining critical-dimension-related properties, inspection apparatus and device manufacturing method | May 22, 2014 | Issued |