Olivia T. Luk

Array ( [id] => 1418682 [patent_doc_number] => 06506615 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-01-14 [patent_title] => 'Method for measuring the depth of well' [patent_app_type] => B2 [patent_app_number] => 10/074852 [patent_app_country] => US [patent_app_date] => 2002-02-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 6 [patent_no_of_words] => 2460 [patent_no_of_claims] => 31 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 62 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/506/06506615.pdf [firstpage_image] =>[orig_patent_app_number] => 10074852 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1355013 [patent_doc_number] => 06576560 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2003-06-10 [patent_title] => 'Method for avoiding the fluorination of the metal contact of the semiconductor device' [patent_app_type] => B1 [patent_app_number] => 10/062661 [patent_app_country] => US [patent_app_date] => 2002-02-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 11 [patent_no_of_words] => 2147 [patent_no_of_claims] => 28 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 122 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/576/06576560.pdf [firstpage_image] =>[orig_patent_app_number] => 10062661 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1376468 [patent_doc_number] => 06559058 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2003-05-06 [patent_title] => 'Method of fabricating three-dimensional components using endpoint detection' [patent_app_type] => B1 [patent_app_number] => 10/061501 [patent_app_country] => US [patent_app_date] => 2002-01-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 10 [patent_no_of_words] => 3867 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 110 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/559/06559058.pdf [firstpage_image] =>[orig_patent_app_number] => 10061501 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1248135 [patent_doc_number] => 06673638 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2004-01-06 [patent_title] => 'Method and apparatus for the production of process sensitive lithographic features' [patent_app_type] => B1 [patent_app_number] => 10/058572 [patent_app_country] => US [patent_app_date] => 2002-01-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 13 [patent_no_of_words] => 8006 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 99 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/673/06673638.pdf [firstpage_image] =>[orig_patent_app_number] => 10058572 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6787818 [patent_doc_number] => 20030139057 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-07-24 [patent_title] => 'Process and apparatus for removal of photoresist from semiconductor wafers' [patent_app_type] => new [patent_app_number] => 10/053371 [patent_app_country] => US [patent_app_date] => 2002-01-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 1952 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 49 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0139/20030139057.pdf [firstpage_image] =>[orig_patent_app_number] => 10053371 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6659635 [patent_doc_number] => 20030134444 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-07-17 [patent_title] => 'METHODS FOR FORMING FEATURES IN POLYMER LAYERS' [patent_app_type] => new [patent_app_number] => 09/683542 [patent_app_country] => US [patent_app_date] => 2002-01-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 5155 [patent_no_of_claims] => 41 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 40 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0134/20030134444.pdf [firstpage_image] =>[orig_patent_app_number] => 09683542 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1477929 [patent_doc_number] => 06451621 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2002-09-17 [patent_title] => 'Using scatterometry to measure resist thickness and control implant' [patent_app_type] => B1 [patent_app_number] => 10/050732 [patent_app_country] => US [patent_app_date] => 2002-01-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 10 [patent_no_of_words] => 4254 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 75 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/451/06451621.pdf [firstpage_image] =>[orig_patent_app_number] => 10050732 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1418599 [patent_doc_number] => 06514865 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2003-02-04 [patent_title] => 'Method of reducing interlayer dielectric thickness variation feeding into a planarization process' [patent_app_type] => B1 [patent_app_number] => 10/044532 [patent_app_country] => US [patent_app_date] => 2002-01-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 13 [patent_no_of_words] => 7926 [patent_no_of_claims] => 25 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 54 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/514/06514865.pdf [firstpage_image] =>[orig_patent_app_number] => 10044532 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1281164 [patent_doc_number] => 06642142 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-11-04 [patent_title] => 'Substrate cleaning method and method for producing an electronic device' [patent_app_type] => B2 [patent_app_number] => 10/034371 [patent_app_country] => US [patent_app_date] => 2002-01-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 24 [patent_no_of_words] => 12155 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 157 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/642/06642142.pdf [firstpage_image] =>[orig_patent_app_number] => 10034371 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1346803 [patent_doc_number] => 06579732 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-06-17 [patent_title] => 'Method and apparatus for controlling material removal from a semiconductor substrate using induced current endpointing' [patent_app_type] => B2 [patent_app_number] => 10/027368 [patent_app_country] => US [patent_app_date] => 2001-12-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 8 [patent_no_of_words] => 4682 [patent_no_of_claims] => 26 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 46 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/579/06579732.pdf [firstpage_image] =>[orig_patent_app_number] => 10027368 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1335751 [patent_doc_number] => 06593153 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-07-15 [patent_title] => 'Method of and apparatus for measuring lattice-constant, and computer program' [patent_app_type] => B2 [patent_app_number] => 10/027491 [patent_app_country] => US [patent_app_date] => 2001-12-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 17 [patent_no_of_words] => 7778 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 97 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/593/06593153.pdf [firstpage_image] =>[orig_patent_app_number] => 10027491 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1385048 [patent_doc_number] => 06548314 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2003-04-15 [patent_title] => 'Method for enabling access to micro-sections of integrated circuits on a wafer' [patent_app_type] => B1 [patent_app_number] => 10/015212 [patent_app_country] => US [patent_app_date] => 2001-12-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 8 [patent_no_of_words] => 1816 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 64 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/548/06548314.pdf [firstpage_image] =>[orig_patent_app_number] => 10015212 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1396991 [patent_doc_number] => 06531381 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-03-11 [patent_title] => 'Method and apparatus for cleaning semiconductor device and method of fabricating semiconductor device' [patent_app_type] => B2 [patent_app_number] => 09/998692 [patent_app_country] => US [patent_app_date] => 2001-12-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 5 [patent_no_of_words] => 3319 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 88 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/531/06531381.pdf [firstpage_image] =>[orig_patent_app_number] => 09998692 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6124524 [patent_doc_number] => 20020075031 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-06-20 [patent_title] => 'Testing integrated circuits' [patent_app_type] => new [patent_app_number] => 09/999322 [patent_app_country] => US [patent_app_date] => 2001-11-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 2714 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 25 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0075/20020075031.pdf [firstpage_image] =>[orig_patent_app_number] => 09999322 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6651090 [patent_doc_number] => 20030008421 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-01-09 [patent_title] => 'PROCESS FOR MAKING WAFERS FOR ION IMPLANTATION MONITORING' [patent_app_type] => new [patent_app_number] => 09/989200 [patent_app_country] => US [patent_app_date] => 2001-11-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 2 [patent_no_of_words] => 1829 [patent_no_of_claims] => 33 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 83 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0008/20030008421.pdf [firstpage_image] =>[orig_patent_app_number] => 09989200 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1390879 [patent_doc_number] => 06544897 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-04-08 [patent_title] => 'Method for forming a vertical edge submicron through-hole and a thin film sample with this kind of through-hole' [patent_app_type] => B2 [patent_app_number] => 10/001332 [patent_app_country] => US [patent_app_date] => 2001-10-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 10 [patent_no_of_words] => 2334 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 26 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/544/06544897.pdf [firstpage_image] =>[orig_patent_app_number] => 10001332 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1450114 [patent_doc_number] => 06455434 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2002-09-24 [patent_title] => 'Prevention of slurry build-up within wafer topography during polishing' [patent_app_type] => B1 [patent_app_number] => 10/001562 [patent_app_country] => US [patent_app_date] => 2001-10-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 7 [patent_no_of_words] => 1729 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 108 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/455/06455434.pdf [firstpage_image] =>[orig_patent_app_number] => 10001562 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1534692 [patent_doc_number] => 06489252 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2002-12-03 [patent_title] => 'Method of forming a spin-on-glass insulation layer' [patent_app_type] => B2 [patent_app_number] => 09/978650 [patent_app_country] => US [patent_app_date] => 2001-10-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 7 [patent_no_of_words] => 4105 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 100 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/489/06489252.pdf [firstpage_image] =>[orig_patent_app_number] => 09978650 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6242411 [patent_doc_number] => 20020045284 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-04-18 [patent_title] => 'Spatial averaging technique for ellipsometry and reflectometry' [patent_app_type] => new [patent_app_number] => 09/973130 [patent_app_country] => US [patent_app_date] => 2001-10-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 4515 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 22 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0045/20020045284.pdf [firstpage_image] =>[orig_patent_app_number] => 09973130 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1412952 [patent_doc_number] => 06524968 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-02-25 [patent_title] => 'Method for forming insulating film and for manufacturing integrated circuit' [patent_app_type] => B2 [patent_app_number] => 09/970692 [patent_app_country] => US [patent_app_date] => 2001-10-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 5 [patent_no_of_words] => 5069 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 52 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/524/06524968.pdf [firstpage_image] =>[orig_patent_app_number] => 09970692 [rel_patent_id] =>[rel_patent_doc_number] =>)