Search

Qun Shen

Examiner (ID: 9548, Phone: (571)270-7927 , Office: P/2643 )

Most Active Art Unit
2643
Art Unit(s)
2662, 2617, 2643, 2661
Total Applications
843
Issued Applications
601
Pending Applications
70
Abandoned Applications
188

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 19749443 [patent_doc_number] => 20250038008 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2025-01-30 [patent_title] => METHODS FOR CHEMICAL MECHANICAL POLISHING AND METHODS FOR FORMING AN INTERCONNECT STRUCTURE OF A SEMICONDUCTOR DEVICE [patent_app_type] => utility [patent_app_number] => 18/360930 [patent_app_country] => US [patent_app_date] => 2023-07-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5604 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 89 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18360930 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/360930
METHODS FOR CHEMICAL MECHANICAL POLISHING AND METHODS FOR FORMING AN INTERCONNECT STRUCTURE OF A SEMICONDUCTOR DEVICE Jul 27, 2023 Pending
Array ( [id] => 19712573 [patent_doc_number] => 20250022715 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2025-01-16 [patent_title] => PLASMA ETCHING PROCESSES [patent_app_type] => utility [patent_app_number] => 18/349474 [patent_app_country] => US [patent_app_date] => 2023-07-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10890 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 51 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18349474 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/349474
PLASMA ETCHING PROCESSES Jul 9, 2023 Pending
Array ( [id] => 19364132 [patent_doc_number] => 20240266166 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-08-08 [patent_title] => DIELECTRIC DENSIFICATION [patent_app_type] => utility [patent_app_number] => 18/347683 [patent_app_country] => US [patent_app_date] => 2023-07-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8567 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 40 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18347683 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/347683
DIELECTRIC DENSIFICATION Jul 5, 2023 Pending
Array ( [id] => 19054667 [patent_doc_number] => 20240096636 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-03-21 [patent_title] => METHODS FOR POLISHING BULK SILICON DEVICES [patent_app_type] => utility [patent_app_number] => 18/217694 [patent_app_country] => US [patent_app_date] => 2023-07-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3645 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 36 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18217694 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/217694
METHODS FOR POLISHING BULK SILICON DEVICES Jul 2, 2023 Pending
Array ( [id] => 19007699 [patent_doc_number] => 20240071770 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-02-29 [patent_title] => METHOD OF MANUFACTURING SEMICONDUCTOR STRUCTURE WITH IMPROVED ETCHING PROCESS [patent_app_type] => utility [patent_app_number] => 18/216800 [patent_app_country] => US [patent_app_date] => 2023-06-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11354 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 139 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18216800 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/216800
Method of manufacturing semiconductor structure with improved etching process Jun 29, 2023 Issued
Array ( [id] => 18726073 [patent_doc_number] => 20230340326 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-10-26 [patent_title] => CHEMICAL SOLUTION, METHOD FOR MANUFACTURING CHEMICAL SOLUTION, AND METHOD FOR TREATING SUBSTRATE [patent_app_type] => utility [patent_app_number] => 18/341929 [patent_app_country] => US [patent_app_date] => 2023-06-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 26103 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -1 [patent_words_short_claim] => 253 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18341929 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/341929
Chemical solution, method for manufacturing chemical solution, and method for treating substrate Jun 26, 2023 Issued
Array ( [id] => 18865826 [patent_doc_number] => 20230420263 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-12-28 [patent_title] => ETCHING METHOD AND PLASMA PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 18/212747 [patent_app_country] => US [patent_app_date] => 2023-06-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9904 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 84 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18212747 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/212747
Etching method and plasma processing apparatus Jun 21, 2023 Issued
Array ( [id] => 19646427 [patent_doc_number] => 20240420947 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-12-19 [patent_title] => METAL OXIDE PRECLEAN FOR BOTTOM-UP GAPFILL IN MEOL AND BEOL [patent_app_type] => utility [patent_app_number] => 18/210651 [patent_app_country] => US [patent_app_date] => 2023-06-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4473 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 88 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18210651 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/210651
Metal oxide preclean for bottom-up gapfill in MEOL and BEOL Jun 15, 2023 Issued
Array ( [id] => 19646426 [patent_doc_number] => 20240420946 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-12-19 [patent_title] => METHOD FOR WAFER TREATMENT [patent_app_type] => utility [patent_app_number] => 18/210077 [patent_app_country] => US [patent_app_date] => 2023-06-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6635 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 97 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18210077 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/210077
Method for wafer treatment Jun 13, 2023 Issued
Array ( [id] => 18696320 [patent_doc_number] => 20230326756 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-10-12 [patent_title] => METHOD FOR FORMING SEMICONDUCTOR STRUCTURE [patent_app_type] => utility [patent_app_number] => 18/333100 [patent_app_country] => US [patent_app_date] => 2023-06-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7803 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 69 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18333100 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/333100
Method for forming semiconductor structure Jun 11, 2023 Issued
Array ( [id] => 18679798 [patent_doc_number] => 20230317455 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-10-05 [patent_title] => ULTRA-HIGH MODULUS AND ETCH SELECTIVITY BORON-CARBON HARDMASK FILMS [patent_app_type] => utility [patent_app_number] => 18/206514 [patent_app_country] => US [patent_app_date] => 2023-06-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7712 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 72 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18206514 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/206514
Ultra-high modulus and etch selectivity boron-carbon hardmask films Jun 5, 2023 Issued
Array ( [id] => 18661231 [patent_doc_number] => 20230307244 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-09-28 [patent_title] => METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND ETCHING GAS [patent_app_type] => utility [patent_app_number] => 18/325640 [patent_app_country] => US [patent_app_date] => 2023-05-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3678 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 118 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18325640 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/325640
Method of manufacturing semiconductor device, and etching gas May 29, 2023 Issued
Array ( [id] => 20116124 [patent_doc_number] => 12365815 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-07-22 [patent_title] => Polishing liquid, polishing liquid set, polishing method, and defect suppression method [patent_app_type] => utility [patent_app_number] => 18/323867 [patent_app_country] => US [patent_app_date] => 2023-05-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 2 [patent_no_of_words] => 9582 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 68 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18323867 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/323867
Polishing liquid, polishing liquid set, polishing method, and defect suppression method May 24, 2023 Issued
Array ( [id] => 20532203 [patent_doc_number] => 12550656 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2026-02-10 [patent_title] => Method for manufacturing semiconductor device and forming photoresist pattern [patent_app_type] => utility [patent_app_number] => 18/321378 [patent_app_country] => US [patent_app_date] => 2023-05-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 22 [patent_no_of_words] => 1066 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 131 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18321378 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/321378
Method for manufacturing semiconductor device and forming photoresist pattern May 21, 2023 Issued
Array ( [id] => 19829969 [patent_doc_number] => 12250776 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-03-11 [patent_title] => Substrate structure and cutting method thereof [patent_app_type] => utility [patent_app_number] => 18/317756 [patent_app_country] => US [patent_app_date] => 2023-05-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 26 [patent_no_of_words] => 7173 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 148 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18317756 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/317756
Substrate structure and cutting method thereof May 14, 2023 Issued
Array ( [id] => 18567551 [patent_doc_number] => 20230257886 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-08-17 [patent_title] => METHOD FOR MANUFACTURING STRUCTURED PRESS ELEMENTS [patent_app_type] => utility [patent_app_number] => 18/306688 [patent_app_country] => US [patent_app_date] => 2023-04-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4062 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 66 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18306688 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/306688
Method for manufacturing structured press elements Apr 24, 2023 Issued
Array ( [id] => 18570441 [patent_doc_number] => 20230260778 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-08-17 [patent_title] => CLEANING METHOD OF GLASS SUBSTRATE, MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE, AND GLASS SUBSTRATE [patent_app_type] => utility [patent_app_number] => 18/137553 [patent_app_country] => US [patent_app_date] => 2023-04-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 40170 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18137553 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/137553
Cleaning method of glass substrate, manufacturing method of semiconductor device, and glass substrate Apr 20, 2023 Issued
Array ( [id] => 19513799 [patent_doc_number] => 20240345485 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-10-17 [patent_title] => ADDITIVE FOR LITHOGRAPHY [patent_app_type] => utility [patent_app_number] => 18/300859 [patent_app_country] => US [patent_app_date] => 2023-04-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11503 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 38 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18300859 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/300859
ADDITIVE FOR LITHOGRAPHY Apr 13, 2023 Pending
Array ( [id] => 20622748 [patent_doc_number] => 12590247 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2026-03-31 [patent_title] => Etching composition, method of etching metal-containing film by using the same, and method of preparing semiconductor device by using the same [patent_app_type] => utility [patent_app_number] => 18/194908 [patent_app_country] => US [patent_app_date] => 2023-04-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 4684 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 379 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18194908 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/194908
Etching composition, method of etching metal-containing film by using the same, and method of preparing semiconductor device by using the same Apr 2, 2023 Issued
Array ( [id] => 18844770 [patent_doc_number] => 20230407174 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-12-21 [patent_title] => ETCHING COMPOSITION, METHOD OF ETCHING METAL-CONTAINING FILM BY USING THE SAME, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE BY USING THE SAME [patent_app_type] => utility [patent_app_number] => 18/194875 [patent_app_country] => US [patent_app_date] => 2023-04-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7229 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 369 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18194875 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/194875
ETCHING COMPOSITION, METHOD OF ETCHING METAL-CONTAINING FILM BY USING THE SAME, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE BY USING THE SAME Apr 2, 2023 Pending
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