Nathan K. Ford

Array ( [id] => 12005302 [patent_doc_number] => 20170309457 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-10-26 [patent_title] => 'SUBSTRATE PROCESSING APPARATUS' [patent_app_type] => utility [patent_app_number] => 15/139174 [patent_app_country] => US [patent_app_date] => 2016-04-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 5467 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15139174 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11122450 [patent_doc_number] => 20160319424 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-11-03 [patent_title] => 'SUBSTRATE PROCESSING APPARATUS' [patent_app_type] => utility [patent_app_number] => 15/097382 [patent_app_country] => US [patent_app_date] => 2016-04-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 9801 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15097382 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11010818 [patent_doc_number] => 20160207771 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-07-21 [patent_title] => 'APPARATUS FOR PRODUCING ALIGNED CARBON NANOTUBE AGGREGATES' [patent_app_type] => utility [patent_app_number] => 15/085586 [patent_app_country] => US [patent_app_date] => 2016-03-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 2 [patent_no_of_words] => 14300 [patent_no_of_claims] => 1 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15085586 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11096490 [patent_doc_number] => 20160293459 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-10-06 [patent_title] => 'APPARATUS FOR PROCESSING SUSTRATE AND SEMICONDUCTOR FABRICATION LINE INCLUDING THE SAME' [patent_app_type] => utility [patent_app_number] => 15/082474 [patent_app_country] => US [patent_app_date] => 2016-03-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 21 [patent_figures_cnt] => 21 [patent_no_of_words] => 5398 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15082474 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11007045 [patent_doc_number] => 20160203997 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-07-14 [patent_title] => 'SUBSTRATE PROCESSING METHOD' [patent_app_type] => utility [patent_app_number] => 15/078772 [patent_app_country] => US [patent_app_date] => 2016-03-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 20 [patent_figures_cnt] => 20 [patent_no_of_words] => 21155 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15078772 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11744320 [patent_doc_number] => 20170198391 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-07-13 [patent_title] => 'SUBSTRATE PROCESSING APPARATUS' [patent_app_type] => utility [patent_app_number] => 15/073951 [patent_app_country] => US [patent_app_date] => 2016-03-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 14086 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15073951 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11718135 [patent_doc_number] => 20170186634 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-06-29 [patent_title] => 'SUBSTRATE PROCESSING APPARATUS' [patent_app_type] => utility [patent_app_number] => 15/071606 [patent_app_country] => US [patent_app_date] => 2016-03-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 13 [patent_no_of_words] => 13484 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15071606 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11079235 [patent_doc_number] => 20160276199 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-09-22 [patent_title] => 'DECOMPRESSION PROCESSING APPARATUS' [patent_app_type] => utility [patent_app_number] => 15/070763 [patent_app_country] => US [patent_app_date] => 2016-03-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 4170 [patent_no_of_claims] => 2 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15070763 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16148059 [patent_doc_number] => 10707106 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-07-07 [patent_title] => High-throughput semiconductor-processing apparatus equipped with multiple dual-chamber modules [patent_app_type] => utility [patent_app_number] => 15/060412 [patent_app_country] => US [patent_app_date] => 2016-03-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 11 [patent_no_of_words] => 5773 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 454 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15060412 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 13251715 [patent_doc_number] => 10138540 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2018-11-27 [patent_title] => Infiltration device and method [patent_app_type] => utility [patent_app_number] => 15/059806 [patent_app_country] => US [patent_app_date] => 2016-03-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 5 [patent_no_of_words] => 5818 [patent_no_of_claims] => 4 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 511 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15059806 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11063625 [patent_doc_number] => 20160260587 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-09-08 [patent_title] => 'SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD' [patent_app_type] => utility [patent_app_number] => 15/051801 [patent_app_country] => US [patent_app_date] => 2016-02-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 11076 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15051801 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11014398 [patent_doc_number] => 20160211351 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-07-21 [patent_title] => 'APPARATUS AND METHOD FOR EPITAXIALLY GROWING SOURCES AND DRAINS OF A FINFET DEVICE' [patent_app_type] => utility [patent_app_number] => 15/001087 [patent_app_country] => US [patent_app_date] => 2016-01-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 2 [patent_no_of_words] => 2949 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15001087 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 13703505 [patent_doc_number] => 20170362707 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-12-21 [patent_title] => ATOMIC LAYER DEPOSITION APPARATUS [patent_app_type] => utility [patent_app_number] => 15/543855 [patent_app_country] => US [patent_app_date] => 2016-01-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5188 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 228 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15543855 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10756250 [patent_doc_number] => 20160102402 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-04-14 [patent_title] => 'SYSTEMS AND METHODS FOR PRODUCTION OF GRAPHENE BY PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION' [patent_app_type] => utility [patent_app_number] => 14/971922 [patent_app_country] => US [patent_app_date] => 2015-12-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 2 [patent_no_of_words] => 4735 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14971922 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11007003 [patent_doc_number] => 20160203955 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-07-14 [patent_title] => 'COOLING STRUCTURE AND PARALLEL PLATE ETCHING APPARATUS' [patent_app_type] => utility [patent_app_number] => 14/963465 [patent_app_country] => US [patent_app_date] => 2015-12-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 5675 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14963465 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16047867 [patent_doc_number] => 10685814 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-06-16 [patent_title] => Processing chamber, combination of processing chamber and loadlock, and system for processing substrates [patent_app_type] => utility [patent_app_number] => 14/952230 [patent_app_country] => US [patent_app_date] => 2015-11-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 8 [patent_no_of_words] => 4576 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 206 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14952230 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10809455 [patent_doc_number] => 20160155614 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-06-02 [patent_title] => 'SUPPORT UNIT AND SUBSTRATE TREATING APPARATUS INCLUDING THE SAME' [patent_app_type] => utility [patent_app_number] => 14/938004 [patent_app_country] => US [patent_app_date] => 2015-11-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 4272 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14938004 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10709875 [patent_doc_number] => 20160056022 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-02-25 [patent_title] => 'Methods for Processing Substrates Using a Movable Plasma Confinement Structure' [patent_app_type] => utility [patent_app_number] => 14/931639 [patent_app_country] => US [patent_app_date] => 2015-11-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 16 [patent_no_of_words] => 6630 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14931639 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10765098 [patent_doc_number] => 20160111254 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-04-21 [patent_title] => 'Workpiece Processing Method And Apparatus' [patent_app_type] => utility [patent_app_number] => 14/878519 [patent_app_country] => US [patent_app_date] => 2015-10-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 6020 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14878519 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10681528 [patent_doc_number] => 20160027673 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-01-28 [patent_title] => 'PROCESSING SYSTEMS AND METHODS FOR HALIDE SCAVENGING' [patent_app_type] => utility [patent_app_number] => 14/875479 [patent_app_country] => US [patent_app_date] => 2015-10-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 26 [patent_figures_cnt] => 26 [patent_no_of_words] => 31385 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14875479 [rel_patent_id] =>[rel_patent_doc_number] =>)