Michelle M. Iacoletti

Array ( [id] => 5372552 [patent_doc_number] => 20090310112 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2009-12-17 [patent_title] => 'EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD' [patent_app_type] => utility [patent_app_number] => 12/480682 [patent_app_country] => US [patent_app_date] => 2009-06-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 7651 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0310/20090310112.pdf [firstpage_image] =>[orig_patent_app_number] => 12480682 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 8422909 [patent_doc_number] => 08279398 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2012-10-02 [patent_title] => 'Deforming mechanism, exposure apparatus, and device manufacturing method' [patent_app_type] => utility [patent_app_number] => 12/481101 [patent_app_country] => US [patent_app_date] => 2009-06-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 10 [patent_no_of_words] => 4322 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 271 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 12481101 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6139835 [patent_doc_number] => 20110128522 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2011-06-02 [patent_title] => 'METHOD FOR MANUFACTURING A PATTERNED MEMBER AND PROCESSING APPARATUS USING ELECTROMAGNETIC BEAM' [patent_app_type] => utility [patent_app_number] => 13/055371 [patent_app_country] => US [patent_app_date] => 2009-06-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 7417 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0128/20110128522.pdf [firstpage_image] =>[orig_patent_app_number] => 13055371 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5301406 [patent_doc_number] => 20090296058 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2009-12-03 [patent_title] => 'LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD' [patent_app_type] => utility [patent_app_number] => 12/476809 [patent_app_country] => US [patent_app_date] => 2009-06-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 19 [patent_figures_cnt] => 19 [patent_no_of_words] => 27486 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0296/20090296058.pdf [firstpage_image] =>[orig_patent_app_number] => 12476809 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5301416 [patent_doc_number] => 20090296068 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2009-12-03 [patent_title] => 'SUBSTRATE TABLE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD' [patent_app_type] => utility [patent_app_number] => 12/476008 [patent_app_country] => US [patent_app_date] => 2009-06-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 11208 [patent_no_of_claims] => 33 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0296/20090296068.pdf [firstpage_image] =>[orig_patent_app_number] => 12476008 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5301412 [patent_doc_number] => 20090296064 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2009-12-03 [patent_title] => 'ILLUMINATION SYSTEM FOR SIZING FOCUSED SPOTS OF A PATTERNING SYSTEM FOR MASKLESS LITHOGRAPHY' [patent_app_type] => utility [patent_app_number] => 12/471642 [patent_app_country] => US [patent_app_date] => 2009-05-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 5591 [patent_no_of_claims] => 32 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0296/20090296064.pdf [firstpage_image] =>[orig_patent_app_number] => 12471642 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5365891 [patent_doc_number] => 20090303450 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2009-12-10 [patent_title] => 'Particle Detection on Patterning Devices with Arbitrary Patterns' [patent_app_type] => utility [patent_app_number] => 12/471023 [patent_app_country] => US [patent_app_date] => 2009-05-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 8678 [patent_no_of_claims] => 24 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0303/20090303450.pdf [firstpage_image] =>[orig_patent_app_number] => 12471023 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5489068 [patent_doc_number] => 20090290139 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2009-11-26 [patent_title] => 'SUBSTRATE TABLE, SENSOR AND METHOD' [patent_app_type] => utility [patent_app_number] => 12/470099 [patent_app_country] => US [patent_app_date] => 2009-05-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 7080 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0290/20090290139.pdf [firstpage_image] =>[orig_patent_app_number] => 12470099 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5301407 [patent_doc_number] => 20090296059 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2009-12-03 [patent_title] => 'MEASUREMENT APPARATUS, MEASUREMENT METHOD, EXPOSURE APPARATUS, AND DEVICE FABRICATION METHOD' [patent_app_type] => utility [patent_app_number] => 12/469586 [patent_app_country] => US [patent_app_date] => 2009-05-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 4875 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0296/20090296059.pdf [firstpage_image] =>[orig_patent_app_number] => 12469586 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5372555 [patent_doc_number] => 20090310115 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2009-12-17 [patent_title] => 'APPARATUS AND METHOD FOR EXPOSING ADJACENT SITES ON A SUBSTRATE' [patent_app_type] => utility [patent_app_number] => 12/469619 [patent_app_country] => US [patent_app_date] => 2009-05-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 12194 [patent_no_of_claims] => 42 [patent_no_of_ind_claims] => 7 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0310/20090310115.pdf [firstpage_image] =>[orig_patent_app_number] => 12469619 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 9678317 [patent_doc_number] => 08817235 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2014-08-26 [patent_title] => 'Lithographic apparatus and method involving a pockels cell' [patent_app_type] => utility [patent_app_number] => 12/436604 [patent_app_country] => US [patent_app_date] => 2009-05-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 12 [patent_no_of_words] => 6889 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 122 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 12436604 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5315841 [patent_doc_number] => 20090280439 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2009-11-12 [patent_title] => 'EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD' [patent_app_type] => utility [patent_app_number] => 12/432998 [patent_app_country] => US [patent_app_date] => 2009-04-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 8484 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0280/20090280439.pdf [firstpage_image] =>[orig_patent_app_number] => 12432998 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6100600 [patent_doc_number] => 20110164228 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2011-07-07 [patent_title] => 'Inspection Apparatus for Lithography' [patent_app_type] => utility [patent_app_number] => 12/989902 [patent_app_country] => US [patent_app_date] => 2009-04-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 6212 [patent_no_of_claims] => 22 [patent_no_of_ind_claims] => 12 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0164/20110164228.pdf [firstpage_image] =>[orig_patent_app_number] => 12989902 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 9924357 [patent_doc_number] => 08982329 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2015-03-17 [patent_title] => 'Method and apparatus for measuring line end shortening, substrate and patterning device' [patent_app_type] => utility [patent_app_number] => 12/933806 [patent_app_country] => US [patent_app_date] => 2009-04-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 10 [patent_no_of_words] => 8395 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 82 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 12933806 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6053531 [patent_doc_number] => 20110109891 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2011-05-12 [patent_title] => 'Apparatus for Supporting and Optical Element, and Method of Making Same' [patent_app_type] => utility [patent_app_number] => 12/933506 [patent_app_country] => US [patent_app_date] => 2009-04-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 16 [patent_no_of_words] => 9243 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0109/20110109891.pdf [firstpage_image] =>[orig_patent_app_number] => 12933506 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 9246583 [patent_doc_number] => 08610873 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2013-12-17 [patent_title] => 'Immersion lithography apparatus and method having movable liquid diverter between immersion liquid confinement member and substrate' [patent_app_type] => utility [patent_app_number] => 12/382100 [patent_app_country] => US [patent_app_date] => 2009-03-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 20 [patent_no_of_words] => 7772 [patent_no_of_claims] => 34 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 326 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 12382100 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5471346 [patent_doc_number] => 20090244512 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2009-10-01 [patent_title] => 'LITHOGRAPHY PROCESS WINDOW ANALYZING METHOD AND ANALYZING PROGRAM' [patent_app_type] => utility [patent_app_number] => 12/400677 [patent_app_country] => US [patent_app_date] => 2009-03-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 2 [patent_no_of_words] => 4345 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0244/20090244512.pdf [firstpage_image] =>[orig_patent_app_number] => 12400677 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5531775 [patent_doc_number] => 20090231563 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2009-09-17 [patent_title] => 'Method and Lithographic Apparatus for Measuring and Acquiring Height Data Relating to a Substrate Surface' [patent_app_type] => utility [patent_app_number] => 12/399737 [patent_app_country] => US [patent_app_date] => 2009-03-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 13171 [patent_no_of_claims] => 26 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0231/20090231563.pdf [firstpage_image] =>[orig_patent_app_number] => 12399737 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5494292 [patent_doc_number] => 20090262320 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2009-10-22 [patent_title] => 'Method and Lithographic Apparatus for Acquiring Height Data Relating to a Substrate Surface' [patent_app_type] => utility [patent_app_number] => 12/399711 [patent_app_country] => US [patent_app_date] => 2009-03-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 11561 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 7 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0262/20090262320.pdf [firstpage_image] =>[orig_patent_app_number] => 12399711 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5384054 [patent_doc_number] => 20090225298 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2009-09-10 [patent_title] => 'OPTICAL ELEMENT, PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE FABRICATION METHOD' [patent_app_type] => utility [patent_app_number] => 12/399587 [patent_app_country] => US [patent_app_date] => 2009-03-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 6447 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0225/20090225298.pdf [firstpage_image] =>[orig_patent_app_number] => 12399587 [rel_patent_id] =>[rel_patent_doc_number] =>)