Search

Paul F Urrutia

Examiner (ID: 3009)

Art Unit(s)
OPLC
Total Applications
5
Issued Applications
0
Pending Applications
5
Abandoned Applications
0

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 16904769 [patent_doc_number] => 20210183685 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-06-17 [patent_title] => EDGE RING AND SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/124139 [patent_app_country] => US [patent_app_date] => 2020-12-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3770 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 62 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17124139 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/124139
EDGE RING AND SUBSTRATE PROCESSING APPARATUS Dec 15, 2020 Pending
Array ( [id] => 17657556 [patent_doc_number] => 20220178021 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-06-09 [patent_title] => WAFER FIXING MECHANISM AND WAFER PRE-CLEANING MACHINE USING THE WAFER FIXING MECHANISM [patent_app_type] => utility [patent_app_number] => 17/114503 [patent_app_country] => US [patent_app_date] => 2020-12-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5946 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 67 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17114503 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/114503
WAFER FIXING MECHANISM AND WAFER PRE-CLEANING MACHINE USING THE WAFER FIXING MECHANISM Dec 7, 2020 Pending
Array ( [id] => 16888857 [patent_doc_number] => 20210175054 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-06-10 [patent_title] => ELECTROSTATIC CHUCK AND SUBSTRATE FIXING DEVICE [patent_app_type] => utility [patent_app_number] => 17/111923 [patent_app_country] => US [patent_app_date] => 2020-12-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4847 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -5 [patent_words_short_claim] => 351 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17111923 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/111923
ELECTROSTATIC CHUCK AND SUBSTRATE FIXING DEVICE Dec 3, 2020 Pending
Array ( [id] => 16936405 [patent_doc_number] => 20210202294 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-07-01 [patent_title] => SUSCEPTOR [patent_app_type] => utility [patent_app_number] => 17/110637 [patent_app_country] => US [patent_app_date] => 2020-12-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 2948 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 78 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17110637 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/110637
SUSCEPTOR Dec 2, 2020 Abandoned
Array ( [id] => 17660725 [patent_doc_number] => 20220181190 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-06-09 [patent_title] => WAFER FIXING MECHANISM AND WAFER PRE-CLEANING MACHINE USING THE WAFER FIXING MECHANISM [patent_app_type] => utility [patent_app_number] => 17/111124 [patent_app_country] => US [patent_app_date] => 2020-12-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6692 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 116 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17111124 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/111124
WAFER FIXING MECHANISM AND WAFER PRE-CLEANING MACHINE USING THE WAFER FIXING MECHANISM Dec 2, 2020 Pending
Array ( [id] => 17615363 [patent_doc_number] => 20220157643 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-05-19 [patent_title] => APPARATUS FOR ROTATING SUBSTRATES [patent_app_type] => utility [patent_app_number] => 16/952979 [patent_app_country] => US [patent_app_date] => 2020-11-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3847 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 46 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16952979 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/952979
APPARATUS FOR ROTATING SUBSTRATES Nov 18, 2020 Pending
Array ( [id] => 16827751 [patent_doc_number] => 20210143044 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-05-13 [patent_title] => PLASMA PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/088123 [patent_app_country] => US [patent_app_date] => 2020-11-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6556 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -10 [patent_words_short_claim] => 181 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17088123 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/088123
PLASMA PROCESSING APPARATUS Nov 2, 2020 Abandoned
Array ( [id] => 17523059 [patent_doc_number] => 20220108908 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-04-07 [patent_title] => SHADOW RING KIT FOR PLASMA ETCH WAFER SINGULATION PROCESS [patent_app_type] => utility [patent_app_number] => 17/064470 [patent_app_country] => US [patent_app_date] => 2020-10-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10826 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 74 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17064470 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/064470
SHADOW RING KIT FOR PLASMA ETCH WAFER SINGULATION PROCESS Oct 5, 2020 Pending
Array ( [id] => 17100134 [patent_doc_number] => 20210287925 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-09-16 [patent_title] => SUBSTRATE SUPPORT PLATE AND SEMICONDUCTOR MANUFACTURING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/016622 [patent_app_country] => US [patent_app_date] => 2020-09-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4236 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 69 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17016622 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/016622
SUBSTRATE SUPPORT PLATE AND SEMICONDUCTOR MANUFACTURING APPARATUS Sep 9, 2020 Abandoned
Array ( [id] => 17040555 [patent_doc_number] => 20210257191 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-08-19 [patent_title] => PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 17/011012 [patent_app_country] => US [patent_app_date] => 2020-09-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5017 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -14 [patent_words_short_claim] => 43 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17011012 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/011012
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD Sep 2, 2020 Pending
Array ( [id] => 16677287 [patent_doc_number] => 20210066053 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-03-04 [patent_title] => ANNULAR MEMBER, SUBSTRATE PROCESSING APPARATUS AND METHOD OF CONTROLLING SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 16/999451 [patent_app_country] => US [patent_app_date] => 2020-08-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6890 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -7 [patent_words_short_claim] => 46 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16999451 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/999451
ANNULAR MEMBER, SUBSTRATE PROCESSING APPARATUS AND METHOD OF CONTROLLING SUBSTRATE PROCESSING APPARATUS Aug 20, 2020 Pending
Array ( [id] => 16487678 [patent_doc_number] => 20200381287 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-12-03 [patent_title] => APPARATUS FOR PREVENTING BACKSIDE PEELING DEFECTS ON SEMICONDUCTOR WAFERS [patent_app_type] => utility [patent_app_number] => 16/994400 [patent_app_country] => US [patent_app_date] => 2020-08-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3276 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 117 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16994400 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/994400
Apparatus for preventing backside peeling defects on semiconductor wafers Aug 13, 2020 Issued
Array ( [id] => 16624832 [patent_doc_number] => 20210043485 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-02-11 [patent_title] => SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE HOLDER [patent_app_type] => utility [patent_app_number] => 16/988363 [patent_app_country] => US [patent_app_date] => 2020-08-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12181 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 182 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16988363 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/988363
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE HOLDER Aug 6, 2020 Abandoned
Array ( [id] => 16624821 [patent_doc_number] => 20210043474 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-02-11 [patent_title] => PLASMA ETCHING APPARATUS [patent_app_type] => utility [patent_app_number] => 16/983098 [patent_app_country] => US [patent_app_date] => 2020-08-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9913 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -3 [patent_words_short_claim] => 118 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16983098 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/983098
PLASMA ETCHING APPARATUS Aug 2, 2020 Pending
Array ( [id] => 16624836 [patent_doc_number] => 20210043489 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-02-11 [patent_title] => PLACEMENT STAGE AND SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 16/943600 [patent_app_country] => US [patent_app_date] => 2020-07-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6724 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -11 [patent_words_short_claim] => 181 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16943600 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/943600
PLACEMENT STAGE AND SUBSTRATE PROCESSING APPARATUS Jul 29, 2020 Pending
Array ( [id] => 16402264 [patent_doc_number] => 20200343122 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-10-29 [patent_title] => MOUNTING TABLE AND PLASMA PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 16/925902 [patent_app_country] => US [patent_app_date] => 2020-07-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9531 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -8 [patent_words_short_claim] => 234 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16925902 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/925902
Mounting table and plasma processing apparatus Jul 9, 2020 Issued
Array ( [id] => 16586006 [patent_doc_number] => 20210020408 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-01-21 [patent_title] => SUBSTRATE SUPPORT ASSEMBLY, SUBSTRATE PROCESSING APPARATUS, AND EDGE RING [patent_app_type] => utility [patent_app_number] => 16/925806 [patent_app_country] => US [patent_app_date] => 2020-07-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6086 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 70 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16925806 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/925806
SUBSTRATE SUPPORT ASSEMBLY, SUBSTRATE PROCESSING APPARATUS, AND EDGE RING Jul 9, 2020 Abandoned
Array ( [id] => 16361479 [patent_doc_number] => 20200318230 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-10-08 [patent_title] => COOLING DEVICE, SEMICONDUCTOR MANUFACTURING APPARATUS, AND SEMICONDUCTOR MANUFACTURING METHOD [patent_app_type] => utility [patent_app_number] => 16/909355 [patent_app_country] => US [patent_app_date] => 2020-06-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4742 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -20 [patent_words_short_claim] => 117 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16909355 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/909355
COOLING DEVICE, SEMICONDUCTOR MANUFACTURING APPARATUS, AND SEMICONDUCTOR MANUFACTURING METHOD Jun 22, 2020 Pending
Array ( [id] => 19168431 [patent_doc_number] => 11984344 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-05-14 [patent_title] => Lift apparatus and substrate processing apparatus including the same [patent_app_type] => utility [patent_app_number] => 16/895513 [patent_app_country] => US [patent_app_date] => 2020-06-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 15 [patent_no_of_words] => 10211 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 184 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16895513 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/895513
Lift apparatus and substrate processing apparatus including the same Jun 7, 2020 Issued
Array ( [id] => 17174075 [patent_doc_number] => 20210327746 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-10-21 [patent_title] => TRAY STRUCTURE [patent_app_type] => utility [patent_app_number] => 16/882555 [patent_app_country] => US [patent_app_date] => 2020-05-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 2684 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -10 [patent_words_short_claim] => 81 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16882555 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/882555
TRAY STRUCTURE May 24, 2020 Abandoned
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