Search

Olivia T. Luk

Examiner (ID: 8315)

Most Active Art Unit
2812
Art Unit(s)
2812
Total Applications
278
Issued Applications
256
Pending Applications
8
Abandoned Applications
14

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 1104722 [patent_doc_number] => 06812049 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2004-11-02 [patent_title] => 'Method and system for performing failure analysis on a multilayer silicon-on-insulator (SOI) device' [patent_app_type] => B1 [patent_app_number] => 10/313687 [patent_app_country] => US [patent_app_date] => 2002-12-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 1 [patent_figures_cnt] => 2 [patent_no_of_words] => 1726 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 99 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/812/06812049.pdf [firstpage_image] =>[orig_patent_app_number] => 10313687 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/313687
Method and system for performing failure analysis on a multilayer silicon-on-insulator (SOI) device Dec 4, 2002 Issued
Array ( [id] => 7612807 [patent_doc_number] => 06903028 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2005-06-07 [patent_title] => 'Soft-landing etching method using doping level control' [patent_app_type] => utility [patent_app_number] => 10/306962 [patent_app_country] => US [patent_app_date] => 2002-11-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 4 [patent_no_of_words] => 2828 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 122 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/903/06903028.pdf [firstpage_image] =>[orig_patent_app_number] => 10306962 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/306962
Soft-landing etching method using doping level control Nov 28, 2002 Issued
Array ( [id] => 6765794 [patent_doc_number] => 20030100194 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-05-29 [patent_title] => 'Method of manufacturing semiconductor device' [patent_app_type] => new [patent_app_number] => 10/303275 [patent_app_country] => US [patent_app_date] => 2002-11-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 4340 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 52 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0100/20030100194.pdf [firstpage_image] =>[orig_patent_app_number] => 10303275 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/303275
Method of manufacturing semiconductor device Nov 24, 2002 Issued
Array ( [id] => 7467068 [patent_doc_number] => 20040102059 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-05-27 [patent_title] => 'Atmospheric robot handling equipment' [patent_app_type] => new [patent_app_number] => 10/303372 [patent_app_country] => US [patent_app_date] => 2002-11-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 5996 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 115 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0102/20040102059.pdf [firstpage_image] =>[orig_patent_app_number] => 10303372 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/303372
Atmospheric robot handling equipment Nov 24, 2002 Issued
Array ( [id] => 1174838 [patent_doc_number] => 06746882 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2004-06-08 [patent_title] => 'Method of correcting non-linearity of metrology tools, and system for performing same' [patent_app_type] => B1 [patent_app_number] => 10/301194 [patent_app_country] => US [patent_app_date] => 2002-11-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 3 [patent_no_of_words] => 4220 [patent_no_of_claims] => 41 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 93 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/746/06746882.pdf [firstpage_image] =>[orig_patent_app_number] => 10301194 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/301194
Method of correcting non-linearity of metrology tools, and system for performing same Nov 20, 2002 Issued
Array ( [id] => 7365372 [patent_doc_number] => 20040092122 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-05-13 [patent_title] => 'Method of improving etch uniformity in deep silicon etching' [patent_app_type] => new [patent_app_number] => 10/291951 [patent_app_country] => US [patent_app_date] => 2002-11-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 2 [patent_no_of_words] => 1466 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 81 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0092/20040092122.pdf [firstpage_image] =>[orig_patent_app_number] => 10291951 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/291951
Method of improving etch uniformity in deep silicon etching Nov 7, 2002 Issued
Array ( [id] => 7365388 [patent_doc_number] => 20040092126 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-05-13 [patent_title] => 'Method for preventing reworked photoresist from collapsing' [patent_app_type] => new [patent_app_number] => 10/289432 [patent_app_country] => US [patent_app_date] => 2002-11-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 2819 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 57 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0092/20040092126.pdf [firstpage_image] =>[orig_patent_app_number] => 10289432 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/289432
Method for preventing reworked photoresist from collapsing Nov 6, 2002 Abandoned
Array ( [id] => 972162 [patent_doc_number] => 06936547 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2005-08-30 [patent_title] => 'Gas delivery system for deposition processes, and methods of using same' [patent_app_type] => utility [patent_app_number] => 10/284681 [patent_app_country] => US [patent_app_date] => 2002-10-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 16 [patent_no_of_words] => 5639 [patent_no_of_claims] => 113 [patent_no_of_ind_claims] => 29 [patent_words_short_claim] => 79 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/936/06936547.pdf [firstpage_image] =>[orig_patent_app_number] => 10284681 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/284681
Gas delivery system for deposition processes, and methods of using same Oct 30, 2002 Issued
Array ( [id] => 6789464 [patent_doc_number] => 20030084808 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-05-08 [patent_title] => 'Lithography system, exposure apparatus and their control method, and device manufacturing method' [patent_app_type] => new [patent_app_number] => 10/281180 [patent_app_country] => US [patent_app_date] => 2002-10-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 5144 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 63 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0084/20030084808.pdf [firstpage_image] =>[orig_patent_app_number] => 10281180 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/281180
Lithography system, exposure apparatus and their control method, and device manufacturing method Oct 27, 2002 Issued
Array ( [id] => 7383671 [patent_doc_number] => 20040082193 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-04-29 [patent_title] => 'PLASMA ENHANCED CVD LOW K CARBON-DOPED SILICON OXIDE FILM DEPOSITION USING VHF-RF POWER' [patent_app_type] => new [patent_app_number] => 10/279367 [patent_app_country] => US [patent_app_date] => 2002-10-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 5466 [patent_no_of_claims] => 24 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 74 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0082/20040082193.pdf [firstpage_image] =>[orig_patent_app_number] => 10279367 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/279367
Plasma enhanced CVD low k carbon-doped silicon oxide film deposition using VHF-RF power Oct 22, 2002 Issued
Array ( [id] => 1089233 [patent_doc_number] => 06828254 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2004-12-07 [patent_title] => 'Plasma enhanced chemical vapor deposition apparatus and method for forming nitride layer using the same' [patent_app_type] => B2 [patent_app_number] => 10/277801 [patent_app_country] => US [patent_app_date] => 2002-10-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 6456 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 123 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/828/06828254.pdf [firstpage_image] =>[orig_patent_app_number] => 10277801 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/277801
Plasma enhanced chemical vapor deposition apparatus and method for forming nitride layer using the same Oct 22, 2002 Issued
Array ( [id] => 7629790 [patent_doc_number] => 06818566 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2004-11-16 [patent_title] => 'Thermal activation of fluorine for use in a semiconductor chamber' [patent_app_type] => B2 [patent_app_number] => 10/274072 [patent_app_country] => US [patent_app_date] => 2002-10-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 1 [patent_figures_cnt] => 1 [patent_no_of_words] => 2884 [patent_no_of_claims] => 24 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 12 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/818/06818566.pdf [firstpage_image] =>[orig_patent_app_number] => 10274072 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/274072
Thermal activation of fluorine for use in a semiconductor chamber Oct 17, 2002 Issued
Array ( [id] => 1089130 [patent_doc_number] => 06828204 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2004-12-07 [patent_title] => 'Method and system for compensating for anneal non-uniformities' [patent_app_type] => B2 [patent_app_number] => 10/272166 [patent_app_country] => US [patent_app_date] => 2002-10-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 7 [patent_no_of_words] => 2675 [patent_no_of_claims] => 24 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 33 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/828/06828204.pdf [firstpage_image] =>[orig_patent_app_number] => 10272166 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/272166
Method and system for compensating for anneal non-uniformities Oct 15, 2002 Issued
Array ( [id] => 968539 [patent_doc_number] => 06939813 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2005-09-06 [patent_title] => 'Apparatus for improved low pressure inductively coupled high density plasma reactor' [patent_app_type] => utility [patent_app_number] => 10/263624 [patent_app_country] => US [patent_app_date] => 2002-10-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 8 [patent_no_of_words] => 2895 [patent_no_of_claims] => 44 [patent_no_of_ind_claims] => 12 [patent_words_short_claim] => 31 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/939/06939813.pdf [firstpage_image] =>[orig_patent_app_number] => 10263624 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/263624
Apparatus for improved low pressure inductively coupled high density plasma reactor Oct 2, 2002 Issued
Array ( [id] => 6783145 [patent_doc_number] => 20030064592 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-04-03 [patent_title] => 'Protective tape applying and separating methods' [patent_app_type] => new [patent_app_number] => 10/262881 [patent_app_country] => US [patent_app_date] => 2002-10-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 4337 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 44 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0064/20030064592.pdf [firstpage_image] =>[orig_patent_app_number] => 10262881 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/262881
Protective tape applying and separating methods Oct 2, 2002 Issued
Array ( [id] => 7280959 [patent_doc_number] => 20040063336 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-04-01 [patent_title] => 'Composition and chemical vapor deposition method for forming organic low k dielectric films' [patent_app_type] => new [patent_app_number] => 10/065302 [patent_app_country] => US [patent_app_date] => 2002-10-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 2 [patent_no_of_words] => 2951 [patent_no_of_claims] => 44 [patent_no_of_ind_claims] => 7 [patent_words_short_claim] => 45 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0063/20040063336.pdf [firstpage_image] =>[orig_patent_app_number] => 10065302 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/065302
Composition and chemical vapor deposition method for forming organic low k dielectric films Sep 30, 2002 Issued
Array ( [id] => 1062815 [patent_doc_number] => 06849559 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2005-02-01 [patent_title] => 'Method for removing photoresist and etch residues' [patent_app_type] => utility [patent_app_number] => 10/259381 [patent_app_country] => US [patent_app_date] => 2002-09-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 4 [patent_no_of_words] => 2260 [patent_no_of_claims] => 38 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 81 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/849/06849559.pdf [firstpage_image] =>[orig_patent_app_number] => 10259381 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/259381
Method for removing photoresist and etch residues Sep 29, 2002 Issued
Array ( [id] => 7278822 [patent_doc_number] => 20040061199 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-04-01 [patent_title] => 'Etching metal using sonication' [patent_app_type] => new [patent_app_number] => 10/260591 [patent_app_country] => US [patent_app_date] => 2002-09-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 2424 [patent_no_of_claims] => 40 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 27 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0061/20040061199.pdf [firstpage_image] =>[orig_patent_app_number] => 10260591 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/260591
Etching metal using sonication Sep 29, 2002 Issued
Array ( [id] => 1299425 [patent_doc_number] => 06623994 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2003-09-23 [patent_title] => 'Method for calibrating optical-based metrology tools' [patent_app_type] => B1 [patent_app_number] => 10/255509 [patent_app_country] => US [patent_app_date] => 2002-09-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 3 [patent_no_of_words] => 4225 [patent_no_of_claims] => 26 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 72 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/623/06623994.pdf [firstpage_image] =>[orig_patent_app_number] => 10255509 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/255509
Method for calibrating optical-based metrology tools Sep 25, 2002 Issued
Array ( [id] => 6668959 [patent_doc_number] => 20030113943 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-06-19 [patent_title] => 'System and method for determining and controlling contamination' [patent_app_type] => new [patent_app_number] => 10/253401 [patent_app_country] => US [patent_app_date] => 2002-09-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 29 [patent_figures_cnt] => 29 [patent_no_of_words] => 13004 [patent_no_of_claims] => 24 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 72 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0113/20030113943.pdf [firstpage_image] =>[orig_patent_app_number] => 10253401 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/253401
System and method for determining and controlling contamination Sep 23, 2002 Issued
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