Search

Ricardo J. Palabrica

Examiner (ID: 14635)

Most Active Art Unit
3663
Art Unit(s)
3646, 3641, 3663
Total Applications
599
Issued Applications
375
Pending Applications
14
Abandoned Applications
210

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 18000884 [patent_doc_number] => 11501995 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-11-15 [patent_title] => Plasma processing apparatus and mounting table thereof [patent_app_type] => utility [patent_app_number] => 16/737267 [patent_app_country] => US [patent_app_date] => 2020-01-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 18 [patent_no_of_words] => 7591 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 306 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16737267 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/737267
Plasma processing apparatus and mounting table thereof Jan 7, 2020 Issued
Array ( [id] => 15873247 [patent_doc_number] => 20200144027 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-05-07 [patent_title] => INDUCTIVE PLASMA SOURCE WITH METALLIC SHOWER HEAD USING B-FIELD CONCENTRATOR [patent_app_type] => utility [patent_app_number] => 16/735494 [patent_app_country] => US [patent_app_date] => 2020-01-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4338 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16735494 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/735494
Inductive plasma source with metallic shower head using b-field concentrator Jan 5, 2020 Issued
Array ( [id] => 17210632 [patent_doc_number] => 11171008 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-11-09 [patent_title] => Abatement and strip process chamber in a dual load lock configuration [patent_app_type] => utility [patent_app_number] => 16/717963 [patent_app_country] => US [patent_app_date] => 2019-12-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 8084 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 217 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16717963 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/717963
Abatement and strip process chamber in a dual load lock configuration Dec 16, 2019 Issued
Array ( [id] => 15775665 [patent_doc_number] => 20200118850 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-04-16 [patent_title] => INTEGRATED SUBSTRATE TEMPERATURE MEASUREMENT ON HIGH TEMPERATURE CERAMIC HEATER [patent_app_type] => utility [patent_app_number] => 16/715456 [patent_app_country] => US [patent_app_date] => 2019-12-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4068 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 74 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16715456 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/715456
INTEGRATED SUBSTRATE TEMPERATURE MEASUREMENT ON HIGH TEMPERATURE CERAMIC HEATER Dec 15, 2019 Abandoned
Array ( [id] => 16668423 [patent_doc_number] => 10937678 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-03-02 [patent_title] => Substrate support with multiple embedded electrodes [patent_app_type] => utility [patent_app_number] => 16/714144 [patent_app_country] => US [patent_app_date] => 2019-12-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 4 [patent_no_of_words] => 3797 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 122 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16714144 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/714144
Substrate support with multiple embedded electrodes Dec 12, 2019 Issued
Array ( [id] => 16013867 [patent_doc_number] => 20200181776 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-06-11 [patent_title] => ACTUATOR TO ADJUST DYNAMICALLY SHOWERHEAD TILT IN A SEMICONDUCTOR- PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 16/712944 [patent_app_country] => US [patent_app_date] => 2019-12-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5088 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16712944 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/712944
Actuator to adjust dynamically showerhead tilt in a semiconductor-processing apparatus Dec 11, 2019 Issued
Array ( [id] => 19932083 [patent_doc_number] => 12305282 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-05-20 [patent_title] => Susceptor of a CVD reactor [patent_app_type] => utility [patent_app_number] => 17/311599 [patent_app_country] => US [patent_app_date] => 2019-12-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 11 [patent_no_of_words] => 0 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 385 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17311599 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/311599
Susceptor of a CVD reactor Dec 5, 2019 Issued
Array ( [id] => 16020833 [patent_doc_number] => 20200185260 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-06-11 [patent_title] => SEMICONDUCTOR PROCESSING SYSTEM [patent_app_type] => utility [patent_app_number] => 16/706115 [patent_app_country] => US [patent_app_date] => 2019-12-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5883 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 53 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16706115 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/706115
Semiconductor processing system Dec 5, 2019 Issued
Array ( [id] => 15807369 [patent_doc_number] => 20200126827 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-04-23 [patent_title] => ELECTROSTATIC CHUCK, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME [patent_app_type] => utility [patent_app_number] => 16/703270 [patent_app_country] => US [patent_app_date] => 2019-12-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7173 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -4 [patent_words_short_claim] => 209 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16703270 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/703270
Electrostatic chuck, substrate processing apparatus, and method of manufacturing semiconductor device using the same Dec 3, 2019 Issued
Array ( [id] => 16812012 [patent_doc_number] => 20210134567 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-05-06 [patent_title] => SUBSTRATE TREATING APPARATUS [patent_app_type] => utility [patent_app_number] => 16/701197 [patent_app_country] => US [patent_app_date] => 2019-12-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6812 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 91 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16701197 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/701197
SUBSTRATE TREATING APPARATUS Dec 2, 2019 Abandoned
Array ( [id] => 16513361 [patent_doc_number] => 20200392619 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-12-17 [patent_title] => APPARATUS AND METHOD OF PROCESSING A SUBSTRATE [patent_app_type] => utility [patent_app_number] => 16/700921 [patent_app_country] => US [patent_app_date] => 2019-12-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8087 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 124 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16700921 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/700921
APPARATUS AND METHOD OF PROCESSING A SUBSTRATE Dec 1, 2019 Abandoned
Array ( [id] => 17971260 [patent_doc_number] => 11488808 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-11-01 [patent_title] => Plasma processing apparatus, calculation method, and calculation program [patent_app_type] => utility [patent_app_number] => 16/698079 [patent_app_country] => US [patent_app_date] => 2019-11-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 19 [patent_figures_cnt] => 22 [patent_no_of_words] => 23254 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 190 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16698079 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/698079
Plasma processing apparatus, calculation method, and calculation program Nov 26, 2019 Issued
Array ( [id] => 16593790 [patent_doc_number] => 10903067 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-01-26 [patent_title] => Cooled reflective adapter plate for a deposition chamber [patent_app_type] => utility [patent_app_number] => 16/695793 [patent_app_country] => US [patent_app_date] => 2019-11-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 5536 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 238 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16695793 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/695793
Cooled reflective adapter plate for a deposition chamber Nov 25, 2019 Issued
Array ( [id] => 15938935 [patent_doc_number] => 20200161101 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-05-21 [patent_title] => PLASMA PROCESSING APPARATUS AND METHOD FOR MEASURING SHAPE OF RING MEMBER [patent_app_type] => utility [patent_app_number] => 16/683920 [patent_app_country] => US [patent_app_date] => 2019-11-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9179 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -4 [patent_words_short_claim] => 266 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16683920 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/683920
PLASMA PROCESSING APPARATUS AND METHOD FOR MEASURING SHAPE OF RING MEMBER Nov 13, 2019 Abandoned
Array ( [id] => 18721437 [patent_doc_number] => 11798791 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-10-24 [patent_title] => Substrate support and plasma processing apparatus [patent_app_type] => utility [patent_app_number] => 16/677902 [patent_app_country] => US [patent_app_date] => 2019-11-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 8 [patent_no_of_words] => 7178 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 257 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16677902 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/677902
Substrate support and plasma processing apparatus Nov 7, 2019 Issued
Array ( [id] => 17370467 [patent_doc_number] => 20220025519 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-01-27 [patent_title] => DEPOSITION REACTOR WITH INDUCTORS AND ELECTROMAGNETIC SHIELDS [patent_app_type] => utility [patent_app_number] => 17/277222 [patent_app_country] => US [patent_app_date] => 2019-10-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3261 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -14 [patent_words_short_claim] => 90 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17277222 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/277222
DEPOSITION REACTOR WITH INDUCTORS AND ELECTROMAGNETIC SHIELDS Oct 23, 2019 Pending
Array ( [id] => 17295302 [patent_doc_number] => 20210391141 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-12-16 [patent_title] => SUBSTRATE STATE DETECTION FOR PLASMA PROCESSING TOOLS [patent_app_type] => utility [patent_app_number] => 17/288468 [patent_app_country] => US [patent_app_date] => 2019-10-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4864 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -30 [patent_words_short_claim] => 36 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17288468 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/288468
SUBSTRATE STATE DETECTION FOR PLASMA PROCESSING TOOLS Oct 15, 2019 Pending
Array ( [id] => 17410171 [patent_doc_number] => 11251068 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-02-15 [patent_title] => Substrate processing apparatus and substrate processing method [patent_app_type] => utility [patent_app_number] => 16/601593 [patent_app_country] => US [patent_app_date] => 2019-10-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 27 [patent_figures_cnt] => 31 [patent_no_of_words] => 12189 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 109 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16601593 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/601593
Substrate processing apparatus and substrate processing method Oct 14, 2019 Issued
Array ( [id] => 15461831 [patent_doc_number] => 20200043740 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-02-06 [patent_title] => FOCUS RING FOR PLASMA ETCHER [patent_app_type] => utility [patent_app_number] => 16/594598 [patent_app_country] => US [patent_app_date] => 2019-10-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9314 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 87 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16594598 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/594598
FOCUS RING FOR PLASMA ETCHER Oct 6, 2019 Abandoned
Array ( [id] => 18666625 [patent_doc_number] => 11773506 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-10-03 [patent_title] => Wafer susceptor with improved thermal characteristics [patent_app_type] => utility [patent_app_number] => 16/594253 [patent_app_country] => US [patent_app_date] => 2019-10-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 13 [patent_no_of_words] => 6628 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 147 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16594253 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/594253
Wafer susceptor with improved thermal characteristics Oct 6, 2019 Issued
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