Search

Qun Shen

Examiner (ID: 9548, Phone: (571)270-7927 , Office: P/2643 )

Most Active Art Unit
2643
Art Unit(s)
2662, 2617, 2643, 2661
Total Applications
843
Issued Applications
601
Pending Applications
70
Abandoned Applications
188

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 20360109 [patent_doc_number] => 12476114 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-11-18 [patent_title] => Chemical mechanical polishing method and method for fabricating semiconductor device using the same [patent_app_type] => utility [patent_app_number] => 18/190300 [patent_app_country] => US [patent_app_date] => 2023-03-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 18 [patent_no_of_words] => 2123 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 129 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18190300 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/190300
Chemical mechanical polishing method and method for fabricating semiconductor device using the same Mar 26, 2023 Issued
Array ( [id] => 20550075 [patent_doc_number] => 12560863 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2026-02-24 [patent_title] => Etching method and plasma processing system [patent_app_type] => utility [patent_app_number] => 18/121700 [patent_app_country] => US [patent_app_date] => 2023-03-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 13 [patent_no_of_words] => 6656 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 207 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18121700 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/121700
Etching method and plasma processing system Mar 14, 2023 Issued
Array ( [id] => 18514586 [patent_doc_number] => 20230230844 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-07-20 [patent_title] => ETCHING METHOD AND PLASMA PROCESSING SYSTEM [patent_app_type] => utility [patent_app_number] => 18/121029 [patent_app_country] => US [patent_app_date] => 2023-03-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 13257 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 86 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18121029 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/121029
Etching method and plasma processing system Mar 13, 2023 Issued
Array ( [id] => 18600145 [patent_doc_number] => 20230274946 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-08-31 [patent_title] => ETCHING COMPOSITIONS [patent_app_type] => utility [patent_app_number] => 18/109905 [patent_app_country] => US [patent_app_date] => 2023-02-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4868 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -22 [patent_words_short_claim] => 50 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18109905 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/109905
ETCHING COMPOSITIONS Feb 14, 2023 Pending
Array ( [id] => 18585922 [patent_doc_number] => 20230268186 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-08-24 [patent_title] => SYSTEMS AND METHODS FOR PRODUCING EPITAXIAL WAFERS [patent_app_type] => utility [patent_app_number] => 18/168199 [patent_app_country] => US [patent_app_date] => 2023-02-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9511 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 117 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18168199 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/168199
Systems and methods for producing epitaxial wafers Feb 12, 2023 Issued
Array ( [id] => 19567707 [patent_doc_number] => 12142485 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-11-12 [patent_title] => Semiconductor structure and manufacturing method thereof [patent_app_type] => utility [patent_app_number] => 18/167888 [patent_app_country] => US [patent_app_date] => 2023-02-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 14 [patent_no_of_words] => 7942 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 97 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18167888 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/167888
Semiconductor structure and manufacturing method thereof Feb 12, 2023 Issued
Array ( [id] => 18442151 [patent_doc_number] => 20230189447 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-06-15 [patent_title] => METHODS FOR PRODUCING AN ETCH RESIST PATTERN ON A METALLIC SURFACE [patent_app_type] => utility [patent_app_number] => 18/164798 [patent_app_country] => US [patent_app_date] => 2023-02-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5958 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 155 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18164798 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/164798
Methods for producing an etch resist pattern on a metallic surface Feb 5, 2023 Issued
Array ( [id] => 18469387 [patent_doc_number] => 20230203671 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-06-29 [patent_title] => SUS SURFACE TREATMENT METHOD [patent_app_type] => utility [patent_app_number] => 18/146033 [patent_app_country] => US [patent_app_date] => 2022-12-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3619 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -6 [patent_words_short_claim] => 104 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18146033 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/146033
SUS surface treatment method Dec 22, 2022 Issued
Array ( [id] => 18325471 [patent_doc_number] => 20230123599 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-04-20 [patent_title] => Method and Device for Preferential Etching of Dislocation of Silicon Carbide Wafer [patent_app_type] => utility [patent_app_number] => 18/085600 [patent_app_country] => US [patent_app_date] => 2022-12-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3508 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -8 [patent_words_short_claim] => 221 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18085600 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/085600
Method and device for preferential etching of dislocation of silicon carbide wafer Dec 20, 2022 Issued
Array ( [id] => 19428157 [patent_doc_number] => 12087590 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-09-10 [patent_title] => Self-healing polishing pad [patent_app_type] => utility [patent_app_number] => 18/066934 [patent_app_country] => US [patent_app_date] => 2022-12-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 11 [patent_no_of_words] => 5819 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 54 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18066934 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/066934
Self-healing polishing pad Dec 14, 2022 Issued
Array ( [id] => 18419255 [patent_doc_number] => 20230173715 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-06-08 [patent_title] => PRESS ELEMENT AND METHOD FOR MANUFACTURING PRESS ELEMENTS [patent_app_type] => utility [patent_app_number] => 18/060336 [patent_app_country] => US [patent_app_date] => 2022-11-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11796 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 54 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18060336 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/060336
PRESS ELEMENT AND METHOD FOR MANUFACTURING PRESS ELEMENTS Nov 29, 2022 Pending
Array ( [id] => 19693395 [patent_doc_number] => 20250011940 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2025-01-09 [patent_title] => ROUGHENING SOLUTION FOR ROLLED COPPER FOIL AND METHOD FOR PRODUCING ROUGHENED COPPER FOIL [patent_app_type] => utility [patent_app_number] => 18/709609 [patent_app_country] => US [patent_app_date] => 2022-11-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10876 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 166 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18709609 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/709609
ROUGHENING SOLUTION FOR ROLLED COPPER FOIL AND METHOD FOR PRODUCING ROUGHENED COPPER FOIL Nov 14, 2022 Pending
Array ( [id] => 19199046 [patent_doc_number] => 11996294 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-05-28 [patent_title] => Cryogenic atomic layer etch with noble gases [patent_app_type] => utility [patent_app_number] => 17/983560 [patent_app_country] => US [patent_app_date] => 2022-11-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 7 [patent_no_of_words] => 7465 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 45 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17983560 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/983560
Cryogenic atomic layer etch with noble gases Nov 8, 2022 Issued
Array ( [id] => 18348915 [patent_doc_number] => 20230137026 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-05-04 [patent_title] => METHOD AND SYSTEM FOR SELECTIVELY REMOVING MATERIAL AT AN EDGE OF A SUBSTRATE [patent_app_type] => utility [patent_app_number] => 17/973903 [patent_app_country] => US [patent_app_date] => 2022-10-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3398 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 61 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17973903 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/973903
METHOD AND SYSTEM FOR SELECTIVELY REMOVING MATERIAL AT AN EDGE OF A SUBSTRATE Oct 25, 2022 Pending
Array ( [id] => 20622874 [patent_doc_number] => 12590374 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2026-03-31 [patent_title] => Selective thermal atomic layer etching [patent_app_type] => utility [patent_app_number] => 18/693555 [patent_app_country] => US [patent_app_date] => 2022-10-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 3 [patent_no_of_words] => 21673 [patent_no_of_claims] => 31 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 154 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18693555 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/693555
Selective thermal atomic layer etching Oct 16, 2022 Issued
Array ( [id] => 19274541 [patent_doc_number] => 12024652 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-07-02 [patent_title] => Polishing composition and method of polishing a substrate having enhanced defect reduction [patent_app_type] => utility [patent_app_number] => 18/046180 [patent_app_country] => US [patent_app_date] => 2022-10-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3133 [patent_no_of_claims] => 5 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 226 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18046180 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/046180
Polishing composition and method of polishing a substrate having enhanced defect reduction Oct 12, 2022 Issued
Array ( [id] => 19314368 [patent_doc_number] => 12040193 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-07-16 [patent_title] => Efficient cleaning and etching of high aspect ratio structures [patent_app_type] => utility [patent_app_number] => 17/963615 [patent_app_country] => US [patent_app_date] => 2022-10-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 11 [patent_no_of_words] => 5572 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 77 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17963615 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/963615
Efficient cleaning and etching of high aspect ratio structures Oct 10, 2022 Issued
Array ( [id] => 19923287 [patent_doc_number] => 12297559 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-05-13 [patent_title] => Method and apparatus for low temperature selective epitaxy in a deep trench [patent_app_type] => utility [patent_app_number] => 17/961463 [patent_app_country] => US [patent_app_date] => 2022-10-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 3504 [patent_no_of_claims] => 22 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 158 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17961463 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/961463
Method and apparatus for low temperature selective epitaxy in a deep trench Oct 5, 2022 Issued
Array ( [id] => 18679763 [patent_doc_number] => 20230317420 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-10-05 [patent_title] => METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, RECORDING MEDIUM, AND SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/957290 [patent_app_country] => US [patent_app_date] => 2022-09-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12703 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 90 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17957290 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/957290
Method of processing substrate, method of manufacturing semiconductor device, recording medium, and substrate processing apparatus Sep 29, 2022 Issued
Array ( [id] => 19884418 [patent_doc_number] => 12270112 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-04-08 [patent_title] => Method of preparing single-layered MXenes, single-layered MXenes prepared thereof, thin film for shielding electromagnetic wave, and electrode [patent_app_type] => utility [patent_app_number] => 17/956039 [patent_app_country] => US [patent_app_date] => 2022-09-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 20 [patent_no_of_words] => 5619 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 107 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17956039 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/956039
Method of preparing single-layered MXenes, single-layered MXenes prepared thereof, thin film for shielding electromagnetic wave, and electrode Sep 28, 2022 Issued
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