Mikhail Kornakov

Array ( [id] => 7231237 [patent_doc_number] => 20050139229 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-06-30 [patent_title] => 'Atmospheric pressure non-thermal plasma device to clean and sterilize the surfaces of probes, cannulas, pin tools, pipettes and spray heads' [patent_app_type] => utility [patent_app_number] => 11/039628 [patent_app_country] => US [patent_app_date] => 2005-01-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 4587 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0139/20050139229.pdf [firstpage_image] =>[orig_patent_app_number] => 11039628 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 521921 [patent_doc_number] => 07182819 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2007-02-27 [patent_title] => 'Methods for cleaning a chamber of semiconductor device manufacturing equipment' [patent_app_type] => utility [patent_app_number] => 11/027086 [patent_app_country] => US [patent_app_date] => 2004-12-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 2 [patent_no_of_words] => 1078 [patent_no_of_claims] => 5 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 171 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/182/07182819.pdf [firstpage_image] =>[orig_patent_app_number] => 11027086 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7231238 [patent_doc_number] => 20050139230 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-06-30 [patent_title] => 'Method for cleaning semiconductor wafers' [patent_app_type] => utility [patent_app_number] => 11/017699 [patent_app_country] => US [patent_app_date] => 2004-12-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 3686 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0139/20050139230.pdf [firstpage_image] =>[orig_patent_app_number] => 11017699 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6918680 [patent_doc_number] => 20050096241 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-05-05 [patent_title] => 'Surfactant-free cleaning compositions and processes for the use thereof' [patent_app_type] => utility [patent_app_number] => 11/011512 [patent_app_country] => US [patent_app_date] => 2004-12-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5302 [patent_no_of_claims] => 23 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0096/20050096241.pdf [firstpage_image] =>[orig_patent_app_number] => 11011512 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7214851 [patent_doc_number] => 20050076531 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-04-14 [patent_title] => 'Wafer backside plate for use in a spin, rinse, and dry module and methods for making and implementing the same' [patent_app_type] => utility [patent_app_number] => 11/005754 [patent_app_country] => US [patent_app_date] => 2004-12-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 16 [patent_no_of_words] => 12190 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0076/20050076531.pdf [firstpage_image] =>[orig_patent_app_number] => 11005754 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5476917 [patent_doc_number] => 20090199874 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2009-08-13 [patent_title] => 'Tableware-washing process including a biocide' [patent_app_type] => utility [patent_app_number] => 10/576983 [patent_app_country] => US [patent_app_date] => 2004-10-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 2 [patent_no_of_words] => 3187 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0199/20090199874.pdf [firstpage_image] =>[orig_patent_app_number] => 10576983 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 394200 [patent_doc_number] => 07297895 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2007-11-20 [patent_title] => 'Apparatus for removal of minute particles from a surface using thermophoresis to prevent particle redeposition' [patent_app_type] => utility [patent_app_number] => 10/966029 [patent_app_country] => US [patent_app_date] => 2004-10-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 10 [patent_no_of_words] => 3306 [patent_no_of_claims] => 5 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 209 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/297/07297895.pdf [firstpage_image] =>[orig_patent_app_number] => 10966029 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7079410 [patent_doc_number] => 20050045209 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-03-03 [patent_title] => 'System and method for cleaning semicondutor fabrication equipment parts' [patent_app_type] => utility [patent_app_number] => 10/962359 [patent_app_country] => US [patent_app_date] => 2004-10-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 8450 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 10 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0045/20050045209.pdf [firstpage_image] =>[orig_patent_app_number] => 10962359 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4848673 [patent_doc_number] => 20080314415 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-12-25 [patent_title] => 'Cleaning Contaminated Materials' [patent_app_type] => utility [patent_app_number] => 10/574188 [patent_app_country] => US [patent_app_date] => 2004-09-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4767 [patent_no_of_claims] => 35 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0314/20080314415.pdf [firstpage_image] =>[orig_patent_app_number] => 10574188 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7152927 [patent_doc_number] => 20050082001 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-04-21 [patent_title] => 'Cleaning method and cleaning device' [patent_app_type] => utility [patent_app_number] => 10/946361 [patent_app_country] => US [patent_app_date] => 2004-09-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 4553 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0082/20050082001.pdf [firstpage_image] =>[orig_patent_app_number] => 10946361 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 441849 [patent_doc_number] => 07255749 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2007-08-14 [patent_title] => 'Substrate cleaning method and substrate cleaning apparatus' [patent_app_type] => utility [patent_app_number] => 10/937014 [patent_app_country] => US [patent_app_date] => 2004-09-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 11 [patent_no_of_words] => 3553 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 129 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/255/07255749.pdf [firstpage_image] =>[orig_patent_app_number] => 10937014 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6987795 [patent_doc_number] => 20050087209 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-04-28 [patent_title] => 'Megasonic processing system with gasified fluid' [patent_app_type] => utility [patent_app_number] => 10/931457 [patent_app_country] => US [patent_app_date] => 2004-09-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 4266 [patent_no_of_claims] => 28 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0087/20050087209.pdf [firstpage_image] =>[orig_patent_app_number] => 10931457 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7124563 [patent_doc_number] => 20050056306 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-03-17 [patent_title] => 'Apparatus and method for treating surfaces of semiconductor wafers using ozone' [patent_app_type] => utility [patent_app_number] => 10/902643 [patent_app_country] => US [patent_app_date] => 2004-07-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 16 [patent_no_of_words] => 9243 [patent_no_of_claims] => 25 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0056/20050056306.pdf [firstpage_image] =>[orig_patent_app_number] => 10902643 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7058186 [patent_doc_number] => 20050000545 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-01-06 [patent_title] => 'Method and apparatus for wet-cleaning substrate' [patent_app_type] => utility [patent_app_number] => 10/898366 [patent_app_country] => US [patent_app_date] => 2004-07-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 26 [patent_figures_cnt] => 26 [patent_no_of_words] => 16855 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0000/20050000545.pdf [firstpage_image] =>[orig_patent_app_number] => 10898366 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 778903 [patent_doc_number] => 06994769 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2006-02-07 [patent_title] => 'In-situ cleaning of a polymer coated plasma processing chamber' [patent_app_type] => utility [patent_app_number] => 10/881112 [patent_app_country] => US [patent_app_date] => 2004-06-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 9 [patent_no_of_words] => 5498 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 171 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/994/06994769.pdf [firstpage_image] =>[orig_patent_app_number] => 10881112 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7119616 [patent_doc_number] => 20050011445 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-01-20 [patent_title] => 'Apparatus and method for in-situ cleaning of a throttle valve in a CVD system' [patent_app_type] => utility [patent_app_number] => 10/870236 [patent_app_country] => US [patent_app_date] => 2004-06-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 3732 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0011/20050011445.pdf [firstpage_image] =>[orig_patent_app_number] => 10870236 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7181039 [patent_doc_number] => 20050161059 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-07-28 [patent_title] => 'Megasonic cleaning using supersaturated cleaning solution' [patent_app_type] => utility [patent_app_number] => 10/864929 [patent_app_country] => US [patent_app_date] => 2004-06-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 4979 [patent_no_of_claims] => 33 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0161/20050161059.pdf [firstpage_image] =>[orig_patent_app_number] => 10864929 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 431908 [patent_doc_number] => 07264680 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2007-09-04 [patent_title] => 'Process and apparatus for treating a workpiece using ozone' [patent_app_type] => utility [patent_app_number] => 10/859668 [patent_app_country] => US [patent_app_date] => 2004-06-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 3944 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 98 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/264/07264680.pdf [firstpage_image] =>[orig_patent_app_number] => 10859668 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7085837 [patent_doc_number] => 20050005948 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-01-13 [patent_title] => 'Atmospheric pressure non-thermal plasma device to clean and sterilize the surfaces of probes, cannulas, pin tools, pipettes and spray heads' [patent_app_type] => utility [patent_app_number] => 10/858272 [patent_app_country] => US [patent_app_date] => 2004-06-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 4567 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0005/20050005948.pdf [firstpage_image] =>[orig_patent_app_number] => 10858272 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 792176 [patent_doc_number] => 06981508 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2006-01-03 [patent_title] => 'On-site cleaning gas generation for process chamber cleaning' [patent_app_type] => utility [patent_app_number] => 10/856654 [patent_app_country] => US [patent_app_date] => 2004-05-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 2 [patent_no_of_words] => 1873 [patent_no_of_claims] => 26 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 69 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/981/06981508.pdf [firstpage_image] =>[orig_patent_app_number] => 10856654 [rel_patent_id] =>[rel_patent_doc_number] =>)